Micromechanical Getter Anchor
One embodiment provides an anchor to hold getter materials in place within a micromechanical device package substrate, said anchor comprising: a first cavity face; and a second cavity face. The cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. Another embodiment provides an anchor to hold a getter in place within a micromechanical device package. The anchor comprises: a package substrate; and a member attached to the package substrate, the member shaped to provide mechanical retention of the getter material formed over said member. Another embodiment provides a micromechanical device package comprising: a package substrate; a package lid enclosing a package cavity; a micromechanical device in the package cavity; and a getter anchor in the package cavity. Other embodiments provide methods of packaging and forming packages having a getter anchor. One getter anchor is formed in a substrate 906 comprised of at least three layers. The layers form a cavity in the substrate 906 with a wide bottom portion—formed in the middle layer 902 and a relatively narrower top portion—formed by the top layer 904. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity. The preceding abstract is submitted with the understanding that it will only be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosures as described in 37 C.F.R. §1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.
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This invention relates to the field of micro-electromechanical systems (MEMS), more particularly to methods of attaching getters in packages containing lubrication for the MEMS device.
BACKGROUND OF THE INVENTIONMicromechanical devices are small structures typically fabricated on a semiconductor wafer using techniques such as optical lithography, doping, metal spattering, oxide deposition, and plasma etching which have been developed for the fabrication of integrated circuits.
Micromirror devices, such as the Digital Micromirror Device™ (DMD™) produced by Texas Instruments, are a type of micromirror device. Other types of micromechanical devices include accelerometers, pressure and flow sensors, gears and motors. While some micromechanical devices, such as pressure sensors, flow sensors, and micromirrors have found commercial success, other types have not yet been commercially viable.
MEMS devices typically have moving mechanical components that rub against each other. Lubricants are required to prevent the small components from wearing out prematurely and to reduce stiction where the components touch. One effective lubricant is perfluordecanoic acid, or PFDA. PFDA forms a monolayer over the components leaving a surface that is non-reactive. PFDA is often applied over the entire interior surface of a package, including the MEMS device. Unfortunately, once PFDA is applied to the package interior, it is very difficult to attach other components, such as moisture and gas getters, to the package. What is needed is a system and method for providing positive retention of getters to the package interior that does not rely on adhesion between the getter and the package.
SUMMARY OF THE INVENTIONObjects and advantages will be obvious, and will in part appear hereinafter and will be accomplished by the present invention which provides a method and system for a micromechanical getter anchor. One embodiment of the claimed invention provides an anchor to hold getter materials in place within a micromechanical device package substrate, said anchor comprising: a first cavity face; and a second cavity face. The first and second cavity faces define an anchor cavity and are arranged to mechanically retain a getter away from a region holding the micromechanical device.
Another embodiment of the disclosed invention provides an anchor to hold a getter in place within a micromechanical package. The anchor comprises: a package substrate; and a member attached to the package substrate, the member shaped to provide mechanical retention of the getter material formed over said member.
Another embodiment of the disclosed invention provides a micromechanical device package comprising: a package substrate; a package lid enclosing a package cavity; a micromechanical device in the package cavity; and a getter anchor in the package cavity.
Another embodiment of the disclosed invention provides a method of packaging a micromechanical device. The method comprises: providing a package substrate having a getter anchor; attaching a micromechanical device to the package substrate; attaching a getter material to the getter anchor; and attaching a package lid to the package substrate.
Another embodiment of the disclosed invention provides a method of forming a package having an anchor. The method comprises: forming a first package substrate layer; forming a second package substrate layer, the second layer having a void; forming a third package substrate layer; laminating the first, second, and third layers such that the void forms an anchor cavity suitable for holding a getter. A further embodiment further comprises: forming a fourth package substrate layer having a void. The second and fourth layers are adjacent when laminated such that a cavity anchor with a narrow top and a relatively wide bottom is formed by the voids in the second and fourth layers.
Another embodiment of the disclosed invention provides a method of packaging a micromechanical device. The method comprises: providing a package substrate, attaching a micromechanical device to the package substrate; attaching bond wires between the micromechanical device and the package substrate; attaching a getter material to the bond wires; and attaching a package lid to the package substrate.
BRIEF DESCRIPTION OF THE DRAWINGSfor a more complete understanding of the present invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
A new package feature has been developed that forms an anchor to secure getters and other materials within a package. The anchor overcomes the limitations of the prior art which required the getter or other material to be adhered to the inside of the package prior to the application of a lubricant. When an anchor according to an embodiment of the present invention is used, the lubricant may be applied prior to, or simultaneously with, the getter.
After mounting the micromechanical device in the package, a window 110 or lid is placed over the package cavity 112 and sealed to the ceramic base. This hermetic seal provides a controlled environment within the package cavity. Semiconductor and MEMS devices typically require protection from moisture and various gasses or other chemicals that remain on the device or in the package after the assembly process, or are released by the package and its contents. Additionally, moisture that penetrates the packages must be prevented from harming the device.
In the case of a MEMS device, moisture is particularly harmful because a polarized molecule such as water adheres to the metal surfaces of the MEMS device. If it becomes sufficiently plentiful to form a meniscus, then it can capture the moving part of the MEMS by capillary force, causing it to cease moving and rendering the part nonfunctional.
