Patents by Inventor Yohei Uchida
Yohei Uchida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20150107772Abstract: A shower head 13 (gas supply device) of supplying a processing gas and an additional gas from a processing gas supply source and an additional gas source, respectively, into a processing space S includes multiple gas distribution plates 28 to 31, the cooling plate 32, and the cover plate 33 stacked in sequence. A peripheral gas diffusion space 35 and an outermost gas diffusion space 36 are formed in the undermost gas distribution plate 28. At least one gas supply path for supplying the processing gas and additional gas into any one of the peripheral gas diffusion space and the outermost gas diffusion space is formed at each of the gas distribution plates. The gas supply path is branched into multiple lines and distances from the processing gas supply source to front ends of the respective branch lines are set to be all the same.Type: ApplicationFiled: May 9, 2013Publication date: April 23, 2015Applicant: Tokyo Electron LimitedInventor: Yohei Uchida
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Patent number: 8905747Abstract: A flash removing punch pin is provided with a rotating mechanism wherein a flange is formed on an upper end portion on an outer circumference side portion of a cutting edge portion, and a plurality of grooves are formed in the axis center direction to the side of a casting part from the flange. An inner portion is slidably inserted into an inner cover, and the inner portion and a processing portion are moved by a spring cylinder in a direction to be separated from each other. The spring cylinder is compressed when the punch pin is in proximity to the casting part, and then the flange of the punch pin contacts a flange portion of the casting part. When the inner portion slides into the inner cover, the processing portion rotates along the axis with the inner portion.Type: GrantFiled: November 26, 2008Date of Patent: December 9, 2014Assignee: Toyota Jidosha Kabushiki KaishaInventors: Tomohiro Hangai, Yohei Uchida
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Patent number: 8883632Abstract: A manufacturing method of a device including: a first process in which a barrier film is formed on a substrate with a concave portion provided on one surface thereof so as to cover an inner wall surface of the concave portion; a second process in which a conductive film is formed so as to cover the barrier film; and a third process in which the conductive film is melted by a reflow method, wherein the method includes a process ? between the second process and the third process, in which the substrate with the barrier film and the conductive film laminated thereon in this order is exposed to an atmosphere under a pressure A for a time period B, and wherein in the process ?, control is carried out such that a product of the pressure A and the time period B is not greater than 6×10?4 [Pa·s].Type: GrantFiled: January 9, 2013Date of Patent: November 11, 2014Assignee: ULVAC, Inc.Inventors: Youhei Endo, Shuji Kodaira, Yuta Sakamoto, Junichi Hamaguchi, Yohei Uchida, Yasushi Higuchi, Shinya Nakamura, Kazuyoshi Hashimoto, Yoshihiro Ikeda, Hiroaki Iwasawa
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Patent number: 8770214Abstract: A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline to a region where the gas mixture is used through a gas mixture supply line. When two or more gases having different flow rates are supplied simultaneously, a gas having a relatively low flow rate is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for a gas having a relatively high flow rate.Type: GrantFiled: December 22, 2009Date of Patent: July 8, 2014Assignee: Tokyo Electron LimitedInventors: Yohei Uchida, Takahiro Yamamoto
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Publication number: 20140146434Abstract: A mounting table structure includes a sheet, having thermal conductivity, provided between a focus ring and a base member; a pressing member having a pressing surface that presses the focus ring toward the base member and contact surfaces, facing downward, arranged at a predetermined interval in a circumferential direction thereof; and a supporting member that is connected to the base member and has first and second contact surfaces. Further, the first contact surfaces and the second contact surfaces are arranged at the predetermined interval in the circumferential direction such that the second and first contact surfaces are alternately arranged. Moreover, the first contact surfaces are located at a position different from that of the second contact surfaces in a height direction, and the contact surfaces of the pressing member are protruded at a distance larger than distances of the first and second contact surfaces in the height direction.Type: ApplicationFiled: November 26, 2013Publication date: May 29, 2014Applicant: Tokyo Electron LimitedInventor: Yohei Uchida
