Patents by Inventor Yukio Nishida
Yukio Nishida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11462556Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array provided in a first region; a first transistor provided in a second region; a second transistor provided in a third region; and an insulative laminated film. The first and second transistors each include a semiconductor layer, a gate electrode, and a gate insulating film. A concentration of boron (B) in the gate electrode of the second transistor is higher than that of the first transistor. The insulative laminated film includes a first insulating film contacting the surface of the semiconductor substrate, and a second insulating film having a smaller diffusion coefficient of hydrogen (H) than that of the first insulating film. The second insulating film has a first portion contacting the semiconductor portion, and the first portion surrounds the third region.Type: GrantFiled: October 15, 2020Date of Patent: October 4, 2022Assignee: Kioxia CorporationInventors: Tetsuya Furukawa, Tomoaki Shino, Mitsuhiro Noguchi, Shinichi Watanabe, Yukio Nishida, Hiroyasu Tanaka
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Publication number: 20210028185Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array provided in a first region; a first transistor provided in a second region; a second transistor provided in a third region; and an insulative laminated film. The first and second transistors each include a semiconductor layer, a gate electrode, and a gate insulating film. A concentration of boron (B) in the gate electrode of the second transistor is higher than that of the first transistor. The insulative laminated film includes a first insulating film contacting the surface of the semiconductor substrate, and a second insulating film having a smaller diffusion coefficient of hydrogen (H) than that of the first insulating film. The second insulating film has a first portion contacting the semiconductor portion, and the first portion surrounds the third region.Type: ApplicationFiled: October 15, 2020Publication date: January 28, 2021Applicant: TOSHIBA MEMORY CORPORATIONInventors: Tetsuya FURUKAWA, Tomoaki SHINO, Mitsuhiro NOGUCHI, Shinichi WATANABE, Yukio NISHIDA, Hiroyasu TANAKA
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Patent number: 10840257Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array provided in a first region; a first transistor provided in a second region; a second transistor provided in a third region; and an insulative laminated film. The first and second transistors each include a semiconductor layer, a gate electrode, and a gate insulating film. A concentration of boron (B) in the gate electrode of the second transistor is higher than that of the first transistor. The insulative laminated film includes a first insulating film contacting the surface of the semiconductor substrate, and a second insulating film having a smaller diffusion coefficient of hydrogen (H) than that of the first insulating film. The second insulating film has a first portion contacting the semiconductor portion, and the first portion surrounds the third region.Type: GrantFiled: February 11, 2019Date of Patent: November 17, 2020Assignee: TOSHIBA MEMORY CORPORATIONInventors: Tetsuya Furukawa, Tomoaki Shino, Mitsuhiro Noguchi, Shinichi Watanabe, Yukio Nishida, Hiroyasu Tanaka
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Publication number: 20200066743Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array provided in a first region; a first transistor provided in a second region; a second transistor provided in a third region; and an insulative laminated film. The first and second transistors each include a semiconductor layer, a gate electrode, and a gate insulating film. A concentration of boron (B) in the gate electrode of the second transistor is higher than that of the first transistor. The insulative laminated film includes a first insulating film contacting the surface of the semiconductor substrate, and a second insulating film having a smaller diffusion coefficient of hydrogen (H) than that of the first insulating film. The second insulating film has a first portion contacting the semiconductor portion, and the first portion surrounds the third region.Type: ApplicationFiled: February 11, 2019Publication date: February 27, 2020Applicant: TOSHIBA MEMORY CORPORATIONInventors: Tetsuya FURUKAWA, Tomoaki SHINO, Mitsuhiro NOGUCHI, Shinichi WATANABE, Yukio NISHIDA, Hiroyasu TANAKA
