Patents by Inventor Yukio Watanabe

Yukio Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9052615
    Abstract: An EUV light source apparatus by which detachment of a chamber or a part of the chamber, movement to a maintenance area, and highly accurate placement relative to projection optics can be performed easily for maintenance of the EUV light source apparatus. The EUV light source apparatus is an apparatus for generating plasma by applying a laser beam to a target material within a chamber and entering EUV light radiated from the plasma into projection optics of exposure equipment, and includes a positioning mechanism for positioning the chamber or a maintenance unit of the chamber in a predetermined location where an optical axis of the collected extreme ultraviolet light and an optical axis of the projection optics of the exposure equipment are aligned, and a movement mechanism for moving the chamber or the maintenance unit of the chamber between the predetermined location and a maintenance area.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: June 9, 2015
    Assignee: GIGAPHOTON INC.
    Inventors: Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki
  • Patent number: 9046651
    Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: June 2, 2015
    Assignee: GIGAPHOTON INC.
    Inventors: Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi
  • Patent number: 9006687
    Abstract: A first lens configured to convert light from the objective lens into parallel light includes a concave lens part having a concave curved face in a center portion of a flat face, and a convex lens part having a convex curved face around a flat face. Further, the first lens includes first and second regions configured to diverge light through the flat face and the concave curved face and a third region configured to collect light through the convex curved face and the concave curved face. When the sample is on a sample table and sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens enters the second region. In contrast, when the sample is directly on the sample table, the light enters the third region.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: April 14, 2015
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Yukio Watanabe
  • Publication number: 20150028226
    Abstract: Even when the distance from an objective lens to a sample differs, the distribution of light from the sample can be detected accurately. A first lens 23 for converting light from the objective lens into parallel light is composed of a concave lens part 32 having a concave curved face 32c in a center portion of a flat face 32a, and a convex lens part 33 having a convex curved face 33c around a flat face 33b. Further, the first lens 23 includes first and second regions for diverging light through the flat face 33b and the concave curved face 32c and a third region for collecting light through the convex curved face 33c and the concave curved face 32c. When the sample is placed on a sample table while being sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens is caused to enter the second region. In contrast, when the sample is directly placed on the sample table, the light is caused to enter the third region.
    Type: Application
    Filed: February 20, 2013
    Publication date: January 29, 2015
    Applicant: Sharp Kabushiki Kaisha
    Inventor: Yukio Watanabe
  • Publication number: 20150008338
    Abstract: Sensitivity is increased by enhancing the fluorescence collection efficiency while suppressing the increase in size of an objective lens. An objective lens 17 is structured to have a convex lens part 26 in a center portion and to have a truncated conical cylindrical body 27 around the convex lens part 26. Therefore, a fluorescence component b having too wide an emission angle to fit in the convex lens part 26, of fluorescence emitted from a sample 16, can be collected by total reflection on an outer peripheral surface 27b of the cylindrical body 27. Thus, even light having too wide an emission angle to be collected by a normal convex lens can be collected. As a result, it is possible to suppress the increase in size of the objective lens, to enhance the fluorescence collection efficiency, and to prevent the S/N ratio from being decreased by the existence of undetected fluorescence that is blocked by a prism 20. This can realize a fluorescence information reading device having high sensitivity.
    Type: Application
    Filed: November 29, 2012
    Publication date: January 8, 2015
    Inventor: Yukio Watanabe
  • Publication number: 20140332700
    Abstract: An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.
    Type: Application
    Filed: July 23, 2014
    Publication date: November 13, 2014
    Inventors: Miwa IGARASHI, Yukio WATANABE, Kouji ASHIKAWA, Norio IWAI, Osamu WAKABAYASHI
  • Patent number: 8811438
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: August 19, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
  • Patent number: 8787413
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: July 22, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino
  • Patent number: 8779402
    Abstract: A target supply device includes a target supply device body including a nozzle having a through-hole through which a target material is discharged, a piezoelectric member having first and second surfaces and connected to the target supply device body at the first surface, the piezoelectric member being configured such that a distance between the first and second surfaces changes in according with an externally supplied electric signal, an elastic member having first and second ends and connected to the second surface of the piezoelectric member at the first end, the elastic member being configured such that a distance between the first and second ends extends or contract in accordance with an externally applied force, and a regulating member configured to regulate a distance between the second end of the elastic member and the target supply device body.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: July 15, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Takayuki Yabu, Yukio Watanabe, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
  • Patent number: 8759804
    Abstract: A chamber apparatus used with an external apparatus having an obscuration region may include: a chamber in which extreme ultraviolet light is generated; a collector mirror provided in the chamber for collecting the extreme ultraviolet light; a support for securing the collector mirror to the chamber; and an output port provided to the chamber for allowing the extreme ultraviolet light collected by the collector mirror to be introduced therethrough into the external apparatus.
