Patents by Inventor Yu-Lung Yeh
Yu-Lung Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250101628Abstract: A plating membrane includes a support structure extending radially outward from a nozzle that is to direct a flow of a plating solution toward a wafer. The plating membrane also includes a frame, supported by the support structure, having an inner wall that is angled outward from the nozzle. The outward angle of the inner wall relative to the nozzle directs a flow of plating solution from the nozzle in a manner that increases uniformity of the flow of the plating solution toward the wafer, reduces the amount of plating solution that is redirected inward toward the center of the plating membrane, reduces plating material voids in trenches of the wafer (e.g., high aspect ratio trenches), and/or the like.Type: ApplicationFiled: December 10, 2024Publication date: March 27, 2025Inventors: Yung-Hsiang CHEN, Hung-San LU, Ting-Ying WU, Chuang CHIHCHOUS, Yu-Lung YEH
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Patent number: 12195866Abstract: A plating membrane includes a support structure extending radially outward from a nozzle that is to direct a flow of a plating solution toward a wafer. The plating membrane also includes a frame, supported by the support structure, having an inner wall that is angled outward from the nozzle. The outward angle of the inner wall relative to the nozzle directs a flow of plating solution from the nozzle in a manner that increases uniformity of the flow of the plating solution toward the wafer, reduces the amount of plating solution that is redirected inward toward the center of the plating membrane, reduces plating material voids in trenches of the wafer (e.g., high aspect ratio trenches), and/or the like.Type: GrantFiled: July 28, 2023Date of Patent: January 14, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yung-Hsiang Chen, Hung-San Lu, Ting-Ying Wu, Chuang Chihchous, Yu-Lung Yeh
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Publication number: 20240391761Abstract: A method is provided that includes forming a first metal layer of a seal structure over a micro-electromechanical system (MEMS) structure and over a channel formed through the MEMS structure to an integrated circuit of a semiconductor structure. The first metal layer is formed at a first temperature. The method includes forming a second metal layer over the first metal layer. The second metal layer is formed at a second temperature less than the first temperature. The method includes performing a first cooling process to cool the semiconductor structure.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Inventors: Kai-Lan CHANG, Yu-Lung YEH, Yen-Hsiu CHEN, Shuo Yen TAI, Yung-Hsiang CHEN
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Publication number: 20240387586Abstract: One or more semiconductor processing tools may deposit a contact etch stop layer on a substrate. In some implementations, the contact etch stop layer is comprised of less than approximately 12 percent hydrogen. Depositing the contact etch stop layer may include depositing contact etch stop layer material at a temperature of greater than approximately 600 degrees Celsius, at a pressure of greater than approximately 150 torr, and/or with a ratio of at least approximately 70:1 of NH3 and SiH4, among other examples. The one or more semiconductor processing tools may deposit a silicon-based layer above the contact etch stop layer. The one or more semiconductor processing tools may perform an etching operation into the silicon-based layer until reaching the contact etch stop layer to form a trench isolation structure.Type: ApplicationFiled: July 26, 2024Publication date: November 21, 2024Inventors: Cheng-Hsien CHEN, Yung-Hsiang CHEN, Chia Hao LI, Yu-Lung YEH, Yen-Hsiu CHEN
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Publication number: 20240371680Abstract: A semiconductor arrangement includes an isolation structure having a first electrical insulator layer in a trench in a semiconductor substrate and a second electrical insulator layer in the trench and over the first electrical insulator layer.Type: ApplicationFiled: July 19, 2024Publication date: November 7, 2024Inventors: Wei-Liang CHEN, Cheng-Hsien CHEN, Yu-Lung YEH, Chuang CHIHCHOUS, Yen-Hsiu CHEN
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Publication number: 20240347571Abstract: A semiconductor device is provided. The semiconductor device includes a first deep trench isolation (DTI) structure within a substrate. The first DTI structure includes a barrier structure, a dielectric structure, and a copper structure. The dielectric structure is between the barrier structure and the copper structure. The barrier structure is between the substrate and the dielectric structure.Type: ApplicationFiled: June 27, 2024Publication date: October 17, 2024Inventors: Yung-Hsiang CHEN, Yu-Lung YEH, Yen-Hsiu CHEN, Bo-Chang SU, Cheng-Hsien CHEN
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Publication number: 20240347377Abstract: Various embodiments of the present application are directed to a method for forming a semiconductor-on-insulator (SOI) device with an impurity competing layer to absorb potential contamination metal particles during an annealing process, and the SOI structure thereof. In some embodiments, an impurity competing layer is formed on the dummy substrate. An insulation layer is formed over a support substrate. A front side of the dummy wafer is bonded to the insulation layer. An annealing process is performed and the impurity competing layer absorbs metal from an upper portion of the dummy substrate. Then, a majority portion of the dummy substrate is removed including the impurity competing layer, leaving a device layer of the dummy substrate on the insulation layer.Type: ApplicationFiled: June 26, 2024Publication date: October 17, 2024Inventors: Yu-Hung Cheng, Pu-Fang Chen, Cheng-Ta Wu, Po-Jung Chiang, Ru-Liang Lee, Victor Y. Lu, Yen-Hsiu Chen, Yeur-Luen Tu, Yu-Lung Yeh, Shi-Chieh Lin
