Abstract: A method includes providing a workpiece in an etching apparatus at ambient temperature, the workpiece comprising a dielectric layer adjacent a conductive layer over a semiconductor substrate. The method includes performing an etching process to selectively remove the dielectric layer relative to the conductive layer. The method further includes, while performing the etching process, cooling the workpiece to a processing temperature that is below the ambient temperature.

Abstract: An endoscope illumination light switching device includes a rotation body in which a plurality of holes including a first hole are formed in a circumferential direction and that switches a hole on an irradiation optical path through rotation, a drive device configured to rotationally drive the rotation body, a sensor, and a processor configured to control a stop position of the rotation body based on a detection signal from the sensor. The rotation body includes a first detection target shape portion corresponding to the first hole, and another detection target shape portion. The sensor outputs a detection signal in response to detection of each shape portion when the rotation body rotates.

Abstract: A binding machine includes a curl forming portion. The curl forming portion includes a curl guide configured to curl a plurality of wires. The curl guide includes a first wire guide configured to regulate positions of the wires directed toward a radially outer periphery side with respect to a radial direction of a annular feeding path, a second wire guide configured to regulate positions of the wires directed toward one axial side with respect to an axial direction of the annular feeding path, and a third wire guide configured to regulate positions of the wires directed toward the other axial side. The curl guide includes a suppression part configured to suppress one wire of the plurality of wires from moving in a direction toward another wire.

Abstract: An imaging control device includes: a distance information acquisition unit that acquires distance information from a first imaging device to a subject; and an operation control unit that controls a state to an operable state in which the first imaging device is capable of performing a remote operation on a second imaging device based on the distance information acquired by the distance information acquisition unit.

Abstract: A method for patterning includes having a substrate including a first layer, a second layer to-be-patterned disposed under the first layer, and a third layer disposed under the second layer, the first layer including a plurality of lines, each of the plurality of lines being separated by a recess, a bottom of the recess exposing a surface of the second layer; exposing the substrate to a first plasma to extend the recesses through the second layer to expose a surface of the third layer, the first plasma being generated from a first halogen based gas and a first oxidizing gas, the first halogen based gas including a carbon-containing halogen based gas; and laterally etching the recesses in the second layer using a second plasma, the second plasma being generated from a second halogen based gas and a second oxidizing gas, the second halogen based gas being a carbon-free halogen based gas.

Abstract: An accelerator device includes a pedal lever, a drive source, a power transmission mechanism, and a control unit. The pedal lever is operable in response to a pedaling operation. The drive source generates a driving force when being energized. The power transmission mechanism transmits the driving force of the drive source to the pedal lever, and applies a reaction force in an opposite direction to a pedaling direction of the pedal lever. The control unit includes a reaction force controller that controls the reaction force applied to the pedal lever by controlling the drive source. The reaction force controller holds an initial reaction force for a reaction force hold time from a start of reaction force application, and performs a reaction force reduction control in which the reaction force is reduced as a time function after an elapse of the reaction force hold time.

Abstract: A media processing device comprises a transport surface along which a medium is transported, and a transporter having a contact portion with which the medium comes into contact, the contact portion pushing and transporting the medium. The transport surface includes a first transport surface along which the medium is transported by the transporter, and a second transport surface that is located downstream of the first transport surface in a transport direction of the transporter, the second transport surface along which the medium separated from the contact portion is transported. The contact portion moves in a different direction which is different from the transport direction relative to the first transport surface on a downstream side of the first transport surface. A step is between the first transport surface and the second transport surface such that the second transport surface is recessed with respect to the first transport surface.

Abstract: An automatic transaction apparatus includes: a money handling assembly configured to handle money including banknotes and coins; a first display above the money handling assembly, the first display facing a first direction and the first display to display a first screen for input of a transaction instruction; a second display above the money handling assembly, the second display facing a second direction which is opposite the first direction, and the second display to display a second screen for input of a transaction instruction; and an operation device that faces the second direction, the operation device on which an operation for performing electronic settlement of a monetary amount corresponding to a transaction input to the second display is performed.

Abstract: A money handling apparatus includes a banknote handling assembly, a coin handling assembly, and a first operation surface having a banknote inlet portion, a banknote outlet portion, a coin inlet portion, and a coin outlet portion and facing a front direction in a front-back direction of the money handling apparatus. The banknote inlet portion and the coin inlet portion are aligned and the banknote outlet portion and the coin outlet portion are aligned in a right-left direction of the money handling apparatus, which is perpendicular to the front-back direction. The banknote inlet portion and the banknote outlet portion overlap and the coin inlet portion and the coin outlet portion overlap in the up-down direction of the money handling apparatus, which is perpendicular to the right-left direction and perpendicular to the front-back direction.

Abstract: A method includes providing a semiconductor substrate and forming a fin protruding from the semiconductor substrate. The method includes forming a silicon-containing layer over the fin. The method further includes patterning the silicon-containing layer to form a gate structure over the fin, where patterning the silicon-containing layer is implemented using an etchant and a passivant that includes a silicon-containing gas and a nitrogen-containing gas.

