Patents by Inventor Yu-Ming Lin

Yu-Ming Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12154965
    Abstract: The present disclosure relates to an integrated circuit (IC) chip including a memory cell with a carrier barrier layer for threshold voltage tunning. The memory cell may, for example, include a gate electrode, a ferroelectric structure, and a semiconductor structure. The semiconductor structure is vertically stacked with the gate electrode and the ferroelectric structure, and the ferroelectric structure is between the gate electrode and the semiconductor structure. A pair of source/drain electrodes is laterally separated and respectively on opposite sides of the gate electrode, and a carrier barrier layer separates the source/drain electrodes from the semiconductor structure.
    Type: Grant
    Filed: August 5, 2022
    Date of Patent: November 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rainer Yen-Chieh Huang, Hai-Ching Chen, Yu-Ming Lin, Chung-Te Lin
  • Patent number: 12154938
    Abstract: Embodiments include structures and methods for fabricating an MFM capacitor having a plurality of metal contacts. An embodiment may include a first metal strip, disposed on a substrate and extending in a first direction, a ferroelectric blanket layer, disposed on the first metal strip, a second metal strip, disposed on the ferroelectric blanket layer and extending in a second direction different from the first direction, and a plurality of metal contacts disposed between the first metal strip and the second metal strip and located within an intersection region of the first metal strip and the second metal strip.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: November 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chun-Chieh Lu, Mauricio Manfrini, Marcus Johannes Hendricus Van Dal, Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin, Georgios Vallianitis
  • Publication number: 20240387169
    Abstract: A method for forming a semiconductor device is provided.
    Type: Application
    Filed: May 17, 2023
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Chieh Huang, I-Cheng Chang, Kai-Wen Cheng, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240387534
    Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Shih-Chuan Chiu, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20240389334
    Abstract: In an embodiment, a device includes: a source line extending in a first direction; a bit line extending in the first direction; a back gate between the source line and the bit line, the back gate extending in the first direction; a channel layer surrounding the back gate; a word line extending in a second direction, the second direction perpendicular to the first direction; and a data storage layer extending along the word line, the data storage layer between the word line and the channel layer, the data storage layer between the word line and the bit line, the data storage layer between the word line and the source line.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Inventors: Meng-Han Lin, Han-Jong Chia, Sheng-Chen Wang, Feng-Cheng Yang, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240387696
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes a gate structure sandwiched between and in contact with a first spacer feature and a second spacer feature, a top surface of the first spacer feature and a top surface of the second spacer feature extending above a top surface of the gate structure, a gate self-aligned contact (SAC) dielectric feature over the first spacer feature and the second spacer feature, a contact etch stop layer (CESL) over the gate SAC dielectric feature, a dielectric layer over the CESL, a gate contact feature extending through the dielectric layer, the CESL, the gate SAC dielectric feature, and between the first spacer feature and the second spacer feature to be in contact with the gate structure, and a liner disposed between the first spacer feature and the gate contact feature.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20240389335
    Abstract: A memory device includes a multi-layer stack, a plurality of channel layers and a plurality of ferroelectric layers. The multi-layer stack is disposed on a substrate and includes a plurality of gate layers and a plurality of dielectric layers stacked alternately. The plurality of channel layers penetrate through the multi-layer stack and are laterally spaced apart from each other, wherein the plurality of channel layers include a first channel layer and a second channel layer, and a first electron mobility of the first channel layer is different from a second electron mobility of the second channel layer. Each of the plurality of channel layers are spaced apart from the multi-layer stack by one of the plurality of ferroelectric layers, respectively.
    Type: Application
    Filed: July 28, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-I Wu, Yu-Ming Lin, Shih-Lien Linus Lu, Sai-Hooi Yeong, Bo-Feng Young
  • Publication number: 20240389298
    Abstract: A semiconductor structure includes a lower dielectric portion, a transistor in the lower dielectric portion, a support feature on the lower dielectric portion, and a capacitor. The transistor includes source, drain and gate electrodes. The support feature has an upper surface opposite to the lower dielectric portion, a lower surface confronting the lower dielectric portion, and a peripheral surface interconnecting the upper and lower surfaces. The capacitor includes: a first electrode including a bottom region beneath the lower surface, and a first surrounding region extending upwardly from an edge of the bottom region to surround the peripheral surface; a second electrode including a top region above the upper surface, and a second surrounding region extending downwardly from an edge of the top region to surround the first surrounding region; and a capacitance dielectric portion disposed to isolate the first and second electrodes from each other.
