Patents by Inventor Yung-Feng Chang

Yung-Feng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11944412
    Abstract: A blood pressure detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a gas-pressure-sensing element, a driving-chip element, an encapsulation layer and a valve layer. The substrate includes inlet apertures. The microelectromechanical element and the gas-pressure-sensing element are stacked and integrally formed on the substrate. The encapsulation layer is encapsulated and positioned on the substrate. A flowing-channel space is formed above the microelectromechanical element and the gas-pressure-sensing element. The encapsulation layer includes an outlet aperture in communication with an airbag. The driving-chip element controls the microelectromechanical element, the gas-pressure-sensing element and valve units to transport gas.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: April 2, 2024
    Assignee: MICROJET TECHNOLOGY CO., LTD.
    Inventors: Hao-Jan Mou, Ying-Lun Chang, Ching-Sung Lin, Chi-Feng Huang, Yung-Lung Han, Chang-Yen Tsai, Wei-Ming Lee, Chun-Yi Kuo, Tsung-I Lin
  • Patent number: 11948935
    Abstract: Provided is a tap cell including a substrate, a first well, a second well, a first doped region, and the second doped region. The substrate has a first region and a second region. The first well has a first dopant type and includes a first portion disposed in the first region and a second portion extending into the second region. The second well has a second dopant type and includes a third portion disposed in the second region and a fourth portion extending into the first region. The first doped region having the first dopant type is disposed in the second portion of the first well and the third portion of the second well along the second region. The second doped region having the second dopant type is disposed in the first portion of the first well and the fourth portion of the second well along the first region.
    Type: Grant
    Filed: November 18, 2022
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung-Feng Chang, Bao-Ru Young, Tung-Heng Hsieh, Chun-Chia Hsu
  • Publication number: 20240096873
    Abstract: Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of semiconductor layers. The semiconductor layers are stacked over the semiconductor substrate and between the first and second epitaxy regions. A first conductive feature is formed over the first epitaxy region and outside an oxide diffusion region. A second conductive feature is formed over the second epitaxy region and outside the oxide diffusion region. A third conductive feature is formed over the first epitaxy region and within the oxide diffusion region. A fourth conductive feature is formed over the second epitaxy region and within the oxide diffusion region. The oxide diffusion region is disposed between the first and second conductive features.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Chun-Chia HSU, Tung-Heng HSIEH, Yung-Feng CHANG, Bao-Ru YOUNG, Jam-Wem LEE, Chih-Hung WANG
  • Publication number: 20240030220
    Abstract: Semiconductor structures and methods are provided. A method according to the present disclosure includes providing a workpiece that includes a plurality of active regions including channel regions and source/drain regions, and a plurality of dummy gate stacks intersecting the plurality of active regions at the channel regions, the plurality of dummy gate stacks including a device portion and a terminal end portion. The method further includes depositing a gate spacer layer over the workpiece, anisotropically etching the workpiece to recess the source/drain regions and to form a gate spacer from the gate spacer layer, forming a patterned photoresist layer over the workpiece to expose the device portion and the recessed source/drain regions while the terminal end portion is covered, and after the forming of the patterned photoresist layer, epitaxially forming source/drain features over the recessed source/drain regions.
    Type: Application
    Filed: August 8, 2023
    Publication date: January 25, 2024
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11881477
    Abstract: An array of poly lines on an active device area of an integrated chip is extended to form a dummy device structure on an adjacent isolation region. The resulting dummy device structure is an array of poly lines having the same line width, line spacing, and pitch as the array of poly lines on the active device area. The poly lines of the dummy device structure are on grid with the poly lines on the active device area. Because the dummy device structure is formed of poly lines that are on grid with the poly lines on the active device area, the dummy device structure may be much closer to the active device area than would otherwise be possible. The resulting proximity of the dummy device structure to the active device area improves anti-dishing performance and reduces empty space on the integrated chip.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: January 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung Feng Chang, Bao-Ru Young, Yu-Jung Chang, Tzung-Chi Lee, Tung-Heng Hsieh, Chun-Chia Hsu
  • Patent number: 11855081
    Abstract: Semiconductor structures and methods are provided. A method according to the present disclosure includes providing a workpiece that includes a plurality of active regions including channel regions and source/drain regions, and a plurality of dummy gate stacks intersecting the plurality of active regions at the channel regions, the plurality of dummy gate stacks including a device portion and a terminal end portion. The method further includes depositing a gate spacer layer over the workpiece, anisotropically etching the workpiece to recess the source/drain regions and to form a gate spacer from the gate spacer layer, forming a patterned photoresist layer over the workpiece to expose the device portion and the recessed source/drain regions while the terminal end portion is covered, and after the forming of the patterned photoresist layer, epitaxially forming source/drain features over the recessed source/drain regions.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11855073
    Abstract: Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first and second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. A first conductive feature is formed over the first epitaxy region and outside an oxide diffusion region. A second conductive feature is formed over the second epitaxy region and outside the oxide diffusion region. The oxide diffusion region is disposed between the first and second conductive features.
