Patents by Inventor Ye Feng

Ye Feng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190311083
    Abstract: Computer-implemented methods of optimizing a process simulation model that predicts a result of a semiconductor device fabrication operation to process parameter values characterizing the semiconductor device fabrication operation are disclosed. The methods involve generating cost values using a computationally predicted result of the semiconductor device fabrication operation and a metrology result produced, at least in part, by performing the semiconductor device fabrication operation in a reaction chamber operating under a set of fixed process parameter values. The determination of the parameters of the process simulation model may employ pre-process profiles, via optimization of the resultant post-process profiles of the parameters against profile metrology results. Cost values for, e.g., optical scatterometry, scanning electron microscopy and transmission electron microscopy may be used to guide optimization.
    Type: Application
    Filed: April 6, 2018
    Publication date: October 10, 2019
    Inventors: Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman, Yan Zhang, Julien Mailfert
  • Publication number: 20190272305
    Abstract: Optical metrology is used to calibrate the plane-of-incidence (POI) azimuth error by determining and correcting an azimuth angle offset. The azimuth angle offset may be determined by measuring at least a partial Mueller matrix from a calibration grating on a sample held on a stage for a plurality of POI azimuth angles. An axis of symmetry is determined for a curve describing a value of a Mueller matrix element with respect to POI azimuth angle, for each desired wavelength and each desired Mueller matrix element. The axis of symmetry may then be used to determine the azimuth angle offset, e.g., by determining a mean, median or average of all, or a filtered subset, of the axes of symmetry. If desired, an axis of symmetry may be determined for data sets other than Mueller matrix elements, such as Fourier coefficients of measured signals.
    Type: Application
    Filed: May 20, 2019
    Publication date: September 5, 2019
    Inventors: Pedro VAGOS, Ye Feng, Daniel Thompson, Yan Zhang
  • Patent number: 10390596
    Abstract: Disclosed is fabric taped aluminum plates multifunctional hair straightener, relating to hairdressing apparatus field. Lower battens are clamped on two sides of lower aluminum plate with lower fabric on surface and lower aluminum plate stopper at one end, lower cover plate and lower cover plate stopper fixedly connected with other side of lower body via several first screws are installed on other side of lower body, one end of the lower cover plate is clamped with that of the lower cover plate stopper; upper clamping spring, upper elastic sheet, upper silicone pad, FUSE, second MCH, second manganese steel sheet and upper aluminum plate are installed inside one side of upper body; upper battens are clamped on two sides of the upper aluminum plate with upper fabric on surface. The hairdressing apparatus having fabric-coated aluminum plates keeps users' hair softer, and is antistatic and silk-like, thereby avoiding water vaporization.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: August 27, 2019
    Assignee: SHENZHEN LADY MERRY TECHNOLOGY CO., LTD
    Inventor: Ye Feng
  • Publication number: 20190244870
    Abstract: Methods and systems for using a time-series of spectra to identify endpoint of an etch process. One method includes accessing a virtual carpet that is generated from a time-series of spectra for an etch process. A polynomial with coefficients represents the virtual carpet. The method includes processing a fabrication etch process on a fabrication wafer and generating a carpet defined from a time-series of spectra while processing the fabrication etch process. While the processing the fabrication etch process and generating the carpet, comparing portions of the carpet and the virtual carpet to identify an endpoint metric of the fabrication etch process.
    Type: Application
    Filed: April 16, 2019
    Publication date: August 8, 2019
    Inventors: Ye Feng, Prashanth Kumar, Andrew D. Bailey, III
  • Patent number: 10296554
    Abstract: Optical metrology is used to calibrate the plane-of-incidence (POI) azimuth error by determining and correcting an azimuth angle offset. The azimuth angle offset may be determined by measuring at least a partial Mueller matrix from a calibration grating on a sample held on a stage for a plurality of POI azimuth angles. An axis of symmetry is determined for a curve describing a value of a Mueller matrix element with respect to POI azimuth angle, for each desired wavelength and each desired Mueller matrix element. The axis of symmetry may then be used to determine the azimuth angle offset, e.g., by determining a mean, median or average of all, or a filtered subset, of the axes of symmetry. If desired, an axis of symmetry may be determined for data sets other than Mueller matrix elements, such as Fourier coefficients of measured signals.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: May 21, 2019
    Assignee: Nanometrics Incorporated
    Inventors: Pedro Vagos, Ye Feng, Daniel Thompson, Yan Zhang
  • Patent number: 10278469
    Abstract: Disclosed is a hairdressing apparatus with an anion generator, the apparatus having a switch, a temperature regulator, and display parts. An upper body and a lower body are fixedly connected through a hinge. An anion generator fixed holder, a first support, an anion generator hood, a first elastic piece, a first aluminum plate with a first metal ceramic heater arranged in it, and a lower cover plate arranged in the lower body. A second support, a printed circuit board assembly plate, an anion generator, a second elastic piece, a second aluminum plate with a second metal ceramic heater arranged in it, and an upper cover plate are arranged in the upper body. An integrated structure is applied to this hairdressing apparatus, insuring safety and comfort to whoever uses it.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: May 7, 2019
    Assignee: SHENZHEN LADY MERRY TECHNOLOGY CO., LTD.
