Abstract: A method of epitaxially growing a SiC film on a Si substrate, including:

Abstract: A three-dimensional shape measuring apparatus has a point light source for radiating illumination light diverging in the shape of an elliptical cone, a slit illumination system for imaging the illumination light into the shape of a slit, an objective system for imaging the illumination light toward a measurement object and for imaging reflected light traveling back from the measurement object, a beam splitter for separating the optical paths of the illumination light entering the objective system and of the reflected light exiting from the objective system, and a sensor for detecting the amount of the reflected light exiting from the objective system.

Abstract: An object of the present invention is to provide a method for accurately measuring a three-dimensional shape of a measuring subject independent of the surface shape of the measuring subject, and another object thereof is to shorten the time from the measurements of the measuring subject until three-dimensional shape data is obtained so as to carry out efficient measuring operations. In a three-dimensional measuring system 1 that measures a three-dimensional shape of a measuring subject, two three-dimensional measuring devices 10, 20 are placed. The three-dimensional measuring device 10 measures a measuring subject placed in a measuring space 3 by allowing a laser slit light L1 in a longitudinal direction to scan in a lateral direction. Moreover, the three-dimensional measuring device 20 measures the measuring subject placed in a measuring space 3 by allowing the laser slit light L1 in a lateral direction to scan in a longitudinal direction.

Abstract: The apparatus sets a standard surface or a standard line with respect to three-dimensional shape data comprising polygons representing an object in a space where the three-dimensional shape data exist, extracts from the three-dimensional shape data polygons having inclination angles with respect to the set standard surface or the set standard line in a predetermined range, and set each collection of the extracted polygons as an extracted surface. Further, the apparatus displays each of the collection of extracted polygons as a surface on a display with putting a color or pattern to each of the collection of the polygons extracted correspondingly to one of the set inclination angles that is different from those of other collections of polygons.

Abstract: A method and apparatus for reducing three-dimensional shape data, includes calculating estimation values for portions to be deformed by converging two or more vertices of a polygon model, and reducing the number of data for the polygon model by converging two or more vertices of the polygon model when the estimation values are equal to or below the predetermined permissible value. Estimation values for surfaces to be deformed by shrinking edges or surfaces are calculated based on distances between the respective surfaces and all the original vertices involved in the surface deformation. Before each data reduction, the portion having been involved in all the previous data reductions is defined as a reduction prohibition area, and a succeeding data reduction is applied to a portion other than the reduction prohibition area.

Abstract: A process for the production of a coal-water mixture, which comprises dry-pulverizing coal under supply of hot air to form pulverized coal in which the proportion of particles having a particle size smaller than 200 .mu.m is at least 90%, in which the proportion of particles having a particle size smaller than 10 .mu.m is 10 to 60%, and making the pulverized coal and the hot air sucked in a mixed-air water jet stream.