Patents by Inventor Ying Liang

Ying Liang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200090940
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a first gate structure and a second gate structure formed on a substrate, wherein the first gate structure includes a first work function metal having a first material, and the second gate structure includes a second work function metal having a second material, the first material being different from the second material, wherein the first gate structure further includes a gate dielectric layer, a self-protective layer having metal phosphate, and the first work function metal on the self-protective layer.
    Type: Application
    Filed: November 19, 2019
    Publication date: March 19, 2020
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20200080372
    Abstract: A blind capable of stepless positioning includes a control unit which controls the positioning of a shade, is disposed in a roller, and has a fixed sleeve, a spindle, a movable sleeve and a pre-torque spring. The fixed sleeve is fixedly disposed at a roller holder and fitted around one end of the spindle, whereas the movable sleeve is fixedly disposed at the roller and fitted around the other end of the spindle; hence, the movable sleeve rotates together with the roller. The pre-torque spring is fitted around the spindle and has two ends connected to the fixed sleeve and the movable sleeve, respectively, such that the pre-torque spring operates in conjunction with the movable sleeve. While the shade is being rolled up and rolled down, a predetermined torque level of the pre-torque spring matches the length of the shade to therefore brake the shade at any height.
    Type: Application
    Filed: November 9, 2018
    Publication date: March 12, 2020
    Inventors: Sheng-Ying HSU, Wen-Ying LIANG, Wu-Chung NIEN
  • Patent number: 10568396
    Abstract: A woven material (100) including bonding fibers (108) and a method of reinforcing woven material using bonding fibers is disclosed. The woven material (100) includes a plurality of warp threads (102), and at least one weft thread (104) coupled to the warp threads (102). The woven material (100) also includes a plurality of bonding fibers (108). The bonding fibers (108) are positioned in parallel with the warp threads (102), and/or in parallel with the weft thread(s) (104). Additionally, the bonding fibers (108) are formed from a material having a melting temperature that is lower than a melting temperature of the material(s) used to form the warp threads (102) and the weft thread(s) (104) of the woven material.
    Type: Grant
    Filed: July 12, 2015
    Date of Patent: February 25, 2020
    Assignee: APPLE INC.
    Inventors: Yoji Hamada, Peter F. Coxeter, Ying-Liang Su, Edward Siahaan, Whitney D. Mattson, Naoto Matsuyuki
  • Publication number: 20200044073
    Abstract: The present disclosure describes structure and method of a fin field-effect transistor (finFET) device. The finFET device includes: a substrate, a fin over the substrate, and a gate structure over the fin. The gate structure includes a work-function metal (WFM) layer over an inner sidewall of the gate structure. A topmost surface of the WFM layer is lower than a top surface of the gate structure. The gate structure also includes a filler gate metal layer over the topmost surface of the WFM layer. A top surface of the filler gate metal layer is substantially co-planar with the top surface of the gate structure. The gate structure further includes a self-assembled monolayer (SAM) between the filler gate metal layer and the WFM layer.
    Type: Application
    Filed: February 27, 2019
    Publication date: February 6, 2020
    Applicant: Taiwam Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li HUANG, Chun-Sheng Liang, Ming-Hsi Yeh, Ying-Liang Chuang, Hsin-Che Chiang, Chun-Ming Yang, Yu-Chi Pan
  • Patent number: 10541317
    Abstract: Methods for, and structures formed by, wet process assisted approaches implemented in a replacement gate process are provided. Generally, in some examples, a wet etch process for removing a capping layer can form a first monolayer on the underlying layer as an adhesion layer and a second monolayer on, e.g., an interfacial dielectric layer between a gate spacer and a fin as an etch protection mechanism. Generally, in some examples, a wet process can form a monolayer on a metal layer, like a barrier layer of a work function tuning layer, as a hardmask for patterning of the metal layer.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: January 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li Huang, Chun-Sheng Liang, Ming-Chi Huang, Ming-Hsi Yeh, Ying-Liang Chuang, Hsin-Che Chiang
  • Publication number: 20200018969
    Abstract: A near-eye display and a near-eye display system are provided. The near-eye display includes a display panel, a collimation lens component, and an optical redirector. The display panel includes a plurality of pixels that are disposed in a tiling manner. The collimation lens component includes a plurality of collimation lenses, and the plurality of collimation lenses are in a one-to-one correspondence with the plurality of pixels. Each of the plurality of collimation lenses is configured to: convert, into collimated light, light emitted by a corresponding pixel, and input the collimated light into the optical redirector. The optical redirector includes a plurality of light convergence structures, and the plurality of light convergence structures are in a one-to-one correspondence with the plurality of collimation lenses. Each of the plurality of light convergence structures is configured to converge, on a focus of the near-eye display, collimated light input by a corresponding collimation lens.
