Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: The present disclosure relates to a device and a method for removing a carbon from an oxygen sensor. The device may include an oxygen sensor installed in a gas exhaust line of a vehicle to measure an oxygen content in an exhaust gas, a valve for transferring a high-pressure air flow to the oxygen sensor, a valve actuator for driving the valve, and a controller for controlling the valve actuator to open the valve when an abnormality occurs in the oxygen sensor. When the abnormality has occurred in the oxygen sensor, the valve for transferring the high-pressure air flow is opened, and a temperature of zirconia provided in the oxygen sensor is raised to remove a carbon deposited on the oxygen sensor.

Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.

Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.

Abstract: A device for preventing dilution of engine oil includes an oil pan in which oil for lubrication of the engine is recovered with fuel. An exhaust purifier is provided on a rear end of the engine and purifying exhaust gas. A gas passage can guide flow of exhaust gas passing through the exhaust purifier to the oil pan. A gas valve can control flow rate of the exhaust gas flowing in the gas passage. A controller controls an opening ratio of the gas valve depending on a temperature of oil inside the oil pan to maintain the temperature of the oil equal to or higher than a temperature at which the fuel in the oil pan is vaporized.

Abstract: A resource recovery method includes: feeding raw water to a first-stage raw water tank; supplying high-temperature vapor to a first-stage heat exchanger; performing heat exchange between the supplied high-temperature vapor and the raw water in the first-stage raw water tank, changing a portion of the water into vapor and supplying the changed vapor to a subsequent-stage heat exchanger; repeatedly performing the performing step for each of the raw water tanks sequentially in the order from a second state to a n-th stage; being feed to a crystallizer from the n-th stage raw water tank; detecting a turbidity of the raw water fed to the crystallizer from the n-th-stage raw water tank; and extracting crystals of valuable resources contained in the raw water fed to the crystallizer from the n-th-stage raw water tank when the turbidity of the raw water becomes a predetermined value.

Abstract: A method of predicting membrane fouling in a reverse osmosis process includes collecting information relative to the reverse osmosis process being performed over a predetermined period of time, the collected information including a process factor and a water quality factor, the process factor including a produced water flow rate; calculating a salt removal rate and a pressure drop based on the collected information; normalizing the produced water flow rate, the salt removal rate, and the pressure drop; generating a prediction equation using normalized values of the produced water flow rate, the salt removal rate, and the pressure drop values; and predicting membrane fouling through the generated prediction equation to determine a chemical cleaning time. Process and water quality factors are normalized to temperature and/or flow rate, and the prediction equation uses the normalized factors. Both short-term and long-term predictions are made for chemical cleaning time and membrane module replacement time.

Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.

Abstract: A device for preventing dilution of engine oil includes an oil pan in which oil for lubrication of the engine is recovered with fuel. An exhaust purifier is provided on a rear end of the engine and purifying exhaust gas. A gas passage can guide flow of exhaust gas passing through the exhaust purifier to the oil pan. A gas valve can control flow rate of the exhaust gas flowing in the gas passage. A controller controls an opening ratio of the gas valve depending on a temperature of oil inside the oil pan to maintain the temperature of the oil equal to or higher than a temperature at which the fuel in the oil pan is vaporized.

Abstract: The present disclosure relates to a device and a method for removing a carbon from an oxygen sensor. The device may include an oxygen sensor installed in a gas exhaust line of a vehicle to measure an oxygen content in an exhaust gas, a valve for transferring a high-pressure air flow to the oxygen sensor, a valve actuator for driving the valve, and a controller for controlling the valve actuator to open the valve when an abnormality occurs in the oxygen sensor. When the abnormality has occurred in the oxygen sensor, the valve for transferring the high-pressure air flow is opened, and a temperature of zirconia provided in the oxygen sensor is raised to remove a carbon deposited on the oxygen sensor.

Abstract: The present invention relates to a method for preparing a mutant strain having high producibility of phytoene and a mutant strain prepared thereby. More particularly, a Deinococcus radiodurans mutant strain, prepared by the method of the present invention, having high producibility of phytoene, does not retain an artificial antibiotic-resistant gene, although constructed by introducing a metabolism engineering method, and has high producibility of phytoene. Thus, the mutant strain prepared according to the method can find useful applications in the mass production of phytoene.

Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

Abstract: A wet etching apparatus includes a process bath having an internal space configured to receive an etchant and having a support unit, on which a wafer is disposed to be in contact with the etchant. A laser unit is disposed above the process bath and is configured to direct a laser beam to the wafer and to heat the wafer thereby. An etchant supply unit is configured to supply the etchant to the internal space of the process bath.

