Patents by Inventor Zhiqiang Wu

Zhiqiang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12256551
    Abstract: A method for forming a semiconductor memory structure includes following operations. A plurality of doped regions are formed in a semiconductor substrate. The doped regions are separated from each other. A stack including a plurality of first insulating layers and a plurality of second insulating layers alternately arranged is formed over the semiconductor substrate. A first trench is formed in the stack. The second insulating layers are replaced with a plurality of conductive layers. A second trench is formed. A charge-trapping layer and a channel layer are formed in the second trench. An isolation structure is formed to fill the second trench. A source structure and a drain structure are formed at two sides of the isolation structure.
    Type: Grant
    Filed: November 20, 2022
    Date of Patent: March 18, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Nuo Xu, Sai-Hooi Yeong, Yu-Ming Lin, Zhiqiang Wu
  • Publication number: 20250089578
    Abstract: A magnetic tunnel junction (MTJ) structure and a memory cell are provided. The MTJ includes a barrier layer, a free layer and a metal oxide cap layer. The free layer is disposed on the barrier layer. The metal oxide cap layer is disposed on the free layer. The metal oxide cap layer has a first surface and a second surface opposite to the first surface. The first surface of the metal oxide cap layer is in contact with the free layer. In a direction of a thickness of the metal oxide cap layer, both of an oxygen concentration at the first surface of the metal oxide cap layer and an oxygen concentration at the second surface of the metal oxide cap layer are higher than an oxygen concentration in a middle portion of the metal oxide cap layer.
    Type: Application
    Filed: September 13, 2023
    Publication date: March 13, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Zhi-Ren Xiao, Nuo Xu, Po-Sheng Lu, Yuan-Hao Chang, Zhiqiang Wu, Yu-Jen WANG
  • Publication number: 20250074511
    Abstract: An assembled sliding frame for trailer, including longitudinal beams each including a top wall, a side wall, and a bottom wall, with an opening formed between inner edges of the top wall and the bottom wall; transverse beams each including a top plate, two side plates, a bottom plate, and an end plate. The top plate is fixedly connected to the top wall by a first bolt extending traversely therethrough; brackets each including an outer bracket, an inner bracket, and a connecting base. The outer bracket has a flat portion abutting against an outer surface of the side wall, the flat portion, the side wall and the end plate are fixedly connected by using a second bolt extending traversely therethrough. The inner bracket is fixedly connected with a connecting plate, and the connecting plate is fixedly connected to the bottom plate by using a second bolt extending traversely therethrough.
    Type: Application
    Filed: June 13, 2024
    Publication date: March 6, 2025
    Inventors: Zhiqiang Wu, Heng Zhang
  • Patent number: 12237414
    Abstract: A method includes receiving a semiconductor substrate. The semiconductor substrate has a top surface and includes a semiconductor element. Moreover, the semiconductor substrate has a fin structure formed thereon. The method also includes recessing the fin structure to form source/drain trenches, forming a first dielectric layer over the recessed fin structure in the source/drain trenches, implanting a dopant element into a portion of the fin structure beneath a bottom surface of the source/drain trenches to form an amorphous semiconductor layer, forming a second dielectric layer over the recessed fin structure in the source/drain trenches, annealing the semiconductor substrate, and removing the first and second dielectric layers. After the annealing and the removing steps, the method further includes further recessing the recessed fin structure to provide a top surface. Additionally, the method includes forming an epitaxial layer from and on the top surface.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDCUTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Ching Wang, Wen-Yuan Chen, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20250063793
    Abstract: A semiconductor device includes a substrate including a planar portion and a mesa portion over the planar portion; an oxide layer over the mesa portion; a ferroelectric material strip covering a protruding plane of the oxide layer and exposing a side plane of the oxide layer; and a gate strip over the ferroelectric material strip and overlapping the oxide layer.
    Type: Application
    Filed: November 5, 2024
    Publication date: February 20, 2025
    Inventors: NUO XU, ZHIQIANG WU
  • Patent number: 12217782
    Abstract: The disclosed MTJ read circuits include a current steering element coupled to the read path. At a first node of the current steering element, a proportionally larger current is maintained to meet the requirements of a reliable voltage or current sensing. At a second node of the current steering element, a proportionally smaller current is maintained, which passes through the MTJ structure. The current at the first node is proportional to the current at the second node such that sensing the current at the first node infers the current at the second node, which is affected by the MTJ resistance value.
