Abstract: Integrated circuits having complementary metal-oxide semiconductor (CMOS) and photonics circuitry and techniques for three-dimensional integration thereof are provided. In one aspect, a three-dimensional integrated circuit comprises a bottom device layer and a top device layer. The bottom device layer comprises a digital CMOS circuitry layer; and a first bonding oxide layer adjacent to the digital CMOS circuitry layer. The top device layer comprises a substrate; an analog CMOS and photonics circuitry layer formed in a silicon-on-insulator (SOI) layer adjacent to the substrate, the SOI layer having a buried oxide (BOX) with a thickness of greater than or equal to about one micrometer; and a second bonding oxide layer adjacent to a side of the analog CMOS and photonics circuitry layer opposite the substrate. The bottom device layer is bonded to the top device layer by an oxide-to-oxide bond between the first bonding oxide layer and the second bonding oxide layer.

Abstract: Integrated circuits having complementary metal-oxide semiconductor (CMOS) and photonics circuitry and techniques for three-dimensional integration thereof are provided. In one aspect, a three-dimensional integrated circuit comprises a bottom device layer and a top device layer. The bottom device layer comprises a substrate; a digital CMOS circuitry layer adjacent to the substrate; and a first bonding oxide layer adjacent to a side of the digital CMOS circuitry layer opposite the substrate. The top device layer comprises an analog CMOS and photonics circuitry layer formed in a silicon-on-insulator (SOI) layer having a buried oxide (BOX) with a thickness of greater than or equal to about 0.5 micrometers; and a second bonding oxide layer adjacent to the analog CMOS and photonics circuitry layer. The bottom device layer is bonded to the top device layer by an oxide-to-oxide bond between the first bonding oxide layer and the second bonding oxide layer.

Abstract: An optoelectronic apparatus for controlling a signal includes an optical waveguide having a variable refractive index; an active device formed within the waveguide, the device having three electrodes, a drain, a source and a gate; and wherein the device is located within the waveguide so that current flowing from the drain to the source changes the refractive index.

Abstract: The present invention is a method and an apparatus for minimizing losses in wavelength selective filters. In one embodiment, an apparatus includes a waveguide bus defined in a first crystalline layer of the apparatus, for receiving incoming light, a resonator defined in the first crystalline layer, and a coupling structure defined in a second polysilicon or amorphous silicon layer of the apparatus, for coupling a selected wavelength of the incoming light from the waveguide bus to the resonator.

Abstract: The present invention is a method and an apparatus for resonant coupling in photonic crystal circuits. In one embodiment, a photonic crystal device comprises a substrate having a plurality of apertures formed therethrough, a photonic crystal circuit (e.g., formed by “removing” a series of apertures), and a strip waveguide extending through the apertures and coupled to the photonic crystal circuit via a surface localized photonic state formed at a surface of the photonic crystal (e.g., in the apertures). The surface localized photonic state facilitates the efficient resonant tunneling of photons from the wavelength-independent strip waveguide to the wavelength-selective photonic crystal circuit, thereby improving the filtering capabilities of the photonic crystal device.

Abstract: An optoelectronic device comprises a photodetector feature, an interfacial layer disposed above at least a portion of the photodetector feature, and a vertical contact disposed on at least a portion of the interfacial layer. The photodetector feature comprises germanium and is operative to convert a light signal into an electrical signal. The interfacial layer comprises nickel. Finally, the vertical contact is operative to transmit the electrical signal from the photodetector feature.

Abstract: The present invention is a waveguide photodetector. In one embodiment, the waveguide photodetector includes a waveguide layer where light is guided or is confined and a detection layer formed on the waveguide layer where guided light is detected. Each of the waveguide layer and the detection layer allows for the guiding of no more than a single mode of light for a given polarization. In another embodiment, the waveguide photodetector includes a waveguide layer where light is guided or is confined, a detection layer formed on the waveguide layer where guided light is detected, a first electrical contact coupled to the detection layer, and a second electrical contact coupled to the detection layer. The first electrical contact and the second electrical contact are disposed in a spaced-apart, substantially parallel manner relative to each other.

Abstract: An apparatus for controlling a signal includes an optical waveguide having a variable refractive index; an active device formed within the waveguide, the device having three electrodes, a drain, a source and a gate; and wherein the device is located within the waveguide so that current flowing from the drain to the source changes the refractive index.

Abstract: The present invention is a method and an apparatus for minimizing losses in wavelength selective filters. In one embodiment, an apparatus includes a waveguide bus defined in a first crystalline layer of the apparatus, for receiving incoming light, a resonator defined in the first crystalline layer, and a coupling structure defined in a second polysilicon or amorphous silicon layer of the apparatus, for coupling a selected wavelength of the incoming light from the waveguide bus to the resonator.