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Publication number: 20130224381Abstract: In order to provide a thin film manufacturing method and a thin film manufacturing apparatus, wherein a thin film with good reproducibility can be manufactured at low cost, and in a way wherein resources are saved, a dummy substrate (S2) is conveyed into a chamber (51), dummy processing gas is supplied to the dummy substrate (S2), a product substrate (S3) is conveyed into the chamber (51), and raw material gas different from the dummy processing gas, and containing therein metal material for manufacturing a thin film with the Metal Organic Chemical Vapor Deposition (MOCVD) method, is supplied to the product substrate (S3). Since the raw material gas is not used as dummy processing gas, the amount of metal material to be used can be inhibited, and a thin film with good reproducibility can be manufactured at low cost, and in a way wherein resources are saved.Type: ApplicationFiled: September 15, 2011Publication date: August 29, 2013Applicant: ULVAC, INCInventors: Takeshi Masuda, Takuya Ideno, Masahiko Kajinuma, Nobuhiro Odajima, Yohei Uchida, Koukou Suu
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Publication number: 20130216710Abstract: [Problem] To provide a thin film production process and a thin film production device, both of which enable the production of a dielectric thin film having small surface roughness. [Solution] This thin film production process comprises: supplying a mixed gas to a substrate (S) that is placed in a chamber (51) and has been heated, wherein the mixed gas comprises a metal raw material gas that serves as a raw material for a dielectric thin film having perovskite-type crystals and an oxidation gas that can react with the metal raw material gas; stopping the supply of the metal raw material gas to the substrate (S); and, subsequent to the stopping of the supply of the metal raw material gas, limiting the supply of the oxidation gas to the substrate (S).Type: ApplicationFiled: September 13, 2011Publication date: August 22, 2013Applicant: ULVAC, INC.Inventors: Takeshi Masuda, Masahiko Kajinuma, Takuya Ideno, Nobuhiro Odajima, Yohei Uchida, Koukou Suu
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Patent number: 8276891Abstract: A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline into a region where the gas mixture is used through a gas mixture supply line. When a typical gas supplied in a gaseous state from a gas supply unit and a liquid source gas vaporized by heating a liquid source material supplied from a liquid source material supply unit by a vaporizing unit are supplied simultaneously, the liquid source gas is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for the typical gas, and the liquid source gas is supplied to a downstream side of a filter for removing particles in the typical gas.Type: GrantFiled: December 18, 2009Date of Patent: October 2, 2012Assignee: Tokyo Electron LimitedInventor: Yohei Uchida
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Publication number: 20120031500Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus 1 has a fluid controlling unit 2 and a fluid introducing unit 3. The fluid introducing unit 3 is divided into three parts: a first and a second inlet-side shutoff/open parts 5, 6 disposed on the inlet side, each made up of 2×N/2 on-off valves 23, and a fluid controlling unit-side shutoff/open part 7 made up of 4×M on-off valves 23, disposed between the first and second inlet-side shutoff/open parts 5, 6 and the fluid controlling unit 2.Type: ApplicationFiled: November 6, 2009Publication date: February 9, 2012Inventors: Jun Hirose, Kazuyuki Tezuka, Yohei Uchida, Mutsunori Koyonogi, Takahiro Matsuda, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20110227246Abstract: A flash removing punch pin is provided with a rotating mechanism wherein a flange is formed on an upper end portion on an outer circumference side portion of a cutting edge portion, and a plurality