    Type: Grant
    Filed: June 9, 2023
    Date of Patent: February 4, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gaurav Gupta, Zhiqiang Wu, Yih Wang
  • Patent number: 12218214
    Abstract: Source/drain silicide that improves performance and methods for fabricating such are disclosed herein. An exemplary device includes a first channel layer disposed over a substrate, a second channel layer disposed over the first channel layer, and a gate stack that surrounds the first channel layer and the second channel layer. A source/drain feature disposed adjacent the first channel layer, second channel layer, and gate stack. The source/drain feature is disposed over first facets of the first channel layer and second facets of the second channel layer. The first facets and the second facets have a (111) crystallographic orientation. An inner spacer disposed between the gate stack and the source/drain feature and between the first channel layer and the second channel layer. A silicide feature is disposed over the source/drain feature where the silicide feature extends into the source/drain feature towards the substrate to a depth of the first channel layer.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: February 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Ching Wang, Chung-I Yang, Jon-Hsu Ho, Wen-Hsing Hsieh, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20250033703
    Abstract: A locking mechanism of a trailer carriage includes a transmission shaft, two bolts, an airbag, and a swing arm. The transmission shaft is pivoted to the carriage and extends in a length direction of the carriage; the two bolts are movably connected to two sides of the carriage in a penetrating manner, the bolt is movable in a width direction of the carriage between a first position where the bolt is accommodated in the carriage and a second position where the bolt protrudes from a side edge of the carriage; and one end of the swing arm is connected to the transmission shaft and a connecting seat is formed at the other end of the swing arm, and one end of the airbag is connected to the carriage and the other end of the airbag is connected to the connecting seat.
    Type: Application
    Filed: August 4, 2022
    Publication date: January 30, 2025
    Inventors: Zhiqiang Wu, Yu Wang, Heng Zhang
  • Publication number: 20250033702
    Abstract: A trailer carriage includes two longitudinal beams and at least two cross beams between the two longitudinal beams. The longitudinal beam includes a side wall, an upper connecting wall and a lower connecting wall. The cross beam includes an upper connecting plate, a lower connecting plate below the upper connecting plate, and an end plate between the upper connecting plate and the lower connecting plate. The upper connecting plate abuts against a bottom of the upper connecting wall, the lower connecting plate abuts against a top of the lower connecting wall, the end plate abuts against an inner side of the side wall. The upper connecting plate is connected with the upper connecting wall via a first huck bolt, the lower connecting plate is connected with the lower connecting wall via a second huck bolt, the end plate is connected with the side wall via a third huck bolt.
    Type: Application
    Filed: August 4, 2022
    Publication date: January 30, 2025
    Inventors: Zhiqiang Wu, Yu Wang, Heng Zhang
  • Patent number: 12199170
    Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes forming a stack of first semiconductor layers and second semiconductor layers over a substrate, etching the stack to form a source/drain (S/D) recess in exposing the substrate, and forming an S/D formation assistance region in the S/D recess. The S/D formation assistance region is partially embedded in the substrate and includes a semiconductor seed layer embedded in an isolation layer. The isolation layer electrically isolates the semiconductor seed layer from the substrate. The method also includes epitaxially growing an S/D feature in the S/D recess from the semiconductor seed layer. The S/D feature is in physical contact with the second semiconductor layers.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: January 14, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Patent number: 12190931
    Abstract: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The first and second conductive structures each have a varying width along the lateral direction. The plurality of third conductive structures are configured to be applied with respective different voltages in accordance with the varying width of the first and second conductive structures.
    Type: Grant
    Filed: June 16, 2023
    Date of Patent: January 7, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Peng-Chun Liou, Zhiqiang Wu, Chung-Wei Wu, Yi-Ching Liu, Yih Wang
  • Publication number: 20250002087
    Abstract: Provided is a sliding frame for trailers, which includes a side beam, wherein the side beam includes a horizontally extending top wall and a vertically extending side wall, an upper surface of the top wall is provided with a wear-resistant pad extending along the length direction of the side beam; a guide rail clip is fixed on an outer surface of the side wall, wherein the guide rail clip includes a connection part fixed to the side wall, and a limiting part located above the connection part, and a backing plate is sandwiched between the connection part and the side wall, a part of the backing plate extends upward to an inner side of the limiting part, and a gap with openings at the top and both front and rear ends is formed between the limiting part and the backing plate.
    Type: Application
    Filed: October 17, 2023
    Publication date: January 2, 2025
    Inventors: Zhiqiang WU, Heng ZHANG
  • Patent number: 12174545
    Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.
    Type: Grant
    Filed: July 28, 2023
    Date of Patent: December 24, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien, Gwan-Sin Chang, Kai Tak Lam, Li-Jui Chen, Heng-Hsin Liu, Chung-Wei Wu, Zhiqiang Wu
  • Patent number: 12166089
    Abstract: A method includes: providing a substrate including a planar portion and a mesa portion over the planar portion; depositing an oxide layer over the mesa portion; depositing a ferroelectric material strip over the oxide layer and aligned with the mesa portion; and depositing a gate strip crossing the ferroelectric material strip and over the oxide layer.