    Type: Application
    Filed: May 19, 2023
    Publication date: November 21, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chao-I WU, Yu-Ming LIN
  • Publication number: 20240389347
    Abstract: A memory device includes a three dimensional memory array having memory cells arranged on multiple floors in rows and columns. Each column is associated with a bit line and a select line. The memory device further includes select gate pairs each being associated with a column. The bit line of a column is connectable to a corresponding a global bit line through a first select gate of a select gate pair associated with the column and a select line of the column is connectable to a corresponding global select line through the second select gate of the select gate pair associated with the column. The plurality of select gate pairs are formed in a different layer than the plurality of memory cells.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Ta Yu, Chia-En Huang, Yi-Ching Liu, Yih Wang, Sai-Hooi Yeong, Yu-Ming Lin
  • Publication number: 20240389344
    Abstract: A memory device and a manufacturing method are provided. The memory device includes a substrate, a transistor, and a memory cell. The substrate has a semiconductor device and a dielectric structure disposed on the semiconductor device. The transistor is disposed over the dielectric structure and is electrically coupled with the semiconductor device. The semiconductor device includes a gate, a channel layer, source drain regions, and a stack of a gate dielectric layer and a first ferroelectric layer. The gate and the source and drain regions are disposed over the dielectric structure. The channel layer is located between the source and drain regions. The stack of the gate dielectric layer and the first ferroelectric layer is disposed between the gate and the channel layer. The memory cell is disposed over the transistor and is electrically connected to one of the source and drain regions. The memory cell includes a ferromagnetic layer or a second ferroelectric layer.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Yu-Ming Lin, Chao-I Wu, Mauricio MANFRINI
  • Publication number: 20240387710
    Abstract: A semiconductor device includes a first transistor. The first transistor includes a source region, a drain region, a semiconductive material layer, a gate dielectric film stack and a gate electrode. The semiconductive material layer is disposed between the source region and the drain region. The gate dielectric film stack is disposed on the semiconductive material layer and includes a first film layer, a second film layer and an intermediate film layer. The first film layer and the second film layer include hafnium. The intermediate layer is sandwiched in between the first film layer and the second film layer and includes hafnium, wherein a hafnium content of the intermediate film layer is lower than a hafnium content of the first film layer and a hafnium content of the second film layer. The gate electrode is disposed on the gate dielectric film stack.
    Type: Application
    Filed: May 15, 2023
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Ting Lin, Wu-Wei Tsai, Hai-Ching Chen, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240389351
    Abstract: A semiconductor chip including a semiconductor substrate, an interconnect structure and a memory cell array is provided. The semiconductor substrate includes a logic circuit. The interconnect structure is disposed on the semiconductor substrate and electrically connected to the logic circuit, and the interconnect structure includes stacked interlayer dielectric layers and interconnect wirings embedded in the stacked interlayer dielectric layers. The memory cell array is embedded in the stacked interlayer dielectric layers. The memory cell array includes driving transistors and memory devices, and the memory devices are electrically connected the driving transistors through the interconnect wirings.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Yu Chang, Han-Jong Chia
  • Publication number: 20240387685
    Abstract: The present disclosure relates to an integrated circuit (IC) chip including a memory cell with a carrier barrier layer for threshold voltage tuning. The memory cell may, for example, include a gate electrode, a ferroelectric structure, and a semiconductor structure. The semiconductor structure is vertically stacked with the gate electrode and the ferroelectric structure, and the ferroelectric structure is between the gate electrode and the semiconductor structure. A pair of source/drain electrodes is laterally separated and respectively on opposite sides of the gate electrode, and a carrier barrier layer separates the source/drain electrodes from the semiconductor structure.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Inventors: Rainer Yen-Chieh Huang, Hai-Ching Chen, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240389345
    Abstract: Various embodiments of the present disclosure are directed towards a method of forming a ferroelectric memory device. In the method, a pair of source/drain regions is formed in a substrate. A gate dielectric and a gate electrode are formed over the substrate and between the pair of source/drain regions. A polarization switching structure is formed directly on a top surface of the gate electrode. By arranging the polarization switching structure directly on the gate electrode, smaller pad size can be realized, and more flexible area ratio tuning can be achieved compared to arranging the polarization switching structure under the gate electrode with the aligned sidewall and same lateral dimensions. In addition, since the process of forming gate electrode can endure higher annealing temperatures, such that quality of the ferroelectric structure is better controlled.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Inventors: Bo-Feng Young, Chung-Te Lin, Sai-Hooi Yeong, Yu-Ming Lin, Sheng-Chih Lai, Chih-Yu Chang, Han-Jong Chia
  • Publication number: 20240389332
    Abstract: A semiconductor structure includes a memory array, a staircase unit, conductive bridge structures, a word line driver and conductive routings. The memory array is disposed in an array region of the semiconductor structure and includes word lines. The staircase unit is disposed in a staircase region and surrounded by the array region. The staircase unit includes first and second staircase steps extending from the word lines of the memory array. The first staircase steps and the second staircase steps face towards each other. The conductive bridge structures are electrically connecting the first staircase steps to the second staircase step. The word line driver is disposed below the memory array and the staircase unit, wherein a central portion of the word line driver is overlapped with a central portion of the staircase unit. The conductive routings extend from the first and the second staircase steps to the word line driver.
