Patents by Inventor Zhiqiang Wu

Zhiqiang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240186388
    Abstract: Semiconductor device includes a substrate having a plurality of fins formed from the substrate, a first source/drain feature comprising a first epitaxial layer in contact with a first fin of the plurality of fins, and a second epitaxial layer formed over the first epitaxial layer, the second epitaxial layer comprising a first facet and a second facet connecting to the first facet, a second source/drain feature disposed adjacent to the first source/drain feature, the second source/drain feature comprising a first epitaxial layer in contact with a second fin of the plurality of fins a second epitaxial layer formed over the first epitaxial layer of the second source/drain feature, the second epitaxial layer of the second source/drain feature comprising a third facet and a fourth facet connecting to the third facet, and a third epitaxial layer comprising a first center portion disposed above and in contact with the first facet and the second facet, and a second center portion disposed above and in contact with th
    Type: Application
    Filed: February 7, 2024
    Publication date: June 6, 2024
    Inventors: Wei Ju LEE, Chun-Fu CHENG, Chung-Wei WU, Zhiqiang WU
  • Patent number: 11990522
    Abstract: A semiconductor structure includes a substrate and a semiconductor channel layer over the substrate. The semiconductor structure includes a high-k gate dielectric layer over the semiconductor channel layer, a work function metal layer over the high-k gate dielectric layer, and a bulk metal layer over the work function metal layer. The work function metal layer includes a first portion and a second portion over the first portion. Both the first portion and the second portion are conductive. Materials included in the second portion are also included in the first portion. The first portion is doped with silicon at a first dopant concentration, and the second portion is not doped with silicon or is doped with silicon at a second dopant concentration lower than the first dopant concentration.
    Type: Grant
    Filed: December 9, 2022
    Date of Patent: May 21, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Tien Tung, Szu-Wei Huang, Zhi-Ren Xiao, Yin-Chuan Chuang, Yung-Chien Huang, Kuan-Ting Liu, Tzer-Min Shen, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20240149949
    Abstract: Provided is a sliding frame assembly for trailers. The sliding frame assembly for trailers includes two longitudinal beams, a number of cross beams and a suspension system; the longitudinal beam includes a side wall, a top wall located at the top of the side wall, and a bottom wall located at the bottom of the side wall, wherein an opening is formed between the top wall and the bottom wall in the inner side of the longitudinal beam, and an end of the cross beam penetrates through the opening; an end surface of the cross beam and an inner surface of the side wall, an upper surface of the cross beam and a lower surface of the top wall, a lower surface of the cross beam and an upper surface of the bottom wall are fixedly connected together respectively; the suspension system includes a bracket.
    Type: Application
    Filed: October 17, 2023
    Publication date: May 9, 2024
    Inventors: Zhiqiang WU, Heng ZHANG, Binhuan ZHONG
  • Patent number: 11955554
    Abstract: A method of fabrication of a multi-gate semiconductor device that includes providing a fin having a plurality of a first type of epitaxial layers and a plurality of a second type of epitaxial layers. The plurality of the second type of epitaxial layers is oxidized in the source/drain region. A first portion of a first layer of the second type of epitaxial layers is removed in a channel region of the fin to form an opening between a first layer of the first type of epitaxial layer and a second layer of the first type of epitaxial layer. A portion of a gate structure is then formed in the opening.
    Type: Grant
    Filed: July 15, 2022
    Date of Patent: April 9, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Huan-Sheng Wei, Hung-Li Chiang, Chia-Wen Liu, Yi-Ming Sheu, Zhiqiang Wu, Chung-Cheng Wu, Ying-Keung Leung
  • Publication number: 20240113234
    Abstract: An integrated chip including a gate layer. An insulator layer is over the gate layer. A channel structure is over the insulator layer. A pair of source/drains are over the channel structure and laterally spaced apart by a dielectric layer. The channel structure includes a first channel layer between the insulator layer and the pair of source/drains, a second channel layer between the insulator layer and the dielectric layer, and a third channel layer between the second channel layer and the dielectric layer. The first channel layer, the second channel layer, and the third channel layer include different semiconductors.
    Type: Application
    Filed: January 4, 2023
    Publication date: April 4, 2024
    Inventors: Ya-Yun Cheng, Wen-Ling Lu, Yu-Chien Chiu, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20240113173
    Abstract: In one example aspect, the present disclosure is directed to a device. The device includes an active region on a semiconductor substrate. The active region extends along a first direction. The device also includes a gate structure on the active region. The gate structure extends along a second direction that is perpendicular to the first direction. Moreover, the gate structure engages with a channel on the active region. The device further includes a source/drain feature on the active region and connected to the channel. A projection of the source/drain feature onto the semiconductor substrate resembles a hexagon.