To prevent moisture and other contaminants from harming the packaged device, one or more getters are used to trap the moisture and other contaminants. These getters include any environmental control materials such as desiccants and molecular sieves.
As mentioned above, the use of a lubricant in the package 100 affects the adhesion of the getters. For example, if the lubricant is already in place—coating the floor 104, sides 106, and window 110—the getter 114 will be unable to adhere to the package. Alternatively, if the getter 114 is adhered to the interior of the package 100 prior to the use of the lubricant, it is possible for the lubricant to work its way between the getter 114 and package over a period of time, especially if the package is operated over a series of extreme temperature cycles, and reduce the adhesion of the getter 114. Additionally, the lubricant may react with the substance adhering the getter 114 to the package and allow the getter to loosen.
In some circumstances it is desirable to deposit the getter and lubricant materials simultaneously. For example, mixing the lubricant and getters allows them to be deposited in one operation. After depositing the materials, and typically after installing the window or lid, the lubricant is distributed throughout the package interior, often by heating the package to distribute a lubricant vapor. In this case, the lubricant and getter materials are mixed together, often with a binder or other carrier and a solvent, and deposited in the package base. Once the package is sealed, it is heated to distribute the lubricant throughout the package interior leaving the getter materials in the place they were deposited. This mixed deposition is thwarted by the lubricant since the getter materials fail to adhere to the package base when deposited while mixed with the lubricant.
A solution to the problem of keeping the getter materials in place is the use of an anchor in the package. An anchor is a feature used to mechanically lock the getter materials in the package and prevent them from moving.
In
The size, shape, and number of the bond wire 202 loops forming the anchor are determined by several factors including the material anchored, the mass of the material anchored, and the vibrational environment to which the device will be exposed. In some environments, the bond wire loops may be attached merely by one end. For example, coiled or kinked wires would be able to hold the getter without being connected to the substrate on both ends.
Preformed getters can be denser than directly dispensed getters that are cured in situ. The higher density of pre-cured getters may benefit the MEMS device by providing a higher capacity for gettering. The disclosed invention is applied to the attachment of preformed getters as shown in
Using the existing bond wires as an anchor prevents having to form a special purpose anchor for the getter and may increase the resistance of the device to vibration. The use of existing bond wires, however, also has several disadvantages and limitations. The getter and carrier used in the embodiment of
The examples shown in these figures merely are illustrative of simplified applications of the present invention. The number, materials, shapes and dimensions of the layers are provided for purposes of illustration and not for purposes of limitation. For example, the wide portions of the narrow slow are not necessary but are illustrated to show one structure that reduces the likelihood of pockets of air being captured in the getter anchor. Under certain conditions, air trapped beneath the getter may expand and could potentially force the getter out of the getter anchor.
Thus, although there has been disclosed to this point a particular embodiment of a system and method for micromechanical getter anchor, it is not intended that such specific references be considered as limitations upon the scope of this invention except insofar as set forth in the following claims. Furthermore, having described the invention in connection with certain specific embodiments thereof, it is to be understood that further modifications may now suggest themselves to those skilled in the art, it is intended to cover all such modifications as fall within the scope of the appended claims.
Claims
1-27. (canceled)
28. A micromechanical device package comprising:
- a package substrate;
- a package lid enclosing a package cavity;
- a micromechanical device in said package cavity; and
- a getter anchor in said package cavity.
29. The micromechanical device package of claim 28, wherein said getter anchor comprises at least one member attached to said package substrate.
30. The micromechanical device package of claim 28, wherein said member is attached to said package substrate by one point.
31. The micromechanical device package of claim 28, wherein said member is attached to said package substrate by one end.
32. The micromechanical device package of claim 28, wherein said member is attached to said package substrate by at least two points.
33. The micromechanical device package of claim 28, wherein said member is attached to said package substrate by at least two ends.
34. The micromechanical device package of claim 28, wherein said member is attached to said package substrate though an intermediate bond pad.
35. The micromechanical device package of claim 28, wherein said member is a wire.
36. The micromechanical device package of claim 28, wherein said member is a bond wire.
37. The micromechanical device package of claim 28, wherein said anchor is a cavity anchor.
38. The micromechanical device package of claim 28, wherein said cavity anchor is formed in said package substrate.
39. The micromechanical device package of claim 28, wherein said cavity anchor is a slot formed in said package substrate.
40. The micromechanical device package of claim 28, wherein said slot has a narrow top and a wider bottom portion.
41. The micromechanical device package of claim 28, wherein said cavity anchor formed to provide mechanical retention of a getter material.
42-67. (canceled)
Type: Application
Filed: Apr 7, 2007
Publication Date: Aug 2, 2007
Applicant: Texas Instruments Incorporated (Dallas, TX)
Inventors: Roger Robbins (McKinney, TX), Jwei Liu (Plano, TX), Jack Smith (Parker, TX), Edward Fisher (Lucas, TX), Joyce Holton (Plano, TX)
Application Number: 11/697,720
International Classification: G02B 26/00 (20060101);