Patents by Inventor Yoshitaka Hara

Yoshitaka Hara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8522714
    Abstract: A wet processing apparatus for wet-processing substrates can suppress the reduction of throughput when some component part thereof becomes unserviceable. The wet processing apparatus includes a first nozzle unit and a second nozzle unit. When the wet processing apparatus operates in a normal mode, a substrate carrying mechanism is controlled so as to deliver substrates alternately to processing units of a first group and those of a second group so that the substrates are processed sequentially in order. When the processing units of the first group (the second group) are unserviceable due to the inoperativeness of the substrate holders, a processing liquid supply system or a nozzle support mechanism, the nozzle unit for the processing units of the second group (the first group) is moved to process substrates by the serviceable ones of the first group (the second group).
    Type: Grant
    Filed: March 1, 2011
    Date of Patent: September 3, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Naofumi Kishita, Kouji Fujimura, Yoshitaka Hara
  • Publication number: 20130088996
    Abstract: There is provided a radio communication system includes a radio station, a host apparatus configured to subordinate the radio station, and a terminal configured to communicate with the radio station. The terminal has a function of transmitting data to the host apparatus through a plurality of the radio stations and, when data is transmitted through the radio stations, executes a first transmitting operation for transmitting different data portions respectively to the radio stations, which are set as transmission destinations, or a second transmitting operation for transmitting same data respectively to the radio stations, which are set as the transmission destinations.
    Type: Application
    Filed: April 1, 2011
    Publication date: April 11, 2013
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Yoshitaka Hara
  • Patent number: 8412210
    Abstract: The present invention concerns a method, a device, a mobile terminal and a base station for transferring data from a mobile terminal to a base station after a wireless resource enabling the transfer of the data from the mobile terminal to the base station has been allocated.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: April 2, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yoshitaka Hara, David Mottier, Loic Brunel, Noriyuki Fukui
  • Patent number: 8393845
    Abstract: A plurality of process modules for conducting processes on a wafer; conveying modules for conveying the wafer, a turnout module for transferring the wafer to/from the conveying module, and a CPU for detecting a trouble occurring in the process module and centrally controlling each of the modules based on a detection signal. When the controller detects the trouble occurring in any one of the process modules, the wafer to be conveyed to the process module where the trouble occurs is conveyed to the turnout module, and conveyance of the wafer before the process module where the trouble occurs is temporarily stopped, and conveyance and processing of the other wafer are continued, and thereafter, conveyance and processing of the wafer before the process module where the trouble occurs are conducted.
    Type: Grant
    Filed: January 18, 2006
    Date of Patent: March 12, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Tomohiro Kaneko, Yoshitaka Hara, Akira Miyata
  • Publication number: 20130057836
    Abstract: The present invention is a substrate treatment apparatus for performing solution treatment on a substrate, performing post-treatment in a treatment module subsequent to the solution treatment, including: a solution treatment section including a plurality of nozzles prepared for respective kinds of treatment solutions corresponding to lots of substrates; a transfer mechanism for transferring the substrate; a monitoring section monitoring whether there is a failure in discharge of the treatment solution in the nozzle; and a control unit outputting a control signal to prohibit the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle determined to have a failure by the monitoring section and to perform the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle other than the nozzle determined to have a failure.
    Type: Application
    Filed: August 30, 2012
    Publication date: March 7, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Tomohiro NAKASHIMA, Shin INOUE, Yoshitaka HARA, Izumi HASEGAWA, Kunie OGATA, Takuya MORI
  • Patent number: 8391234
    Abstract: In a wireless communication system in which a base station, a mobile station, and a correspondent station are connected via a network, the base station includes a sounding-reference-signal arrangement control unit that causes sounding reference signals 5, 6, and 7, which are used for observing a propagation path state in the frequency band and are transmitted from the mobile station to the base station, to be transmitted for each of frequency bandwidths obtained by dividing the frequency band into a plurality of frequency bands in a minimum control time of the data transmission and in a time width shorter than the minimum control time, determines an arrangement of sounding reference signals 5, 6, and 7 in the minimum control time so that at least a part of transmission in the frequency bandwidth and transmission in another frequency bandwidth are executed at different times, and holds the arrangement as arrangement information.
