Patents by Inventor Yu-Lung Yeh
Yu-Lung Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180053800Abstract: A semiconductor device is operated for sensing incident light and includes a substrate, a device layer, a semiconductor layer and a color filter layer. The device layer is disposed on the substrate and includes light-sensing regions. The semiconductor layer overlies the device layer and has a first surface and a second surface opposite to the first surface. The first surface is adjacent to the device layer. The semiconductor layer includes microstructures on the second surface. The color filter layer is disposed on the second surface of the semiconductor layer.Type: ApplicationFiled: October 27, 2017Publication date: February 22, 2018Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan TU, Yu-Lung YEH, Hsing-Chih LIN, Chien-Chang HUANG, Shih-Shiung CHEN
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Patent number: 9818779Abstract: A semiconductor device is operated for sensing incident light and includes a substrate, a device layer, a semiconductor layer and a color filter layer. The device layer is disposed on the substrate and includes light-sensing regions. The semiconductor layer overlies the device layer and has a first surface and a second surface opposite to the first surface. The first surface is adjacent to the device layer. The semiconductor layer includes microstructures on the second surface. The color filter layer is disposed on the second surface of the semiconductor layer.Type: GrantFiled: August 14, 2014Date of Patent: November 14, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan Tu, Yu-Lung Yeh, Hsing-Chih Lin, Chien-Chang Huang, Shih-Shiung Chen
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Publication number: 20170236864Abstract: A semiconductor device includes a substrate, light-sensing devices and a bonding layer. The substrate overlies the carrier, and has a first surface and a second surface opposite to the first surface. The substrate includes recesses in the second surface, and surfaces of each of the recesses are wet etched surfaces. The light-sensing devices are disposed on the first surface of the substrate. The bonding layer is disposed between the substrate and the carrier.Type: ApplicationFiled: May 3, 2017Publication date: August 17, 2017Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang HUANG, Wei-Tung HUANG, Yen-Hsiang HSU, Yu-Lung YEH, Chun-Chieh FANG
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Patent number: 9721983Abstract: A semiconductor device includes a carrier substrate, a first color filter, a first photodetector, and a light enhancement structure. The first photodetector is disposed between the carrier substrate and the first color filter. The light enhancement structure is disposed between the first color filter and the carrier substrate and adjacent to the first photodetector for enhancing intensity of light incident the first photodetector.Type: GrantFiled: May 15, 2015Date of Patent: August 1, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang Huang, Chien-Nan Tu, Li-Ming Sun, Yu-Lung Yeh, Yi-Ping Pan
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Patent number: 9711521Abstract: The present disclosure relates to a semiconductor substrate including, a first silicon layer comprising an upper surface with protrusions extending vertically with respect to the upper surface. An isolation layer is arranged over the upper surface meeting the first silicon layer at an interface, and a second silicon layer is arranged over the isolation layer. A method of manufacturing the semiconductor substrate is also provided.Type: GrantFiled: August 31, 2015Date of Patent: July 18, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yong-En Syu, Kuan-Chi Tsai, Kuo-Yu Cheng, Keng-Yu Chen, Shih-Shiung Chen, Shao-Yu Chen, Wei-Kung Tsai, Yu-Lung Yeh
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Publication number: 20170194190Abstract: A semiconductor structure includes a semiconductive substrate including a first surface and a second surface opposite to the first surface, a shallow trench isolation (STI) including a first portion at least partially disposed within the semiconductive substrate and tapered from the first surface towards the second surface, and a second portion disposed inside the semiconductive substrate, coupled with the first portion and extended from the first portion towards the second surface, and a void enclosed by the STI, wherein the void is at least partially disposed within the second portion of the STI.Type: ApplicationFiled: April 1, 2016Publication date: July 6, 2017Inventors: CHING-CHUNG SU, JIECH-FUN LU, JIAN WU, CHE-HSIANG HSUEH, MING-CHI WU, CHI-YUAN WEN, CHUN-CHIEH FANG, YU-LUNG YEH