Abstract: A method for removing iodine by using Deinococcus radiodurans having a gold nanoparticle synthesis ability is disclosed. More particularly, a method for removing radioactive iodine by adsorbing radioactive iodine onto gold nanoparticles synthesized in cells of Deinococcus radiodurans is disclosed. A recombinant microorganism having an enhanced radioactive iodine removal ability according to the present invention may selectively remove radioactive iodine present in various types of solutions at a high efficiency of 99% or higher, and thus may be very effective in removing radioactive iodine generated in large-scale hospitals, industries, nuclear facility accidents, and the like.

Abstract: A chemical liquid supply apparatus includes a storage container configured to accommodate a chemical liquid for processing a semiconductor substrate, a chemical liquid supply pipe, a supply nozzle, and a grounding conductor. A conductive layer including a non-metallic conductive material is formed on an inner surface of the chemical liquid supply pipe. The supply nozzle includes a non-metallic conductive material. The conductive layer or the supply nozzle is electrically connected to the grounding conductor which is grounded to an outside of the pipe.

Abstract: A liquid chemical recycle system includes a buffer tank receiving a first liquid chemical from outside; a vacuum tank having a vacuum pump connected thereto and receiving the first liquid chemical from the buffer tank using the vacuum pump; and a recycle tank receiving the first liquid chemical from the vacuum tank and providing a second liquid chemical, which is a recycled first liquid chemical, to the outside, wherein the buffer tank includes a first injection portion, to which the first liquid chemical is provided, and a first supply portion, which provides the first liquid chemical to the vacuum tank, and a bottom of the buffer tank is downwardly inclined toward the first supply portion to prevent a material contained in the first liquid chemical from being accumulated in the buffer tank.

Abstract: A chemical liquid supply apparatus includes a nozzle unit including a nozzle arm and an injection nozzle mounted in an end of the nozzle arm, a chemical liquid supply unit including a first chemical liquid tank accommodating a first chemical liquid and a second chemical liquid tank accommodating a second chemical liquid, and supplying the first chemical liquid and the second chemical liquid to the nozzle unit, and a mixer unit provided in the nozzle unit and discharging a process fluid by mixing the first chemical liquid and the second chemical liquid, wherein the mixer unit includes an in-line mixer mixing the first chemical liquid and the second chemical liquid that are continually injected from the chemical liquid supply unit, and a mixer pipe extending from the in-line mixer to the injection nozzle.

Abstract: A resource recovery method includes: feeding raw water to a first-stage raw water tank; supplying high-temperature vapor to a first-stage heat exchanger; performing heat exchange between the supplied high-temperature vapor and the raw water in the first-stage raw water tank, changing a portion of the water into vapor and supplying the changed vapor to a subsequent-stage heat exchanger; repeatedly performing the performing step for each of the raw water tanks sequentially in the order from a second state to a n-th stage; being feed to a crystallizer from the n-th stage raw water tank; detecting a turbidity of the raw water fed to the crystallizer from the n-th-stage raw water tank; and extracting crystals of valuable resources contained in the raw water fed to the crystallizer from the n-th-stage raw water tank when the turbidity of the raw water becomes a predetermined value.

Abstract: A multi-stage submerged membrane distillation water treatment apparatus including: a plurality of raw water tanks arranged in multiple stages ranging from a first stage to an n-th stage and storing raw water, the raw water flowing sequentially from the first stage to the n-th stage; membrane distillation (MD) modules submerged in the respective raw water tanks and discharging a portion of the raw water as vapor; heat exchangers submerged in the respective raw water tanks and maintaining the raw water at a predetermined temperature by performing heat exchange between the raw water and vapor supplied from the respective previous-stage MD modules; a vapor generator generating and supplying high-temperature vapor to the first-stage heat exchanger; a condenser condensing vapor supplied by the n-th-stage MD module; and a raw water feeder feeding low-temperature raw water to the first-stage raw water tank via the condenser.

Abstract: A multi-stage submerged membrane distillation water treatment apparatus including: a plurality of raw water tanks arranged in multiple stages ranging from a first stage to an n-th stage and storing raw water, the raw water flowing sequentially from the first stage to the n-th stage; membrane distillation (MD) modules submerged in the respective raw water tanks and discharging a portion of the raw water as vapor; heat exchangers submerged in the respective raw water tanks and maintaining the raw water at a predetermined temperature by performing heat exchange between the raw water and vapor supplied from the respective previous-stage MD modules; a vapor generator generating and supplying high-temperature vapor to the first-stage heat exchanger; a condenser condensing vapor supplied by the n-th-stage MD module; and a raw water feeder feeding low-temperature raw water to the first-stage raw water tank via the condenser.