Patents by Inventor Yen-Hao Shih

Yen-Hao Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9741731
    Abstract: A 3D stacked semiconductor structure is provided, comprising a plurality of stacks vertically formed on a substrate and disposed parallel to each other, a dielectric layer formed on the stacks, a plurality of conductive plugs independently formed in the dielectric layer; and a metal-oxide-semiconductor (MOS) layer formed on the dielectric layer. One of the stacks at least comprises a plurality of multi-layered pillars, and each of the multi-layered pillars comprises a plurality of insulating layers and a plurality of semiconductor layers arranged alternately. The MOS layer comprises a plurality of MOS structures connected to the conductive plugs respectively, and function as layer-selectors for selecting and decoding the to-be-operated layer.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: August 22, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Patent number: 9536611
    Abstract: A semiconductor device includes a plurality of active strips, where active strips in the plurality are coupled together at one end by a pad and terminated at another end by a conductive line. The device includes memory cells at cross-points between the plurality of active strips and a plurality of word lines. The device includes string select structures arranged in an interlaced configuration as side gates for active strips. The device includes control circuitry, configured to turn on a particular active strip by applying a turn-on voltage to two string select structures arranged as side gates for the particular active strip, and to turn off a second particular active strip by applying a turn-off bias to at least one string select structure arranged as a side gate for the second particular active strip. The turn-off bias includes one of a ground voltage, a non-negative voltage, and a floating condition.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: January 3, 2017
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Yi-Hsuan Hsiao
  • Patent number: 9461064
    Abstract: A memory array includes a plurality of ridge-shaped multi-layer stacks extending along a first direction, and a hard mask layer formed on top of the plurality of ridge-shaped multi-layer stacks. The hard mask layer includes a plurality of stripes vertically aligned with the plurality of ridge-shaped multi-layer stacks, respectively, a plurality of bridges connecting adjacent ones of the stripes along a second direction orthogonal to the first direction, and a plurality of hard mask through holes between the plurality of bridges and the plurality of stripes.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: October 4, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Teng-Hao Yeh, Chih-Wei Hu, Yen-Hao Shih
  • Patent number: 9431417
    Abstract: A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a substrate, a plurality of stacks, a plurality of memory layers, a plurality of channel layers and a plurality of connecting portions. The stacks are disposed on the substrate. Each of the stacks comprises alternately-stacked conductive layers and insulating layers. The memory layers are disposed on sidewalls of the stacks, respectively. The channel layers are disposed on the memory layers, respectively, wherein each of the channel layers comprises a surface being exposed. The connecting portions connect the surface of each of the channel layers to the substrate, respectively.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: August 30, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Patent number: 9425191
    Abstract: A memory device and a manufacturing method of the same are provided. The memory device includes a substrate, a 3D memory array, a periphery circuit, and a conductive connection structure. The 3D memory array and the periphery circuit are stacked on the substrate. The periphery circuit includes a patterned metal layer and a contact structure electrically connected to the patterned metal layer. The conductive connection structure is electrically connected to the patterned metal layer. The 3D memory array is electrically connected to the periphery circuit via the conductive connection structure.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: August 23, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yi-Hsuan Hsiao, Yen-Hao Shih, Shih-Hung Chen, Hang-Ting Lue
  • Patent number: 9419010
    Abstract: A plurality of semiconductor layers is etched to define a first plurality of stacks of active strips between a first plurality of trenches. A first memory layer is formed on side surfaces of active strips in the first plurality of trenches, and a first layer of conductive material is formed over the first memory layer. The first plurality of stacks is etched to define a second plurality of stacks of active strips between a second plurality of trenches of the plurality of semiconductor layers. A second memory layer is formed on side surfaces of active strips in the second plurality of trenches, and a second layer of conductive material is formed over the second memory layer. Channel regions of memory cells in the memory device are formed in active strips of the plurality of semiconductor layers in the second plurality of stacks.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: August 16, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Chih-Ping Chen, Sheng-Chih Lai
  • Patent number: 9397209
    Abstract: A semiconductor structure has a second portion with an appendage on one side of the second portion and extruding along the longitudinal direction of the second portion. Moreover the semiconductor structure also has a gate line longitudinally parallel to the second portion, wherein the length of the gate line equals to the longitudinal length of the second portion.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: July 19, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Yen-Hao Shih
  • Publication number: 20160181269
    Abstract: A 3D stacked semiconductor structure is provided, comprising a plurality of stacks vertically formed on a substrate and disposed parallel to each other, a dielectric layer formed on the stacks, a plurality of conductive plugs independently formed in the dielectric layer; and a metal-oxide-semiconductor (MOS) layer formed on the dielectric layer. One of the stacks at least comprises a plurality of multi-layered pillars, and each of the multi-layered pillars comprises a plurality of insulating layers and a plurality of conductive layers arranged alternately. The MOS layer comprises a plurality of MOS structures connected to the conductive plugs respectively, and function as layer-selectors for selecting and decoding the to-be-operated layer.