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Patent number: 9666619Abstract: A semiconductor device includes a carrier, a substrate, light-sensing devices and a bonding layer. The substrate overlies the carrier, and has a first surface and a second surface opposite to the first surface. The substrate includes inverted pyramid recesses in the second surface. The light-sensing devices are disposed on the first surface of the substrate. The bonding layer is disposed between the substrate and the carrier.Type: GrantFiled: April 16, 2015Date of Patent: May 30, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang Huang, Wei-Tung Huang, Yen-Hsiang Hsu, Yu-Lung Yeh, Chun-Chieh Fang
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Patent number: 9620556Abstract: A method for forming an image-sensor device is provided. The method includes providing a first semiconductor substrate having a first surface and a second surface opposite to the first surface. The method includes forming a device layer over the first surface of the first semiconductor substrate. The method includes bonding the first semiconductor substrate to a second semiconductor substrate after the formation of the device layer. The second surface faces the second semiconductor substrate. The method includes forming a diffusion layer between the first semiconductor substrate and the second semiconductor substrate. The diffusion layer has a dopant concentration gradient that increases in a direction from the first semiconductor substrate toward the second semiconductor substrate.Type: GrantFiled: November 10, 2015Date of Patent: April 11, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Nan Tu, Yu-Lung Yeh, Ming-Hsien Wu
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Patent number: 9620553Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.Type: GrantFiled: June 15, 2016Date of Patent: April 11, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang Huang, Hsing-Chih Lin, Chien-Nan Tu, Yu-Lung Yeh
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Publication number: 20170062452Abstract: The present disclosure relates to a semiconductor substrate including, a first silicon layer comprising an upper surface with protrusions extending vertically with respect to the upper surface. An isolation layer is arranged over the upper surface meeting the first silicon layer at an interface, and a second silicon layer is arranged over the isolation layer. A method of manufacturing the semiconductor substrate is also provided.Type: ApplicationFiled: August 31, 2015Publication date: March 2, 2017Inventors: Yong-En Syu, Kuan-Chi Tsai, Kuo-Yu Cheng, Keng-Yu Chen, Shih-Shiung Chen, Shao-Yu Chen, Wei-Kung Tsai, Yu-Lung Yeh
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Publication number: 20160372360Abstract: A semiconductor structure is provided, which includes a semiconductor substrate, a first well region, a second well region, an active region, a shallow trench isolation (STI) and at least one deep trench isolation (DTI). The first well region of a first conductive type is on the semiconductor substrate. The second well region of a second conductive type is on the semiconductor substrate and adjacent to the first well region. The second conductive type is different from the first conductive type. The active region is on the first well region. The active region has a conductive type the same as the second conductive type of the second well region. The STI is between the first and second well regions. The DTI is below the STI. The DTI is disposed between at least a portion of the first well region and at least a portion of the second well region.Type: ApplicationFiled: June 17, 2015Publication date: December 22, 2016Inventors: Chun-Chieh FANG, Chien-Chang HUANG, Chi-Yuan WEN, Jian WU, Ming-Chi WU, Jung-Yu CHENG, Shih-Shiung CHEN, Wei-Tung HUANG, Yu-Lung YEH
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Patent number: 9502556Abstract: In a method for manufacturing a semiconductor device, a substrate including a gate structure is provided. A source region and a drain region are formed at opposing sides of the gate structure and an implant region for a resistor device is formed in the substrate. Pocket implant regions are formed in the source region and the drain region. A dielectric layer is formed to cover the gate structure and the substrate. A portion of dopants in the pocket implant regions interact with portions of dopants in the source region and the drain region to form lightly doped drain regions above the pocket implant regions. A resistor region of the resistor device is defined on the implant region. A portion of the dielectric layer is removed to form a spacer on a sidewall of the gate structure and a resistor protection dielectric layer on a portion of the implant region.Type: GrantFiled: July 1, 2014Date of Patent: November 22, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Chi Wu, Yu-Lung Yeh, Chieh-Shuo Liang, Shih-Chang Lin, Meng-Yi Wu, Hsing-Chih Lin
