Abstract: A power supply device for supplying power to a load by combining a secondary battery and a capacitor includes a switching element which switches the supply of power to the load from the capacitor, a DC-DC converter which enables a voltage of the capacitor to be stepped up and supplied to the load and a control unit which enables power to be supplied to the load by pulse-controlling the switching element, controlling the DC-DC converter to output a pulse current alternately with the switching element and combining the alternately output pulse currents if the voltage of the capacitor drops below a minimum voltage capable of driving the load.

Abstract: A power supply device for supplying power to a load by combining a secondary battery and a capacitor connected in parallel to the secondary battery includes an insulation type DC-DC converter with a primary coil connected in parallel to the secondary battery and configured to accumulate energy by a current supplied from the secondary battery and a secondary coil connected in series to the capacitor and configured such that an induction current flows therein by the accumulated energy from the primary coil.

Abstract: A power supply device for supplying power to a load by combining a secondary battery and a capacitor includes a bypass switch which enables power to be directly supplied to the load from the capacitor by being switched to a connected state when a voltage of the capacitor is a voltage capable of driving the load, and a first DC-DC converter which enables the voltage of the capacitor to be stepped up and supplied to the load when the voltage of the capacitor drops below a minimum voltage capable of driving the load.

Abstract: An object is to enable erasure correction even at the time of a degeneration operation and reduce the number of necessary parallel media through dynamic setting of degree of redundancy. A parallel data encoding/decoding system performs parallel data transmissions using a plurality of lanes from an encoder to a decoder. The encoder encodes products of elements of an encoding vector M of symbols of each lane and a state vector U indicating validity of the symbols, and transmits the state vector U along with a transmission vector Y obtained through the encoding. The decoder decodes a subset Msub constituted of valid elements of the encoding vector M using a received reception vector Y?, the received state vector U, and an erasure vector E indicating whether each element of the transmission vector has been erased in a transmission/reception section.

Abstract: A continuously variable transmission includes a first gear shift mechanism for changing continuously a speed ratio of drive power input from a prime mover, a second gear shift mechanism for changing continuously a speed ratio of drive power input from the prime mover, and a planetary gear mechanism to which drive power output from the first gear shift mechanism and that output from the second gear shift mechanism are input and from which combined drive power is output to an output shaft. The planetary gear mechanism includes a sun gear, a planetary carrier and a ring gear. An output from the first gear shift mechanism and that from the second gear shift mechanism are respectively input to any two of the sun gear, the planetary carrier and the ring gear and the remaining one is coupled to the output shaft.

Abstract: Such a film forming method is provided that can prevent peeling of surface films including a resist film from a substrate during immersion exposure. The film forming method includes the steps of forming surface films including a resist film and a protective film covering the resist film over a surface of a wafer, and forming an edge cap film by supplying an edge cap film material to at least a boundary portion including a periphery of the wafer and peripheries of the surface films such as the protective film.

Abstract: An accessory drive mechanism for a hybrid vehicle, capable of operating accessories irrespective of the travel state of the vehicle, and also capable of smoothly switching between the power which is transmitted from the traveling motor side and the power which is transmitted from the accessory drive motor side. The accessory drive mechanism is provided with a drive power take-off mechanism (20) for taking out the power from a travel drive system (D). An accessory (11) is connected to the drive power take-off mechanism (20). A first one-way clutch (C1) which can transmit the power only to the accessory (11) side is disposed between the drive power take-off mechanism (20) and the accessory (11). An accessory driving motor (an auxiliary motor (12e)) is connected to the side of the accessory (11) which is on the opposite side from the drive power take-off mechanism (20).

Abstract: A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates. The system includes a first automated substrate transfer line configured to transfer the target substrates among a plurality of process sections for respectively performing processes on the target substrates, and a second automated substrate transfer line of a cyclical type dedicated to a plurality of process apparatuses of a photolithography process section, which are configured to perform a series of processes in the photolithography sequence, the second automated substrate transfer line being located relative to the first automated substrate transfer line so as for the target substrates to be transferred therebetween.

Abstract: A proposition is to provide a power transmitting mechanism for a hybrid vehicle having improved energy utilization efficiency. A power transmitting mechanism for the hybrid vehicle using powers of the engine and the motor/generator in a combined manner, the mechanism includes an engine drive shaft coupled to an engine output shaft via a main clutch; a motor output shaft of a motor/generator rotatably supported separately from the engine drive shaft; a drive shaft brake releasing/fixing the engine drive shaft; a motor-brake releasing/fixing the motor output shaft; and a planetary gear mechanism.

Abstract: A continuously variable transmission includes a first gear shift mechanism for changing continuously a speed ratio of drive power input from a prime mover, a second gear shift mechanism for changing continuously a speed ratio of drive power input from the prime mover, and a planetary gear mechanism to which drive power output from the first gear shift mechanism and that output from the second gear shift mechanism are input and from which combined drive power is output to an output shaft. The planetary gear mechanism includes a sun gear, a planetary carrier and a ring gear. An output from the first gear shift mechanism and that from the second gear shift mechanism are respectively input to any two of the sun gear, the planetary carrier and the ring gear and the remaining one is coupled to the output shaft.