    Type: Application
    Filed: December 22, 2014
    Publication date: June 23, 2016
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Patent number: 9336867
    Abstract: An integrated circuit phase change memory can be pre-coded by inducing a first resistance state in some cells and the memory, and a second resistance state and some other cells in the memory to represent a data set. The integrated circuit phase change memory is mounted on a substrate after coding the data set. After mounting the integrated circuit phase change memory, the data set is read by sensing the first and second resistance states, and changing cells in the first resistance state to a third resistance state and changing cells in the second resistance state to a fourth resistance state. The first and second resistance states maintain a sensing margin after solder bonding or other thermal cycling process. The third and fourth resistance states are characterized by the ability to cause a transition using higher speed and lower power, suitable for a mission function of a circuit.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: May 10, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsiang-Lan Lung, Ming-Hsiu Lee, Yen-Hao Shih, Tien-Yen Wang, Chao-I Wu
  • Publication number: 20160086971
    Abstract: A memory array includes a plurality of ridge-shaped multi-layer stacks extending along a first direction, and a hard mask layer formed on top of the plurality of ridge-shaped multi-layer stacks. The hard mask layer includes a plurality of stripes vertically aligned with the plurality of ridge-shaped multi-layer stacks, respectively, a plurality of bridges connecting adjacent ones of the stripes along a second direction orthogonal to the first direction, and a plurality of hard mask through holes between the plurality of bridges and the plurality of stripes.
    Type: Application
    Filed: November 23, 2015
    Publication date: March 24, 2016
    Inventors: Teng-Hao YEH, Chih-Wei HU, Yen-Hao SHIH
  • Patent number: 9293348
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate, a stacked structure, a dielectric layer, a conductive structure, a dielectric structure and a conductive plug. The stacked structure includes dielectric films and conductive films arranged alternately. The dielectric layer is between the conductive structure and a sidewall of the stacked structure. The dielectric structure is on the stacked structure and defining a through via. The conductive plug fills the through via and physically contacts one of the conductive films exposed by the through via and adjoined with the dielectric layer.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: March 22, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Guan-Ru Lee, Yen-Hao Shih
  • Patent number: 9281315
    Abstract: A memory structure and a method for manufacturing the same are provided. The memory structure comprises a substrate, stacks, memory layers, a conductive material and conductive lines. The stacks are positioned on the substrate. The stacks are separated from each other by trenches. Each of the stacks comprises alternately stacked conductive stripes and insulating stripes. The memory layers conformally cover the stacks respectively. The conductive material is positioned in the trenches and on the stacks. The conductive material in the trenches forms one or more holes in each of the trenches. The conductive lines are positioned on the conductive material. Each of the conductive lines comprises a first portion and a second portion connected to each other, the first portion extends along a direction perpendicular to an extending direction of the stacks, and the second portion extends along the extending direction of the stacks.
    Type: Grant
    Filed: March 3, 2015
    Date of Patent: March 8, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Yen-Hao Shih, Chih-Wei Hu
  • Patent number: 9252156
    Abstract: A method of forming an interlayer conductor structure. The method includes forming a stack of semiconductor pads coupled to respective active layers for a circuit. The semiconductor pads include outside perimeters each having one side coupled to a respective active layer. Impurities are implanted along the outside perimeters to form outside lower resistance regions on the pads. Openings are then formed in the stack of the semiconductor pads to expose a landing area for interlayer conductors on a corresponding semiconductor pad and to define an inside perimeter on at least one of the semiconductor pads. Inside lower resistance regions are formed along the inside perimeters by implanting impurities for interlayer conductor contacts and configured to overlap and be continuous with the corresponding outside lower resistance region.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: February 2, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Yi-Hsuan Hsiao, Chih-Ping Chen
  • Patent number: 9246015
    Abstract: A vertical channel transistor structure is provided. The structure includes a substrate, a channel, a cap layer, a charge trapping layer, a source and a drain. The channel is formed in a fin-shaped structure protruding from the substrate. The cap layer is deposited on the fin-shaped structure. The cap layer and the fin-shaped structure have substantially the same width. The charge trapping layer is deposited on the cap layer and on two vertical surfaces of the fin-shaped structure. The gate is deposited on the charge trapping layer and on two vertical surfaces of the fin-shaped structure. The source and the drain are respectively positioned on two sides of the fin-shaped structure and opposite the gate.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: January 26, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Yen-Hao Shih, Chia-Wei Wu
  • Patent number: 9245603
    Abstract: An integrated circuit and an operating method for the same are provided. The integrated circuit comprises a stacked structure and a conductive structure. The stacked structure comprises a conductive strip. The conductive structure is disposed above the stacked structure and electrically connected to the conductive strip. The conductive structure and the conductive strip have various gap distances between corresponding points of different pairs according to a basic axis.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: January 26, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Hang-Ting Lue, Yen-Hao Shih, Chih-Chang Hsieh, Chih-Wei Hu
  • Patent number: 9224750
    Abstract: A memory array includes a plurality of ridge-shaped multi-layer stacks extending along a first direction, and a hard mask layer formed on top of the plurality of ridge-shaped multi-layer stacks. The hard mask layer includes a plurality of stripes vertically aligned with the plurality of ridge-shaped multi-layer stacks, respectively, a plurality of bridges connecting adjacent ones of the stripes along a second direction orthogonal to the first direction, and a plurality of hard mask through holes between the plurality of bridges and the plurality of stripes.