    Type: Grant
    Filed: March 11, 2011
    Date of Patent: June 24, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Toshihiro Nishisaka, Yukio Watanabe, Tamotsu Abe, Osamu Wakabayashi
  • Publication number: 20140131587
    Abstract: An extreme ultraviolet light source apparatus for supplying extreme ultraviolet light to a processing unit for performing processing by using the extreme ultraviolet light. The extreme ultraviolet light source apparatus includes: a chamber in which the extreme ultraviolet light to be supplied to the processing unit is generated; a collector mirror for collecting the extreme ultraviolet light generated in the chamber to output the extreme ultraviolet light to the processing unit; and an optical path connection module for defining a route of the extreme ultraviolet light between the chamber and the processing unit and isolating the route of the extreme ultraviolet light from outside.
    Type: Application
    Filed: January 17, 2014
    Publication date: May 15, 2014
    Applicant: GIGAPHOTON INC.
    Inventors: Yukio WATANABE, Osamu WAKABAYASHI, Miwa IGARASHI
  • Patent number: 8698111
    Abstract: An apparatus for generating extreme ultraviolet light by exciting a target material to turn the target material into plasma may include: a frame; a chamber in which the extreme ultraviolet light is generated; a target supply unit for supplying the target material into the chamber; a first connection member for connecting the frame and the chamber flexibly; a mechanism for fixing the target supply unit to the frame; and a second connection member for connecting the target supply unit to the chamber flexibly.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: April 15, 2014
    Assignee: Gigaphonton Inc.
    Inventors: Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Hideo Hoshino
  • Patent number: 8669542
    Abstract: An extreme ultraviolet light source apparatus for supplying extreme ultraviolet light to a processing unit for performing processing by using the extreme ultraviolet light. The extreme ultraviolet light source apparatus includes: a chamber in which the extreme ultraviolet light to be supplied to the processing unit is generated; a collector mirror for collecting the extreme ultraviolet light generated in the chamber to output the extreme ultraviolet light to the processing unit; and an optical path connection module for defining a route of the extreme ultraviolet light between the chamber and the processing unit and isolating the route of the extreme ultraviolet light from outside.
    Type: Grant
    Filed: April 21, 2010
    Date of Patent: March 11, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Osamu Wakabayashi, Miwa Igarashi
  • Publication number: 20140001369
    Abstract: A chamber apparatus used with an external apparatus having an obscuration region may include: a chamber in which extreme ultraviolet light is generated; a collector mirror provided in the chamber for collecting the extreme ultraviolet light; a support for securing the collector mirror to the chamber; and an output port provided to the chamber for allowing the extreme ultraviolet light collected by the collector mirror to be introduced therethrough into the external apparatus.
    Type: Application
    Filed: August 2, 2013
    Publication date: January 2, 2014
    Applicant: GIGAPHOTON INC.
    Inventors: Toshihiro NISHISAKA, Yukio WATANABE, Tamotsu ABE, Osamu WAKABAYASHI
  • Patent number: 8593672
    Abstract: An information equipment apparatus provided with: an operation section; a communication section which carries out communication with a terminal apparatus storing identification data of an operator related to an operation in the operation section, by using a human body of the operator as a communication path; and a control section which, in coordination with a detection of the operation in the operation section, executes an identification of the operator based on the identification data by carrying out communication with the terminal apparatus via the communication section, and according to a result of the identification, controls a control operation corresponding to the operation in the operation section.
    Type: Grant
    Filed: April 28, 2010
    Date of Patent: November 26, 2013
    Assignee: Konica Minolta Business Technologies, Inc.
    Inventors: Motoaki Aoyama, Shunichi Kumakura, Yukio Watanabe
  • Publication number: 20130294470
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Application
    Filed: July 8, 2013
    Publication date: November 7, 2013
    Inventors: Yukio WATANABE, Hideyuki HAYASHI, Kouji KAKIZAKI, Michio SHINOZAKI, Hideo HOSHINO
  • Publication number: 20130294469
    Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion an
    Type: Application
    Filed: July 8, 2013
    Publication date: November 7, 2013
    Inventors: Yukio WATANABE, Hideyuki HAYASHI, Kouji KAKIZAKI, Michio SHINOZAKI, Hideo HOSHINO
  • Publication number: 20130277452
    Abstract: A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus; a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit; and a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber.
    Type: Application
    Filed: June 24, 2013
    Publication date: October 24, 2013
    Inventors: Takayuki YABU, Kouji KAKIZAKI, Yukio WATANABE, Osamu WAKABAYASHI
  • Patent number: 8497489
    Abstract: A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus; a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit; and a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: July 30, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Takayuki Yabu, Kouji Kakizaki, Yukio Watanabe, Osamu Wakabayashi
  • Patent number: 8498317
    Abstract: A temperature controller for a gas laser which controls temperatures of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: July 30, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki, Hideo Hoshino