Patents by Inventor Yaw Wen Hu

Yaw Wen Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11062984
    Abstract: A semiconductor device includes a substrate, and interposer layers. The substrate has a first region, and a second region adjacent the first region. The interposer layers are sequentially stacked on the substrate. Each of the interposer layers has an active region and an open region, are respectively correspond to the first region and the second region of the substrate. Each of the interposer layers includes a device layout pattern, and a stress release structure. The device layout pattern is formed within the active region. The stress release structure is formed within the open region, and includes openings.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: July 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Neng-Tai Shih, Hsu Chiang, Hsin-Chuan Tsai, Sheng-Hsiung Wu
  • Publication number: 20190074246
    Abstract: A semiconductor device includes a substrate, and interposer layers. The substrate has a first region, and a second region adjacent the first region. The interposer layers are sequentially stacked on the substrate. Each of the interposer layers has an active region and an open region, are respectively correspond to the first region and the second region of the substrate. Each of the interposer layers includes a device layout pattern, and a stress release structure. The device layout pattern is formed within the active region. The stress release structure is formed within the open region, and includes openings.
    Type: Application
    Filed: November 1, 2018
    Publication date: March 7, 2019
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Neng-Tai Shih, Hsu Chiang, Hsin-Chuan Tsai, Sheng-Hsiung Wu
  • Patent number: 10121734
    Abstract: A semiconductor device includes a substrate, and interposer layers. The substrate has a first region, and a second region adjacent the first region. The interposer layers are sequentially stacked on the substrate. Each of the interposer layers has an active region and an open region, which respectively correspond to the first region and the second region of the substrate. Each of the interposer layers includes a device layout pattern, and a stress release structure. The device layout pattern is formed within the active region. The stress release structure is formed within the open region, and includes openings.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: November 6, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Neng-Tai Shih, Hsu Chiang, Hsin-Chuan Tsai, Sheng-Hsiung Wu
  • Publication number: 20170207154
    Abstract: A semiconductor device includes a substrate, and interposer layers. The substrate has a first region, and a second region adjacent the first region. The interposer layers are sequentially stacked on the substrate. Each of the interposer layers has an active region and an open region, which are respectively corresponded to the first region and the second region of the substrate. Each of the interposer layers includes a device layout pattern, and a stress release structure. The device layout pattern is formed within the active region. The stress release structure is formed within the open region, and includes openings.
    Type: Application
    Filed: January 20, 2016
    Publication date: July 20, 2017
    Inventors: Tzung-Han LEE, Yaw-Wen HU, Neng-Tai SHIH, Hsu CHIANG, Hsin-Chuan TSAI, Sheng-Hsiung WU
  • Publication number: 20170012028
    Abstract: A recoverable device for memory product includes a substrate, a plurality of device dies and at least one local interconnect layer. The device dies are embedded inside the substrate. The at least one local interconnect layer is disposed on an upper surface of the substrate, and configured to route the device dies to a plurality of electrical terminals on an uppermost surface of the local interconnect layer relative to the substrate.
    Type: Application
    Filed: July 9, 2015
    Publication date: January 12, 2017
    Inventors: Tzung-Han LEE, Yaw-Wen HU, Neng-Tai SHIH, Hsu CHIANG
  • Patent number: 9496358
    Abstract: A semiconductor electronic device structure includes a substrate having a trench disposed therein, a gate electrode disposed in the trench, and a gate dielectric layer disposed on the surface in the trench. The substrate and the gate electrode are electrically insulated from each other by the gate dielectric layer. The substrate further has a pair of doped areas. The doped areas each are vertically disposed along the two respective lateral sides of the trench. The doped areas each have a first portion and a second portion arranged atop the first portion. The first portion extends vertically to the portion of the substrate that is aligned to the gate electrode. The lateral dimension of the first portion is smaller than the lateral dimension of the second portion, and the doping concentration of the first portion is lighter than the doping concentration of the second portion.
    Type: Grant
    Filed: May 29, 2014
    Date of Patent: November 15, 2016
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Neng-Tai Shih, Heng Hao Hsu, Yu Jing Chang, Hsu Chiang
  • Publication number: 20160104782
    Abstract: A method of manufacturing a transistor structure includes a step of implanting a light dosage into a substrate at a bit line junction and two cell side junctions, and a step of implanting a light dosage into the bit line junction an additional time. A uniform region having a substantially uniform dopant concentration is formed at the bit line junction. The dopant concentration of the uniform region is higher than that of the cell side junctions and higher than that of the region of the bit line junction under the uniform region.