    Type: Application
    Filed: September 20, 2019
    Publication date: January 16, 2020
    Inventors: Jian Ou, Ying LIANG, Songlin LI
  • Publication number: 20200006518
    Abstract: Embodiments of the present disclosure provide a method of cleaning a lanthanum containing substrate without formation of undesired lanthanum compounds during processing. In one embodiment, the cleaning method includes treating the lanthanum containing substrate with an acidic solution prior to cleaning the lanthanum containing substrate with a HF solution. The cleaning method permits using lanthanum doped high-k dielectric layer to modulate effective work function of the gate stack, thus, improving device performance.
    Type: Application
    Filed: September 12, 2019
    Publication date: January 2, 2020
    Inventors: Ming-Chi Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 10515808
    Abstract: A chemical mechanical polishing (CMP) system includes an O3/DIW generator, a polishing unit, and a cleaning unit. The O3/DIW generator is configured to generate an O3/DIW solution including ozone gas (O3) dissolved in deionized water (DIW). The polishing unit includes components for buffing a surface of a semiconductor structure, and a pipeline coupled to the O3/DIW generator to receive the O3/DIW solution for the buffing. The cleaning unit is coupled to the O3/DIW generator and is configured to clean the surface of the semiconductor structure using the O3/DIW solution.
    Type: Grant
    Filed: September 16, 2016
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen
  • Patent number: 10490410
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a first gate structure and a second gate structure formed on a substrate, wherein the first gate structure includes a first work function metal having a first material, and the second gate structure includes a second work function metal having a second material, the first material being different from the second material, wherein the first gate structure further includes a gate dielectric layer, a self-protective layer having metal phosphate, and the first work function metal on the self-protective layer.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: November 26, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20190341317
    Abstract: Embodiments of the present disclosure provide wet process based methods for modifying threshold value (Vt) of high-k metal gate using self-assembled monolayer (SAM) on dedicated transistor. In one embodiment, the method includes forming a gate structure over a substrate, the gate structure comprising a gate dielectric layer, a barrier layer formed over the gate dielectric layer, and an oxide layer formed over the barrier layer, and forming a self-assembled monolayer on the oxide layer by exposing the oxide layer to an aqueous solution containing metal oxides in a metal dissolving acid.
    Type: Application
    Filed: July 22, 2019
    Publication date: November 7, 2019
    Inventors: Ju-Li Huang, Chih-Long Chiang, Kuo Bin Huang, Ming-Hsi Yeh, Ying-Liang Chuang
  • Publication number: 20190326282
    Abstract: Provided is a metal gate structure and related methods that include performing a metal gate cut process. The metal gate cut process includes a plurality of etching steps. For example, a first anisotropic dry etch is performed, a second isotropic dry etch is performed, and a third wet etch is performed. In some embodiments, the second isotropic etch removes a residual portion of a metal gate layer including a metal containing layer. In some embodiments, the third etch removes a residual portion of a dielectric layer.
    Type: Application
    Filed: May 6, 2019
    Publication date: October 24, 2019
    Inventors: Ming-Chi HUANG, Ying-Liang CHUANG, Ming-Hsi YEH, Kuo-Bin HUANG
  • Publication number: 20190319650
    Abstract: Embodiments of the present invention relate to the communications field, and provide a branching tower-mounted amplifier and an antenna feed system, so that a branching tower-mounted amplifier is added on an antenna unit side, thereby implementing a function of a four-port RRU, ensuring network coverage, and improving network performance. The branching tower-mounted amplifier includes a first filter module, a second filter module, a first amplification module, a second amplification module, a control module, a first branching module, and a second branching module.
    Type: Application
    Filed: June 27, 2019
    Publication date: October 17, 2019
    Inventors: Jiangchun GU, Ying LIANG
  • Publication number: 20190273149
    Abstract: Methods for, and structures formed by, wet process assisted approaches implemented in a replacement gate process are provided. Generally, in some examples, a wet etch process for removing a capping layer can form a first monolayer on the underlying layer as an adhesion layer and a second monolayer on, e.g., an interfacial dielectric layer between a gate spacer and a fin as an etch protection mechanism. Generally, in some examples, a wet process can form a monolayer on a metal layer, like a barrier layer of a work function tuning layer, as a hardmask for patterning of the metal layer.
