Patents by Inventor Yufei Chen

Yufei Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scrubber operation
    Publication number: 20010035197
    Abstract: Methods and apparatuses are provided that remove a scrubber brush from contact with a wafer surface prior to slowing down the scrubber brush's rotational rate. The scrubbing method may comprise rotating a scrubber brush at a non-reduced rate, while the scrubber brush is in contact with the wafer and removing the scrubber brush from contact with the wafer while rotating the scrubber brush at the non-reduced rate. The scrubbing apparatus has a controller programmed to perform the scrubbing method.
    Type: Application
    Filed: January 26, 2001
    Publication date: November 1, 2001
    Applicant: Applied Materials, Inc.
    Inventors: Brian J. Brown, Yufei Chen, David G. Andeen, Madhavi Chandrachood