    Type: Application
    Filed: October 8, 2014
    Publication date: April 14, 2016
    Inventors: TZUNG-HAN LEE, NENG-TAI SHIH, YAW-WEN HU
  • Patent number: 9230967
    Abstract: The instant disclosure relates to a method for forming self-aligned isolation trenches in semiconductor substrate, comprising the following steps. The first step is providing a semiconductor substrate defined a plurality of active areas thereon. The next step is forming at least two buried bit lines in each of the active areas and an insulating structure disposed above and opposite to the at least two buried bit lines. The next step is forming a self-aligned spacer on the sidewalls of each of the insulating structures. The last step is selectively removing the semiconductor substrate with the self-aligned spacers as masks to form a plurality of isolation trenches.
    Type: Grant
    Filed: April 14, 2014
    Date of Patent: January 5, 2016
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu
  • Publication number: 20150348871
    Abstract: A semiconductor device includes a substrate having a first side and a second side opposite to the first side; a through substrate via (TSV) structure protruding from a surface of the substrate on the second side; a block layer conformally covering the surface of the substrate and the TSV structure; a first dielectric layer covering the block layer except for a portion of the block layer that is directly on the TSV structure; a second dielectric layer on the first dielectric layer; and a damascened circuit pattern in the second dielectric layer. The second dielectric layer is in direct contact with the first dielectric layer. The damascened circuit pattern is in direct contact with the TSV structure.
    Type: Application
    Filed: May 29, 2014
    Publication date: December 3, 2015
    Applicant: INOTERA MEMORIES, INC.
    Inventors: Hsu Chiang, Yaw-Wen Hu, Neng-Tai Shih, Tzung-Han Lee
  • Publication number: 20150349072
    Abstract: A semiconductor electronic device structure includes a substrate having a trench disposed therein, a gate electrode disposed in the trench, and a gate dielectric layer disposed on the surface in the trench. The substrate and the gate electrode are electrically insulated from each other by the gate dielectric layer. The substrate further has a pair of doped areas. The doped areas each are vertically disposed along the two respective lateral sides of the trench. The doped areas each have a first portion and a second portion arranged atop the first portion. The first portion extends vertically to the portion of the substrate that is aligned to the gate electrode. The lateral dimension of the first portion is smaller than the lateral dimension of the second portion, and the doping concentration of the first portion is lighter than the doping concentration of the second portion.
    Type: Application
    Filed: May 29, 2014
    Publication date: December 3, 2015
    Applicant: INOTERA MEMORIES, INC.
    Inventors: TZUNG-HAN LEE, YAW-WEN HU, NENG-TAI SHIH, HENG HAO HSU, YU JING CHANG, HSU CHIANG
  • Patent number: 9184166
    Abstract: The instant disclosure relates to a semiconductor device which includes a semiconductor substrate, at least one patterned reinforcing layer, a plurality of lower electrodes, and a supporting layer. The at least one patterned reinforcing layer is arranged above the semiconductor substrate, wherein the at least one patterned reinforcing layer has a plurality of reinforcing structures configured to define a plurality of alignment apertures. The lower electrodes are arranged on the semiconductor substrate, wherein N of the lower electrodes pass through each of the alignment apertures, where N is an integer greater than or equal to 1. The supporting layer is arranged above the at least one patterned reinforcing layer and between the lower electrodes.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: November 10, 2015
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Vishnu Kumar Agarwal
  • Patent number: 9171847
    Abstract: A semiconductor structure includes a semiconductor substrate, an active area in the semiconductor substrate, two trenches intersecting the active area to thereby divide the active area into a source region and two drain regions spaced apart from the source region, a saddle-shaped N+/N?/N+ structure in the source region of the active area; and two N+ drain doping regions in the two drain regions, respectively.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: October 27, 2015
    Assignee: INOTERA MEMORIES, INC.
    Inventors: Tzung-Han Lee, Neng-Tai Shih, Yaw-Wen Hu
  • Publication number: 20150294972
    Abstract: The instant disclosure relates to a semiconductor device includes a semiconductor substrate, a plurality of buried bit lines, a plurality of insulating structures, and a plurality of self-aligned spacers. The semiconductor substrate has a plurality of active areas defined thereon. The buried bit lines are disposed in the semiconductor substrate, wherein two of the buried bit lines are positioned in each of the active areas. The insulating structures are disposed on the semiconductor substrate, wherein each of the insulating structures is positioned on and opposite to the two of the buried bit lines. The self-aligned spacers are disposed on the sidewalls of the insulating structures respectively to partially expose the surface of the semiconductor substrate.
    Type: Application
    Filed: June 8, 2015
    Publication date: October 15, 2015
    Inventors: TZUNG-HAN LEE, YAW-WEN HU
  • Publication number: 20150243597
    Abstract: A semiconductor device includes a substrate having a front side and a rear side, a plurality of dielectric layers on the front side, a plurality of interconnection circuit structures in the dielectric layers, and at least one backside passivation layer on the rear side. The backside passivation layer and the top passivation layer are made of the same material and have substantially the same thickness.
