Abstract: A sputtering apparatus for producing a thin film with use of a laser beam is disclosed. The sputtering apparatus comprises a vacuum chamber, a target and a substrate disposed inside the vacuum chamber, a laser beam-projecting unit, a beam-shape adjusting unit, an optical scanning unit, and a light-converging unit. The optical scanning unit comprises a mirror which rotates to allow the laser beam to scan the target, and the angular speed thereof is regulated so as to move the spot of the laser beam at a fixed speed on the target. The beam-shape adjusting unit or the light-converging unit moves along its optical axis in synchronization with the movement of the mirror of the optical scanning unit, thereby keeping the spot of the laser beam at a predetermined size.

Abstract: A laser sputtering apparatus has a vacuum chamber, a target holder installed in the vacuum chamber, arranged to oppose the target in the vacuum chamber, a substrate mounted on the substrate support, and a laser beam source which emits laser beams onto the target through a window provided in the vacuum chamber wall, providing a laser sputtering apparatus that supplies dielectric thin films with a high permittivity and a high withstanding voltage.

Abstract: A sputtering apparatus includes: a discharge chamber having four curved side surfaces protruding toward a center of the chamber to form a discharge space surrounded by the side surfaces therein; a gas inlet and a gas outlet each formed at the chamber; cylindrical cathodes; plural permanent magnets arranged outside each of the side surfaces of the chamber; a sputtering electrode arranged at the space surrounded by the curved side surfaces; and a bed for holding a substrate, which is arranged in the chamber and opposed to the sputtering electrode. Each of the cathodes is arranged between the adjacent curved side surfaces of the chamber. A negative electric potential is applied to each of the cathodes. The adjacent permanent magnets have different magnetic poles to each other. The surface of substrate held by the bed is parallel to the opposed surface of the sputtering electrode, and the surfaces of the substrate and the electrode are arranged crossing the curved side surfaces.

Abstract: An ion source comprising a discharge chamber that has a gas inlet and an ion exit, two pairs of cathodes that are disposed on the side surfaces of said discharge chamber, two pairs of anodes, each anode being disposed in a space between the adjacent cathodes, and a pair of solenoids that are wrapped around one pair of cathodes so as to be mutually repulsive magnetically, wherein there is no magnetic field in the central axis of the other pair of cathodes around which no solenoids are wrapped.

Abstract: A fibrous bone filler having an excellent biocompatibility. The bone filler comprises fibers containing hydroxyl apatite. The hydroxyl apatite is "intact", that is, the hydroxyl apatite substantially retains its hydroxyl groups.

Abstract: A sputtering type of a metal ion source includes a microwave radiation means and a pair of magnetic poles to which a negative electric potential is applied. The magnetic pole acts as an electrode for retarding electrons when a sputtering target is placed at the pointed end of the magnetic pole, high density ions generated by the operation of PIG (Penning Ionization Guage) discharge and a magnetic field efficiently bombard and sputter a target, and a microwave discharge acts as an electron supplying source so that a stable discharge is maintained.

Abstract: A time of flight mass spectrometer comprising the analyzer tube having a plurality of ring-like electrodes on the same axis in which a voltage as a force in an inverse proportion to the distance is given to ions applied.

Abstract: In a method and apparatus for fusing together thermoplastic synthetic resin molded articles wherein opposing ends of the molded articles are melted and then fused together under pressure, gaps are formed between holding mechanisms holding respective molded articles and moving mechanisms for moving the molded articles away from a heating plate so as to apply a percussive force upon the holding mechanisms by the movement of the moving mechanisms.

Abstract: A synthetic resin pallet is provided with at least one slip preventing member on the upper and or lower surfaces of the deck board. The slip preventing member is made of relatively soft and flexible material, preferably a polyolefin resin.