Patents by Inventor Yongxin Wang

Yongxin Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12230470
    Abstract: A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity may be provided adjacent to the region of second conductivity. The sensing element may include a section in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: February 18, 2025
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Rui-Ling Lai
  • Patent number: 12205792
    Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.
    Type: Grant
    Filed: October 20, 2022
    Date of Patent: January 21, 2025
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai, Kenichi Kanai
  • Patent number: 12205343
    Abstract: A computer-implemented method of detecting one or more objects in a driving environment located externally to a vehicle, and a vehicle imaging system configured to detect one or more objects. The computer-implemented method includes training a first neural network to detect objects in a color video stream, the first neural network having a plurality of mid-level color features at a plurality of scales, and training a second neural network, operatively coupled to color neural network and an infrared video stream, to match, at the plurality of scales, mid-level infrared features of the second neural network to mid-level color features of the first neural network. A pixel-level invisibility map is then generated from the color video stream and the infrared video stream by determining differences, at each of the plurality of scales, between mid-level color features at the first neural network and mid-level infrared features at the second infrared neural network, and coupling the result to a fusing function.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: January 21, 2025
    Assignee: George Mason University
    Inventors: Yongxin Wang, Duminda Wijesekera
  • Publication number: 20250018111
    Abstract: Disclosed is an intelligent control method for a refill-type screw insulin injection pump, including the following steps: starting the refill-type screw insulin injection pump, and filling prefabricated liquid insulin medicine into the refill injection mechanism; operating the key operation module to enable the intelligent control module to control the power device to work; when the primary telescopic screw mechanism extends to a limit, the sensor assembly transmits a signal to the intelligent control module, and the intelligent control module controls a rotational speed of the power device to be slowed down to reduce impact force of the primary telescopic screw mechanism; the refill injection mechanism performs the injection of liquid insulin medicine; and repeating the above steps, and refilling liquid insulin medicine to prepare for the next injection upon completion of the injection of liquid insulin medicine.
    Type: Application
    Filed: July 2, 2024
    Publication date: January 16, 2025
    Inventors: Leijie WANG, Hongmei zhang, Yongxin Wang, Jucai Fang, Ting Dong, Jun Yan, Dandan Zhang, Zhuobin Xie, Wuyi Ming
  • Publication number: 20250006456
    Abstract: An improved apparatus and method for enhancing an image, and more particularly an apparatus and method for enhancing an image through cross-talk cancellation in a multiple charged-particle beam inspection are disclosed. An improved method for enhancing an image includes acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system. The first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident. The method includes reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam. The method further includes generating a first image corresponding to first secondary electron beam after reduction.
    Type: Application
    Filed: July 29, 2024
    Publication date: January 2, 2025
    Inventors: Wei FANG, Lingling PU, Bo WANG, Zhonghua DONG, Yongxin WANG
  • Patent number: 12080513
    Abstract: An improved apparatus and method for enhancing an image, and more particularly an apparatus and method for enhancing an image through cross-talk cancellation in a multiple charged-particle beam inspection are disclosed. An improved method for enhancing an image includes acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system. The first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident. The method includes reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam. The method further includes generating a first image corresponding to first secondary electron beam after reduction.
    Type: Grant
    Filed: August 8, 2020
    Date of Patent: September 3, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Wei Fang, Lingling Pu, Bo Wang, Zhonghua Dong, Yongxin Wang
  • Patent number: 12064600
    Abstract: Disclosed is an acoustic method for precisely controlling and metering manual injection. The method includes: rotating a main housing to allow ratchet grooves to collide with ratchets on a ratchet wheel; obtaining collision voice and vibration signals by a switch sensor and a perception sensor; performing a Mel-frequency cepstral coefficient (MFCC) algorithm and classification with deep neural networks (DNN) on signals detected by a voice sensor, to output processed and recognized voice features; performing an empirical mode decomposition (EMD) algorithm and classification with cyclic delay diversity (CDD) on signals detected by a vibration sensor, to output processed and recognized vibration signals; and inputting the output voice features, the vibration signals, and reception time differences between the voice signals and the vibration signals into a support vector machine (SVM) classifier jointly for final recognition and classification, to recognize whether manual injection is correctly performed.