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Patent number: 9842766Abstract: A semiconductor device according to an embodiment, includes a plurality of wires, a first dielectric film, and a second dielectric film. The plurality of wires are arranged above a semiconductor substrate so as to extend in a first direction and aligned via a first cavity. The first dielectric film has a plurality of portions arranged above the plurality of wires so as to extend in a second direction substantially perpendicular to the plurality of wires and aligned along the first direction via a second cavity leading to the first cavity. The second dielectric film is formed above the first dielectric film so as to cover the second cavity.Type: GrantFiled: January 28, 2015Date of Patent: December 12, 2017Assignee: TOSHIBA MEMORY CORPORATIONInventors: Masato Endo, Kazunori Masuda, Yukio Nishida, Naoya Kami, Yuuichi Tatsumi, Naoyuki Kondo
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Patent number: 9780232Abstract: To enhance the performance of a semiconductor device. In a method for manufacturing a semiconductor device, a metal film is formed over a semiconductor substrate having an insulating film formed on a surface thereof, and then the metal film is removed in a memory cell region, whereas, in a part of a peripheral circuit region, the metal film is left. Next, a silicon film is formed over the semiconductor substrate, then the silicon film is patterned in the memory cell region, and, in the peripheral circuit region, the silicon film is left so that an outer peripheral portion of the remaining metal film is covered with the silicon film. Subsequently, in the peripheral circuit region, the silicon film, the metal film, and the insulating film are patterned for forming an insulating film portion formed of the insulating film, a metal film portion formed of the metal film, and a conductive film portion formed of the silicon film.Type: GrantFiled: February 19, 2016Date of Patent: October 3, 2017Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yukio Nishida, Tomohiro Yamashita
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Publication number: 20170193204Abstract: Provided are a content control device, a control method therefor, and a program, with which the usage of digital content can be controlled appropriately. This content control device 100 is equipped with: a storage unit 102 that stores, for each content, the provided count (which is an instance count of the content being provided at a given point in time), and the providable count of the content; a provision determination unit 104 that, based on the provided count and the providable count, determines whether object content can be provided to a candidate device that receives the provided object content; and a provision count management unit 106 that, when the object content is provided to the candidate device 12 in accordance with the determination result from the provision determination unit 104, adds the provided count stored in relation to the object content.Type: ApplicationFiled: May 18, 2015Publication date: July 6, 2017Inventors: Yukio NISHIDA, Noriyoshi HIROI
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Publication number: 20170195881Abstract: In order to enable a user's portable terminal to be authenticated by a method which is easy for the user, a control device of this information processing system uses terminal information transmitted from a portable terminal and containing a first identifier to generate a second identifier, which is returned to the portable terminal. The portable terminal presents the obtained second identifier in a visual manner. When the control device detects, on the basis of a photographic image from an imaging device which photographs a predetermined imaging area, that the generated second identifier has been presented visually by the portable terminal, the control device authenticates that portable terminal.Type: ApplicationFiled: May 18, 2015Publication date: July 6, 2017Inventors: Yukio NISHIDA, Noriyoshi HIROI
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Publication number: 20170038912Abstract: An information providing device (100) includes: a display processing unit (101) that causes each of plural pieces of different specific content corresponding to plural information content groups to be displayed on a display unit or a projection surface while switching the pieces of specific content over time; a detection unit (102) that detects a predetermined operation of a user; and a provision unit (103) that recognizes piece of specific content which is a target of the detected predetermined operation and provides an operation interface for the user relating to an information content group corresponding to the recognized piece of specific content.Type: ApplicationFiled: March 4, 2015Publication date: February 9, 2017Applicants: NEC Solution Innovators, Ltd., NEC CorporationInventors: Yukio NISHIDA, Tomoko SENDAI, Noriyoshi HIROI
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Publication number: 20170032349Abstract: An information processing apparatus (100) includes a symbol detection unit (101) that detects an identification symbol included in an object based on sensor information, and an association unit (102) that associates, in accordance with a positional relationship between a commodity or a commodity symbol corresponding to the commodity and the object including the detected identification symbol, identification information obtained using the detected identification symbol with information on the commodity.Type: ApplicationFiled: March 4, 2015Publication date: February 2, 2017Applicants: NEC Solution Innovators, Ltd., NEC CorporationInventors: Yukio NISHIDA, Tomoko SENDAI, Noriyoshi HIROI
