Abstract: A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.

Abstract: A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.

Abstract: A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.

Abstract: A photolithography apparatus includes a cleaning unit which cleans a target substrate, a drying unit which dries the target substrate provided from the cleaning unit, and a coating unit which forms a photoresist layer by coating a photoresist on the target substrate provided from the drying unit. The drying unit includes a first vacuum unit which performs a vacuum treatment on the target substrate.

Abstract: A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.

Abstract: A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.

Abstract: A display device includes a peripheral area around a display area, a display element in the display area, and a dam in the peripheral area. A thin film encapsulation layer covers the dam and the display element. A touch sensor is on the thin film encapsulation layer. A first insulating layer is between the thin film encapsulation layer and the touch sensor and has a first region and a second region. A dielectric constant of the first region is lower than a dielectric constant of the second region, and the first region is between the dam and the touch sensor.

Abstract: A method of manufacturing a roll type imprint master mold including disposing a base layer on a substrate including a first area and a second area adjacent to the first area, disposing an inorganic insulation layer on the base layer, forming a first mask pattern and a first resin pattern in the first area, forming a pattern layer by etching the inorganic insulation layer using the first resin and the first mask patterns as a mask, removing the first resin and the first mask patterns, forming a second mask pattern and a second resin pattern in the second area, forming a pattern layer by etching the inorganic insulation layer using the second resin and the second mask patterns as a mask, removing the second resin and the second mask patterns, separating the base layer from the substrate, and attaching the base layer onto a roll body.

Abstract: A display device includes a substrate, a first thin-film transistor (TFT), a first organic light-emitting diode (OLED), and a second OLED. The TFT is on a first surface of the substrate and includes a first output electrode and a second output electrode. The OLED is on the first surface of the substrate and is electrically connected to the first output electrode of the TFT. The second OLED is on a second surface of the substrate and is electrically connected to the second output electrode of the TFT.

Abstract: A flexible touch sensing unit may include a substrate including an active touch region and an inactive region surrounding the active touch region, a plurality of first sensing electrodes disposed on the active touch region and extending along a first direction, a plurality of second sensing electrodes disposed on the active touch region and extending along a second direction, and a plurality of sensing lines disposed on the inactive region and electrically connected to the first sensing electrodes and the second sensing electrodes. Each of the sensing lines may include a first metal layer, a first conductive layer disposed on the first metal layer, and a second metal layer disposed on the first conductive layer. Each of the first sensing electrodes may include a third metal layer, and each of the second sensing electrodes may include a fourth metal layer. The first conductive layer may include a self-assembled monolayer.

Abstract: A display device including a display panel configured to display an image and having a folding area by which the display panel is configured to be folded along a folding axis, and a touch member disposed on the display panel and configured to detect an external touch signal. The touch member includes a plurality of first conductive patterns disposed to overlap the folding area, in which each of the first conductive patterns includes a fiber layer including a plurality of nanofibers, and the nanofibers includes a plurality of cavities.

Abstract: A display device includes a substrate, a first thin-film transistor (TFT), a first organic light-emitting diode (OLED), and a second OLED. The TFT is on a first surface of the substrate and includes a first output electrode and a second output electrode. The OLED is on the first surface of the substrate and is electrically connected to the first output electrode of the TFT. The second OLED is on a second surface of the substrate and is electrically connected to the second output electrode of the TFT.

Abstract: A display device includes a peripheral area around a display area, a display element in the display area, and a dam in the peripheral area. A thin film encapsulation layer covers the dam and the display element. A touch sensor is on the thin film encapsulation layer. A first insulating layer is between the thin film encapsulation layer and the touch sensor and has a first region and a second region. A dielectric constant of the first region is lower than a dielectric constant of the second region, and the first region is between the dam and the touch sensor.

Abstract: A flexible electronic device including a substrate and a line layer disposed on the substrate. The line layer includes a first conductive layer disposed on the substrate, a plurality of polymer walls disposed on the first conductive layer and spaced apart from each other in a horizontal direction parallel to the substrate, and a second conductive layer including first portions disposed between the polymer walls and a second portion disposed on the polymer walls. A portion of the first conductive layer contacts the first portions.

Abstract: Provided is a touch member includes a folding region folded around a folding axis and a non-folding region adjacent to the folding region. The touch member includes a first conductive pattern disposed in the folding region and a second conductive pattern disposed in the non-folding region. The touch member also includes an air gap defined inside the first conductive pattern. The touch member is configured to detect an external signal.

Abstract: A wire grid polarizer plate includes: a transparent substrate through which incident light is transmitted; and a partition wall member on the transparent substrate and at which first polarized light is transmitted and second polarized light perpendicular to the first polarized light is reflected. The partition wall member is defined by: first partition walls spaced apart from each other on the transparent substrate, the first partition walls formed of a first metal; second partition walls respectively on the first partition walls, the second partition walls formed of a second metal having strength greater than that of the first metal; and third reinforced partition walls respectively on the second partition walls and having a stepped cross-sectional structure, the third partition walls formed of an oxide of the first metal, the oxide of the first metal having strength greater than the strength of the second metal.

Abstract: A method of manufacturing a roll type imprint master mold including disposing a base layer on a substrate including a first area and a second area adjacent to the first area, disposing an inorganic insulation layer on the base layer, forming a first mask pattern and a first resin pattern in the first area, forming a pattern layer by etching the inorganic insulation layer using the first resin and the first mask patterns as a mask, removing the first resin and the first mask patterns, forming a second mask pattern and a second resin pattern in the second area, forming a pattern layer by etching the inorganic insulation layer using the second resin and the second mask patterns as a mask, removing the second resin and the second mask patterns, separating the base layer from the substrate, and attaching the base layer onto a roll body.

Abstract: A touch sensor includes a touch substrate including a touch sensing area and a non-sensing area outside the touch sensing area, touch electrodes disposed in the touch sensing area and configured to sense a touch, and touch wiring connected to the touch electrodes in the non-sensing area, in which the touch wiring includes a first wiring conductive layer, a second wiring conductive layer disposed on the first wiring conductive layer, and transparent layers disposed at first and second sides of the second wiring conductive layer and on the first wiring conductive layer.

Abstract: A flexible electronic device including a substrate and a line layer disposed on the substrate. The line layer includes a first conductive layer disposed on the substrate, a plurality of polymer walls disposed on the first conductive layer and spaced apart from each other in a horizontal direction parallel to the substrate, and a second conductive layer including first portions disposed between the polymer walls and a second portion disposed on the polymer walls. A portion of the first conductive layer contacts the first portions.

Abstract: A display device including a display panel configured to display an image and having a folding area by which the display panel is configured to be folded along a folding axis, and a touch member disposed on the display panel and configured to detect an external touch signal. The touch member includes a plurality of first conductive patterns disposed to overlap the folding area, in which each of the first conductive patterns includes a fiber layer including a plurality of nanofibers, and the nanofibers includes a plurality of cavities.