Abstract: Embodiments of the disclosure provide an optical sensing system and an optical sensing method thereof. The optical sensing system comprises a light source configured to emit an optical signal into an environment surrounding the optical sensing system. The optical sensing system further comprises a photodetector configured to receive the optical signal reflected from the environment of the optical sensing system, and convert the optical signal to an electrical signal, where the photodetector is disposed in a package. The optical sensing system additionally comprises a readout circuit configured to generate a readout signal based on the electrical signal received from the photodetector, where the readout circuit is disposed in the same package as the photodetector and connected to the photodetector through routings in the package.

Abstract: An eye tracking system employing three-dimensional (3D) sensing using time of flight is provided. Instead of directly measuring the time of arrival of the emitted photons, the light intensity of the transmitted laser beam is modulated, and a phase change of the return beam computed by comparison with the transmit waveform. The modulation frequency is resolved with radio frequency (RF) mixing and digital signal processing techniques. A variety of phase detection systems and techniques including, but not limited to, quadrature analog front end detection and analog homodyne phase detection are applied. The modulation frequency may, depending on phase detection technique, be sinusoidal or pulsed.

Abstract: Provided is a three-dimensional measurement device, including an illumination system (I) and an imaging system (II). The illumination system includes, along an illumination light path, a light source (8), a light beam shaping apparatus (8), a pattern modulation apparatus (6), and a projection lens (2). The pattern modulation apparatus is configured to form a coded pattern. The light beam shaping apparatus is configured to shape light emitted by the light source into near-parallel light. The projection lens is configured to project the coded pattern onto a target object. The imaging system includes an imaging lens (3), a first beam-splitting system (12, 13), and an image sensor group including N image sensors (9, 10, 11). The first beam-splitting system is configured to transmit the coded pattern received by the imaging lens and projected onto the target object to the N image sensors of the image sensor group.

Abstract: An excess heat-generating element is coupled to a heat sink through a heat conduction path. A thermal switch is mounted in the heat conduction path. A temperature-sensitive element is coupled to the heat conduction path on a same side of the thermal switch as the excess heat-generating element. A temperature monitor is mounted adjacent the temperature-sensitive element. A temperature controller has an input coupled to the temperature output of the temperature monitor and an output control line coupled to an input of the thermal switch. The temperature controller switches off the thermal switch, in response to detecting a temperature below a temperature threshold from the temperature output. When the thermal switch it off, it impedes heat flow from the excess heat-generating element to the heat sink, and the heat flow is redirected to increase heat flow from the excess heat-generating element to the heat-sensitive element.

Abstract: Embodiments of the disclosure provide methods for microfabricating an omni-view peripheral scanning system. One exemplary method may include separately fabricating a reflector and a scanning MEMS mirror, and then bonding the microfabricated reflector with the scanning MEMS mirror to form the omni-view peripheral scanning system. The microfabricated reflector may include a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion. The microfabricated scanning MEMS mirror may include a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform. The scanning MEMS mirror may face the cone-shaped bottom portion of the reflector when forming the omni-view peripheral scanning system.

Abstract: An eye tracking system for absolute phase unwrapping includes a fringe projector, a camera, and an illumination module. The projector provides a periodical fringe pattern onto the eye and the camera captures a reflection of the fringe pattern. Fourier transform, wavelet transform, phase shifting, and/or variants thereof may be used to determine a phase of the fringe pattern and generate a wrapped phase map. Spatial phase unwrapping is used for phase unwrapping resulting in a relative unwrapped phase map. The illumination module with a known relative position between the fringe projector and the camera is used to create glint(s) on the eye. Detected glints on the original image are used to convert the relative unwrapped phase map to an absolute unwrapped phase map.

Abstract: Embodiments of the disclosure provide an apparatus for emitting laser light and a system and method for detecting laser light returned from an object. The system includes a transmitter and a receiver. The transmitter includes one or more laser sources, at least one of the laser sources configured to provide a respective native laser beam having a wavelength above 1,100 nm. The transmitter also includes a wavelength converter configured to receive the native laser beams provided by the laser sources and convert the native laser beams into a converted laser beam having a wavelength below 1,100 nm. The transmitter further includes a scanner configured to emit the converted laser beam to the object in a first direction. The receiver is configured to detect a returned laser beam having a wavelength below 1,100 nm and returned from the object in a second direction.