    Type: Grant
    Filed: September 30, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Chia Hsu, Tung-Heng Hsieh, Yung-Feng Chang, Bao-Ru Young, Jam-Wem Lee, Chih-Hung Wang
  • Publication number: 20230385505
    Abstract: A method for making an integrated circuit (IC) includes inserting black boxes into a layout of the IC; connecting the black boxes with a connectivity network; and inserting first dummy patterns in areas of the layout outside of the black boxes and the connectivity network. After the inserting of the first dummy patterns, the method further includes replacing the black boxes with circuit macros that have one-to-one correspondence with the black boxes, wherein each of the circuit macros includes circuit patterns in a central area of the respective circuit macro and second dummy patterns surrounding the central area. In the method, at least one of the following operations is performed by an electronic design automation (EDA) tool: the inserting of the black boxes, the connecting of the black boxes, the inserting of the first dummy patterns, and the replacing of the black boxes with the circuit macros.
    Type: Application
    Filed: May 31, 2022
    Publication date: November 30, 2023
    Inventors: Yung Feng Chang, Yu-Jung Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230378318
    Abstract: A method for forming a semiconductor device structure includes forming a fin structure with alternating stacked first semiconductor layers and second semiconductor layers over a substrate. The method also includes forming a cladding layer over the fin structure. The method also includes forming a fin isolation structure beside the cladding layer. The method also includes forming a capping layer over the fin isolation structure. The method also includes forming a dummy gate structure across the capping layer. The method also includes patterning the dummy gate structure. The method also includes patterning the capping layer by using the dummy gate structure as a mask layer. The method also includes removing the dummy gate structure.
    Type: Application
    Filed: May 17, 2022
    Publication date: November 23, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Jyun WU, Yung Feng CHANG, Tung-Heng HSIEH, Bao-Ru YOUNG
  • Publication number: 20230378158
    Abstract: A semiconductor structure includes a substrate having a first well of a first conductivity type and a second well of a second conductivity type. From a top view, the first well includes first and seconds edges extending along a first direction. The second edge has multiple turns, resulting in the first well having a protruding section and a recessed section. The semiconductor structure further includes a first source/drain feature over the protruding section and a second source/drain feature over a main body of the first well. The first source/drain feature is of the first conductivity type. The second source/drain feature is of the second conductivity type. The first and the second source/drain features are generally aligned along a second direction perpendicular to the first direction from the top view.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 23, 2023
    Inventors: Yung Feng Chang, Chun-Chia Hsu, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11721687
    Abstract: A semiconductor structure includes a substrate having a first well of a first conductivity type and a second well of a second conductivity type. From a top view, the first well includes first and seconds edges extending along a first direction. The second edge has multiple turns, resulting in the first well having a protruding section and a recessed section. The semiconductor structure further includes a first source/drain feature over the protruding section and a second source/drain feature over a main body of the first well. The first source/drain feature is of the first conductivity type. The second source/drain feature is of the second conductivity type. The first and the second source/drain features are generally aligned along a second direction perpendicular to the first direction from the top view.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung Feng Chang, Chun-Chia Hsu, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230197640
    Abstract: Integrated circuit (IC) chips and seal ring structures are provided. An IC chip according to the present disclosure includes a circuit region and a seal ring region surrounding the circuit region. The seal ring region includes a first active region extending lengthwise in a first direction and a first gate structure disposed on the first active region. The first gate structure extends lengthwise in a second direction that is tilted from the first direction. The first direction and the second direction form a tilted angle therebetween.
    Type: Application
    Filed: December 20, 2021
    Publication date: June 22, 2023
    Inventors: Yu-Bey Wu, Yen-Lian Lai, Yung Feng Chang, Jiun-Ming Kuo, Yuan-Ching Peng
  • Publication number: 20230137766
    Abstract: Semiconductor structures and methods are provided. A semiconductor structure according to an embodiment includes a substrate having an n well abutting a p well along a boundary. The semiconductor structure also includes a continuous active region over the n well and the p well, a plurality of gate structures over channel regions of the continuous active region, and one gate structure of the plurality of gate structures is disposed directly over the boundary. A portion of the channel region directly under the one gate structure is in direct contact with both an n-type source/drain feature over the p well and a p-type source/drain feature over the n well.
    Type: Application
    Filed: July 29, 2022
    Publication date: May 4, 2023
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230138711
    Abstract: An IC includes a first standard cell (SC1) having a first circuit area (CA1) and a first transition area (TA1) placed on an edge of the CA1; and a SC2 having a CA2 and a TA2 placed on an edge of CA2?. CA1 includes a first and a second active region (AR1 and AR2) longitudinally oriented along a first direction (D1), and a first gate stack (G1) along a D2?D1 and extending over AR1 and AR2. G1 includes a first gate segment (GS1) contacting AR1 and a GS2 contacting AR2. GS1 and GS2 are different in composition. GS1 and GS2 are associated with a pFET and a nFET, respectively. TA1 includes a G2 longitudinally oriented along D2 and spans between opposite cell edges of the SC1. G2 is a lengthwise uniform gate stack. SC2 is placed in abutment with the SC1 such that TA1 and TA2 share a common edge.