    Inventor: Ye Feng
  • Patent number: 10262910
    Abstract: Methods and systems for using a time-series of spectra to identify endpoint of an etch process. One method includes accessing a virtual carpet that is formed from a time-series of spectra for the etch process collected during a training operation. And, running a fabrication etch process on a fabrication wafer, such that while the fabrication etch process is performed portions of a carpet defined from a time-series of spectral is generated for the fabrication etch process. Then, comparing the portions of the carpet of the fabrication etch process to the virtual carpet. End pointing is processed for the fabrication etch process when said comparing indicates that a desired metric has been reached for the fabrication wafer. In one example, said portions of the carpet include a current frame of captured spectra and at least one previous frame of captured spectra.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: April 16, 2019
    Assignee: Lam Research Corporation
    Inventors: Ye Feng, Prashanth Kumar, Andrew D. Bailey, III
  • Publication number: 20190086120
    Abstract: An internal pressure relief safety valve of a water heater includes: a valve body including a water inflow channel, a water outflow channel and a pressure relief channel, the water inflow channel communicates with the water outflow channel through a water outflow hole; a unidirectional water inflow assembly disposed in the valve body and used for allowing water flow to flow from the water inflow channel to the water outflow channel unidirectionally; a valve clack cooperating with a side wall of the pressure relief channel in a sliding and sealing way; a flexible sealing gasket installed at one end of the valve clack facing toward the pressure relief port and used for cooperating with the pressure relief port; and a pressure relief spring used for applying pressure to the valve clack, so that the flexible sealing gasket blocks the pressure relief port.
    Type: Application
    Filed: August 21, 2018
    Publication date: March 21, 2019
    Applicant: Zhejiang Dunyun Industrial Co., Ltd.
    Inventors: Weidong ZHOU, Tianlu ZHOU, Ye FENG
  • Publication number: 20190072482
    Abstract: A metrology system for substrate processing includes an optical metrology station including a plurality of optical sensors to measure spectra from a plurality of measurement locations on a substrate. A plurality of fiber cables are connected to the plurality of optical sensors. A spectrometer is selectively connected to the plurality of fiber cables. A mass metrology station measures at least one of a mass or mass change of the substrate. A controller includes a modelling module to generate thickness values at the plurality of measurement locations based on the spectra from the plurality of measurement locations and a learned model. A spatial modelling module generates a spatial thickness distribution model for the substrate based on the thickness values at the plurality of measurement locations from the modelling module and the at least one of the mass or the mass change from the mass metrology station.
    Type: Application
    Filed: September 6, 2017
    Publication date: March 7, 2019
    Inventors: Ye Feng, Rajan Arora, Jason Shields
  • Publication number: 20180182632
    Abstract: Methods and systems for using a time-series of spectra to identify endpoint of an etch process. One method includes accessing a virtual carpet that is formed from a time-series of spectra for the etch process collected during a training operation. And, running a fabrication etch process on a fabrication wafer, such that while the fabrication etch process is performed portions of a carpet defined from a time-series of spectral is generated for the fabrication etch process. Then, comparing the portions of the carpet of the fabrication etch process to the virtual carpet. End pointing is processed for the fabrication etch process when said comparing indicates that a desired metric has been reached for the fabrication wafer. In one example, said portions of the carpet include a current frame of captured spectra and at least one previous frame of captured spectra.
    Type: Application
    Filed: December 23, 2016
    Publication date: June 28, 2018
    Inventors: Ye Feng, Prashanth Kumar, Andrew D. Bailey, III
  • Patent number: 9999285
    Abstract: Disclosed is fabric taped aluminum tubes novel hair curler, relating to hairdressing apparatus field. Two ends of upper aluminum tube and lower aluminum tube are clamped onto connector and front stopper support; upper elastic sheet, upper iron sheet and first MCH are arranged inside upper aluminum tube with upper fabric outside; clamping sheet, with one end fixedly connected with lower other side of handle key via screws, is arranged on outer surface of upper fabric; FUSE, silicon gel stopper, lower elastic sheet, lower iron sheet and second MCH are arranged inside lower aluminum tube with lower fabric outside; front stopper is fixedly connected with one end of front stopper support via screws. Special fabrics coated on two semicircular aluminum tubes can generate negative ions, lock moisture and prevent moisture loss, thereby well protecting hair softer; the antistatic, silk-like curler is simple and convenient in operation and more comfortable.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: June 19, 2018
    Assignee: Shenzhen Lady Merry Technology Co., Ltd.