    Type: Application
    Filed: March 1, 2018
    Publication date: September 5, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li HUANG, Chun-Sheng LIANG, Ming-Chi HUANG, Ming-Hsi YEH, Ying-Liang CHUANG, Hsin-Che CHIANG
  • Patent number: 10361133
    Abstract: Embodiments of the present disclosure provide wet process based methods for modifying threshold value (Vt) of high-k metal gate using self-assembled monolayer (SAM) on dedicated transistor. In one embodiment, the method includes forming a gate structure over a substrate, the gate structure comprising a gate dielectric layer, a barrier layer formed over the gate dielectric layer, and an oxide layer formed over the barrier layer, and forming a self-assembled monolayer on the oxide layer by exposing the oxide layer to an aqueous solution containing metal oxides in a metal dissolving acid.
    Type: Grant
    Filed: September 18, 2017
    Date of Patent: July 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li Huang, Chih-Long Chiang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo Bin Huang
  • Publication number: 20190164766
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a first gate structure and a second gate structure formed on a substrate, wherein the first gate structure includes a first work function metal having a first material, and the second gate structure includes a second work function metal having a second material, the first material being different from the second material, wherein the first gate structure further includes a gate dielectric layer, a self-protective layer having metal phosphate, and the first work function metal on the self-protective layer.
    Type: Application
    Filed: December 28, 2018
    Publication date: May 30, 2019
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 10283503
    Abstract: Provided is a metal gate structure and related methods that include performing a metal gate cut process. The metal gate cut process includes a plurality of etching steps. For example, a first anisotropic dry etch is performed, a second isotropic dry etch is performed, and a third wet etch is performed. In some embodiments, the second isotropic etch removes a residual portion of a metal gate layer including a metal containing layer. In some embodiments, the third etch removes a residual portion of a dielectric layer.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: May 7, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Chi Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 10283417
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a semiconductor device includes a first gate structure and a second gate structure on a substrate; wherein the first gate structure includes a first gate dielectric layer having a first material, and the second gate structure includes a second gate dielectric layer having a second material, the first material being different from the second material, wherein the first and the second gate structures further includes a first and a second self-protective layers disposed on the first and the second gate dielectric layers respectively, wherein the first self-protective layer includes metal phosphate and the second self-protective layer includes boron including complex agents and a first work function tuning layer on the first self-protective layer in the first gate structure.
    Type: Grant
    Filed: December 6, 2017
    Date of Patent: May 7, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20190131421
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The method includes forming a fin structure over a substrate. The method also includes forming a gate structure over the fin structure. The method further includes forming fin spacers over sidewalls of the fin structure and gate spacers over sidewalls of the gate structure. In addition, the method includes forming a source/drain structure over the fin structure and depositing a dummy material layer to cover the source/drain structure. The dummy material layer is removed faster than the gate spacers during the removal of the dummy material layer. The method further includes forming a salicide layer over the source/drain structure and the fin spacers, and forming a contact over the salicide layer. The dummy material layer includes Ge, amorphous silicon or spin-on carbon.
    Type: Application
    Filed: October 30, 2017
    Publication date: May 2, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsiang-Ku SHEN, Jin-Mu YIN, Tsung-Chieh HSIAO, Chia-Lin CHUANG, Li-Zhen YU, Dian-Hau CHEN, Shih-Wei WANG, De-Wei YU, Chien-Hao CHEN, Bo-Cyuan LU, Jr-Hung LI, Chi-On CHUI, Min-Hsiu HUNG, Huang-Yi HUANG, Chun-Cheng CHOU, Ying-Liang CHUANG, Yen-Chun HUANG, Chih-Tang PENG, Cheng-Po CHAU, Yen-Ming CHEN
  • Publication number: 20190131185
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a semiconductor device includes a first gate structure and a second gate structure on a substrate; wherein the first gate structure includes a first gate dielectric layer having a first material, and the second gate structure includes a second gate dielectric layer having a second material, the first material being different from the second material, wherein the first and the second gate structures further comprises a first and a second self-protective layers disposed on the first and the second gate dielectric layers respectively, wherein the first self-protective layer comprises metal phosphate and the second self-protective layer comprises boron comprising complex agents and a first work function tuning layer on the first self-protective layer in the first gate structure.
    Type: Application
    Filed: November 30, 2018
    Publication date: May 2, 2019
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20190103325
    Abstract: A method includes forming a gate stack, which includes a first portion over a portion of a first semiconductor fin, a second portion over a portion of a second semiconductor fin, and a third portion connecting the first portion to the second portion. An anisotropic etching is performed on the third portion of the gate stack to form an opening between the first portion and the second portion. A footing portion of the third portion remains after the anisotropic etching. The method further includes performing an isotropic etching to remove a metal gate portion of the footing portion, and filling the opening with a dielectric material.
    Type: Application
    Filed: April 30, 2018
    Publication date: April 4, 2019
    Inventors: Ming-Chi Huang, Kuo-Bin Huang, Ying-Liang Chuang, Ming-Hsi Yeh