    Type: Grant
    Filed: June 4, 2014
    Date of Patent: December 29, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Chih-Wei Hu, Yen-Hao Shih
  • Publication number: 20150357341
    Abstract: A memory array includes a plurality of ridge-shaped multi-layer stacks extending along a first direction, and a hard mask layer formed on top of the plurality of ridge-shaped multi-layer stacks. The hard mask layer includes a plurality of stripes vertically aligned with the plurality of ridge-shaped multi-layer stacks, respectively, a plurality of bridges connecting adjacent ones of the stripes along a second direction orthogonal to the first direction, and a plurality of hard mask through holes between the plurality of bridges and the plurality of stripes.
    Type: Application
    Filed: June 4, 2014
    Publication date: December 10, 2015
    Inventors: Teng-Hao Yeh, Chih-Wei Hu, Yen-Hao Shih
  • Patent number: 9196315
    Abstract: A device on an integrated circuit includes a stack of alternating semiconductor lines and insulating lines, and a gate structure over the stack of semiconductor lines. The gate structure includes a vertical portion adjacent the stack on the at least one side, and horizontal extension portions between the semiconductor lines. Sides of the insulating lines can be recessed relative to sides of the semiconductor lines, so at least one side of the stack includes recesses between semiconductor lines. The horizontal extension portions can be in the recesses. The horizontal extension portions have inside surfaces adjacent the sides of the insulating lines, and outside surfaces that can be flush with the sides of the semiconductor lines. The device may include a second gate structure spaced away from the first mentioned gate structure, and an insulating element between horizontal extension portions of the second gate structure and the first mentioned gate structure.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: November 24, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Teng-Hao Yeh, Yen-Hao Shih, Yan-Ru Chen
  • Patent number: 9136277
    Abstract: A three dimensional stacked semiconductor structure comprises a stack including plural oxide layers and conductive layers arranged alternately, at least a contact hole formed vertically to the oxide layers and the conductive layers, and extending to one of the conductive layers, an insulator formed at the sidewall of the contact hole, a conductor formed in the contact hole and connecting the corresponding conductive layer, and the corresponding conductive layer comprises a silicide. The silicide could be formed at edges or an entire body of the corresponding conductive layer. Besides the silicide, the corresponding conductive layer could, partially or completely, further comprise a conductive material connected to the conductor. The corresponding conductive layer which the contact hole extends to has higher conductivity than other conductive layers. Also, the 3D stacked semiconductor structure could be applied to a fan-out region of a 3D flash memory.
    Type: Grant
    Filed: October 16, 2012
    Date of Patent: September 15, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Patent number: 9123778
    Abstract: For certain three dimensionally stacked memory devices, bit lines or word lines for memory cells are stacked in spaced apart ridge like structures arranged to extend in a first direction. In such structures, complementary wordlines or bit lines, can be damascene features between the spaced apart. The damascene conductors can be formed using double patterned masks to etch sub-lithographic sacrificial lines, forming a fill over the sacrificial lines, and then removing the sacrificial lines to leave trenches that act as the damascene molds in the fill. Then the trenches are filled with the conductor material. The 3D memory array can include dielectric charge trapping memory cells, which have a high-K blocking dielectric layer, and in which the conductor material comprises a high work function material.
    Type: Grant
    Filed: May 20, 2013
    Date of Patent: September 1, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih, Guanru Lee