Abstract: A method of forming an integrated circuit using an amorphous carbon film. The amorphous carbon film is formed by thermally decomposing a gas mixture comprising a hydrocarbon compound and an inert gas. The amorphous carbon film is compatible with integrated circuit fabrication processes. In one integrated circuit fabrication process, the amorphous carbon film is used as a hardmask. In another integrated circuit fabrication process, the amorphous carbon film is an anti-reflective coating (ARC) for deep ultraviolet (DUV) lithography. In yet another integrated circuit fabrication process, a multi-layer amorphous carbon anti-reflective coating is used for DUV lithography.

Abstract: A system accessing and transmitting different data frames in a digital transmission network for accessing and transmitting different data frames, comprising: at least a user-network interface (UNI), which is used to couple with the user's network; at least a network-network interface (NNI), which is used to couple with said digital transmission network to transfer data; a data converting device, which is coupled with said UNIs and said NNIs to convert data formats between said UNIs, data formats between said NNIs, or data formats between said NNIs and said UNIs; wherein said data converting device comprises a virtual interface device, said virtual interface device comprises: at least two device interfaces, a virtual interface processing unit, a rule database, a control interface unit and an inter-device interface, so as to improve access ability of the device.

Abstract: A system accessing and transmitting different data frames in a digital transmission network, for accessing and transmitting different data frames, said system comprises: at least a user-network interface (UNI), which is used to couple with the subscriber's network; and/or at least a network-network interface (NNI), which is used to couple with said digital transmission network to transfer data; and a data converting device, coupled with said UNIs and said NNIs, which is used to convert data formats between said UNIs or data formats between said NNIs or data formats between said UNIs and said NNIs; said data converting device comprises a virtual bridge device and an interface device, said virtual bridge device switches data between said UNIs and said NNIs, and said virtual bridge device detects control messages, and transmits the control messages to control system of the device to process via the control interface unit; and data frames of message except control messages are switched, so as to overcome the limi

Abstract: A method for processing data through a system for accessing and transmitting different data frames in a digital transmission network includes the following steps: the virtual interface device classifying the data frames, and the virtual interface device outputting the data frames to corresponding device interfaces. The system includes a user-network interface (UNI), which is used to connect to a user's network, a network-network interface (NNI), which is used to connect to said digital transmission network to transfer data, a mapping/demapping device, a virtual interface device, which couples with the UNI and couples with the NNI via the mapping/demapping device, and a control device, which couples with the virtual interface device to control it to access and transmit the data frames.

Abstract: A system accessing and transmitting different data frames in a digital transmission network, said system comprises at least a subscriber network interface designed to couple with the subscribers' networks and/or at least an inter-network interface designed to couple with said digital transmission network to transfer data, a data converting device coupled with said subscriber network interfaces and said inter-network interfaces to convert formats of data between said subscriber network interfaces, formats of data between said inter-network interfaces, or formats of data between said inter-network interfaces and said subscriber network interfaces; wherein said data converting device comprises a virtual bridge device and their interface devices, said virtual bridge devices exchange data between said subscriber network interfaces and said inter-network interfaces via said interface devices; wherein said virtual bridge device is designed to detect control messages and transfer the detected control messages to the

Abstract: A method and system for accessing and transmitting different types data frames in a digital transmission network, wherein the system includes a data processing and dispatching device having at least an inter-device interface, a processing flow database, and a control interface unit, and wherein the method includes the steps of extracting type number information from data frames, searching for rules in the processing flow database corresponding to the extracted type number, determining the retrieved result and discard the data frames if the retrieval result it blank, otherwise extracting an inter-device interface number and outputting the data frames via the inter-device interface with the extracted inter-device interface number.

Abstract: A mixed-frequency, high temperature PECVD process is utilized to create a high quality silicon nitride layer having highly conformal properties. Deposition in an ammonia rich ambient at high temperature reduces microloading between dense and isolated features by improving surface mobility of precursors. High quality nitride films formed by the instant process are particularly suited for front-end applications such as the formation of spacer structures and the formation of contact etch stop layers.

Abstract: A mixed-frequency, high temperature PECVD process is utilized to create a high quality silicon nitride layer having highly conformal properties. Deposition in an ammonia rich ambient at high temperature reduces microloading between dense and isolated features by improving surface mobility of precursors. High quality nitride films formed by the instant process are particularly suited for front-end applications such as the formation of spacer structures and the formation of contact etch stop layers.

Abstract: A method for forming a patterned amorphous carbon layer in a semiconductor stack, including forming an amorphous carbon layer on a substrate and forming a silicon containing photoresist layer on top of the amorphous carbon layer. Thereafter, the method includes developing a pattern transferred into the resist layer with a photolithographic process and etching through the amorphous carbon layer in at least one region defined by the pattern in the resist layer, wherein a resist layer hard mask is formed in an outer portion of the photoresist layer during etching.