    Type: Grant
    Filed: January 27, 2009
    Date of Patent: March 5, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yasunori Nouda, Yoshitaka Hara
  • Patent number: 8385295
    Abstract: Conventionally, if the number of transmission antennas is greater than that of reception antennas, different signals simultaneously transmitted from the transmission antennas cannot be separated from one another at the receiving end, resulting in a significant degradation of received-signal quality. A transmitter and a receiver each have a plurality of antennas. The transmitter transmits a pilot signal. The receiver receives the pilot signal, calculates transmission-related information corresponding to the pilot signal, selects, based on this calculated information, a transmission signal to be used by the transmitter, and notifies the transmitter of the selected signal. The transmitter selects, from the informed transmission signal, transmission antennas and uses the selected antennas to transmit information signals, so that a signal separation can be easily performed at the receiving end.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: February 26, 2013
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitaka Hara, Akinori Taira, Tomoaki Otsuki, Kenji Suto
  • Patent number: 8377501
    Abstract: A coating and developing system and control method is provided. The system and control method curtails the amount of time for which a substrate is held with no purpose while improving the throughput of the coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, the holding of wafers in the inspection modules can be suppressed and the throughput can be improved.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: February 19, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Yasushi Hayashida, Yoshitaka Hara, Tomohiro Kaneko
  • Publication number: 20120283096
    Abstract: The present invention relates to (i) a plant growth-improving agent containing a growth-improving component that increases a concentration of an oxoanion in an area around a plant, the oxoanion being heavier than a sulfate ion and containing four oxygen atoms, (ii) a seed to which such a plant growth-improving agent has been applied, and (iii) a plant growth-improving method including a cultivating step of growing a plant in the presence of such a growth-improving component.
    Type: Application
    Filed: January 26, 2011
    Publication date: November 8, 2012
    Applicant: Incorporated Administrative Agency National Agricu lture and Food Research Organization
    Inventor: Yoshitaka Hara
  • Publication number: 20120164572
    Abstract: A device to form a coating film which can quickly coat a substrate of a follow-up lot after coating a preceding lot. The device is configured such that nozzles for a preceding lot and a following lot are integrated into a common movement mechanism and moved between an upper side of a liquid processing unit and a standby area. A coating method includes sucking air into the nozzle for the preceding lot to form an upper gas layer, sucking a solvent for the preceding lot in the standby area to form a thinner layer, and sucking air into the nozzle for the preceding lot to form a lower gas layer within the nozzle, and thus forming a state that a solvent layer is interposed between the upper gas layer and the lower gas layer.
    Type: Application
    Filed: December 23, 2011
    Publication date: June 28, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Akira MIYATA, Yoshitaka HARA, Kouji FUJIMURA
  • Publication number: 20120134437
    Abstract: Conventionally, if the number of transmission antennas is greater than that of reception antennas, different signals simultaneously transmitted from the transmission antennas cannot be separated from one another at the receiving end, resulting in a significant degradation of received-signal quality. A transmitter and a receiver each have a plurality of antennas. The transmitter transmits a pilot signal. The receiver receives the pilot signal, calculates transmission-related information corresponding to the pilot signal, selects, based on this calculated information, a transmission signal to be used by the transmitter, and notifies the transmitter of the selected signal. The transmitter selects, from the informed transmission signal, transmission antennas and uses the selected antennas to transmit information signals, so that a signal separation can be easily performed at the receiving end.
    Type: Application
    Filed: February 9, 2012
    Publication date: May 31, 2012
    Applicant: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitaka HARA, Akinori TAIRA, Tomoaki OTSUKI, Kenji SUTO
  • Patent number: 8125963
    Abstract: A radio communication method and apparatus generate a plurality of information signals and transmit the signals to a communication partner from a plurality of antennas. A plurality of combination of signals to be transmitted are selected. A transmission evaluation value is determined based on the signal noise ratio of each signal. After all combinations are evaluated, a transmission format suitable for sending a combination of signals is determined based on a highest evaluation value.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: February 28, 2012
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitaka Hara, Akinori Taira, Tomoaki Otsuki, Kenji Sudo
  • Publication number: 20110310836
    Abstract: The present invention concerns a method, a device and a system for transferring signals representative of a pilot symbol pattern to a first telecommunication device by a second telecommunication device. The method is executed by the second telecommunication. It obtains information associated with data to be transferred to the first telecommunication device. The adjusted transmission power of the signals representative of the pilot symbol pattern is according the associated information. The signals representative of the pilot symbol pattern at the adjusted transmission power are subsequently transferred.
