Magnetoresistive random access memory (MRAM) cell having a diode with asymmetrical characteristics
In a magnetoresistive random access memory (MRAM), a magnetic tunnel junction (MTJ) (54) cell is stacked with an asymmetric tunnel device (56). This device, when used in a crosspoint MRAM array, improves the sensing of the state or resistance of the MTJ cells. Each MTJ cell has at least two ferromagnetic layers (42, 46) separated by an insulator (44). The asymmetric tunnel device (56) is electrically connected in series with the MTJ cell and is formed by at least two conductive layers (48, 52) separated by an insulator (50). The asymmetric tunnel device may be a MIM (56), MIMIM (80) or a MIIM (70). Asymmetry results from conducting electrons in a forward biased direction at a significantly greater rate than in a reversed biased direction. Materials chosen for the asymmetric tunnel device are selected to obtain an appropriate electron tunneling barrier shape to obtain the desired rectifying current/voltage characteristic.
The invention relates to magneto-resistive random access memories (MRAMs), and more particularly to MRAM cells having a diode.
RELATED ARTMRAMs are attractive due to being non-volatile and relatively high speed. In any memory, especially large memories, cell density is a significant issue. A smaller cell results in a smaller array for a given memory size. The smaller array results in less area being occupied, which in turn, results in lower cost. One of the higher density memories is constructed by simply connecting the cell, which is the magnetic tunnel junction (MTJ), between the word line and the bit line. This type of memory is known to be dense, but difficulties with being able to provide enough sense signal differentiation in the light of the many alternative current paths in the deselected cells has made such memories difficult to manufacture on a commercial basis.
One technique to overcome this has been to use a non-linear device in series with the MTJ. The non-linear device provides a first current level at one voltage, but significantly less than half this current at half the voltage. The intent is for this non-linear device to operate in the higher current regime for the selected cells and the lower current regime for the unselected cells. One of the difficulties of this approach is obtaining sufficient non-linearity to provide a sufficient current differential between the selected and unselected cells.
Thus, there is a need to provide a high density memory array that provides improved margin between the selected and unselected cells.
BRIEF DESCRIPTION OF THE DRAWINGSThe present invention is illustrated by way of example and not limited by the accompanying figures, in which like references indicate similar elements, and in which:
Skilled artisans appreciate that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve the understanding of the embodiments of the present invention.
DETAILED DESCRIPTION OF THE DRAWINGSA magneto-resistive random access memory (MRAM) uses memory cells connected between rows and columns without requiring a selection transistor. The memory cell comprises a single stack having both a magnetic tunnel junction (MTJ)and an asymmetric device. Because the asymmetric device is conveniently made in the same stack as the MTJ, the addition of the asymmetric device does not sacrifice high density and is achieved with relatively little increased complexity. Being asymmetric, the asymmetric device effectively reduces the parasitic leakage from the unselected cells even with the reverse bias on the asymmetric device of the unselected cells being of a greater magnitude than the forward bias on the asymmetric device of a selected cell. This is better understood with reference to the drawings and the following description.
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In a read operation a bias voltage, for example 500 millivolts (mV), is applied to the selected bit line and ground to the selected word line. The unselected bit lines are at the bias voltage and the unselected word lines are also maintained at the bias voltage, 500 mV. The selected cell then has the bias voltage applied across it. For example, if cell 18 is selected for reading, then word line 26 is grounded, word line 28 is at the bias voltage, bit line 30 is at the bias voltage, and bit line 32 is at the bias voltage. Thus, the selected cell is forward biased from bit line 30 to word line 26, and the state of memory cell 18 is detected based on the current flowing therethrough. The unselected cells are substantially not biased. Cell 24 is substantially not biased with word line 28 at the bias voltage and bit line 32 at the bias voltage. Cell 20 is forward biased with word line 26 grounded and bit line 32 at the bias voltage. Cell 22 is not biased with both word line 28 and bit line 30 at the bias voltage.
Effectively, all of the cells on the selected word line are treated the same. Selection is actually based on which of the bit lines are chosen for sensing. Due to the current through a cell on each bit line, there is some voltage drop on these bit lines. This is made as small as reasonably possible, but it is not zero. Further, the voltage drop on each bit line is somewhat different because the state of the cells on the selected word line is variable from bit line to bit line. Also the voltage on the selected word line is not same for each cell because of current flowing through the word line. This voltage drop is made to be as small as reasonably possible but this drop is also not zero. Due to these voltage drops on the bit lines, unselected cells are also biased. The biasing then generates currents on the unselected word lines. These parasitic currents on the unselected word lines and bit lines degrade to some extent the current on the selected bit line, making it more difficult to accurately detect the state of the cell. Even though these parasitic currents can flow through some forward biased cells, each parasitic path, however, has at least one reverse biased cell in it.
