Abstract: An optical element for terahertz waves includes: an optical component including a silicon surface, an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film and bonding the silicon surface of the optical component and the antireflection film to each other. The adhesive layer includes a thermally denatured olefin-based polymer.

Abstract: A substrate processing apparatus includes a substrate processing unit, a partition wall, a first gas supply, and a second gas supply. The substrate processing unit performs a liquid processing on a substrate. The partition wall separates a first space defined from a carry-in/out port through which the substrate is loaded to the substrate processing unit, and a second space other than the first space. The first gas supply is connected to the partition wall, and supplies an atmosphere adjusting gas to the first space. The second gas supply is connected to a place different from the first gas supply in the partition wall, and supplies an atmosphere adjusting gas to the first space.

Abstract: A sintered gear and an electrical actuator with the sintered gear where the sintered gear has spur teeth formed on a circumference of the gear. A central hole is on the center of the gear. A boss is formed around the central hole. A peripheral portion is formed radially inward of the teeth. A thickness of a region between the boss and the peripheral portion is thinner than that of the boss. The peripheral portion is formed on at least one side of the gear. The peripheral portion has an axially larger thickness than the region between the boss and peripheral portion.

Abstract: A substrate processing apparatus according to an aspect of the present disclosure includes a substrate holder, a top plate portion, a gas supply unit, and an arm. The substrate holder holds a substrate. The top plate is installed to face the substrate held on the substrate holder, and has a through hole formed therethrough at a position facing the center of the substrate. The gas supply supplies an atmosphere adjustment gas to a space between the substrate holder and the top plate. The processing liquid nozzle ejects a liquid to the substrate. The arm holds the processing liquid nozzle and moves the processing liquid nozzle between a processing position where the processing liquid is ejected from the processing liquid nozzle through the through hole and a standby position outside the substrate.

Abstract: A substrate processing apparatus according to the present disclosure includes: a substrate processing unit; a partition wall; and a liquid supply source. The substrate processing unit includes a substrate holder and performs a liquid processing on a substrate. The partition wall serves as a partition wall between a first space from a carry-in/out port through which the substrate is carried in/out to the substrate processing unit, and a second space other than the first space. The liquid supply source is provided in the second space and supplies a processing liquid to the substrate.

Abstract: Provided is a method for producing a novel silicon carbide that can be reacted at a low reaction temperature. The present invention pertains to a silicon carbide production method comprising a step for sintering a composition that at least contains: silicon nanoparticles having an average particle diameter of less than 200 nm; and a carbon-based material.

Abstract: A gas concentration measurement device includes a light source that emits infrared light, a detector that detects the infrared light through a band pass filter, and a waveguide including a wave-guiding portion that includes a tubular inner peripheral surface, an entrance that introduces the infrared light from the light source to the wave-guiding portion, and an exit that guides the infrared light that passes through the wave-guiding portion toward the detector. A portion or the entirety of the inner peripheral surface of the wave-guiding portion includes a tapered region that includes a cross section that decreases along a direction extending from the entrance to the exit. The waveguide reflects the infrared light that enters the wave-guiding portion to reduce energy of the infrared light that is obliquely incident on the band pass filter.

Abstract: Provided is an electric actuator (1), including: a motor part (A); and a motion conversion mechanism part (B). The motion conversion mechanism part (B) includes: a screw shaft (33); a nut member (32); and a planetary gear speed reducer (10) configured to reduce a speed of rotation of the rotor (24) and output the rotation. The screw shaft (33) is configured to advance toward one side in an axial direction or retreat toward another side in the axial direction in accordance with a rotation direction of the nut member (32), and the nut member (32) is arranged on an inner periphery of the rotor (24), and is coupled to a planetary gear carrier (43), which is an output member of the planetary gear speed reducer (10), so as to be capable of transmitting torque.

Abstract: A capsule endoscope position detection method includes first to third steps. The method uses at least four antennas configured to receive signals wirelessly transmitted from a capsule endoscope inside a subject. In the first step, a calculation device calculates a distance difference between a first distance and a second distance on the basis of the signals received by two of the at least four antennas. The first distance is a distance between one of the two antennas and a capsule endoscope. The second distance is a distance between the other of the two antennas and the capsule endoscope. In the second step, the calculation device selects at least three distance differences among the distance differences calculated in the first step. In the third step, the calculation device calculates a Z coordinate of the capsule endoscope on the basis of the selected distance difference.

Abstract: An electric actuator includes a housing configured to accommodate and hold a motor part and a motion conversion mechanism part. The motion conversion mechanism part includes: a screw shaft; and a nut member. An operation part mounted to the screw shaft is configured to operate an object to be operated in an axial direction through a linear motion of the screw shaft in the axial direction along with a rotation of the nut member. A terminal part (terminal main body) configured to hold an electrical component includes a tubular portion sandwiched by members forming the housing from both sides in the axial direction, and has an opening portion formed in in the tubular portion and configured to cause an inside and an outside of the housing to communicate with each other. The screw shaft is formed into a hollow shape having a through hole extending in the axial direction.

