Patents by Inventor Yong Dae Kim

Yong Dae Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE AND METHOD FOR CLEANING PHOTOMASK
    Publication number: 20060207633
    Abstract: Disclosed herein is a device and a method of cleaning a photomask, which prevents haze from being generated on a surface of the photomask during a photolithography process. The photomask is heat treated to remove residual ions on a surface thereof and to induce curing and oxidation of Cr and MoSiON layers, thereby preventing diffusion of the ions. Etching of Cr and MoSiON layers due to a cleaning process is suppressed in order to significantly reduce a change in phase and transmissivity of optical properties of Cr and MoSiON.
    Type: Application
    Filed: March 20, 2006
    Publication date: September 21, 2006
    Applicant: PKL CO., Ltd.
    Inventors: Yong Dae KIM, Jong Min KIM, Han Byul KANG, Hyun Joon CHO, Sang Soo CHOI
  • Load lock modules and semiconductor manufacturing apparatuses
    Publication number: 20060033175
    Abstract: A load lock module may include a chamber adapted to receive at least one wafer, a supply tube adapted to supply purging gas into the chamber, an outlet adapted to remove the purging gas from the chamber, and an ejector adapted to provide the purging gas to the surface of the at least one wafer received by the chamber.
    Type: Application
    Filed: August 11, 2005
    Publication date: February 16, 2006
    Inventor: Yong-Dae Kim
  • Plasma etching apparatus
    Publication number: 20050061447
    Abstract: A plasma etch apparatus is disclosed. The plasma etch apparatus includes an electrostatic chuck for loading a wafer; an insulation portion surrounding the electrostatic chuck; and a focus ring disposed on the electrostatic chuck and the insulation portion. The focus ring has a concave-convex configuration.
    Type: Application
    Filed: September 20, 2004
    Publication date: March 24, 2005
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Yong-Dae Kim, Soon-Ho Yon, Do-Hyeong Kim, Doo-Won Lee
  • Luggage restraining structure
    Patent number: 6425628
    Abstract: The luggage restraining structure comprises a safety block fixed by securing elements between a rear folding seat and a trunk, the trunk being formed behind the rear folding seat which is collapsible and easy to keep. The luggage restraining structure prevents the luggage from bouncing into the passenger area by the force of inertia of luggage loaded in the trunk in the event of a sudden stop or rear-on collision, thereby protecting the passengers against the impact energy of luggage.
    Type: Grant
    Filed: December 8, 2000
    Date of Patent: July 30, 2002
    Assignee: Kia Motors Corporation
    Inventor: Yong Dae Kim
  • Luggage restraining structure
    Publication number: 20020024227
    Abstract: The luggage restraining structure comprises a safety block (30) fixed by securing elements between a rear folding seat (20) and a trunk (11), the trunk (11) being formed behind the rear folding seat (20) which is collapsible and easy to keep. The luggage restraining structure prevents the luggage from bouncing into the passenger area by the force of inertia of luggage loaded in the trunk (11) in the event of a sudden stop or rear-on collision, thereby protecting the passengers against the impact energy of luggage.
    Type: Application
    Filed: December 8, 2000
    Publication date: February 28, 2002
    Inventor: Yong Dae Kim