Patents by Inventor Yutaka Shiraishi

Yutaka Shiraishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220199786
    Abstract: Provided is a highly reliable semiconductor device in which an influence on device characteristics can be reduced while improving a high temperature and high humidity bias resistance of a termination structure (termination region) of a chip by a relatively simple method. The semiconductor device includes an active region disposed on a main surface of a semiconductor substrate, and a termination region disposed on the main surface so as to surround the active region. The termination region includes an interlayer insulating film formed on the main surface of the semiconductor substrate, and an organic protective film formed so as to cover the interlayer insulating film. An insulating film having a thickness of 100 nm or less and containing nitrogen is provided between the interlayer insulating film and the organic protective film.
    Type: Application
    Filed: November 22, 2021
    Publication date: June 23, 2022
    Applicant: Hitachi Power Semiconductor Device, Ltd.
    Inventors: Shigeo Tokumitsu, Masaki Shiraishi, Yutaka Kato, Tetsuo Oda
  • Patent number: 11363706
    Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: June 14, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Toshihiro Nishisaka, Tsukasa Hori
  • Patent number: 11360391
    Abstract: A target supply device includes a tank body portion holding a target substance; a communication portion connected to the tank body portion and including a filter that filters the melted target substance and a nozzle that discharges the target substance having passed through the filter; a main heater that heats the tank body portion; a sub-heater that heats the communication portion; and a control unit, the control unit being configured to set the main heater to a temperature higher than a melting point of the target substance before the target substance is melted, to set the sub-heater to a temperature lower than the melting point of the target substance until the target substance in the tank body portion is melted, and to set the sub-heater to a temperature higher than the melting point of the target substance after the target substance in the tank body portion is melted.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: June 14, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori
  • Publication number: 20220182086
    Abstract: A signal transmission device has a multi-point wiring structure in which termination resistors are mounted on both ends of a cable, and a plurality of PCBs connected to the cable transmit a signal through the cable. The PCB of a host node includes: a connector connected to the cable; a transformer unit that is connected to the connector via a first PCB transmission line and insulates the connector; an RS 485 transceiver that is connected to the transformer unit via a second PCB transmission line and transmits the signal to the PCB of another node or receives the signal from the PCB of another node; and AC termination that is provided in at least one of the first PCB transmission line and the second PCB transmission line and suppresses resonance and antiresonance in a reflection frequency characteristic of noise.
    Type: Application
    Filed: October 29, 2021
    Publication date: June 9, 2022
    Inventors: Goro HAMAMOTO, Yutaka UEMATSU, Masahiro SHIRAISHI, Tatsuyuki OOTANI
  • Patent number: 11320740
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: May 3, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Yutaka Shiraishi, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe
  • Patent number: 11310899
    Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: April 19, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Tsukasa Hori
  • Publication number: 20220015218
    Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.
    Type: Application
    Filed: May 28, 2021
    Publication date: January 13, 2022
    Applicant: Gigaphoton Inc.
    Inventors: Yutaka SHIRAISHI, Toshihiro NISHISAKA, Tsukasa HORI
  • Publication number: 20210410261
    Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.
    Type: Application
    Filed: May 5, 2021
    Publication date: December 30, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Yutaka SHIRAISHI, Tsukasa HORI
  • Publication number: 20210364927
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Application
    Filed: April 12, 2021
    Publication date: November 25, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Yutaka SHIRAISHI, Toshihiro NISHISAKA, Hiroshi SOMEYA, Yukio WATANABE
  • Patent number: 10955760
    Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.
    Type: Grant
    Filed: March 9, 2020
    Date of Patent: March 23, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Masaki Nakano, Yutaka Shiraishi
  • Publication number: 20200341383
    Abstract: A target supply device includes a tank body portion holding a target substance; a communication portion connected to the tank body portion and including a filter that filters the melted target substance and a nozzle that discharges the target substance having passed through the filter; a main heater that heats the tank body portion; a sub-heater that heats the communication portion; and a control unit, the control unit being configured to set the main heater to a temperature higher than a melting point of the target substance before the target substance is melted, to set the sub-heater to a temperature lower than the melting point of the target substance until the target substance in the tank body portion is melted, and to set the sub-heater to a temperature higher than the melting point of the target substance after the target substance in the tank body portion is melted.