    Type: Application
    Filed: November 27, 2023
    Publication date: April 4, 2024
    Inventors: Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Patent number: 11949001
    Abstract: The present disclosure provides a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device includes channel members disposed over a substrate, a gate structure engaging the channel members, and an epitaxial feature adjacent the channel members. At least one of the channel members has an end portion in physical contact with an outer portion of the epitaxial feature. The end portion of the at least one of the channel members includes a first dopant of a first concentration. The outer portion of the epitaxial feature includes a second dopant of a second concentration. The first concentration is higher than the second concentration.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Ching Wang, Chung-I Yang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Patent number: 11942134
    Abstract: A memory circuit includes a memory array including a plurality of memory cells, each memory cell of the plurality of memory cells including an n-type channel layer including a metal oxide material, and a gate structure overlying and adjacent to the n-type channel layer, the gate structure including a conductive layer overlying a ferroelectric layer. The memory circuit is configured to apply a gate voltage to each memory cell of the plurality of memory cells in first and second write operations, the gate voltage has a positive polarity and a first magnitude in the first write operation and a negative polarity and a second magnitude greater than the first magnitude in the second write operation.
    Type: Grant
    Filed: November 18, 2022
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Huan-Sheng Wei, Tzer-Min Shen, Zhiqiang Wu
  • Patent number: 11929409
    Abstract: Semiconductor device includes a substrate having multiple fins formed from a substrate, a first source/drain feature comprising a first epitaxial layer in contact with a first fin, a second epitaxial layer formed on the first epitaxial layer, and a third epitaxial layer formed on the second epitaxial layer, the third epitaxial layer comprising a center portion and an edge portion that is at a different height than the center portion; a fourth epitaxial layer formed on the third epitaxial layer, a second source/drain feature adjacent the first source/drain feature, comprising a first epitaxial layer in contact with a second fin, a second epitaxial layer formed on the first epitaxial layer of the second source/drain feature, a third epitaxial layer formed on the second epitaxial layer of the second source/drain feature, the third epitaxial layer comprising a center portion and an edge portion that is at a different height than the center portion of the third epitaxial layer of the second source/drain feature; a
    Type: Grant
    Filed: October 14, 2022
    Date of Patent: March 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20240063263
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a first nanostructure over the substrate. The first nanostructure has a (001) surface, the first nanostructure has a first channel direction on the (001) surface, and the first channel direction is [0 1 0] or [0 ?1 0]. The semiconductor device structure includes a gate stack surrounding the first nanostructure. The semiconductor device structure includes a first source/drain structure and a second source/drain structure over the substrate and over opposite sides of the gate stack. The first nanostructure is between the first source/drain structure and the second source/drain structure, and the first channel direction is from the first source/drain structure to the second source/drain structure.
    Type: Application
    Filed: November 2, 2023
    Publication date: February 22, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huang-Siang LAN, Sathaiya Mahaveer DHANYAKUMAR, Tzer-Min SHEN, Zhiqiang WU
  • Patent number: 11908919
    Abstract: A method of manufacturing a semiconductor device includes forming a fin structure in which first semiconductor layers and second semiconductor layers are alternatively stacked; forming a sacrificial gate structure over the fin structure; etching a source/drain (S/D) region of the fin structure, which is not covered by the sacrificial gate structure, thereby forming an S/D space; laterally etching the first semiconductor layers through the S/D space, thereby forming recesses; forming a first insulating layer, in the recesses, on the etched first semiconductor layers; after the first insulating layer is formed, forming a second insulating layer, in the recesses, on the first insulating layer, wherein a dielectric constant of the second insulating layer is less than that of the first insulating layer; and forming an S/D epitaxial layer in the S/D space, wherein the second insulating layer is in contact with the S/D epitaxial layer.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chih-Ching Wang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Patent number: 11889674
    Abstract: A method includes providing a substrate having an n-type fin-like field-effect transistor (NFET) region and forming a fin structure in the NFET region. The fin structure includes a first layer having a first semiconductor material, and a second layer under the first layer and having a second semiconductor material different from the first semiconductor material. The method further includes forming a patterned hard mask to fully expose the fin structure in gate regions of the NFET region and partially expose the fin structure in at least one source/drain (S/D) region of the NFET region. The method further includes oxidizing the fin structure not covered by the patterned hard mask, wherein the second layer is oxidized at a faster rate than the first layer. The method further includes forming an S/D feature over the at least one S/D region of the NFET region.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: January 30, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Publication number: 20240023338
    Abstract: A semiconductor device includes a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a first lateral direction. The semiconductor device includes third conductive structures each extending along the first lateral direction. The third conductive structures are disposed across the first and second conductive structures. The semiconductor device includes a first semiconductor channel extending along the vertical direction. The first semiconductor channel is disposed between the third conductive structures and the first conductive structure, and between the third conductive structures and the second conductive structure. The first and second conductive structures each have a first varying width along the first lateral direction, and the first semiconductor channel has a second varying width along a second lateral direction.