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Publication number: 20160336365Abstract: A semiconductor device includes a carrier substrate, a first color filter, a first photodetector, and a light enhancement structure. The first photodetector is disposed between the carrier substrate and the first color filter. The light enhancement structure is disposed between the first color filter and the carrier substrate and adjacent to the first photodetector for enhancing intensity of light incident the first photodetector.Type: ApplicationFiled: May 15, 2015Publication date: November 17, 2016Inventors: Chien-Chang HUANG, Chien-Nan TU, Li-Ming SUN, Yu-Lung YEH, Yi-Ping PAN
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Publication number: 20160307946Abstract: A semiconductor device includes a carrier, a substrate, light-sensing devices and a bonding layer. The substrate overlies the carrier, and has a first surface and a second surface opposite to the first surface. The substrate includes inverted pyramid recesses in the second surface. The light-sensing devices are disposed on the first surface of the substrate. The bonding layer is disposed between the substrate and the carrier.Type: ApplicationFiled: April 16, 2015Publication date: October 20, 2016Inventors: Chien-Chang HUANG, Wei-Tung HUANG, Yen-Hsiang HSU, Yu-Lung YEH, Chun-Chieh FANG
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Publication number: 20160300877Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.Type: ApplicationFiled: June 15, 2016Publication date: October 13, 2016Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang HUANG, Hsing-Chih LIN, Chien-Nan TU, Yu-Lung YEH
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Patent number: 9397130Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.Type: GrantFiled: December 26, 2014Date of Patent: July 19, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Chang Huang, Hsing-Chih Lin, Chien-Nan Tu, Yu-Lung Yeh
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Publication number: 20160190191Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.Type: ApplicationFiled: December 26, 2014Publication date: June 30, 2016Inventors: Chien-Chang HUANG, Hsing-Chih LIN, Chien-Nan TU, Yu-Lung YEH
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Patent number: 9337229Abstract: A semiconductor device includes an epitaxial layer including a first surface and a silicon layer disposed on the first surface and including a second surface opposite to the first surface, wherein the silicon layer includes a plurality of pillars on the second surface, a portion of the plurality of pillars on a predetermined portion of the second surface are in substantially same dimension, each of the plurality of pillars on the predetermined portion of the second surface stands substantially orthogonal to the second surface, the plurality of pillars are configured for absorbing an electromagnetic radiation of a predetermined wavelength projected from the epitaxial layer and generating an electrical energy in response to the absorption of the electromagnetic radiation.Type: GrantFiled: April 3, 2014Date of Patent: May 10, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chien Nan Tu, Yu-Lung Yeh, Ming-Hsien Wu, Li-Ming Sun
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Publication number: 20160071899Abstract: A method for forming an image-sensor device is provided. The method includes providing a first semiconductor substrate having a first surface and a second surface opposite to the first surface. The method includes forming a device layer over the first surface of the first semiconductor substrate. The method includes bonding the first semiconductor substrate to a second semiconductor substrate after the formation of the device layer. The second surface faces the second semiconductor substrate. The method includes forming a diffusion layer between the first semiconductor substrate and the second semiconductor substrate. The diffusion layer has a dopant concentration gradient that increases in a direction from the first semiconductor substrate toward the second semiconductor substrate.Type: ApplicationFiled: November 10, 2015Publication date: March 10, 2016Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan TU, Yu-Lung YEH, Ming-Hsien WU
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Patent number: 9269733Abstract: A semiconductor device includes a substrate, a semiconductor layer and a switching element. The semiconductor layer is disposed on the substrate. The semiconductor layer has a light-sensing portion and includes microstructures at a side face area corresponding to the light-sensing portion. The switching element is disposed on the semiconductor layer. In the semiconductor device, the switching element and the light-sensing portion are staggered.Type: GrantFiled: July 11, 2014Date of Patent: February 23, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Nan Tu, Yu-Lung Yeh, Hsing-Chih Lin, Chien-Chang Huang