    Type: Application
    Filed: July 10, 2020
    Publication date: October 29, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI
  • Publication number: 20200233309
    Abstract: An extreme ultraviolet light generation apparatus that generates plasma by irradiating a target substance with a pulse laser beam and generates extreme ultraviolet light from the plasma includes: a chamber housing a collector mirror configured to condense the extreme ultraviolet light; a gas introduction pipe through which gas is introduced into the chamber; a mass flow controller configured to change the flow rate of the gas; a discharge pump configured to discharge the gas from the chamber; a pressure sensor configured to monitor the pressure in the chamber; and a control unit configured to control the mass flow controller based on the pressure measured by using the pressure sensor. The control unit controls the mass flow controller to increase an increase ratio of the flow rate of the gas entering the chamber as the pressure acquired by the pressure sensor increases.
    Type: Application
    Filed: April 7, 2020
    Publication date: July 23, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Yuki TAKEDA, Yutaka SHIRAISHI
  • Publication number: 20200209765
    Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.
    Type: Application
    Filed: March 9, 2020
    Publication date: July 2, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Masaki Nakano, Yutaka Shiraishi
  • Patent number: 10629414
    Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: April 21, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori, Osamu Wakabayashi
  • Patent number: 10524343
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; a target supply unit that supplies a droplet of a target substance to a plasma generation region in the chamber; a first pipe at least partly covering a trajectory of the droplet and having a first opened end part as an upstream end part and a second opened end part as a downstream end part in a trajectory direction; a second pipe at least partly covering the first pipe with a gap between the second pipe and the first pipe, and having a third end part, opened and extending downstream of the second end part of the first pipe in the trajectory direction, as a downstream end part in the trajectory direction; and a gas supply unit that supplies gas flowing through the gap and causes the gas to flow in the trajectory direction out of a gas exit.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: December 31, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Takanobu Ishihara, Toshihiro Nishisaka, Yutaka Shiraishi
  • Publication number: 20190289705
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; a target supply unit that supplies a droplet of a target substance to a plasma generation region in the chamber; a first pipe at least partly covering a trajectory of the droplet and having a first opened end part as an upstream end part and a second opened end part as a downstream end part in a trajectory direction; a second pipe at least partly covering the first pipe with a gap between the second pipe and the first pipe, and having a third end part, opened and extending downstream of the second end part of the first pipe in the trajectory direction, as a downstream end part in the trajectory direction; and a gas supply unit that supplies gas flowing through the gap and causes the gas to flow in the trajectory direction out of a gas exit.
    Type: Application
    Filed: June 3, 2019
    Publication date: September 19, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Takanobu ISHIHARA, Toshihiro NISHISAKA, Yutaka SHIRAISHI
  • Patent number: 10372041
    Abstract: A target generation device according to one aspect of the present disclosure includes a tank for containing a target substance, a heater provided at the tank, a nozzle communicating with the inside of the tank, a lid having a gas inlet port communicating with the inside of the tank, and a plurality of shielding plates that are disposed inside the tank and suppress entry of the target substance to the gas inlet port. Each of the shielding plates includes at least one non-shielding region for allowing the gas to pass through. The non-shielding regions of at least two of the shielding plates are arranged at positions in which one of the non-shielding regions of the at least two of the shielding plates is not seen into the other of the non-shielding regions of the at least two of the shielding plates.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: August 6, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Toshihiro Nishisaka
  • Publication number: 20190237303
    Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.
    Type: Application
    Filed: April 9, 2019
    Publication date: August 1, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI, Osamu WAKABAYASHI
  • Patent number: 10349508
    Abstract: A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: July 9, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Toshihiro Nishisaka, Toshiyuki Hirashita, Takuya Ishii
  • Publication number: 20190155163
    Abstract: A target generation device according to one aspect of the present disclosure includes a tank for containing a target substance, a heater provided at the tank, a nozzle communicating with the inside of the tank, a lid having a gas inlet port communicating with the inside of the tank, and a plurality of shielding plates that are disposed inside the tank and suppress entry of the target substance to the gas inlet port. Each of the shielding plates includes at least one non-shielding region for allowing the gas to pass through. The non-shielding regions of at least two of the shielding plates are arranged at positions in which one of the non-shielding regions of the at least two of the shielding plates is not seen into the other of the non-shielding regions of the at least two of the shielding plates.
    Type: Application
    Filed: January 29, 2019
    Publication date: May 23, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Yutaka SHIRAISHI, Toshihiro NISHISAKA