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Patent number: 12094756Abstract: A semiconductor arrangement includes an isolation structure having a first electrical insulator layer in a trench in a semiconductor substrate and a second electrical insulator layer in the trench and over the first electrical insulator layer.Type: GrantFiled: July 27, 2022Date of Patent: September 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Wei-Liang Chen, Cheng-Hsien Chen, Yu-Lung Yeh, Chuang Chihchous, Yen-Hsiu Chen
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Publication number: 20240274632Abstract: A semiconductor device includes a plurality of photodiodes, a semiconductor structure, a dielectric layer, a color filter layer, and a micro-lens. The semiconductor structure overlaps the photodiodes. The semiconductor structure includes a plurality of microstructures on a backside of the semiconductor structure. The dielectric layer is over the microstructures of the semiconductor structure. A thickness of the dielectric layer is less than a vertical distance from one of the photodiodes to one of the microstructures. The color filter layer is over the dielectric layer. The micro-lens is over the color filter layer.Type: ApplicationFiled: April 25, 2024Publication date: August 15, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan TU, Yu-Lung YEH, Hsing-Chih LIN, Chien-Chang HUANG, Shih-Shiung CHEN
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Patent number: 12046615Abstract: A semiconductor device is provided. The semiconductor device includes a first deep trench isolation (DTI) structure within a substrate. The first DTI structure includes a barrier structure, a dielectric structure, and a copper structure. The dielectric structure is between the barrier structure and the copper structure. The barrier structure is between the substrate and the dielectric structure.Type: GrantFiled: March 4, 2021Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Yung-Hsiang Chen, Yu-Lung Yeh, Yen-Hsiu Chen, Bo-Chang Su, Cheng-Hsien Chen
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Patent number: 12040221Abstract: Various embodiments of the present application are directed to a method for forming a semiconductor-on-insulator (SOI) device with an impurity competing layer to absorb potential contamination metal particles during an annealing process, and the SOI structure thereof. In some embodiments, an impurity competing layer is formed on the dummy substrate. An insulation layer is formed over a support substrate. A front side of the dummy wafer is bonded to the insulation layer. An annealing process is performed and the impurity competing layer absorbs metal from an upper portion of the dummy substrate. Then, a majority portion of the dummy substrate is removed including the impurity competing layer, leaving a device layer of the dummy substrate on the insulation layer.Type: GrantFiled: January 19, 2022Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hung Cheng, Pu-Fang Chen, Cheng-Ta Wu, Po-Jung Chiang, Ru-Liang Lee, Victor Y. Lu, Yen-Hsiu Chen, Yeur-Luen Tu, Yu-Lung Yeh, Shi-Chieh Lin
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Publication number: 20240234589Abstract: A semiconductor device and a method of forming the same is disclosed. The semiconductor device includes a substrate, a first well region disposed within the substrate, a second well region disposed adjacent to the first well region and within the substrate, and an array of well regions disposed within the first well region. The first well region includes a first type of dopants, the second well region includes a second type of dopants that is different from the first type of dopants, and the array of well regions include the second type of dopants. The semiconductor device further includes a metal silicide layer disposed on the array of well regions and within the substrate, a metal silicide nitride layer disposed on the metal silicide layer and within the substrate, and a contact structure disposed on the metal silicide nitride layer.Type: ApplicationFiled: March 27, 2024Publication date: July 11, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ting-Ying Wu, Yung-Hsiang Chen, Yu-Lung Yeh, Yen-Hsiu Chen, Wei-Liang Chen, Ying-Tsang Ho
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Patent number: 11996429Abstract: A semiconductor device includes a device layer, a semiconductor layer, a sensor element, a dielectric layer, a color filter layer, and a micro-lens. The semiconductor layer is over the device layer. The semiconductor layer has a plurality of microstructures thereon. Each of the microstructures has a substantially triangular cross-section. The sensor element is under the microstructures of the semiconductor layer and is configured to sense incident light. The dielectric layer is over the microstructures of the semiconductor layer. The color filter layer is over the dielectric layer. The micro-lens is over the color filter layer.Type: GrantFiled: November 14, 2021Date of Patent: May 28, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan Tu, Yu-Lung Yeh, Hsing-Chih Lin, Chien-Chang Huang, Shih-Shiung Chen
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Patent number: 11990493Abstract: An image sensor device is provided. The image sensor device includes a semiconductor substrate having a front surface, a back surface opposite to the front surface, and a light-sensing region close to the front surface. The image sensor device includes an insulating layer covering the back surface and extending into the semiconductor substrate. The protection layer has a first refractive index, and the first refractive index is less than a second refractive index of the semiconductor substrate and greater than a third refractive index of the insulating layer, and the protection layer conformally and continuously covers the back surface and extends into the semiconductor substrate. The image sensor device includes a reflective structure surrounded by insulating layer in the semiconductor substrate.Type: GrantFiled: May 18, 2022Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Chieh Fang, Ming-Chi Wu, Ji-Heng Jiang, Chi-Yuan Wen, Chien-Nan Tu, Yu-Lung Yeh, Shih-Shiung Chen, Kun-Yu Lin