Abstract: A method of processing a substrate that includes: forming a bottom passivation layer including an oxide over a first portion of a dielectric layer at a bottom of a recess of the substrate, the recess having sidewalls including a second portion of the dielectric layer; and performing a lateral etch to etch the second portion of the dielectric layer, the bottom passivation layer covering the first portion of the dielectric layer during the lateral etch, and where the forming of the bottom passivation layer includes exposing the substrate to a first plasma including a halogen, and exposing the substrate to a second plasma including oxygen to form the bottom passivation layer.

Abstract: A coin processing device includes: a first storage and a second storage each configured to store a coin; a transport configured to transport the coin; an outlet configured to dispense the coin to outside; and a controller configured to execute a first operation of transmitting the coin stored in the first storage so as to store the coin in the second storage, and a second operation of dispensing the coin stored in the second storage from the outlet, wherein the controller executes the first operation in a period after execution of the second operation until a start of the next second operation, and wherein a timing of execution of the first operation can be changed in a period after execution of the second operation until a start of the next second operation.

Abstract: A method includes providing a semiconductor substrate and forming a dielectric layer over the semiconductor substrate. The method includes forming a metal layer over the dielectric layer. The method includes forming a patterned mask over the metal layer. The method includes performing a first etching process using a first etchant to form metal patterns separated by trenches in the metal layer. The method further includes performing a second etching process using a second etchant and a passivant to extend the trenches in the dielectric layer, resulting in a passivation layer formed along sidewalls of the metal patterns.

Abstract: A semiconductor structure includes an alternating stack of insulating layers and electrically conductive layers that is located on a front side of a source layer, memory openings vertically extending through the alternating stack, memory opening fill structures located in the memory openings, a dielectric material portion laterally offset from the alternating stack, a connection via structure vertically extending through the dielectric material portion and contacting a front side surface of a metallic plate, and a backside contact pad in electrical contact with the metallic plate.

Abstract: A binding machine includes: a wire feeding unit configured to feed a wire; a curl forming unit configured to form a path along which the wire fed by the wire feeding unit is to be wound around a to-be-bound object; a butting part against which the to-be-bound object is to be butted; a cutting unit configured to cut the wire wound on the to-be-bound object; a binding unit configured to twist the wire wound on the to-be-bound object and cut by the cutting unit; and a tension applying part configured to apply tension to the wire to be cut at the cutting unit with a force higher than a force applied in a loosening direction of the wire wound on the to-be-bound object.

Abstract: A terminal block includes: a base plate; a first fixing portion arranged on the base plate, to which an end portion of a first bus bar is fixed; a first wall portion erected on the base plate and forming an extension path of the first bus bar; a second fixing portion arranged on the base plate side by side with the first fixing portion, to which an end portion of a second bus bar is fixed; and a second wall portion erected on the base plate and forming an extension path of the second bus bar. The first wall portion has a first interference region preventing arrangement of the second bus bar to the first fixing portion, and the second wall portion has a second interference region preventing arrangement of the first bus bar to the second fixing portion.

Abstract: A circular annular seal ring made from a resin is adapted to be disposed between an outer member and an inner member that rotate relative to each other. The seal ring is disposed in a circumferential groove of the outer member or the inner member to isolate a liquid space from an external space. The seal ring is formed from an elongated and arcuate rod to define a circle by joining ends of the rod, and has a junction formed from the ends. The seal ring has a radial thickness gradually decreasing from two points that are apart from the junction toward the junction. The points are separated from the junction by an angle of not less than 60 degrees and not more than 150 degrees about a central axis of the circle.

Abstract: A vacuum processing apparatus includes a processing unit comprising a processing chamber disposed in a vacuum container, a detector detecting a thickness of the target film on a wafer or an end point during the processing of the wafer using a light from the wafer, the detector being functioned to detect the thickness or the end point by comparing a data pattern of obtained in advance indicating light intensities of a plurality of wavelengths related to the film thickness using the wavelength as a parameter and a real data pattern indicating the light intensities of the plurality of wavelengths obtained at a particular time during the processing, and the data pattern being obtained by dividing differential coefficient value of time-series data of the light intensities of the plurality of wavelengths by time-series data indicating values of the light intensities of the plurality of wavelengths.

Abstract: A circular annular seal ring made from a resin is adapted to be disposed between an outer member and an inner member that rotate relative to each other. The seal ring is disposed in a circumferential groove of the outer member or the inner member to isolate a liquid space from an external space. The seal ring is formed from an elongated and arcuate rod to define a circle by joining ends of the rod, and has a junction formed from the ends. The seal ring has a radial thickness gradually decreasing from two points that are apart from the junction toward the junction. The points are separated from the junction by an angle of not less than 60 degrees and not more than 150 degrees about a central axis of the circle.

Abstract: A compression molding die includes a first mold and a second mold. The first mold includes a bottom surface member and a side surface member. A space is providable in the first mold by a step of at least one of an outer peripheral surface of the bottom surface member and an inner peripheral surface of the side surface member. The first mold includes a gas inlet capable of introducing gas into the space, a gas outlet through which the gas introduced into the space is dischargeable, and a seal member below the space.