Abstract: Disclosed is a blankmask for EUV lithography, including a reflective film, a capping film and a phase shift film which are sequentially formed on a substrate. The phase shift film includes a first layer containing niobium (Nb) and chrome (Cr), and a second layer containing tantalum (Ta) and silicon (Si). In the first layer, the content of niobium (Nb) ranges from 20 to 50 at %, and the content of chrome (Cr) content ranges from 10 to 40 at %. The blankmask can implement an excellent resolution and NILS, and implement a low DtC.

Abstract: Disclosed is a blankmask for EUV lithography, including a reflective film, a capping film, an etch stop film, a phase shift film, and a hard mask film which are sequentially formed on a substrate. The phase shift film contains ruthenium (Ru), and the etch stop film contains chrome (Cr) and niobium (Nb). In the etch stop film, the content of niobium (Nb) ranges from 20 to 50 at %, and the content of chrome (Cr) ranges from 10 to 40 at %. The hard mask film contains tantalum (Ta) and oxygen (O). The content of tantalum (Ta) in the hard mask film is higher than or equal to 50 at %. With the blankmask, it is possible to implement a high resolution and NILS during wafer printing, and implement DtC.

Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: A glass stress test method includes breaking a glass, analyzing a shape of a crack of a broken portion of the glass in a plan view, finding a breakage origin of the glass based on the shape of the crack in the plan view, analyzing a cross-section of the breakage origin, and calculating a stress of the glass based on a cross-sectional analysis result of the breakage origin. The stress of the glass is calculated as a value proportional to a floor constant defined by a condition of a floor surface disposed when the glass is broken.

Abstract: A secondary battery includes an electrode assembly having a positive electrode provided with a positive electrode tab, a separator, and a negative electrode provided with a negative electrode tab, the positive electrode, the separator, and the negative electrode being wound, the electrode assembly having a core part at a center thereof; a can configured to receive the electrode assembly therein, the negative electrode tab being connected to the can; a cap assembly coupled to an opening of the can, the positive electrode tab being connected to the cap assembly; and a reinforcing member provided on an end of the separator exposed beyond the positive electrode or the negative electrode to prevent heat of the positive electrode tab or the negative electrode tab from being transferred to the separator.

Abstract: Provided is a method for recovering and reusing an active material from a positive electrode scrap.

Abstract: A blankmask for EUV lithography includes a substrate, a reflective layer, a capping layer, and a phase shift layer. The phase shift layer is made of a material containing ruthenium (Ru) and chromium (Cr), and a total content of ruthenium (Ru) and chromium (Cr) is 50 to 100 at %. The phase shift layer may further contain boron (B) or nitrogen (N). The phase shift layer of the present invention has a high relative reflectance (relative reflectance with respect to a reflectance of the reflective layer under the phase shift layer) with respect to a tantalum (Ta)-based phase shift layer and has a phase shift amount of 170 to 230°. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: An organic light emitting display device driven at a first driving frequency or a second driving frequency lower than the first driving frequency includes pixels coupled to first scan lines, second scan lines, and data lines, a first scan driver configured to supply scan signals to the first scan lines during a first period and a second period in one frame period, when the organic light emitting display device is driven at the second driving frequency, a second scan driver configured to supply scan signals to the second scan lines during the first period, when the organic light emitting display device is driven at the second driving frequency, and a data driver configured to supply a data signal to the data lines during the first period.

Abstract: A blankmask for extreme ultraviolet lithography includes a substrate, a reflective layer formed on the substrate, and a phase shift layer formed on the reflective layer. The phase shift layer contains niobium (Nb), and is made of a material containing one of tantalum (Ta), chromium (Cr), and ruthenium (Ru). A phase shift layer containing Nb and Ta has a relative reflectance of 5 to 20%, a phase shift layer containing Nb and Cr has a relative reflectance of 9 to 15%, and a phase shift layer containing Nb and Ru has a relative reflectance of 20% or more. The phase shift layer has a phase shift amount of 170 to 230°, and has a surface roughness of 0.5 nmRMS or less. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: Provided is a cluster node recommendation system. A method of controlling the cluster node recommendation system includes: inputting user selection information from a user, the user selection information including at least one of a cloud vendor, an Information Technology (IT) resource size, and a free resource size; checking resource requirements of a designated application; outputting a node configuration by inputting the input user selection information and the checked resource requirements of the application to an artificial intelligence module; verifying validity by arranging a container in which the application is executed, in the output node configuration; and providing a final node configuration in which validity verification is made, to the user.