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Patent number: 11973148Abstract: A semiconductor device and a method of forming the same is disclosed. The semiconductor device includes a substrate, a first well region disposed within the substrate, a second well region disposed adjacent to the first well region and within the substrate, and an array of well regions disposed within the first well region. The first well region includes a first type of dopants, the second well region includes a second type of dopants that is different from the first type of dopants, and the array of well regions include the second type of dopants. The semiconductor device further includes a metal silicide layer disposed on the array of well regions and within the substrate, a metal silicide nitride layer disposed on the metal silicide layer and within the substrate, and a contact structure disposed on the metal silicide nitride layer.Type: GrantFiled: November 18, 2021Date of Patent: April 30, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ting-Ying Wu, Yung-Hsiang Chen, Yu-Lung Yeh, Yen-Hsiu Chen, Wei-Liang Chen, Ying-Tsang Ho
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Publication number: 20240018685Abstract: A plating membrane includes a support structure extending radially outward from a nozzle that is to direct a flow of a plating solution toward a wafer. The plating membrane also includes a frame, supported by the support structure, having an inner wall that is angled outward from the nozzle. The outward angle of the inner wall relative to the nozzle directs a flow of plating solution from the nozzle in a manner that increases uniformity of the flow of the plating solution toward the wafer, reduces the amount of plating solution that is redirected inward toward the center of the plating membrane, reduces plating material voids in trenches of the wafer (e.g., high aspect ratio trenches), and/or the like.Type: ApplicationFiled: July 28, 2023Publication date: January 18, 2024Inventors: Yung-Hsiang CHEN, Hung-San LU, Ting-Ying WU, Chuang CHIHCHOUS, Yu-Lung YEH
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Publication number: 20230387150Abstract: An image sensor with high quantum efficiency is provided. In some embodiments, a semiconductor substrate includes a non-porous semiconductor layer along a front side of the semiconductor substrate. A periodic structure is along a back side of the semiconductor substrate. A high absorption layer lines the periodic structure on the back side of the semiconductor substrate. The high absorption layer is a semiconductor material with an energy bandgap less than that of the non-porous semiconductor layer. A photodetector is in the semiconductor substrate and the high absorption layer. A method for manufacturing the image sensor is also provided.Type: ApplicationFiled: August 3, 2023Publication date: November 30, 2023Inventors: Chien-Chang Huang, Chien Nan Tu, Ming-Chi Wu, Yu-Lung Yeh, Ji Heng Jiang
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Patent number: 11830892Abstract: An image sensor with high quantum efficiency is provided. In some embodiments, a semiconductor substrate includes a non-porous semiconductor layer along a front side of the semiconductor substrate. A periodic structure is along a back side of the semiconductor substrate. A high absorption layer lines the periodic structure on the back side of the semiconductor substrate. The high absorption layer is a semiconductor material with an energy bandgap less than that of the non-porous semiconductor layer. A photodetector is in the semiconductor substrate and the high absorption layer. A method for manufacturing the image sensor is also provided.Type: GrantFiled: November 30, 2020Date of Patent: November 28, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Chang Huang, Chien Nan Tu, Ming-Chi Wu, Yu-Lung Yeh, Ji Heng Jiang
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Patent number: 11814743Abstract: A plating membrane includes a support structure extending radially outward from a nozzle that is to direct a flow of a plating solution toward a wafer. The plating membrane also includes a frame, supported by the support structure, having an inner wall that is angled outward from the nozzle. The outward angle of the inner wall relative to the nozzle directs a flow of plating solution from the nozzle in a manner that increases uniformity of the flow of the plating solution toward the wafer, reduces the amount of plating solution that is redirected inward toward the center of the plating membrane, reduces plating material voids in trenches of the wafer (e.g., high aspect ratio trenches), and/or the like.Type: GrantFiled: June 15, 2020Date of Patent: November 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yung-Hsiang Chen, Hung-San Lu, Ting-Ying Wu, Chuang Chihchous, Yu-Lung Yeh
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Publication number: 20230197550Abstract: A semiconductor device includes an ultra-thick metal (UTM) structure. The semiconductor device includes a passivation layer including a first passivation oxide. The first passivation oxide includes an unbias film and a first bias film, where the unbias film is on portions of the UTM structure and on portions of a layer on which the UTM structure is formed, and the first bias film is on the unbias film. The passivation layer includes a second passivation oxide consisting of a second bias film, the second bias film being on the first bias film. The passivation layer includes a third passivation oxide consisting of a third bias film, the third bias film being on the second bias film.Type: ApplicationFiled: February 24, 2023Publication date: June 22, 2023Inventors: Li Chun LIU, Chun Tang WANG, Chih Hung WANG, Ching Feng LEE, Yu-Lung YEH