Abstract: A control system for a liquid infusion apparatus comprises a plurality of liquid infusion devices, each having a common connector of liquid infusion device side for an electric power supply line and a communication line, a plurality of racks stacked one another, each for receiving each of the liquid infusion devices, a plurality of common connectors of rack side, each mounted on each of the racks a base unit, and a connector provided on the base unit so as to connect an electric power supply line and a communication line to the connectors of lack side. Each of the common connectors of rack side is connected to each of the common connectors of liquid infusion device side, when each of the liquid infusion devices is inserted into each of the respective racks.

Abstract: An automatic icemaker of the present invention includes a control box, an ice-making tray supporting frame rotatably supported and rotated by the control box, at least one ice-making tray rotatably supported by the ice-making tray supporting frame, a rotation limiter fixed to the ice-making tray supporting frame and limiting the rotation of the ice-making tray, a stopper fixed to the control box, and a projection provided to the ice-making tray. Irregularities are provided to at least one of the contact surfaces of the stopper and projection.

Abstract: A method of forming a low-K dielectric film, comprises the steps of placing a substrate carrying thereon a low-K dielectric film on a stage, heating the low-K dielectric film on the stage, processing the low-K dielectric film by plasma of a processing gas containing a hydrogen gas, the plasma being excited while supplying the processing gas over the low-K dielectric film, wherein the plasma is excited within 90 seconds after placing the substrate upon the stage.

Abstract: A roller pump comprises a pump housing having a cylindrical inner surface, a rotor fixed to a drive shaft placed at the central portion of the pump housing, rollers provided around the rotor and a driver for driving the drive shaft through a reduction gear. The rollers press an elastic tube installed between the rollers and the inner surface of the pump housing to transfer a liquid in the elastic tube by rotation of the rotor. The pump housing and the reduction gear are integrated into one body and an output shaft of the reduction gear is fixed to the drive shaft of the rotor. A stepping motor is used as the driver. A part of the inner surface of the pump housing is composed of a semicircle, another part of the inner surface is composed of a partial circle of which center is shifted from the center of the semicircle.

Abstract: An extrusion-type liquid delivery apparatus according to the present invention comprises: a plunger mover to move a plunger; a plunger mover driver to move the plunger mover; a pair of hooks rotatably mounted on the plunger mover with the bent ends projecting from the plunger mover, and having slopes at the bent ends; a spring to close the bent ends of the pair of hooks by spring force; and a clamp to block a liquid delivery channel connected to a container.

Abstract: A movable-body linear drive assembly comprises: a drive source; a drive pulley connected to the drive source; an idler pulley which is disposed such that the idler pulley is spaced from the drive pulley by a distance; a belt which is wound around the drive pulley and the idler pulley, and which has a detection part; a movable body mounted on the belt; and at least one detector which detects the detection part of the belt.

Abstract: A process gas constituted by a compound having a ring structure in its molecules is introduced into a chamber (12). In the meantime, an excitation gas such as argon, etc. is excited by an activator (34) and introduced into the chamber (12), so that the process gas is excited. The excited process gas is deposited on a process target substrate (19), forming a porous low dielectric constant film having ring structures in the film.

Abstract: 1,3,5-trimethyl-1,3,5-trivinylcyclotrisiloxane (V3D3) and isopropyl alcohol (IPA) are supplied to a chamber 12, and they are excited by plasma to generate molecular active species of these compounds. These active species are reacted in the vicinity of the surface of a substrate to form an insulating thin film with a thickness of, for example, 50 nm containing IPA molecules. Moreover, the IPA molecules contained in the thin film are selectively desorbed by plasma process using ammonium gas to form uniform holes in the thickness direction. The film forming process and the hole forming process are repeatedly executed by a plurality of times, thereby making it possible to obtain an insulating film with a predetermined thickness and holes formed uniformly.

Abstract: A roller pump comprises a pump housing having a cylindrical inner surface, a rotor fixed to a drive shaft placed at the central portion of the pump housing, rollers provided around the rotor and a driver for driving the drive shaft through a reduction gear. The rollers press an elastic tube installed between the rollers and the inner surface of the pump housing to transfer a liquid in the elastic tube by rotation of the rotor. The pump housing and the reduction gear are integrated into one body and an output shaft of the reduction gear is fixed to the drive shaft of the rotor. A stepping motor is used as the driver. A part of the inner surface of the pump housing is composed of a semicircle, another part of the inner surface is composed of a partial circle of which center is shifted from the center of the semicircle.