of grooves are formed in the axis center direction to the side of a casting part from the flange. An inner portion is slidably inserted into an inner cover, and the inner portion and a processing portion are moved by a spring cylinder in a direction to be separated from each other. The spring cylinder is compressed when the punch pin is in proximity to the casting part, and then the flange of the punch pin contacts a flange portion of the casting part. When the inner portion slides into the inner cover, the processing portion rotates along the axis with the inner portion.Type: ApplicationFiled: November 26, 2008Publication date: September 22, 2011Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Tomohiro Hangai, Yohei Uchida
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Publication number: 20100155971Abstract: A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline into a region where the gas mixture is used through a gas mixture supply line. When a typical gas supplied in a gaseous state from a gas supply unit and a liquid source gas vaporized by heating a liquid source material supplied from a liquid source material supply unit by a vaporizing unit are supplied simultaneously, the liquid source gas is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for the typical gas, and the liquid source gas is supplied to a downstream side of a filter for removing particles in the typical gas.Type: ApplicationFiled: December 18, 2009Publication date: June 24, 2010Applicant: TOKYO ELECTRON LIMITEDInventor: Yohei Uchida
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Publication number: 20100154908Abstract: A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline to a region where the gas mixture is used through a gas mixture supply line. When two or more gases having different flow rates are supplied simultaneously, a gas having a relatively low flow rate is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for a gas having a relatively high flow rate.Type: ApplicationFiled: December 22, 2009Publication date: June 24, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Yohei UCHIDA, Takahiro Yamamoto
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Patent number: 7239784Abstract: The present invention provides an optical fiber of which a zero dispersion wavelength falls within a range of between 1,250 nm and 1,350 nm inclusive, transmission loss at 1,550 nm is equal to or less than 0.185 dB/km, chromatic dispersion at 1,550 nm is within the range of 19±1 ps/nm·km, a dispersion slope at 1,550 nm is equal to or less than 0.06 ps/nm2·km, an effective area Aeff is equal to or more than 105 ?m2, a cable cutoff wavelength ?cc is equal to or less than 1,530 nm, polarization mode dispersion is equal to or less than 0.1 ps/km1/2, and a loss when the optical fiber is wound on a mandrel having an outer diameter of 20 mm is equal to or less than 10 dB/m.Type: GrantFiled: January 20, 2006Date of Patent: July 3, 2007Assignee: The Furukawa Electric Co., Ltd.Inventors: Shuhei Hayami, Mitsuhiro Kawasaki, Yohei Uchida
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Publication number: 20060198591Abstract: The present invention provides an optical fiber of which a zero dispersion wavelength falls within a range of between 1,250 nm and 1,350 nm inclusive, transmission loss at 1,550 nm is equal to or less than 0.185 dB/km, chromatic dispersion at 1,550 nm is within the range of 19±1 ps/nm·km, a dispersion slope at 1,550 nm is equal to or less than 0.06 ps/nm2·km, an effective area Aeff is equal to or more than 105 ?m2, a cable cutoff wavelength ?cc is equal to or less than 1,530 nm, polarization mode dispersion is equal to or less than 0.1 ps/km1/2, and a loss when the optical fiber is wound on a mandrel having an outer diameter of 20 mm is equal to or less than 10 dB/m.Type: ApplicationFiled: January 20, 2006Publication date: September 7, 2006Applicant: The Furukawa Electric Co. Ltd.Inventors: Shuhei Hayami, Mitsuhiro Kawasaki, Yohei Uchida
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Patent number: 7095940Abstract: The present invention provides an optical fiber of which a zero dispersion wavelength falls within a range of between 1,250 nm and 1,350 nm inclusive, transmission loss at 1,550 nm is equal to or less than 0.185 dB/km, chromatic dispersion at 1,550 nm is within the range of 19±1 ps/nm·km, a dispersion slope at 1,550 nm is equal to or less than 0.06 ps/nm2·km, an effective area Aeff is equal to or more than 105 ?m2, a cable cutoff wavelength ?cc is equal to or less than 1,530 nm, polarization mode dispersion is equal to or less than 0.1 ps/km1/2, and a loss when the optical fiber is wound on a mandrel having an outer diameter of 20 mm is equal to or less than 10 dB/m.Type: GrantFiled: October 1, 2003Date of Patent: August 22, 2006Assignee: The Furukawa Electric Co., Ltd.Inventors: Shuhei Hayami, Mitsuhiro Kawasaki, Yohei Uchida