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Patent number: 9379150Abstract: The present invention improves the performance of an image sensor. In a planar view, fluorine is introduced into a part overlapping with a channel region in a gate electrode GE1 of an amplification transistor and is not introduced into the interior of a semiconductor substrate 1S. Concretely as shown in FIG. 20, a resist film FR1 is patterned in the manner of opening the part planarly overlapping with the channel region in the gate electrode GE1. Then fluorine is injected into the interior of the gate electrode GE1 exposed from an opening OP1 by an ion implantation method using the resist film FR1 in which the opening OP1 is formed as a mask.Type: GrantFiled: October 25, 2014Date of Patent: June 28, 2016Assignee: Renesas Electronics CorporationInventors: Yukio Nishida, Tomohiro Yamashita, Yuki Yamamoto
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Publication number: 20160172509Abstract: To enhance the performance of a semiconductor device. In a method for manufacturing a semiconductor device, a metal film is formed over a semiconductor substrate having an insulating film formed on a surface thereof, and then the metal film is removed in a memory cell region, whereas, in a part of a peripheral circuit region, the metal film is left. Next, a silicon film is formed over the semiconductor substrate, then the silicon film is patterned in the memory cell region, and, in the peripheral circuit region, the silicon film is left so that an outer peripheral portion of the remaining metal film is covered with the silicon film. Subsequently, in the peripheral circuit region, the silicon film, the metal film, and the insulating film are patterned for forming an insulating film portion formed of the insulating film, a metal film portion formed of the metal film, and a conductive film portion formed of the silicon film.Type: ApplicationFiled: February 19, 2016Publication date: June 16, 2016Inventors: Yukio NISHIDA, Tomohiro YAMASHITA
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Publication number: 20160099286Abstract: The performance of a semiconductor device is improved by preventing 1/f noise from being generated in a peripheral transistor, in the case where the occupation area of photodiodes, which are included in each of a plurality of pixels that form an image pickup device, is expanded. In the semiconductor device, the gate electrode of an amplification transistor is formed by both a gate electrode part over an active region and a large width part that covers the boundary between the active region and an element isolation region and the active region near the boundary and that has a gate length larger than that of the gate electrode part.Type: ApplicationFiled: December 15, 2015Publication date: April 7, 2016Inventors: Yuki YAMAMOTO, Yukio NISHIDA, Tomohiro YAMASHITA
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Patent number: 9299854Abstract: To enhance the performance of a semiconductor device. In a method for manufacturing a semiconductor device, a metal film is formed over a semiconductor substrate having an insulating film formed on a surface thereof, and then the metal film is removed in a memory cell region, whereas, in a part of a peripheral circuit region, the metal film is left. Next, a silicon film is formed over the semiconductor substrate, then the silicon film is patterned in the memory cell region, and, in the peripheral circuit region, the silicon film is left so that an outer peripheral portion of the remaining metal film is covered with the silicon film. Subsequently, in the peripheral circuit region, the silicon film, the metal film, and the insulating film are patterned for forming an insulating film portion formed of the insulating film, a metal film portion formed of the metal film, and a conductive film portion formed of the silicon film.Type: GrantFiled: February 24, 2014Date of Patent: March 29, 2016Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yukio Nishida, Tomohiro Yamashita
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Publication number: 20160078940Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes first word lines equipped with flag-like portions on one side of the block in the row direction and equipped with no flag-like portions on the other side of the block in the row direction, and second word lines equipped with no flag-like portions on the one side of the block in the row direction and equipped with flag-like portions on the other side of the block in the row direction.Type: ApplicationFiled: February 6, 2015Publication date: March 17, 2016Applicant: Kabushiki Kaisha ToshibaInventors: Naoya KAMI, Kazunori Masuda, Yuuichi Tatsumi, Naoyuki Kondo, Masato Endo, Yukio Nishida