    Type: Grant
    Filed: July 14, 2023
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Nuo Xu, Zhiqiang Wu
  • Publication number: 20240387736
    Abstract: Methods are disclosed herein for forming fin-like field effect transistors (FinFETs) that maximize strain in channel regions of the FinFETs. An exemplary method includes forming a fin having a first width over a substrate. The fin includes a first semiconductor material, a second semiconductor material disposed over the first semiconductor material, and a third semiconductor material disposed over the second semiconductor material. A portion of the second semiconductor material is oxidized, thereby forming a second semiconductor oxide material. The third semiconductor material is trimmed to reduce a width of the third semiconductor material from the first width to a second width. The method further includes forming an isolation feature adjacent to the fin. The method further includes forming a gate structure over a portion of the fin, such that the gate structure is disposed between source/drain regions of the fin.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Inventors: Kuo-Cheng Chiang, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Publication number: 20240389215
    Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Inventors: Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Kai Tak Lam, Li-Jui Chen, Heng-Hsin Liu, Zhiqiang Wu
  • Publication number: 20240379803
    Abstract: A device includes a substrate, a first semiconductor channel over the substrate, and a second semiconductor channel over the substrate and laterally separated from the first semiconductor channel. A gate structure covers and wraps around the first semiconductor channel and the second semiconductor channel. A first source/drain region abuts the first semiconductor channel on a first side of the gate structure, and a second source/drain region abuts the second semiconductor channel on the first side of the gate structure. An isolation structure is under and between the first source/drain region and the second source/drain region, and includes a first isolation region in contact with bottom surfaces of the first and second source/drain regions, and a second isolation region in contact with sidewalls of the first and second source/drain regions, and extending from a bottom surface of the first isolation region to upper surfaces of the first and second source/drain regions.
    Type: Application
    Filed: July 25, 2024
    Publication date: November 14, 2024
    Inventors: Wei Ju LEE, Zhi-Chang LIN, Chun-Fu CHENG, Chung-Wei WU, Zhiqiang WU
  • Publication number: 20240378715
    Abstract: The present disclosure provides a method for topography simulation of a physical structure under a topography-changing process. The method includes initializing a voxel mesh as a three-dimensional (3D) representation of a physical structure by a central processing unit (CPU), generating a batch of particles, simulating a flight path of one of the particles with a ray-tracing method by a parallel processing thread in a graphics processing unit (GPU), identifying a surface normal of a voxel unit in the voxel mesh that intersects the flight path by the parallel processing thread in the GPU, passing parameters describing the one of the particles hitting the voxel mesh from the GPU to the CPU, determining a surface reaction between the one of the particles and the voxel unit by the CPU, and updating the voxel mesh based on the determining of the surface reaction.
    Type: Application
    Filed: July 18, 2024
    Publication date: November 14, 2024
    Inventors: Nuo Xu, Zhengping Jiang, Ji-Ting Li, Yuan Hao Chang, Zhiqiang Wu, Wen-Hsing Hsieh
  • Publication number: 20240379593
    Abstract: Methods and semiconductor structures are provided. A semiconductor structure according to the present disclosure includes a plurality of transistors, an interconnect structure electrically coupled to the plurality of transistors, a metal feature disposed over the interconnect structure and electrically isolated from the plurality of transistors, an insulation layer disposed over the metal feature, and a first redistribution feature and a second redistribution feature disposed over the insulation layer. A space between the first redistribution feature and the second redistribution feature is disposed directly over at least a portion of the metal feature.
    Type: Application
    Filed: July 12, 2024
    Publication date: November 14, 2024
    Inventors: Kuo-An Liu, Wen-Chiung Tu, Yuan-Yang Hsiao, Kai Tak Lam, Chen-Chiu Huang, Zhiqiang Wu, Dian-Hau Chen
  • Publication number: 20240381783
    Abstract: An MRAM cell block and a magnetic shielding structure for the MRAM cell block are incorporated into a metal interconnect of an integrated circuit (IC) device. The magnetic shielding structure may be provided by metallization layers and via layers having wires and vias that incorporate a magnetic shielding material. The magnetic shielding material may form the wires and vias, form a liner around the wires, or may be a layer of the wires. The wires and vias may also include a metal that is more conductive than the magnetic shielding material. The metal interconnect may include layers above or below the magnetic shielding structure that lack the magnetic shielding material and are more conductive. The MRAM cell block with the magnetic shielding structure is optionally provided as a standalone memory device or incorporated into a 3-D IC device that includes a second substrate having a conventional metal interconnect.
    Type: Application
    Filed: July 21, 2024
    Publication date: November 14, 2024
    Inventors: Nuo Xu, Yuan Hao Chang, Po-Sheng Lu, Zhiqiang Wu