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Publication number: 20050089289Abstract: The present invention provides an optical fiber of which a zero dispersion wavelength falls within a range of between 1,250 nm and 1,350 nm inclusive, transmission loss at 1,550 nm is equal to or less than 0.185 dB/km, chromatic dispersion at 1,550 nm is within the range of 19±1 ps/nm·km, a dispersion slope at 1,550 nm is equal to or less than 0.06 ps/nm2·km, an effective area Aeff is equal to or more than 105 ?m2, a cable cutoff wavelength ?cc is equal to or less than 1,530 nm, polarization mode dispersion is equal to or less than 0.1 ps/km1/2, and a loss when the optical fiber is wound on a mandrel having an outer diameter of 20 mm is equal to or less than 10 dB/m.Type: ApplicationFiled: October 1, 2003Publication date: April 28, 2005Applicant: The Furukawa Electric Co, Ltd.Inventors: Shuhei Hayami, Mitsuhiro Kawasaki, Yohei Uchida
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Publication number: 20040223714Abstract: The optical fiber includes a center core portion, a side core portion and clad portion, which has a dispersion value of 14-20 ps/nm/km at a wavelength of 1550 nm, a dispersion slope of 0.05-0.08 ps/nm2/km at a wavelength of 1550 nm and a transmission attenuation of 0.2 dB/km or less at a wavelength of 1550 nm, wherein the relative refractive index difference &Dgr;1 between the center core portion and the clad portion is 0.25-0.50%, the relative refractive index difference &Dgr;2 between the side core portion and the clad portion is 0.05-0.30%, an inequality &Dgr;2 <&Dgr;1 is satisfied, the ratio a/b between an outer diameter a of the center core portion and an outer diameter b of the side core portion is 0.3-0.7, and the effective core area Aeff at a wavelength of 1550 nm is 90 &mgr;m2 or larger.Type: ApplicationFiled: October 22, 2003Publication date: November 11, 2004Inventors: Mitsuhiro Kawasaki, Yohei Uchida, Hiroaki Oonuma
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Patent number: 6665482Abstract: The optical fiber includes a center core portion, a side core portion and clad portion, which has a dispersion value of 14-20 ps/nm/km at a wavelength of 1550 nm, a dispersion slope of 0.05-0.08 ps/nm2/km at a wavelength of 1550 nm and a transmission attenuation of 0.2 dB/km or less at a wavelength of 1550 nm, wherein the relative refractive index difference &Dgr;1 between the center core portion and the clad portion is 0.25-0.50%, the relative refractive index difference &Dgr;2 between the side core portion and the clad portion is 0.05-0.30%, an inequality &Dgr;2<&Dgr;1 is satisfied, the ratio a/b between an outer diameter a of the center core portion and an outer diameter b of the side core portion is 0.3-0.7, and the effective core area Aeff at a wavelength of 1550 nm is 90 &mgr;m2 or larger.Type: GrantFiled: February 12, 2002Date of Patent: December 16, 2003Assignee: The Furakawa Electric Co., Ltd.Inventors: Mitsuhiro Kawasaki, Yohei Uchida, Hiroaki Oonuma
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Publication number: 20020154876Abstract: The optical fiber includes a center core portion, a side core portion and clad portion, which has a dispersion value of 14-20 ps/nm/km at a wavelength of 1550 nm, a dispersion slope of 0.05-0.08 ps/nm2/km at a wavelength of 1550 nm and a transmission attenuation of 0.2 dB/km or less at a wavelength of 1550 nm, wherein the relative refractive index difference &Dgr;1 between the center core portion and the clad portion is 0.25-0.50%, the relative refractive index difference &Dgr;2 between the side core portion and the clad portion is 0.05-0.30%, an inequality &Dgr;2 <&Dgr;1 is satisfied, the ratio a/b between an outer diameter a of the center core portion and an outer diameter b of the side core portion is 0.3-0.7, and the effective core area Aeff at a wavelength of 1550 nm is 90 &mgr;m2 or larger.Type: ApplicationFiled: February 12, 2002Publication date: October 24, 2002Inventors: Mitsuhiro Kawasaki, Yohei Uchida, Hiroaki Oonuma