Abstract: A memory device and a manufacturing method of the same are provided. The memory device includes a substrate, a 3D memory array, a periphery circuit, and a conductive connection structure. The 3D memory array and the periphery circuit are stacked on the substrate. The periphery circuit includes a patterned metal layer and a contact structure electrically connected to the patterned metal layer. The conductive connection structure is electrically connected to the patterned metal layer. The 3D memory array is electrically connected to the periphery circuit via the conductive connection structure.

Abstract: A memory device includes a plurality of semiconductor lines, such as body-tied fins, on a substrate. The lines including buried-channel regions doped for depletion mode operation. A storage structure lies on the plurality of lines, including tunnel insulating layer on the channel regions of the fins, a charge storage layer on the tunnel insulating layer, and a blocking insulating layer on the charge storage layer. A plurality of word lines overlie the storage structure and cross over the channel regions of the semiconductor lines, whereby memory cells lie at cross-points of the word lines and the semiconductor lines.

Abstract: A semiconductor device includes a plurality of active strips, where active strips in the plurality are coupled together at one end by a pad and terminated at another end by a conductive line. The device includes memory cells at cross-points between the plurality of active strips and a plurality of word lines. The device includes string select structures arranged in an interlaced configuration as side gates for active strips. The device includes control circuitry, configured to turn on a particular active strip by applying a turn-on voltage to two string select structures arranged as side gates for the particular active strip, and to turn off a second particular active strip by applying a turn-off bias to at least one string select structure arranged as a side gate for the second particular active strip. The turn-off bias includes one of a ground voltage, a non-negative voltage, and a floating condition.

Abstract: A 3D memory device includes an improved dual gate memory cell. The improved dual gate memory cell has a channel body with opposing first and second side surfaces, charge storage structures on the first and second side surfaces, and a gate structure overlying the charge storage structures on both the first and second side surfaces. The channel body has a depth between the first and second side surfaces less than a threshold channel body depth, combined with the gate structure which establishes an effective channel length of the cell greater than a threshold length. The combination of the channel body depth and effective channel length are related so that the cell channel body can be fully depleted, and sub-threshold leakage current can be suppressed when the memory cell has a high threshold state under a read bias.

Abstract: A method of forming an interlayer conductor structure. The method includes forming a stack of semiconductor pads coupled to respective active layers for a circuit. The semiconductor pads include outside perimeters each having one side coupled to a respective active layer. Impurities are implanted along the outside perimeters to form outside lower resistance regions on the pads. Openings are then formed in the stack of the semiconductor pads to expose a landing area for interlayer conductors on a corresponding semiconductor pad and to define an inside perimeter on at least one of the semiconductor pads. Inside lower resistance regions are formed along the inside perimeters by implanting impurities for interlayer conductor contacts and configured to overlap and be continuous with the corresponding outside lower resistance region.

Abstract: An integrated circuit device includes a substrate including a first region and a second region. A pit is formed in the first region. A stack of active layers alternating with insulating layers is deposited in the pit. The stack includes a particular insulating layer. The particular insulating layer has a first thickness, where a sum of the first thickness, thickness of active layers, and thicknesses of other insulating layers is essentially equal to a depth of the pit. The first thickness is different than the thicknesses of the other insulating layers by an amount within a range of process variations for the depth of the pit, for the thicknesses of the active layers, and for the thicknesses of other insulating layers. The device includes a planarized surface over the first and second regions, where an uppermost one of the active layers has a top surface below the planarized surface.

Abstract: An integrated circuit device includes a substrate including a first region and a second region. A pit is formed in the first region. A stack of active layers alternating with insulating layers is deposited in the pit. The stack includes a particular insulating layer. The particular insulating layer has a first thickness, where a sum of the first thickness, thickness of active layers, and thicknesses of other insulating layers is essentially equal to a depth of the pit. The first thickness is different than the thicknesses of the other insulating layers by an amount within a range of process variations for the depth of the pit, for the thicknesses of the active layers, and for the thicknesses of other insulating layers. The device includes a planarized surface over the first and second regions, where an uppermost one of the active layers has a top surface below the planarized surface.

Abstract: A semiconductor structure and a method for manufacturing the same are provided. The method comprises following steps. A first silicon-containing conductive material is formed on a substrate. A second silicon-containing conductive material is formed on the first silicon-containing conductive material. The first silicon-containing conductive material and the second silicon-containing conductive material have different dopant conditions. The first silicon-containing conductive material and the second silicon-containing conductive material are thermally oxidized for turning the first silicon-containing conductive material wholly into an insulating oxide structure, and the second silicon-containing conductive material into a silicon-containing conductive structure and an insulating oxide layer.

Abstract: A semiconductor structure and a method for manufacturing the same are provided. The method comprises following steps. A first silicon-containing conductive material is formed on a substrate. A second silicon-containing conductive material is formed on the first silicon-containing conductive material. The first silicon-containing conductive material and the second silicon-containing conductive material have different dopant conditions. The first silicon-containing conductive material and the second silicon-containing conductive material are thermally oxidized for turning the first silicon-containing conductive material wholly into an insulating oxide structure, and the second silicon-containing conductive material into a silicon-containing conductive structure and an insulating oxide layer.