Other alternatives may be used to operate the memory. For example, the unselected bit lines can be left floating instead of being at the bias voltage. The voltage on bit lines would not be truly floating because the memory cells, which are at least a little conductive even in the reverse bias condition, would provide a path to the word lines, which are biased to a specific voltage.
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Materials for layer 48, layer 50, and layer 52 are chosen so that the barrier height of layer 48 with respect to layer 50 and the barrier height of layer 52 with respect to layer 50 are both in the range of zero to 0.6 eV. Furthermore, the materials are chosen so that the difference in these two barrier heights is also 0.2 to 0.6 eV. This ensures that even with the small allowed voltages across the MTJs of the cells, there is a two order of magnitude difference between the currents in the forward and reverse bias direction. For this example of layer 48 being titanium nitride, layer 50 being titanium oxide, and layer 52 being tantalum, the barrier height ΦM1 is 0.53 eV and ΦM2 is 0.14 eV so that the barrier height between layers 48 and 52 is 0.39 eV. The thickness of insulator 50 must be such that the forward bias resistance of asymmetric device 56 is preferably less than or equal to the resistance of MTJ 54. It is beneficial that the forward bias resistance of the asymmetric device not make up a high percentage of the total resistance of the cell and also that the reverse bias resistance of the asymmetric device be large in relation to that of the MTJ. The thicknesses of the metal layers are not particularly significant, 100 Angstroms is an effective thickness. The thickness of the insulator layer 50 may be 30 Angstroms for this example. Other insulators that should be effective as substitutes for titanium oxide include strontium titanate, tantalum pentoxide, strontium bismuth tantalate. Other alternatives that meet the above criteria may be used as substitutes for the metal layers as well. Metals that can be effective when properly chosen according to the above criteria include titanium, copper, and iron.
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In the foregoing specification, the invention has been described with reference to specific embodiments. However, one of ordinary skill in the art appreciates that various modifications and changes can be made without departing from the scope of the present invention as set forth in the claims below. For example, the asymmetric devices 56, 78, and 82 can be on the other side of MTJs, 54, 71, and 81, respectively. Similarly, the metals can be reversed so that the forward and reverse directions are interchanged. Accordingly, the specification and figures are to be regarded in an illustrative rather than a restrictive sense, and all such modifications are intended to be included within the scope of present invention.
Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, the benefits, advantages, solutions to problems, and any element(s) that may cause any benefit, advantage, or solution to occur or become more pronounced are not to be construed as a critical, required, or essential feature or element of any or all the claims. As used herein, the terms “comprises,” “comprising,” or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Claims
1-10. (canceled)
11. A method of forming a non-volatile memory cell comprising:
- providing a bit line;
- providing a word line;
- coupling one of the bit line or the word line to a magnetic tunnel junction (MTJ) storage element, the magnetic tunnel junction (MTJ) storage element having at least a first ferromagnetic layer, an insulating layer and a second ferromagnetic layer; and
- coupling an asymmetric tunnel device to one of the word line or the bit line and in series with the MTJ storage element, the asymmetric tunnel device being asymmetric by conducting electrons in a forward biased direction at a significantly higher rate than in a reversed biased direction.
12. The method of claim 11 further comprising:
- forming the asymmetric tunnel device by providing a first metal layer, providing an overlying insulating layer and providing an overlying second metal layer to form a metal-insulator-metal (MIM) device.
13. The method of claim 11 further comprising:
- forming the asymmetric tunnel device by providing a first metal layer, providing an overlying first insulating layer, providing an overlying second metal layer, providing an overlying second insulating layer and providing an overlying third metal layer to form a metal-insulator-metal-insulator-metal (MIMIM) device.
14. The method of claim 11 further comprising:
- forming the asymmetric tunnel device by providing a first metal layer, providing an overlying first insulating layer, providing an overlying second insulating layer, and providing an overlying second metal layer to form a metal-insulator-insulator-metal (MIIM) device.
15. The method of claim 11 further comprising:
- forming the asymmetric tunnel device by forming a first layer, the first layer comprising tantalum, forming a second layer, the second layer comprising at least one of titanium oxide, strontium titanate, tantalum pentoxide and strontium bismuth tantalate (SrBi2Ta2O9), and forming a third layer, the third layer comprising titanium nitride.
16. The method of forming the non-volatile memory cell of claim 11 further comprising:
- forming a plurality of non-volatile memory cells, each of the plurality of non-volatile memory cells having a respective magnetic tunnel junction and asymmetric tunnel device, by first forming all layers of all the plurality of non-volatile memory cells' magnetic tunnel junctions and asymmetric tunnel devices prior to removing excess layer material between desired locations of the plurality of non-volatile memory cells using a single mask.
17-24. (canceled)
Type: Application
Filed: Nov 12, 2004
Publication Date: Apr 21, 2005
Inventors: Chitra Subramanian (Austin, TX), Joseph Nahas (Austin, TX)
Application Number: 10/986,615