    Type: Application
    Filed: April 1, 2022
    Publication date: May 4, 2023
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230082104
    Abstract: Provided is a tap cell including a substrate, a first well, a second well, a first doped region, and the second doped region. The substrate has a first region and a second region. The first well has a first dopant type and includes a first portion disposed in the first region and a second portion extending into the second region. The second well has a second dopant type and includes a third portion disposed in the second region and a fourth portion extending into the first region. The first doped region having the first dopant type is disposed in the second portion of the first well and the third portion of the second well along the second region. The second doped region having the second dopant type is disposed in the first portion of the first well and the fourth portion of the second well along the first region.
    Type: Application
    Filed: November 18, 2022
    Publication date: March 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung-Feng Chang, Bao-Ru Young, Tung-Heng Hsieh, Chun-Chia Hsu
  • Publication number: 20230052954
    Abstract: The integrated circuit (IC) structure includes a semiconductor substrate, a first active region, a dummy fill region, a second active region, first metal gate structures, and second metal gate structures. The first active region is on the semiconductor substrate. The dummy fill region is on the semiconductor substrate. The second active region is on the semiconductor substrate and spaced apart from the first active region by the dummy fill region. The first metal gate structures extend in the first active region and have a first gate pitch and a first gate width. The second metal gate structures extend in the second active region and have a second gate width greater than the first gate width and a second gate pitch being an integer times the first gate pitch, and the integer being two or more.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yung Feng CHANG, Tung-Heng HSIEH, Bao-Ru YOUNG, Pi-Yun SUN
  • Publication number: 20230040287
    Abstract: Integrated circuit (IC) chips are provided. An IC chip according to the present corner area between an outer corner of the device region and an inner corner of the ring region. The ring region includes a first active region extending along a first direction, a first source/drain contact disposed partially over the first active region and extending along the first direction, and first gate structures disposed completely over the first active region and each extending lengthwise along the first direction. The corner area includes a second active region extending along a second direction that forms an acute angle with the first direction, a second source/drain contact disposed partially over the second active region and extending along the second direction, and second gate structures disposed over the second active region and each extending along the first direction.
    Type: Application
    Filed: May 27, 2022
    Publication date: February 9, 2023
    Inventors: Yen Lian Lai, Chun Yu Chen, Yung Feng Chang
  • Publication number: 20230040387
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate; and a seal ring region enclosing a circuit region disposed over the substrate. The seal ring region further includes a fin ring protruding from the substrate having a first width; an isolation ring disposed over the substrate and adjacent to the fin ring; a gate ring disposed over the fin ring having a second width, wherein the second width is less than the first width; an epitaxial ring disposed between the fin ring and the isolation ring; and a contact ring lands on the epitaxial ring and the isolation ring. Each of the fin ring, the isolation ring, the epitaxial ring, and the contact ring extends parallel to each other and fully surrounds the circuit region to form a closed loop.
    Type: Application
    Filed: June 6, 2022
    Publication date: February 9, 2023
    Inventors: Yen Lian Lai, Chun Yu Chen, Yung Feng Chang
  • Publication number: 20230029158
    Abstract: Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first and second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. A first conductive feature is formed over the first epitaxy region and outside an oxide diffusion region. A second conductive feature is formed over the second epitaxy region and outside the oxide diffusion region. The oxide diffusion region is disposed between the first and second conductive features.
    Type: Application
    Filed: September 30, 2022
    Publication date: January 26, 2023
    Inventors: Chun-Chia HSU, Tung-Heng HSIEH, Yung-Feng CHANG, Bao-Ru YOUNG, Jam-Wem LEE, Chih-Hung WANG
  • Publication number: 20230012743
    Abstract: Semiconductor structures and methods are provided. A method according to the present disclosure includes providing a workpiece that includes a plurality of active regions including channel regions and source/drain regions, and a plurality of dummy gate stacks intersecting the plurality of active regions at the channel regions, the plurality of dummy gate stacks including a device portion and a terminal end portion. The method further includes depositing a gate spacer layer over the workpiece, anisotropically etching the workpiece to recess the source/drain regions and to form a gate spacer from the gate spacer layer, forming a patterned photoresist layer over the workpiece to expose the device portion and the recessed source/drain regions while the terminal end portion is covered, and after the forming of the patterned photoresist layer, epitaxially forming source/drain features over the recessed source/drain regions.
    Type: Application
    Filed: July 16, 2021
    Publication date: January 19, 2023
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young