Abstract: Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

Abstract: Embodiments of the disclosure include a receiver of an optical sensing system. The receiver may include a Hadamard mask configured to resonate during a scanning procedure performed by the optical sensing system. The Hadamard mask may include a frame beginning pattern corresponding to a start of a frame captured during the scanning procedure. The Hadamard mask may also include a coded pattern configured to provide sub-pixelization of the frame. The receiver may also include a photodetector array positioned on a first side of the Hadamard mask. The photodetector array may be configured to detect light that passes through the Hadamard mask during the scanning procedure to generate the frame.

Abstract: Embodiments of the disclosure provide a micromachined mirror assembly. The micromachined mirror assembly includes a micro mirror configured to tilt around an axis and a first and a second torsion beam each having a first and a second end. The second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis. The micromachined mirror assembly also includes a first DC voltage applied to the first end of the first torsion beam and a second DC voltage, different from the first DC voltage, is applied to the first end of the second torsion beam.

Abstract: In one example, a method of fabricating a polygon assembly of a Light Detection and Ranging (LiDAR) module is provided. The method comprises: forming, on a backside surface of a first silicon-on-insulator (SOI) substrate, a multi-facet polygon of the polygon assembly; forming, on a frontside surface of the first SOI substrate, an axial portion of a support structure of the polygon assembly, the axial portion forming a stack with the polygon along a rotation axis; forming, on a frontside surface of a second SOI substrate, a plurality of radial portions of the support structure; forming, on a backside surface of the second SOI substrate, a cavity that encircles the plurality of radial portions; and bonding, based on a wafer bonding operation, the axial portion to the plurality of radial portions to form the polygon assembly.

Abstract: A MEMS-based vertical cavity surface emitting laser (VCSEL) includes an embedded photodiode. A representative VCSEL includes a distributed Bragg reflector (DBR), a photodiode structure located within the distributed Bragg reflector, an active region overlying the distributed Bragg reflector, and a MEMS upper reflector disposed over the active region. The VCSEL may be configured as an optical sensor. The laser cavity and hence a working wavelength of the sensor may be tuned by modulating the MEMS reflector such as through an applied voltage.

Abstract: Embodiments of the disclosure provide a collimating scanner for an optical sensing system, a method for fabricating the collimating scanner, and a transmitter that includes the collimating scanner. An exemplary collimating scanner may include a scanning mirror configured to steer a light beam towards an object. The collimating scanner may also include a Fresnel zone plate profile patterned on the scanning mirror configured to collimate the light beam. The disclosed collimating scanner eliminates the use a separate collimating lens and thus improves the form factor of the optical sensing system.

Abstract: Embodiments of the disclosure provide a mirror assembly for controlling optical directions in an optical sensing system. The mirror assembly may include a frame and a beam structure mechanically coupled to the frame. The beam structure may define a rotational axis. The mirror assembly may also include a micro mirror suspended by the beam structure. The mirror assembly may further include a plurality of piezoelectric actuators mechanically coupled to the frame and configured to rotate the micro mirror along the rotational axis. Each of the plurality of piezoelectric actuators may be disposed between the rotational axis and an outer edge of the frame.

Abstract: Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

Abstract: In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

Abstract: In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

Abstract: According to certain embodiments, a micro-electromechanical system (MEMS) apparatus has a MEMS mirror structure with a rotatable mirror. Rotation of the mirror produces a change in a measured capacitance corresponding to an angle of rotation. The MEMS structure sits on an oxide layer deposited on a substrate. There is a parasitic capacitance between the MEMS mirror structure and the substrate. An added capacitance is provided between the substrate and a DC voltage source. The added capacitance is much larger than the parasitic capacitance, and shunts the parasitic capacitance to ground to minimize its effect on the measured capacitance.