Abstract: A proposition is to provide a power transmission mechanism for parallel hybrid vehicle that is capable of smoothly combining/separating input/output powers of a motor and an engine, and is applicable to a large hybrid vehicle by ensuring sufficient strength of a mechanism for combining and separating the input/output powers.

Abstract: A PEB unit has a first heat plate and a second heat plate. After an exposure process for a resist film for EUV on a wafer and before a development process, the PEB unit heats the wafer through the first heat plate at a first heating temperature. A heating time through the first heat plate is not less than 10 seconds and not more than 30 seconds. Thereafter, the PEB unit heats the wafer through the second heat plate at a second heating temperature lower than the first heating temperature. A temperature difference between the first heating temperature and the second heating temperature is not less than 20° C. and not more than 60° C.

Abstract: A photoresist coating and developing apparatus 1 includes a photoresist film forming unit that forms a photoresist film on a substrate; a heat treatment unit that heats the substrate on which the photoresist film is formed by the photoresist film forming unit; a cooling unit that cools the substrate, on which the photoresist film is formed and which is heated by the heat treatment unit, to normal temperature; a heating unit 61 that heats the substrate, which is cooled to normal temperature by the cooling unit, to a predetermined temperature; a load-lock chamber L1 that unloads the substrate under depressurized atmosphere to expose the photoresist film; and a transfer device 62 that transfers the substrate from the heating unit 61 to the load-lock chamber L1.

Abstract: An accessory drive mechanism for a hybrid vehicle, capable of operating accessories irrespective of the travel state of the vehicle, and also capable of smoothly switching between the power which is transmitted from the traveling motor side and the power which is transmitted from the accessory drive motor side. The accessory drive mechanism is provided with a drive power take-off mechanism (20) for taking out the power from a travel drive system (D). An accessory (11) is connected to the drive power take-off mechanism (20). A first one-way clutch (C1) which can transmit the power only to the accessory (11) side is disposed between the drive power take-off mechanism (20) and the accessory (11). An accessory driving motor (an auxiliary motor (12e)) is connected to the side of the accessory (11) which is on the opposite side from the drive power take-off mechanism (20).

Abstract: A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates. The system includes a first automated substrate transfer line configured to transfer the target substrates among a plurality of process sections for respectively performing processes on the target substrates, and a second automated substrate transfer line of a cyclical type dedicated to a plurality of process apparatuses of a photolithography process section, which are configured to perform a series of processes in the photolithography sequence, the second automated substrate transfer line being located relative to the first automated substrate transfer line so as for the target substrates to be transferred therebetween.

Abstract: A substrate processing system (100) includes a first automated substrate transfer line or main transfer line (20) configured to transfer wafers (W) over the entire system and to transfer wafers to and from respective process sections, and a second automated substrate transfer line or auxiliary transfer line (30) configured to transfer wafers (W) inside a photolithography process section (1a). The auxiliary transfer line (30) is disposed as a transfer mechanism independent of the main transfer line (20). An OHT (31) is configured to travel around on the auxiliary transfer line (30) having a loop shape, so as to transfer wafers (W) to and from and among the respective process apparatuses in the photolithography process section (1a).

Abstract: A proposition is to provide a power transmission mechanism for parallel hybrid vehicle that is capable of smoothly combining/separating input/output powers of a motor and an engine, and is applicable to a large hybrid vehicle by ensuring sufficient strength of a mechanism for combining and separating the input/output powers.

Abstract: A proposition is to provide a power transmitting mechanism for a hybrid vehicle having improved energy utilization efficiency. A power transmitting mechanism for the hybrid vehicle using powers of the engine and the motor/generator in a combined manner, the mechanism includes an engine drive shaft coupled to an engine output shaft via a main clutch; a motor output shaft of a motor/generator rotatably supported separately from the engine drive shaft; a drive shaft brake releasing/fixing the engine drive shaft; a motor-brake releasing/fixing the motor output shaft; and a planetary gear mechanism.

Abstract: A pattern forming method includes forming a resist film or sequentially forming a resist film and a protection film in this order on a surface of a substrate; then, performing immersion light exposure that includes immersing the resist film or the resist film and the protection film formed on the substrate in a liquid during light exposure, thereby forming a predetermined light exposure pattern on the resist film; and performing a development process of the light exposure pattern by use of a development liquid, thereby forming a predetermined resist pattern. After the immersion light exposure and before the development process, the method further includes performing a hydrophilic process of turning a surface of the resist film or the protection film serving as a substrate surface into a hydrophilic state to allow the substrate surface to be wetted with the development liquid overall.

Abstract: In the present invention, patterning for the first time is performed on a film to be worked above the front surface of a substrate, and the actual dimension of the pattern formed by the patterning for the first time is measured. Based on the dimension measurement result of the patterning or the first time, the condition of patterning for the second time is then set. In this event, the condition of the patterning for the second time is set so that a difference between the dimension of the patterning for the first time and its target dimension is equal to a difference between the dimension of the patterning for the second time and its target dimension. Thereafter, the patterning for the second time is performed under the set patterning condition.