Abstract: A NAND string of memory cells has stacks of split word lines (gates), with resulting increased bit density. Variants add a top assist gate to the NAND string, a bottom assist gate to the NAND string, or both a top assist gate and a bottom assist gate to the NAND string.

Abstract: A memory device includes an array of dielectric charge trapping structures memory cells including word lines and bit lines. Control circuitry is coupled to the array arranged to control read, program and erase operations. A controller is arranged with supporting circuitry thermally annealing charge trapping structures in the memory cells in the array. Word line drivers and word line termination circuits can be used to induce current flow on the word lines to induce heat for the annealing. The thermal annealing can be applied interleaved with normal operations for recover from cycling damage. Also, the thermally annealing can be applied during mission functions like erase, to improve performance of the function.

Abstract: A memory device includes an array of dielectric charge trapping structures memory cells including word lines and bit lines. Control circuitry is coupled to the array arranged to control read, program and erase operations. A controller is arranged with supporting circuitry thermally annealing charge trapping structures in the memory cells in the array. Word line drivers and word line termination circuits can be used to induce current flow on the word lines to induce heat for the annealing. The thermal annealing can be applied interleaved with normal operations for recover from cycling damage. Also, the thermally annealing can be applied during mission functions like erase, to improve performance of the function.

Abstract: A semiconductor structure and a manufacturing method of the same are provided. The semiconductor structure includes a substrate, a first stacked structure, a second stacked structure, a dielectric element, and a conductive line. The first stacked structure and the second stacked structure are disposed on the substrate. Each of the first stacked structure and the second stacked structure includes conductive strips and insulating strips stacked alternately. The conductive strips are separated from each other by the insulating strips. The dielectric element is disposed on the first stacked structure and the second stacked structure and includes a second dielectric portion. The first stacked structure and the second stacked structure are separated from each other by only the second dielectric portion. The conductive line is disposed on the stack sidewalls of the first stacked structure and the second stacked structure far from the second dielectric portion.

Abstract: An injection method for non-volatile memory cells with a Schottky source and drain is described. Carrier injection efficiency is controlled by an interface characteristic of silicide and silicon. A Schottky barrier is modified by controlling an overlap of a gate and a source/drain and by controlling implantation, activation and/or gate processes.

Abstract: A semiconductor structure and a method for manufacturing the same are provided. The method comprises following steps. A first silicon-containing conductive material is formed on a substrate. A second silicon-containing conductive material is formed on the first silicon-containing conductive material. The first silicon-containing conductive material and the second silicon-containing conductive material have different dopant conditions. The first silicon-containing conductive material and the second silicon-containing conductive material are thermally oxidized for turning the first silicon-containing conductive material wholly into an insulating oxide structure, and the second silicon-containing conductive material into a silicon-containing conductive structure and an insulating oxide layer.

Abstract: A semiconductor structure and a manufacturing method of the same are provided. The semiconductor structure includes a substrate, a first stacked structure, a second stacked structure, a dielectric element, and a conductive line. The first stacked structure and the second stacked structure are disposed on the substrate. Each of the first stacked structure and the second stacked structure includes conductive strips and insulating strips stacked alternately. The conductive strips are separated from each other by the insulating strips. The dielectric element is disposed on the first stacked structure and the second stacked structure and includes a second dielectric portion. The first stacked structure and the second stacked structure are separated from each other by only the second dielectric portion. The conductive line is disposed on the stack sidewalls of the first stacked structure and the second stacked structure far from the second dielectric portion.

Abstract: A NAND string of memory cells has stacks of split word lines (gates), with resulting increased bit density. Variants add a top assist gate to the NAND string, a bottom assist gate to the NAND string, or both a top assist gate and a bottom assist gate to the NAND string.

Abstract: An injection method for non-volatile memory cells with a Schottky source and drain is described. Carrier injection efficiency is controlled by an interface characteristic of silicide and silicon. A Schottky barrier is modified by controlling an overlap of a gate and a source/drain and by controlling implantation, activation and/or gate processes.

Abstract: With advanced lithographic nodes featuring a half-pitch of 30 nm or less, charge trapping NAND memory has neighboring cells sufficiently close together that fringing fields from a neighboring pass gate interferes with the threshold voltage. The interference results from fringing fields that occupy the gaps that separate the neighboring charge storage structures. The fringing electric fields are suppressed, by the insulating structures having a relative dielectric constant with respect to vacuum that is less than a relative dielectric constant of silicon oxide, from entering the neighboring charge storage structures. In some embodiments, the insulating structures suppress the fringing electric fields from entering a channel region. This suppresses the short channel effects despite the small dimensions of the devices.

Abstract: An injection method for non-volatile memory cells with a Schottky source and drain is described. Carrier injection efficiency is controlled by an interface characteristic of silicide and silicon. A Schottky barrier is modified by controlling an overlap of a gate and a source/drain and by controlling implantation, activation and/or gate processes.