Patents by Inventor Yongxin Wang
Yongxin Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230215685Abstract: A detector includes a plurality of sensing elements, section circuitry that communicatively couples a first set of sensing elements to an input of first signal processing circuitry, and a switch network that connects sets of sensing elements. Inter-element switches may connect adjacent sensing elements, including those in a diagonal direction. An output bus may be connected to each sensing element of the first set by a switching element. There may be a common output (pickup point) arranged at one sensing element that is configured to output signals from the first set. Various switching and wiring schemes are proposed. For example, the common output may be directly connected to the switch network. A switch may be provided between the output bus and first signal processing circuitry. A switch may be provided between the switch network and the first signal processing circuitry.Type: ApplicationFiled: May 25, 2021Publication date: July 6, 2023Applicant: ASML Netherlands B.V.Inventor: Yongxin WANG
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Publication number: 20230178328Abstract: An apparatus includes a first charged particle beam manipulator positioned in a first layer configured to influence a charged particle beam and a second charged particle beam manipulator positioned in a second layer configured to influence the charged particle beam. The first and second charged particle beam manipulators may each include a plurality of electrodes having a first set of opposing electrodes and a second set of opposing electrodes. A first driver system electrically connected to the first set may be configured to provide a plurality of discrete output states to the first set. A second driver system electrically connected to the second set may be configured to provide a plurality of discrete output states to the second set. The first and second charged-particle beam manipulators may each comprise a plurality of segments; and a controller having circuitry configured to individually control operation of each of the plurality of segments.Type: ApplicationFiled: March 18, 2021Publication date: June 8, 2023Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Zhonghua DONG, Xiaoyu JI, Shahedul HOQUE, Weiming REN, Xuedong LIU, Guofan YE, Kuo-Chin CHIEN
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Publication number: 20230170179Abstract: A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.Type: ApplicationFiled: April 23, 2021Publication date: June 1, 2023Applicant: ASML Netherlands B.V.Inventor: Yongxin WANG
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Publication number: 20230137186Abstract: Some disclosed embodiments include an electron detector comprising: a first semiconductor layer having a first portion and a second portion; a second semiconductor layer; a third semiconductor layer; a PIN region formed by the first, second, and third semiconductor layers; a power supply configured to apply a reverse bias between the first and the third semiconductor layers; and a depletion region formed within the PIN region by the reverse bias and configured to generate a detector signal based on a first subset of the plurality of signal electrons captured within the depletion region, wherein the second portion of the first semiconductor layer is not depleted and is configured to provide an energy barrier to block a second subset of the plurality of signal electrons and to allow the first subset of the plurality of signal electrons to pass through to reach the depletion region.Type: ApplicationFiled: April 1, 2021Publication date: May 4, 2023Applicant: ASML Netherlands B.V.Inventors: Weiming REN, Zhong-wei CHEN, Yongxin WANG
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Publication number: 20230123152Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.Type: ApplicationFiled: October 20, 2022Publication date: April 20, 2023Applicant: ASML NETHERLANDS B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI, Kenichi KANAI
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Publication number: 20230112447Abstract: Systems and methods of observing a sample using an electron beam apparatus are disclosed. The electron beam apparatus comprises an electron source configured to generate a primary electron beam along a primary optical axis, and a first electron detector having a first detection layer substantially parallel to the primary optical axis and configured to detect a first portion of a plurality of signal electrons generated from a probe spot on a sample. The method may comprise generating a plurality of signal electrons and detecting the signal electrons using the first electron detector substantially parallel to the primary optical axis of the primary electron beam. A method of configuring an electrostatic element or a magnetic element to detect backscattered electrons may include disposing an electron detector on an inner surface of the electrostatic or magnetic element and depositing a conducting layer on the inner surface of the electron detector.Type: ApplicationFiled: March 9, 2021Publication date: April 13, 2023Applicant: ASML Netherlands B.V.Inventors: Weiming REN, Yongxin WANG
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Patent number: 11594395Abstract: Detectors and detection systems are disclosed. According to certain embodiments, a detector comprises a substrate comprising a plurality of sensing elements including a first sensing element and a second sensing element, wherein at least the first sensing element is formed in a triangular shape. The detector may include a switching region configured to connect the first sensing 5 element and the second sensing element. There may also be provided a plurality of sections including a first section connecting a first plurality of sensing elements to a first output and a second section connecting a second plurality of sensing elements to a second output. The section may be provided in a hexagonal shape.Type: GrantFiled: March 21, 2019Date of Patent: February 28, 2023Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong
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Publication number: 20230005707Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: ApplicationFiled: September 13, 2022Publication date: January 5, 2023Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI
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Publication number: 20220415608Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: ApplicationFiled: July 1, 2022Publication date: December 29, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI
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Publication number: 20220393057Abstract: A charged particle beam system may include a detector. A package for a detector may have a package body that includes two sets of pins, each of the sets of pins including two pins. Each pin of the sets of pins may be configured to be connected to one of two terminals of a sensing element. Pins of different sets may be configured to be connected to a different one of the two terminals of the diode. The sets of pins may be arranged with a symmetry such that magnetic fields generated when current passes through the sets of pins is reduced due to the symmetry.Type: ApplicationFiled: October 30, 2020Publication date: December 8, 2022Applicant: ASML NETHERLANDS B.V.Inventor: Yongxin WANG
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Publication number: 20220377111Abstract: The disclosed technology teaches a method for evaluating user compliance with an organization's security policies, formulating a user confidence or risk score, comprising scoring for each user a sum of alert weights, categorized by severity, and generated over time. Each contribution to an alert weight is generated due to an activity by the user that the organization's security policies treat as risky. Alert weights, over time, are subject to a decay factor that attenuates the alert weights as time passes. Also disclosed is reporting the user confidence score, comprising causing display of a time series of the user confidence or risk scores over a predetermined time and/or a current user confidence or risk score and/or at least some details of the activity by the user that contributed to the alert weights over time.Type: ApplicationFiled: April 18, 2022Publication date: November 24, 2022Applicant: Netskope, Inc.Inventors: Yihua LIAO, Yi ZHANG, Dipak PATIL, Prathamesh DESHPANDE, Yongxin WANG, Siying YANG
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Publication number: 20220375716Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.Type: ApplicationFiled: April 4, 2022Publication date: November 24, 2022Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Weiming REN, Zhonghua DONG, Zhongwei CHEN
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Patent number: 11508547Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.Type: GrantFiled: June 7, 2019Date of Patent: November 22, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai, Kenichi Kanai
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Patent number: 11481709Abstract: The disclosed technology teaches a method of calibrating a user confidence or risk score that expresses evaluation of user behavior that was not compliant with an organization's security policies, including configuring components of the user confidence or risk score, comprising configuring categorical alert weights, categorized by severity, responsive to administrator controls, for alerts to be generated due to an activity by the user that the organization's security policies treat as risky, and configuring a decay factor that attenuates the alert weights as time passes, responsive to an administrator sensitivity control. The disclosed method includes causing display of resulting user behavior evaluation examples, based on activity examples for user examples, comprising causing display of a time series of the user confidence or risk scores for the activity examples for the user examples, and a resulting user confidence or risk score for the user examples.Type: GrantFiled: May 20, 2021Date of Patent: October 25, 2022Assignee: Netskope, Inc.Inventors: Yihua Liao, Yi Zhang, Dipak Patil, Prathamesh Deshpande, Yongxin Wang, Siying Yang
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Patent number: 11476085Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: September 14, 2018Date of Patent: October 18, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Publication number: 20220301811Abstract: An improved apparatus and method for enhancing an image, and more particularly an apparatus and method for enhancing an image through cross-talk cancellation in a multiple charged-particle beam inspection are disclosed. An improved method for enhancing an image includes acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system. The first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident. The method includes reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam. The method further includes generating a first image corresponding to first secondary electron beam after reduction.Type: ApplicationFiled: August 20, 2020Publication date: September 22, 2022Inventors: Wei FANG, Lingling PU, Bo WANG, Zhonghua DONG, Yongxin WANG
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Patent number: 11444951Abstract: The disclosed technology teaches a method of reducing false detection of anomalous user behavior on a computer network, including forming groups from identity and access management (IAM) properties and assigning the users into initially assigned groups based on respective IAM properties, and recording individual user behavior in a statistical profile, including application usage frequency. The method also includes dynamically assigning a user with a realigned group, different from the initial assigned group, based on comparing the recorded user behavior, with user behavior in statistical profiles of the users in the groups, evaluating and reporting anomalous events among ongoing behavior of the individual user based on deviations from a statistical profile of the realigned group. The method utilizes common app usage for forming the groups, in some cases.Type: GrantFiled: May 20, 2021Date of Patent: September 13, 2022Assignee: Netskope, Inc.Inventors: Dipak Patil, Yi Zhang, Yihua Liao, Prathamesh Deshpande, Yongxin Wang, Siying Yang
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Patent number: 11433638Abstract: Provided are garments that comprise thermally-conductive materials, the materials comprising a heat-collecting coating disposed on a fibrous base material having a thermally-conductive additive dispersed within. Also provided are methods of fabricating thermally-conductive garments.Type: GrantFiled: December 14, 2018Date of Patent: September 6, 2022Assignee: The H.D. Lee Company, Inc.Inventors: Dhruv Agarwal, Yongxin Wang, Josue Monge
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Patent number: 11430629Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: September 14, 2018Date of Patent: August 30, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Publication number: 20220246391Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another, preferably by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.Type: ApplicationFiled: January 10, 2022Publication date: August 4, 2022Applicant: ASML Netherlands B.V.Inventors: Joe WANG, Yongxin WANG, Zhongwei CHEN, Xuerang HU