    Type: Application
    Filed: February 25, 2014
    Publication date: August 27, 2015
    Applicant: INOTERA MEMORIES, INC.
    Inventors: Hsu Chiang, Yaw-Wen Hu
  • Publication number: 20150206883
    Abstract: The instant disclosure relates to a semiconductor device which includes a semiconductor substrate, at least one patterned reinforcing layer, a plurality of lower electrodes, and a supporting layer. The at least one patterned reinforcing layer is arranged above the semiconductor substrate, wherein the at least one patterned reinforcing layer has a plurality of reinforcing structures configured to define a plurality of alignment apertures. The lower electrodes are arranged on the semiconductor substrate, wherein N of the lower electrodes pass through each of the alignment apertures, where N is an integer greater than or equal to 1. The supporting layer is arranged above the at least one patterned reinforcing layer and between the lower electrodes.
    Type: Application
    Filed: May 8, 2014
    Publication date: July 23, 2015
    Applicant: INOTERA MEMORIES, INC.
    Inventors: TZUNG-HAN LEE, YAW-WEN HU, VISHNU KUMAR AGARWAL
  • Patent number: 9070740
    Abstract: A memory unit includes a substrate, at least one charge storage element, at least one first recessed access element, and an isolation portion. The substrate has a surface and the first recessed access element is disposed in an active area of the substrate and extending from the surface into the substrate. The first recessed access element is electrically connected to the charge storage element and induces in the substrate a first depletion region. The isolation portion is adjacent to the active area and extending from the surface into the substrate. The isolation portion includes a trenched isolating barrier and a second recessed access element. The second recessed access element is disposed in the trenched isolating barrier and induces in the substrate a second depletion region merging with the first depletion region.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: June 30, 2015
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Chung-Yuan Lee, Hsu Chiang, Sheng-Hsiung Wu, Hung Chang Liao
  • Patent number: 9070782
    Abstract: A semiconductor structure includes multiple buried gates which are disposed in a substrate and have a first source and a second source, an interlayer dielectric layer covering the multiple buried gates and the substrate as well as a core dual damascene plug including a first plug, a second plug and an insulating slot. The insulating slot is disposed between the first plug and the second plug so that the first plug and the second plug are mutually electrically insulated. The first plug and the second plug respectively penetrate the interlayer dielectric layer and are respectively electrically connected to the first source and the second source.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 30, 2015
    Assignee: INOTERA MEMORIES, INC.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Hung-Chang Liao, Chung-Yuan Lee, Hsu Chiang, Sheng-Hsiung Wu
  • Publication number: 20150171162
    Abstract: The instant disclosure relates to a method for forming self-aligned isolation trenches in semiconductor substrate, comprising the following steps. The first step is providing a semiconductor substrate defined a plurality of active areas thereon. The next step is forming at least two buried bit lines in each of the active areas and an insulating structure disposed above and opposite to the at least two buried bit lines. The next step is forming a self-aligned spacer on the sidewalls of each of the insulating structures. The last step is selectively removing the semiconductor substrate with the self-aligned spacers as masks to form a plurality of isolation trenches.
    Type: Application
    Filed: April 14, 2014
    Publication date: June 18, 2015
    Applicant: Inotera Memories, Inc.
    Inventors: TZUNG-HAN LEE, YAW-WEN HU
  • Patent number: 9035366
    Abstract: A semiconductor electronic device structure includes an active area array disposed in a substrate, an isolation structure, a plurality of recessed gate structures, a plurality of word lines, and a plurality of bit lines. The active area array a plurality of active area columns and a plurality of active area rows, defining an array of active areas. The substrate has two recesses formed at the central region thereof. Each recessed gate structure is respectively disposed in the recess. A protruding structure is formed on the substrate in each recess. A STI structure of the isolation structure is arranged between each pair of adjacent active area rows. Word lines are disposed in the substrate, each electrically connecting the gate structures there-under. Bit lines are disposed above the active areas, forming a crossing pattern with the word lines.
    Type: Grant
    Filed: September 12, 2013
    Date of Patent: May 19, 2015
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu, Hung Chang Liao, Chung-Yuan Lee, Hsu Chiang, Sheng-Hsiung Wu
  • Patent number: 9018733
    Abstract: A semiconductor structure includes a substrate having thereon at least one conductive region; a plurality of cylinder-shaped electrodes disposed on the substrate, wherein each of the cylinder-shaped electrodes has a horizontal portion that is in direct contact with the at least one conductive region and a vertical sidewall portion connecting the horizontal portion; an upper support structure comprising a first lattice structure that is situated in a first horizontal level that is lower than a tip portion of each of the cylinder-shaped electrodes; and a lower support structure comprising a second lattice structure that interlocks middle portions of the cylinder-shaped electrodes.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: April 28, 2015
    Assignee: Inotera Memories, Inc.
    Inventors: Tzung-Han Lee, Yaw-Wen Hu