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Patent number: 9287259Abstract: MISFETs after the 32 nm technology node have a High-k gate insulating film and a metal gate electrode. Such MISFETs have the problem that the absolute value of the threshold voltage of n-MISFET and p-MISFET inevitably increases by the subsequent high temperature heat treatment. The threshold voltage is therefore controlled by forming various threshold voltage adjusting metal films on a High-k gate insulating film and introducing a film component from them into the High-k gate insulating film. The present inventors have however revealed that lanthanum or the like introduced into the High-k gate insulating film of the n-MISFET is likely to transfer to the STI region by the subsequent heat treatment. The semiconductor integrated circuit device according to the present invention is provided with an N channel threshold voltage adjusting element outward diffusion preventing region in the surface portion of the element isolation region below and at the periphery of the gate stack of the n-MISFET.Type: GrantFiled: April 9, 2012Date of Patent: March 15, 2016Assignee: Renesas Electronics CorporationInventors: Hirofumi Shinohara, Yukio Nishida, Katsuyuki Horita, Tomohiro Yamashita, Hidekazu Oda
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Publication number: 20160052364Abstract: In a vehicular air conditioner in which heat of recirculated air inputted by an indoor air blower, is exchanged by an indoor heat exchanger so as to be retransmitted to a vehicle, there are provided with a cyclone fan, which aspirates heavy fresh outside air including snow or the like, so as to mix the outside air with the recirculated air inputted by the indoor air blower, and a partition plate, which separates light air in which snow or the like is not included, and heavy air in which snow or the like is included, by centrifugal force of the cyclone fan at a blowoff outlet of the cyclone fan.Type: ApplicationFiled: June 28, 2013Publication date: February 25, 2016Applicant: Mitsubishi Electric CorporationInventors: Yasuyuki SOGAWA, Yukio NISHIDA
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Publication number: 20160056067Abstract: A semiconductor device according to an embodiment, includes a plurality of wires, a first dielectric film, and a second dielectric film. The plurality of wires are arranged above a semiconductor substrate so as to extend in a first direction and aligned via a first cavity. The first dielectric film has a plurality of portions arranged above the plurality of wires so as to extend in a second direction substantially perpendicular to the plurality of wires and aligned along the first direction via a second cavity leading to the first cavity. The second dielectric film is formed above the first dielectric film so as to cover the second cavity.Type: ApplicationFiled: January 28, 2015Publication date: February 25, 2016Applicant: Kabushiki Kaisha ToshibaInventors: Masato ENDO, Kazunori Masuda, Yukio Nishida, Naoya Kami, Yuuichi Tatsumi, Naoyuki Kondo
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Patent number: 9245921Abstract: The performance of a semiconductor device is improved by preventing 1/f noise from being generated in a peripheral transistor, in the case where the occupation area of photodiodes, which are included in each of a plurality of pixels that form an image pickup device, is expanded. In the semiconductor device, the gate electrode of an amplification transistor is formed by both a gate electrode part over an active region and a large width part that covers the boundary between the active region and an element isolation region and the active region near the boundary and that has a gate length larger than that of the gate electrode part.Type: GrantFiled: November 10, 2014Date of Patent: January 26, 2016Assignee: Renesas Electronics CorporationInventors: Yuki Yamamoto, Yukio Nishida, Tomohiro Yamashita
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Publication number: 20150206920Abstract: The performance of a semiconductor device is improved by preventing 1/f noise from being generated in a peripheral transistor, in the case where the occupation area of photodiodes, which are included in each of a plurality of pixels that form an image pickup device, is expanded. In the semiconductor device, the gate electrode of an amplification transistor is formed by both a gate electrode part over an active region and a large width part that covers the boundary between the active region and an element isolation region and the active region near the boundary and that. has a gate length larger than that of the gate electrode part.Type: ApplicationFiled: November 10, 2014Publication date: July 23, 2015Inventors: Yuki YAMAMOTO, Yukio NISHIDA, Tomohiro YAMASHITA