Abstract: A screw shaft 22 constitutes a feed screw mechanism provided in an electric actuator. In the screw shaft 22 on which a mounting surface 22c for mounting a sensor target is formed, a portion where the mounting surface 22c is formed has a non-circular, line-symmetric cross section.

Abstract: An electric actuator (1) includes: a motor part (A); a motion conversion mechanism part (B); and a housing (2) configured to house the motor part (A) and the motion conversion mechanism part (B). The motion conversion mechanism part (B) includes: a screw shaft (33); and a nut member (32) rotatably fitted to an outer periphery of the screw shaft. The screw shaft (33) performs a linear motion in an axial direction along with a rotation of the nut member (32). The housing (2) includes a plurality of members coupled to one another in the axial direction. A terminal part (D) (terminal main body (50)) configured to hold a power supply circuit configured to supply drive power to the motor part (A) includes a tubular portion (50A) sandwiched by the members forming the housing (2) from both sides in the axial direction.

Abstract: A substrate processing apparatus according to the present disclosure includes a gripping mechanism and a base plate. The gripping mechanism grips a peripheral edge of a substrate. The base plate is located below the substrate gripped by the gripping mechanism and supports the gripping mechanism. Furthermore, the base plate includes a liquid drain hole that discharges a processing liquid flowing from the substrate to an upper surface of the base plate through the gripping mechanism.

Abstract: Provided is an electric actuator, including: a drive part (2); a motion conversion mechanism part (3) configured to convert a rotary motion from the drive part (2) into a linear motion in an axial direction in parallel to an output shaft of the drive part (2); and a lock mechanism part (7) configured to prevent drive by the motion conversion mechanism part (3). The lock mechanism part (7) includes: a rotary motor (64); and a lock member (60), which is driven by the rotary motor (64) so as to be brought into at least any one of a locking state of preventing the drive by the motion conversion mechanism part (3) and an unlocking state of releasing the locking state.

Abstract: Provided is an electric actuator including: a drive part (2); a motion conversion mechanism part (3) configured to convert a rotary motion from the drive part (2) into a linear motion a transmission gear mechanism (28) configured to transmit a driving force from the drive part (2) to the motion conversion mechanism part (3); and a lock mechanism part (7) configured to prevent the drive by the motion conversion mechanism part (3), wherein the transmission gear mechanism (28) includes a first gear (30) arranged on the drive part (2) side and a second gear (31) arranged on the motion conversion mechanism part (3) side, and wherein the lock mechanism part (7) is arranged on an opposite side of the drive part (2) with respect to the first gear (30), and on the motion conversion mechanism part (3) side with respect to a rotation center line of the first gear (30).

Abstract: A substrate processing method according to an embodiment of the present disclosure includes a step of holding a substrate by a substrate holding unit (31) which is rotatable, a step of arranging a top plate portion (41) above the substrate, a step of supplying a processing liquid to the substrate, and a step of supplying a rinsing liquid (Lr) between the substrate and the top plate portion (41) to wash the substrate and the top plate portion (41) with the rinsing liquid (Lr).

Abstract: Provided is an electric actuator (1), including: a motor part (A); and a motion conversion mechanism part (B). The motion conversion mechanism part (B) includes: a ball screw shaft (33); and a ball screw nut (32), which is rotatably fitted to an outer periphery of the ball screw shaft (33), and is provided so as to be capable of transmitting torque with a rotor (24) of the motor part (A) rotatably supported through intermediation of a rolling bearing (27, 30). The ball screw shaft (33) advances toward one side in the axial direction or retreats toward another side in the axial direction in accordance with a rotation direction of the ball screw nut (32). In the electric actuator (1), a needle roller bearing (47) serving as a thrust bearing is arranged adjacent to the ball screw nut (32) on the another side in the axial direction.

Abstract: An electric actuator includes an electric motor 5, and a motion conversion mechanism 4 configured to convert a rotary motion of the electric motor 5 into a linear motion, in which the motion conversion mechanism 4 has a nut 17 rotatably supported, and a screw shaft 18 configured to axially move in accordance with a rotation of the nut 17, the electric actuator is provided with a case 20 covering an axial end surface 18b of the screw shaft 18, and the electric actuator is provided with an elastic member 30 between the axial end surface 18b of the screw shaft 18 and an opposite surface 20b of the case 20 facing the axial end surface 18b of the screw shaft 18.

Abstract: An electric actuator 1 includes a motor 5 and a motion conversion mechanism 4 that converts a rotary motion generated by driving the motor 5 into a predetermined motion. A magnet 31 as a sensor target is disposed on a movable part performing a predetermined motion, and magnetic sensors 32 detecting position information of the magnet 31 is disposed around the magnet 31. A magnetic shield plate 34 is disposed between the motor 5 and the magnetic sensors 32, and an outer surface 5e of the motor 5 and an inner surface 34a of the magnetic shield plate 34 face each other with a predetermined gap 35 therebetween.

Abstract: A composite particle is provided having sufficient insulating properties and high thermal conductivity and also having an excellent handling property and moldability. In particular, a random-shaped composite particle is provided in which primary particles of inorganic filler are aggregated and the primary particles are coated with a thermoplastic resin, and a method for producing the composite particle, as well as a molded article and a method for producing the molded article, are also provided.

Abstract: A screw shaft 22 constitutes a feed screw mechanism provided in an electric actuator. In the screw shaft 22 on which a mounting surface 22c for mounting a sensor target is formed, a portion where the mounting surface 22c is formed has a non-circular, line-symmetric cross section.