    Type: Application
    Filed: July 28, 2023
    Publication date: January 18, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Peng-Chun Liou, Zhiqiang Wu, Ya-Yun Cheng, Yi-Ching Liu, Meng-Han Lin
  • Publication number: 20240016066
    Abstract: A memory device includes a substrate, a reference layer, a tunneling layer, a film stack, and a capping layer. The reference layer is disposed on the substrate. The tunneling layer is disposed on the reference layer. The film stack is formed over the tunneling layer and on the substrate, wherein the film stack includes a first free layer, a spacer with high exchange stiffness constant and a second free layer. The first free layer is in contact with the tunneling layer and the film stack. The spacer with high exchange stiffness constant is sandwiched between the first free layer and the second free layer. The capping layer is disposed on and electrically connected to the film stack.
    Type: Application
    Filed: July 10, 2022
    Publication date: January 11, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Sheng Lu, Zhi-Ren Xiao, Nuo Xu, Zhiqiang Wu
  • Patent number: 11862218
    Abstract: In some embodiments, the present application provides a memory device. The memory device includes a memory cell array comprising a plurality of magnetic tunnel junction (MTJ) memory cells arranged in columns and rows, a read bias circuit connected to the memory cell array and configured to provide a reading bias for a MTJ memory cell of the memory cell array, and a first non-linear resistance device connected in series and between the MTJ memory cell and the read bias circuit. The first non-linear resistance device is configured to provide a first resistance when conducting a first current and a second resistance greater than the first resistance when conducting a second current smaller than the first current.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Gaurav Gupta, Zhiqiang Wu
  • Publication number: 20230420506
    Abstract: A method includes forming a channel region above a (110)-orientated substrate and having a length extending in a <100> direction; epitaxial growing a plurality of source/drain regions on either side the channel region; forming a gate structure surrounding the channel region; forming a plurality of source/drain contacts on the source/drain regions.
    Type: Application
    Filed: June 22, 2022
    Publication date: December 28, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Ju LEE, Chun-Fu CHENG, Chung-Wei WU, Zhiqiang WU
  • Patent number: 11855143
    Abstract: In one example aspect, the present disclosure is directed to a device. The device includes an active region on a semiconductor substrate. The active region extends along a first direction. The device also includes a gate structure on the active region. The gate structure extends along a second direction that is perpendicular to the first direction. Moreover, the gate structure engages with a channel on the active region. The device further includes a source/drain feature on the active region and connected to the channel. A projection of the source/drain feature onto the semiconductor substrate resembles a hexagon.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20230411399
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate having a first region and a second region; a first fin active region of a first semiconductor material disposed within the first region, oriented in a first direction, wherein the first fin active region has a <100> crystalline direction along the first direction; and a second fin active region of a second semiconductor material disposed within the second region and oriented in the first direction, wherein the second fin active region has a <110> crystalline direction along the first direction.
    Type: Application
    Filed: July 20, 2023
    Publication date: December 21, 2023
    Inventors: Tzer-Min Shen, Zhiqiang Wu, Chung-Cheng Wu, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang, Min Cao
  • Publication number: 20230413571
    Abstract: Various embodiments of the present disclosure provide a memory device and methods of forming the same. In one embodiment, a memory device is provided. The memory device includes a first oxide material having a first sidewall and a second sidewall, a first spacer layer in contact with the first sidewall of the first oxide material, the first spacer layer having a first conductivity type, a second spacer layer in contact with the second sidewall of the first oxide material, wherein the second spacer layer has the first conductivity type. The memory device also includes a channel layer having a second conductivity type that is opposite to the first conductivity type, wherein the channel layer is in contact with the first oxide material, the first spacer layer, and the second spacer layer. The memory device further includes a ferroelectric layer in contact with the channel layer.
    Type: Application
    Filed: June 15, 2022
    Publication date: December 21, 2023
    Inventors: Wen-Ling LU, Yu-Chien CHIU, Chih-Yu CHANG, Hung-Wei LI, Ya-Yun CHENG, Zhiqiang WU, Yu-Ming LIN, Mauricio MANFRINI
  • Publication number: 20230411480
    Abstract: A method of forming a semiconductor device includes forming a fin on a substrate, the fin comprising alternately stacked first semiconductor layers and second semiconductor layers, removing the first semiconductor layers to form a plurality of spaces each between adjacent two of the second semiconductor layers, implanting oxygen into the second semiconductor layers, and forming a gate structure wrapping around the second semiconductor layers.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Zhi-Ren XIAO, Nuo XU, Zhiqiang WU