    Type: Application
    Filed: July 22, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Shih-Lien Linus Lu, Chia-En Huang, Yih Wang, Yu-Ming Lin
  • Publication number: 20240387658
    Abstract: A semiconductor structure includes a metal gate structure (MG) formed over a substrate, a first gate spacer formed on a first sidewall of the MG, a second gate spacer formed on a second sidewall of the MG opposite to the first sidewall, where the second gate spacer is shorter than the first gate spacer, a source/drain (S/D) contact (MD) adjacent to the MG, where a sidewall of the MD is defined by the second gate spacer, and a contact feature configured to electrically connect the MG to the MD.
    Type: Application
    Filed: July 25, 2024
    Publication date: November 21, 2024
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20240389346
    Abstract: A semiconductor chip including a semiconductor substrate, an interconnect structure and a memory cell array is provided. The semiconductor substrate includes a logic circuit. The interconnect structure is disposed on the semiconductor substrate and electrically connected to the logic circuit, and the interconnect structure includes stacked interlayer dielectric layers and interconnect wirings embedded in the stacked interlayer dielectric layers. The memory cell array is embedded in the stacked interlayer dielectric layers. The memory cell array includes driving transistors and memory devices, and the memory devices are electrically connected the driving transistors through the interconnect wirings.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Yu Chang, Han-Jong Chia
  • Publication number: 20240389336
    Abstract: A semiconductor chip including a semiconductor substrate, an interconnect structure and memory devices is provided. The semiconductor substrate includes first transistors, and the first transistors are negative capacitance field effect transistors. The interconnect structure is disposed over the semiconductor substrate and electrically connected to the first transistors, and the interconnect structure includes stacked interlayer dielectric layers, interconnect wirings, and second transistors embedded in the stacked interlayer dielectric layers. The memory devices are embedded in the stacked interlayer dielectric layers and electrically connected to the second transistors.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sheng-Chen Wang, Sai-Hooi Yeong, Yu-Ming Lin, Chao-I Wu
  • Publication number: 20240389260
    Abstract: A card connecting assembly mountable on a circuit board for insertion of an electronic card includes a card connector disposed on the circuit board, and an electronic card mounting structure having first and second guiderails for the electronic card to be slidably insertable thereinto, and a latch mechanism integrally formed and elastically connected with the first guiderail. The latch mechanism includes an operating portion and a latch portion. With the latch portion engaged in the notch when the electronic card is inserted into the card connector to prevent removal thereof. Through the operating portion operably and elastically displaced away from the first guiderail, the latch portion is disengageable from the notch, the electronic card is permitted to be removed from the card connector.
    Type: Application
    Filed: March 8, 2024
    Publication date: November 21, 2024
    Applicant: Jabil Circuit ( Singapore) Pte. Ltd.
    Inventors: Hsun-Wei Fan, Chen-Hsuan Hsu, Chung-Ju Wang, Yu-Ming Lin
  • Patent number: 12150308
    Abstract: A semiconductor chip including a semiconductor substrate, an interconnect structure and a memory cell array is provided. The semiconductor substrate includes a logic circuit. The interconnect structure is disposed on the semiconductor substrate and electrically connected to the logic circuit, and the interconnect structure includes stacked interlayer dielectric layers and interconnect wirings embedded in the stacked interlayer dielectric layers. The memory cell array is embedded in the stacked interlayer dielectric layers. The memory cell array includes driving transistors and memory devices, and the memory devices are electrically connected the driving transistors through the interconnect wirings.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: November 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Yu Chang, Han-Jong Chia