    Inventor: Ye Feng
  • Publication number: 20180070694
    Abstract: Disclosed is fabric taped aluminum tubes novel hair curler, relating to hairdressing apparatus field. Two ends of upper aluminum tube and lower aluminum tube are clamped onto connector and front stopper support; upper elastic sheet, upper iron sheet and first MCH are arranged inside upper aluminum tube with upper fabric outside; clamping sheet, with one end fixedly connected with lower other side of handle key via screws, is arranged on outer surface of upper fabric; FUSE, silicon gel stopper, lower elastic sheet, lower iron sheet and second MCH are arranged inside lower aluminum tube with lower fabric outside; front stopper is fixedly connected with one end of front stopper support via screws. Special fabrics coated on two semicircular aluminum tubes can generate negative ions, lock moisture and prevent moisture loss, thereby well protecting hair softer; the antistatic, silk-like curler is simple and convenient in operation and more comfortable.
    Type: Application
    Filed: September 12, 2016
    Publication date: March 15, 2018
    Inventor: Ye Feng
  • Publication number: 20180070695
    Abstract: Disclosed is fabric taped aluminum plates multifunctional hair straightener, relating to hairdressing apparatus field. Lower battens are clamped on two sides of lower aluminum plate with lower fabric on surface and lower aluminum plate stopper at one end, lower cover plate and lower cover plate stopper fixedly connected with other side of lower body via several first screws are installed on other side of lower body, one end of the lower cover plate is clamped with that of the lower cover plate stopper; upper clamping spring, upper elastic sheet, upper silicone pad, FUSE, second MCH, second manganese steel sheet and upper aluminum plate are installed inside one side of upper body; upper battens are clamped on two sides of the upper aluminum plate with upper fabric on surface. The hairdressing apparatus having fabric-coated aluminum plates keeps users' hair softer, and is antistatic and silk-like, thereby avoiding water vaporization.
    Type: Application
    Filed: September 12, 2016
    Publication date: March 15, 2018
    Inventor: Ye Feng
  • Publication number: 20170311690
    Abstract: Disclosed is a hairdressing apparatus with anion function having switch, temperature regulation and display parts. A second support and a PCBA plate are arranged in an upper body, a second MCH is arranged in a second aluminum plate, a FUSE is arranged on the second MCH and fixed on the second aluminum plate by a second elastic piece, and the second support is arranged on the second aluminum plate, to form a second heating unit component, which is arranged in the upper body, on the upper part of which the upper cover plate is fixed, through a screw, a spring is arranged between the upper and lower covers, the upper and lower bodies are fixedly connected through a shaft sleeve and shaft sleeve screw further sleeved with a side cover. The hairdressing apparatus has anion function, and is safe and comfortable, so use demands of different people are met.
    Type: Application
    Filed: April 29, 2016
    Publication date: November 2, 2017
    Inventor: Ye Feng
  • Patent number: 9668538
    Abstract: A method and apparatus for coloring an article includes fastening an article to a container which at least partially encloses the article. The article fastens to the container in a fixed position. A portion of the container is inserted into a liquid by an actuator. The liquid enters the container through an open end. An air pocket is created in the container when it is inserted into the liquid. A first portion of the article is contained within the air pocket and a second portion of the article is dipped into the liquid and thereby is colored from a dye in the liquid. The actuator also removes the container and the article from the liquid. The process can be repeated with the article in an inverted position and with another liquid to color another portion of the article a second color.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: June 6, 2017
    Assignee: NIKE, Inc.
    Inventors: Ye Feng, Jared S. Baggen, Anna Schoborg
  • Publication number: 20140255612
    Abstract: A coloring system includes an assembly for retaining articles to be colored and an actuator for moving the assembly. The assembly can be translated horizontally, raised and lowered and rotated by the actuator. The coloring system may include a fluid control system that allows gas to be removed from a container of the assembly while the container is immersed in a liquid coloring agent.
    Type: Application
    Filed: March 6, 2014
    Publication date: September 11, 2014
    Applicant: NIKE, Inc.
    Inventors: Ye Feng, Jared S. Baggen, Anna Schoborg
  • Patent number: D821031
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: June 19, 2018
    Assignee: Shenzhen Lady Merry Technology Co., Ltd.
    Inventor: Ye Feng
  • Patent number: D829989
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: October 2, 2018
    Assignee: Shenzhen Lady Merry Technology Co., Ltd.
    Inventor: Ye Feng
  • Patent number: D836246
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: December 18, 2018
    Assignee: Shenzhen Lady Merry Technology Co., Ltd.
    Inventor: Ye Feng
  • Patent number: D865287
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: October 29, 2019
    Assignee: SHENZHEN LADY MERRY TECHNOLOGY CO., LTD
    Inventor: Ye Feng