Abstract: A substrate processing apparatus according to an aspect of the present disclosure includes a substrate holder, a top plate portion, a gas supply unit, and an arm. The substrate holder holds a substrate. The top plate is installed to face the substrate held on the substrate holder, and has a through hole formed therethrough at a position facing the center of the substrate. The gas supply supplies an atmosphere adjustment gas to a space between the substrate holder and the top plate. The processing liquid nozzle ejects a liquid to the substrate. The arm holds the processing liquid nozzle and moves the processing liquid nozzle between a processing position where the processing liquid is ejected from the processing liquid nozzle through the through hole and a standby position outside the substrate.

Abstract: Provided is a ball screw device (31), including: a ball screw shaft (33); and a ball screw nut (32) which is rotatably fitted to an outer periphery of the ball screw shaft (33) through intermediation of a plurality of balls (34), wherein the ball screw shaft (33) performs a linear motion in an axial direction along with rotation of the ball screw nut (32), wherein the ball screw shaft (33) has a hollow shape having a hole portion (33b) extending in the axial direction, and wherein a stroke detection sensor (55) configured to detect an amount of displacement of the ball screw shaft (33) in the axial direction is arranged in the hole portion (33b).

Abstract: Disclosed is a substrate processing apparatus including: a holding unit that holds a substrate; a processing liquid supply unit that supplies a processing liquid to the substrate; a cup that includes a bottom portion, a tubular peripheral wall portion erected on the bottom portion, a liquid receiving portion provided above the peripheral wall portion and configured to receive the processing liquid scattered from the substrate, and a groove portion formed in a circumferential direction on an upper surface of the peripheral wall portion, and surrounds the holding unit; and a cleaning liquid supply unit that supplies a cleaning liquid to the upper surface of the peripheral wall portion.

Abstract: Provided is an electric actuator, including: a motor part; a motion conversion mechanism part; an operation part; and a terminal part, wherein a hollow rotary shaft configured to support a rotor core of the motor part is supported by a rolling bearing so as to be rotatable, wherein the motion conversion mechanism part is coupled to the hollow rotary shaft, and includes a ball screw, wherein a ball screw nut of the ball screw is arranged inside the hollow rotary shaft, wherein the operation part is coupled to the motion conversion mechanism part, and wherein an inner raceway surface of the rolling bearing is formed on the hollow rotary shaft.

Abstract: An electric actuator (1) includes: a motor part (A); a motion conversion mechanism part (B); and a housing (2) configured to house the motor part (A) and the motion conversion mechanism part (B). The motion conversion mechanism part (B) includes: a screw shaft (33); and a nut member (32) rotatably fitted to an outer periphery of the screw shaft. The screw shaft (33) performs a linear motion in an axial direction along with a rotation of the nut member (32). The housing (2) includes a plurality of members coupled to one another in the axial direction. A terminal part (D) (terminal main body (50)) configured to hold a power supply circuit configured to supply drive power to the motor part (A) includes a tubular portion (50A) sandwiched by the members forming the housing (2) from both sides in the axial direction.

Abstract: Provided is an electric actuator including: a drive part (2); a motion conversion mechanism part (3) configured to convert a rotary motion from the drive part (2) into a linear motion a transmission gear mechanism (28) configured to transmit a driving force from the drive part (2) to the motion conversion mechanism part (3); and a lock mechanism part (7) configured to prevent the drive by the motion conversion mechanism part (3), wherein the transmission gear mechanism (28) includes a first gear (30) arranged on the drive part (2) side and a second gear (31) arranged on the motion conversion mechanism part (3) side, and wherein the lock mechanism part (7) is arranged on an opposite side of the drive part (2) with respect to the first gear (30), and on the motion conversion mechanism part (3) side with respect to a rotation center line of the first gear (30).

Abstract: Provided is an electric actuator, including: a drive part (2); a motion conversion mechanism part (3) configured to convert a rotary motion from the drive part (2) into a linear motion in an axial direction in parallel to an output shaft of the drive part (2); and a lock mechanism part (7) configured to prevent drive by the motion conversion mechanism part (3). The lock mechanism part (7) includes: a rotary motor (64); and a lock member (60), which is driven by the rotary motor (64) so as to be brought into at least any one of a locking state of preventing the drive by the motion conversion mechanism part (3) and an unlocking state of releasing the locking state.

Abstract: Provided is an electric actuator (1), including: a motor part (A); and a motion conversion mechanism part (B) configured to convert a rotary motion of the motor part (A) into a linear motion to output the linear motion. The motion conversion mechanism part (B) includes: a screw shaft (33) arranged coaxially with a rotation center of a rotor (24) of the motor part (A); and a nut member (32) rotatably fitted to an outer periphery of the screw shaft. The rotor (24) includes a rotor inner (26) serving as a hollow rotary shaft having the nut member (32) arranged on an inner periphery thereof. A rotary motion of the rotor (24) is transmitted to the nut member (32) through an intermediate member (Z) arranged between an inner peripheral surface of the rotor inner (26) and an outer peripheral surface (32b) of the nut member (32).

Abstract: [PROBLEM TO BE SOLVED] To provide a composite of thermally-modified polymer layer and inorganic substrate, a composite of polymer member and inorganic substrate, and production methods thereof. [MEANS TO SOLVE THE PROBLEM] The method of the present invention for producing a composite of thermally-modified polymer layer and inorganic substrate 110 or 120 includes forming a first polymer layer on an inorganic substrate 10, and heating and thermally modifying the first polymer layer in order to bond the first thermally-modified polymer layer 20 onto the inorganic substrate.