Abstract: A battery mounting structure for a vehicle is provided to include a case having a first internal member that is disposed to be spaced parallel to an upper side of a lower panel of the case and a second internal member that is disposed perpendicular to the first internal member, and configured to accommodate a plurality of battery modules therein using the first internal member and the second internal member. An outer side member is provided in a shape protruding toward the outside on an outer side of the case. The battery modules are disposed in a stacking direction of battery cells that is parallel to a longitudinal direction of the first internal member.

Abstract: A stereoscopic image display apparatus that is capable of being efficiently aligned using a remotely controlled alignment function and a method of displaying a stereoscopic image using the same are disclosed.

Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: A stereoscopic image display apparatus that is capable of being efficiently aligned using a remotely controlled alignment function and a method of displaying a stereoscopic image using the same are disclosed.

Abstract: A stereoscopic image display apparatus that is capable of being efficiently aligned using a remotely controlled alignment function and a method of displaying a stereoscopic image using the same are disclosed.

Abstract: Disclosed are a thermoelectric generation apparatus, a heat generation apparatus for fuel storage tanks, and a waste heat recovery system. The thermoelectric generation apparatus according to an embodiment of this disclosure includes a first piping through which a fluid flows, a second piping through which a cooling medium of a lower temperature than the fluid flows so as to radiate the heat of the fluid, a plurality of first radiating fins having one side in contact with air of a lower temperature than the fluid so as to radiate the heat of the fluid and the other side in contact with the second piping, and a thermoelectric generation module provided between the first piping and the second piping to produce electricity through a temperature difference between the first piping and the second piping.

Abstract: A method of Mission Critical Push to Talk (MCPTT) service performed by a mobile terminal includes: generating, at the mobile terminal, a group call announcement for off-network Mission Critical Push to Talk (MCPTT) service, the group call announcement for off-network MCPTT service including information of a period of the group call announcement for off-network MCPTT service; controlling a transceiver to periodically transmit, to one or more mobile terminals, the group call announcement for off-network MCPTT service based on the period; in response to the transmitted group call announcement for off-network MCPTT service, receiving a response from the one or more mobile terminals; and establishing, based on the response from the one or more mobile terminals, a group call with the one or more mobile terminals by setting a direct wireless communication with the one or more mobile terminals.

Abstract: Disclosed are a thermoelectric generation apparatus, a heat generation apparatus for fuel storage tanks, and a waste heat recovery system. The thermoelectric generation apparatus according to an embodiment of this disclosure includes a first piping through which a fluid flows, a second piping through which a cooling medium of a lower temperature than the fluid flows so as to radiate the heat of the fluid, a plurality of first radiating fins having one side in contact with air of a lower temperature than the fluid so as to radiate the heat of the fluid and the other side in contact with the second piping, and a thermoelectric generation module provided between the first piping and the second piping to produce electricity through a temperature difference between the first piping and the second piping.

Abstract: A camera actuator having autofocusing and image stabilization functions includes a fixing part mounted on a portable terminal; a first coil mounted on the fixed part; a first carrier installed to be movable in the direction parallel with the lens within the fixing part; a magnet mounted on the first carrier in such a manner that the outside surface of the magnet faces the first coil; a second carrier installed to be movable in the direction of an optical axis of the lens within the first carrier and moving along with the first carrier; a second coil mounted on the second carrier, disposed within the magnet and generating a second driving force to the second carrier; a lens part including at least one lens, mounted on the second carrier, and moving along with the second carrier; and a hall sensor sensing the position of the first carrier.

Abstract: A stereoscopic image display apparatus that is capable of being efficiently aligned using a remotely controlled alignment function and a method of displaying a stereoscopic Image using the same are disclosed.