    Type: Grant
    Filed: March 15, 2023
    Date of Patent: August 20, 2024
    Assignee: Phray Technology Co., Ltd.
    Inventors: Yongxin Wang, Leijie Wang, Jucai Fang, Yanling Liu, Weidong Zhang, Wuyi Ming, Shengfei Zhang
  • Publication number: 20240235332
    Abstract: An in-vehicle power supply system includes multiple power pods each holding multiple power cells, and a mechanical transport system to exchange power cells. Each power cell includes a controller and a power converter with a coil wound around a through hole. Each power pod includes a controller and a power converter with a magnetic core having posts that pass through the through holes of the power cells. Multiple parts of the magnetic core can be opened to allow power cell exchange. The power cells held by each power pod are magnetically parallel to each other and coupled to the power pod by magnetic field coupling. Also disclosed is an electric motor incorporating such power cells as a part of its stator, with coils of the power cells disposed around parts of the stator's magnetic core to function as coils of the stator.
    Type: Application
    Filed: July 12, 2022
    Publication date: July 11, 2024
    Inventor: Yongxin WANG
  • Patent number: 12030772
    Abstract: The present disclosure describes an image forming element having a semiconductor chip with micro-electro-mechanical-system (MEMS) devices and voltage generators, each voltage generator being configured to generate a voltage used by one or more of the MEMS devices. A floating ground may be used to add a voltage to the voltage generated by the voltage generators. The semiconductor chip may include electrical connections, where each voltage generator is configured to provide the voltage to the one or more MEMS devices through the electrical connections. The MEMS devices may define a boundary in the semiconductor chip within which the MEMS devices, the voltage generators, and the electrical connections are located. Each MEMS device may generate an electrostatic field to manipulate an electron beamlet of a multi-beam charged particle microscope. The MEMS devices may be organized into groups based on a distance to a reference location (e.g., optical axis) in the semiconductor chip.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: July 9, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Rui-Ling Lai, Qian Zhang
  • Publication number: 20240186106
    Abstract: An improved method of performing a self-diagnosis of a charged particle inspection system is disclosed. An improved method comprises triggering a self-diagnosis based on output data of the charged particle inspection system; in response to the triggering of the self-diagnosis, receiving diagnostic data of a sub-system of the charged particle inspection system; identifying an issue associated with the output data based on the diagnostic data of the sub-system; and generating a control signal to adjust an operation parameter of the sub-system according to the identified issue.
    Type: Application
    Filed: March 3, 2022
    Publication date: June 6, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Yongxin WANG, Bruno LA FONTAINE
  • Patent number: 11942304
    Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: March 26, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
  • Publication number: 20240079204
    Abstract: A method of detecting charged particles may include detecting beam intensity as a primary charged particle beam moves along a first direction; acquiring a secondary beam spot projection pattern as the primary charged particle beam moves along a second direction; and determining a parameter of a secondary beam spot based on the acquired secondary beam spot projection pattern. A method of compensating for beam spot changes on a detector may include acquiring a beam spot projection pattern on the detector, determining a change of the beam spot projection pattern, and adjusting a parameter of a detector cell of the detector based on the change. Another method may be provided for forming virtual apertures with respect to detector cells of a detector.
    Type: Application
    Filed: December 8, 2021
    Publication date: March 7, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Yongxin WANG, Oleg KRUPIN, Weiming REN, Xuerang HU, Xuedong LIU
  • Patent number: 11860977
    Abstract: Techniques for performing visual clustering with a hierarchical graph neural network framework including a joint linkage prediction and density estimation graph model are described. Embodiments herein recurrently run the joint linkage prediction and density estimation graph model to generate intermediate clusters in multiple iterations (e.g., until convergence) to obtain a final clustering result. In certain embodiments, for each iteration, the input graph contains nodes that are merged from nodes assigned to intermediate clusters from the previous iteration. By using a small and fixed bandwidth k in each iteration, embodiments herein alleviate the sensitivity to the k selection for different clustering applications. Certain embodiments herein remove the tuning of a different k (e.g., k-bandwidth) for k-nearest neighbor graph construction over different clustering applications.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: January 2, 2024
    Assignee: Amazon Technologies, Inc.