Abstract: Provided is an electric actuator (1), including: a motor part (A); and a motion conversion mechanism part (B) configured to convert a rotary motion of the motor part (A) into a linear motion to output the linear motion. The motion conversion mechanism part (B) includes: a screw shaft (33) arranged coaxially with a rotation center of a rotor (24) of the motor part (A); and a nut member (32) rotatably fitted to an outer periphery of the screw shaft. The rotor (24) includes a rotor inner (26) serving as a hollow rotary shaft having the nut member (32) arranged on an inner periphery thereof. A rotary motion of the rotor (24) is transmitted to the nut member (32) through an intermediate member (Z) arranged between an inner peripheral surface of the rotor inner (26) and an outer peripheral surface (32b) of the nut member (32).

Abstract: Provided is an electric actuator, including: a motor part; a motion conversion mechanism part; an operation part; and a terminal part, wherein a hollow rotary shaft configured to support a rotor core of the motor part is supported by a rolling bearing so as to be rotatable, wherein the motion conversion mechanism part is coupled to the hollow rotary shaft, and includes a ball screw, wherein a ball screw nut of the ball screw is arranged inside the hollow rotary shaft, wherein the operation part is coupled to the motion conversion mechanism part, and wherein an inner raceway surface of the rolling bearing is formed on the hollow rotary shaft.

Abstract: Provided is a ball screw device (31), including: a ball screw shaft (33); and a ball screw nut (32) which is rotatably fitted to an outer periphery of the ball screw shaft (33) through intermediation of a plurality of balls (34), wherein the ball screw shaft (33) performs a linear motion in an axial direction along with rotation of the ball screw nut (32), wherein the ball screw shaft (33) has a hollow shape having a hole portion (33b) extending in the axial direction, and wherein a stroke detection sensor (55) configured to detect an amount of displacement of the ball screw shaft (33) in the axial direction is arranged in the hole portion (33b).

Abstract: Provided is an electric actuator (1), including: a motor part (A); and a motion conversion mechanism part (B). The motion conversion mechanism part (B) includes: a ball screw shaft (33); and a ball screw nut (32), which is rotatably fitted to an outer periphery of the ball screw shaft (33), and is provided so as to be capable of transmitting torque with a rotor (24) of the motor part (A) rotatably supported through intermediation of a rolling bearing (27, 30). The ball screw shaft (33) advances toward one side in the axial direction or retreats toward another side in the axial direction in accordance with a rotation direction of the ball screw nut (32). In the electric actuator (1), a needle roller bearing (47) serving as a thrust bearing is arranged adjacent to the ball screw nut (32) on the another side in the axial direction.

Abstract: A substrate processing apparatus according to the present disclosure includes first and second nozzles that eject a processing liquid to a substrate; a moving mechanism that moves the first and second nozzles; and a nozzle cleaning device that cleans at least the second nozzle. The nozzle cleaning device includes a cleaning bath and an overflow bath. The cleaning bath includes a liquid storage portion that stores a cleaning liquid for cleaning the second nozzle, and an overflow portion that discharges the cleaning liquid exceeding a predetermined level from the liquid storage portion. The overflow bath is disposed adjacent to the cleaning bath and receives the cleaning liquid discharged from the overflow portion and discharge the received cleaning liquid to the outside.

Abstract: A gear that can be utilized in an electric actuator has teeth formed on its outer circumference and a central hole formed at its center. An intermediate region is positioned between a peripheral portion near the teeth and a boss near the central hole. The intermediate region has a thickness thinner than the peripheral portion and the boss. A plurality of weight-lightening apertures is circumferentially and equidistantly formed in the intermediate region. A vibration absorbing member of synthetic rubber is formed on both side surfaces of the intermediate region. The vibration absorbing member is integrally connected on each side through the weight-lightening apertures. The vibration absorbing member is attached to the radially outer side rather than an outer diameter of a bearing arranged adjacent to the vibration absorbing member.

Abstract: Disclosed is a substrate processing apparatus including: a holding unit that holds a substrate; a processing liquid supply unit that supplies a processing liquid to the substrate; a cup that includes a bottom portion, a tubular peripheral wall portion erected on the bottom portion, a liquid receiving portion provided above the peripheral wall portion and configured to receive the processing liquid scattered from the substrate, and a groove portion formed in a circumferential direction on an upper surface of the peripheral wall portion, and surrounds the holding unit; and a cleaning liquid supply unit that supplies a cleaning liquid to the upper surface of the peripheral wall portion.

Abstract: A sintered gear and an electrical actuator with the sintered gear where the sintered gear has spur teeth formed on a circumference of the gear. A central hole is on the center of the gear. A boss is formed around the central hole. A peripheral portion is formed radially inward of the teeth. A thickness of a region between the boss and the peripheral portion is thinner than that of the boss. The peripheral portion is formed on at least one side of the gear. The peripheral portion has an axially larger thickness than the region between the boss and peripheral portion.

Abstract: An electric linear actuator has a housing with an electric motor, a speed reduction mechanism and a ball screw mechanism. The ball screw mechanism converts the rotational motion of the electric motor to an axial linear motion of a drive shaft. The ball screw mechanism has a nut and a screw shaft. The screw shaft is inserted into the nut, via a large number of balls. The screw shaft is axially movably supported on the housing but is non-rotatable with respect to the housing. An output gear, forming part of the speed reduction mechanism, is secured on the nut. The bearings are arranged at either side of the output gear. The bearings are mounted on the housing, via a ring-shaped washer, formed from an elastic member.