Abstract: The present invention is a method and an apparatus for minimizing losses in wavelength selective filters. In one embodiment, an apparatus includes a waveguide bus defined in a first crystalline layer of the apparatus, for receiving incoming light, a resonator defined in the first crystalline layer, and a coupling structure defined in a second polysilicon or amorphous silicon layer of the apparatus, for coupling a selected wavelength of the incoming light from the waveguide bus to the resonator.

Abstract: The present invention is a method and an apparatus for minimizing losses in wavelength selective filters. In one embodiment, an apparatus includes a waveguide bus defined in a first crystalline layer of the apparatus, for receiving incoming light, a resonator defined in the first crystalline layer, and a coupling structure defined in a second polysilicon or amorphous silicon layer of the apparatus, for coupling a selected wavelength of the incoming light from the waveguide bus to the resonator.

Abstract: The present invention is a method and an apparatus for tuning an optical delay line. In one embodiment, an optical delay line includes at least one ring resonator in which light is guided or is confined and at least one heater positioned laterally from the ring resonator. The heater produces heat in a localized area, allowing for the tuning of individual delay elements with minimal crosstalk.

Abstract: The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.

Abstract: The present invention is a method and an apparatus for resonant coupling in photonic crystal circuits. In one embodiment, a photonic crystal device comprises a substrate having a plurality of apertures formed therethrough, a photonic crystal circuit (e.g., formed by “removing” a series of apertures), and a strip waveguide extending through the apertures and coupled to the photonic crystal circuit via a surface localized photonic state formed at a surface of the photonic crystal (e.g., in the apertures). The surface localized photonic state facilitates the efficient resonant tunneling of photons from the wavelength-independent strip waveguide to the wavelength-selective photonic crystal circuit, thereby improving the filtering capabilities of the photonic crystal device.

Abstract: The present invention is a waveguide photodetector. In one embodiment, the waveguide photodetector includes a waveguide layer where light is guided or is confined and a detection layer formed on the waveguide layer where guided light is detected. Each of the waveguide layer and the detection layer allows for the guiding of no more than a single mode of light for a given polarization. In another embodiment, the waveguide photodetector includes a waveguide layer where light is guided or is confined, a detection layer formed on the waveguide layer where guided light is detected, a first electrical contact coupled to the detection layer, and a second electrical contact coupled to the detection layer. The first electrical contact and the second electrical contact are disposed in a spaced-apart, substantially parallel manner relative to each other.

Abstract: The present invention is a method and an apparatus for resonant coupling in photonic crystal circuits. In one embodiment, a photonic crystal device comprises a substrate having a plurality of apertures formed therethrough, a photonic crystal circuit (e.g., formed by “removing” a series of apertures), and a strip waveguide extending through the apertures and coupled to the photonic crystal circuit via a surface localized photonic state formed at a surface of the photonic crystal (e.g., in the apertures). The surface localized photonic state facilitates the efficient resonant tunneling of photons from the wavelength-independent strip waveguide to the wavelength-selective photonic crystal circuit, thereby improving the filtering capabilities of the photonic crystal device.

Abstract: The present invention is a method and an apparatus for thermo-optic control of optical signals using photonic crystal structures. In one embodiment, a first portion of a split signal is modulated by propagating the signal through a photonic crystal waveguide in which two electrical contacts are laterally spaced from the waveguide region by a plurality of apertures formed through the photonic crystal substrate. A voltage applied across the electrical contacts causes resistive heating of the proximate photonic crystal waveguide through which the signal propagates, thereby modulating the temperature relative to an un-modulated second portion of the split signal that is used as a reference.

Abstract: The present invention is a method and an apparatus for dynamic manipulation and dispersion in photonic crystal devices. In one embodiment, a photonic crystal structure comprises a substrate having a plurality of apertures formed therethrough, a waveguide formed by “removing” a row of apertures, and a plurality of pairs of lateral electrical contacts, the lateral electrical contact pairs extending along the length of the waveguide in a spaced-apart manner. The lateral electrical contact pairs facilitate local manipulation of the photonic crystal structure's refractive index. Thus, optical signals of different wavelengths that propagate through the photonic crystal structure can be dynamically manipulated.

Abstract: A method of forming at least one quantum dot on a predetermined area of a substrate includes forming a nucleation site having at least one surface or subsurface defect at the predetermined area of the substrate by implantation with ions, and growing a quantum dot on the nucleation site.

Abstract: The present invention is a method an apparatus for forming lateral electrical contacts for photonic crystal based structures. In one embodiment, a photonic crystal structure comprises a substrate having a plurality of apertures formed therethrough, a waveguide formed by “removing” a row of apertures, and a pair of lateral electrical contacts, each spaced a distance away from the waveguide by at least one row of apertures. The optical mode of the waveguide is confined in the lateral direction by the at least one row of apertures. Thus the apertures provide optical isolation for the electrical contacts, which minimizes losses due to absorption of light by the contacts. The contacts may be used to apply voltages for thermo-optic control of the waveguide, for current injection, or for configuring the waveguide as a photodetector, among other applications.