    Inventors: Yifan Xing, Tianjun Xiao, Tong He, Yongxin Wang, Yuanjun Xiong, Wei Xia, David Paul Wipf, Zheng Zhang, Stefano Soatto
  • Patent number: 11862427
    Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
    Type: Grant
    Filed: September 13, 2022
    Date of Patent: January 2, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
  • Publication number: 20230347052
    Abstract: Disclosed is an acoustic method for precisely controlling and metering manual injection. The method includes: rotating a main housing to allow ratchet grooves to collide with ratchets on a ratchet wheel; obtaining collision voice and vibration signals by a switch sensor and a perception sensor; performing a Mel-frequency cepstral coefficient (MFCC) algorithm and classification with deep neural networks (DNN) on signals detected by a voice sensor, to output processed and recognized voice features; performing an empirical mode decomposition (EMD) algorithm and classification with cyclic delay diversity (CDD) on signals detected by a vibration sensor, to output processed and recognized vibration signals; and inputting the output voice features, the vibration signals, and reception time differences between the voice signals and the vibration signals into a support vector machine (SVM) classifier jointly for final recognition and classification, to recognize whether manual injection is correctly performed.
    Type: Application
    Filed: March 15, 2023
    Publication date: November 2, 2023
    Inventors: Yongxin WANG, Leijie WANG, Jucai FANG, Yanling LIU, Weidong ZHANG, Wuyi MING, Shengfei ZHANG
  • Publication number: 20230331116
    Abstract: An in-vehicle power supply system includes multiple power cells of identical mechanical size, multiple power pods each holding multiple power cells, and a mechanical transport system to move and exchange power cells with pumps at power cell exchange and charging stations. Each power cell and each power pod includes a control unit and a power converter with a magnetic core. The power cells held by a power pod are arranged parallel to each other and coupled to the power pod by magnetic field coupling. Power is transferred between the power pod and the power cells bidirectionally using magnetic field of different frequencies, and data and commands are communicated between them using magnetic field of another different frequency. Load balancing among power cells within a power pod and among power pods can be achieved. The structure of the power cell exchange and charging stations is also described.
    Type: Application
    Filed: June 22, 2023
    Publication date: October 19, 2023
    Inventor: Yongxin Wang
  • Publication number: 20230335372
    Abstract: A charged particle beam detector may include a circuit with a storage cell configured to receive a signal representing an output of a sensing element; a storage cell multiplexer configured to selectively transmit the signal representing the output of the sensing element to the storage cell; a threshold detector configured to compare the signal representing the output of the sensing element to a threshold; and a converter configured to perform signal processing on a signal transmitted from the storage cell.
    Type: Application
    Filed: July 6, 2021
    Publication date: October 19, 2023
    Applicant: ASML Netherlands B.V.
    Inventor: Yongxin WANG
  • Patent number: 11784024
    Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another, preferably by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 10, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Joe Wang, Yongxin Wang, Zhongwei Chen, Xuerang Hu
  • Patent number: 11718198
    Abstract: An in-vehicle power supply system includes multiple power cells of identical mechanical size, multiple power pods each holding multiple power cells, and a mechanical transport system to move and exchange power cells with pumps at power cell exchange and charging stations. Each power cell and each power pod includes a control unit and a power converter with a magnetic core. The power cells held by a power pod are arranged parallel to each other and coupled to the power pod by magnetic field coupling. Power is transferred between the power pod and the power cells bidirectionally using magnetic field of different frequencies, and data and commands are communicated between them using magnetic field of another different frequency. Load balancing among power cells within a power pod and among power pods can be achieved. The structure of the power cell exchange and charging stations is also described.
    Type: Grant
    Filed: February 6, 2021
    Date of Patent: August 8, 2023
    Inventor: Yongxin Wang
  • Patent number: 11715619
    Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: August 1, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Weiming Ren, Zhonghua Dong, Zhongwei Chen