    Type: Application
    Filed: August 25, 2011
    Publication date: December 22, 2011
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Yoshitaka HARA, David MOTTIER, Loic BRUNEL, Noriyuki FUKUI
  • Patent number: 8081709
    Abstract: A method for transmitting data in a telecommunication system including at least one communication network CNW1 including a group of radio base stations B1 able to communicate with at least one mobile terminal MT through a wireless link, which method includes at least one frequency switching step for switching an operating frequency of the wireless link from a first frequency band to a second frequency band, and a control signal transmission step in the course of which a slot including control data (Cnt, Swrq, Mst) is transmitted through a communication channel established over said wireless link. The method upgrades an existing network by allowing it to use a new band of available frequencies for the operation of the wireless link.
    Type: Grant
    Filed: July 13, 2010
    Date of Patent: December 20, 2011
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitaka Hara, Kazuyoshi Oshima
  • Patent number: 8057114
    Abstract: A wet-processing apparatus includes module groups each including plural processing modules and a shared nozzle device to be used in common by the processing module of the module group. The wet-processing apparatus includes plural processing modules not less than four processing modules, for example, six processing modules. The six processing modules are divided into two module groups, namely, first and second module groups each of the three processing modules. Each of the first and the second module group is provided with a nozzle device for pouring a processing solution onto a wafer. The first wafer is delivered to the first processing module, the second wafer is delivered to the processing module of the second module group, the third wafer is delivered to the processing module of the first module group. Thus the successive wafers are delivered alternately to the first and the second module groups.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: November 15, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Yasushi Hayashida, Yoshitaka Hara
  • Patent number: 8025023
    Abstract: Wafers A1 to A10 of a first lot A and wafers B1 to B10 of a second lot B are processed by a second heating unit at different temperatures, respectively. A wafer W is carried in a processing block included in coating and developing system along a route passing a temperature control unit CPL2, a coating unit BCT, a heating unit LHP2, a temperature control unit CPL3, a coating unit COT, a heating unit LHP3, and a cooling unit COL in that order. The process temperature of the heating unit LHP3 is changed after the last wafer A10 of the first lot A has been processed by the heating unit LHP3.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: September 27, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Yasushi Hayashida, Yoshitaka Hara
  • Patent number: 8027392
    Abstract: A method for transmitting information between at least two transceivers TRA and TRB linked together by a communication channel, said information being carried by means of at least one carrying signal Csg having an operating frequency, includes, according to the invention, a frequency selection step in the course of which said operating frequency is dynamically selected among frequencies comprised within at least a first and a second non-adjacent frequency intervals.
    Type: Grant
    Filed: November 30, 2005
    Date of Patent: September 27, 2011
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitaka Hara, Akinori Taira
  • Publication number: 20110217473
    Abstract: A wet processing apparatus for wet-processing substrates can suppress the reduction of throughput when some component part thereof becomes unserviceable. The wet processing apparatus includes a first nozzle unit and a second nozzle unit. When the wet processing apparatus operates in a normal mode, a substrate carrying mechanism is controlled so as to deliver substrates alternately to processing units of a first group and those of a second group so that the substrates are processed sequentially in order. When the processing units of the first group (the second group) are unserviceable due to the inoperativeness of the substrate holders, a processing liquid supply system or a nozzle support mechanism, the nozzle unit for the processing units of the second group (the first group) is moved to process substrates by the serviceable ones of the first group (the second group).
    Type: Application
    Filed: March 1, 2011
    Publication date: September 8, 2011
    Applicant: Tokyo Electron Limited
    Inventors: Naofumi KISHITA, Kouji Fujimura, Yoshitaka Hara
  • Patent number: 7965619
    Abstract: The present invention relates to a wireless communication system that performs data communication using a spatial multiplex transmission scheme. A mobile station includes a transmission weight calculating unit that calculates a transmission weight and a beam information notifying signal generating unit that transmits a known signal for generating partial space information at a base station side. A base station includes a scheduling unit (DL spatial scheduling unit (17), UL spatial scheduling unit (18), and beam information notifying signal response vector estimating unit (20)) that generates the partial space information based on a received first known signal, and performs downstream scheduling and upstream scheduling based on the partial space information, and a scheduling result transmitting unit (UL control information generating unit (14) and transmission weight calculating unit (19)) that transmits a packet including an upstream scheduling result.
    Type: Grant
    Filed: July 5, 2007
    Date of Patent: June 21, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventors: Akinori Taira, Yasunori Katou, Yoshitaka Hara
  • Publication number: 20110140919
    Abstract: A vehicle support system for supporting a man in safely crossing a road without crosswalks installed is provided.
    Type: Application
    Filed: December 9, 2010
    Publication date: June 16, 2011
    Inventors: Yoshitaka HARA, Takuya Naka, Saku Egawa, Masashi Koga