Chip stack package

Abstract

Provided is a chip stack package that may include a lower semiconductor chip, an upper semiconductor chip stacked on the lower semiconductor chip, and at least one adhesive formed in space between the lower semiconductor chip and the upper semiconductor chip. The at least one adhesive may include a first adhesive and a second adhesive. The first adhesive may be formed in a portion of the space, and the second adhesive may be formed in the space except for a region in which the first adhesive is provided. The space between adjacent semiconductor chips may be completely filled with the at least one adhesive. Therefore, a chip stack package according to the exemplary embodiments of the present invention may exhibit improved mechanical stability and reliability.

Description

RELATED APPLICATION DATA

This application is a Continuation-In-Part of U.S. patent application Ser. No. 11/038,210, filed on Jan. 21, 2005, now pending, which claims priority under 35 U.S.C. § 119 of Korean Patent Application No. 2004-45567, filed on Jun. 18, 2004, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a chip stack package and, more particularly, to a wafer level chip scale package.

2. Description of the Related Art

The electronic industry is continually seeking methods, techniques and designs that will result in the manufacture of electronic products that are smaller, lighter, faster, more efficient, operate at higher speeds, provide multiple functions and/or result in improved performance, at an effective cost. One of the methods that have been used for attaining such goals is improved package assembly techniques that have resulted in the development of new types of packages such as chip scale or chip size packages (CSP). The CSPs may be manufactured at chip level or at wafer level, with those manufactured at the wafer level also referred to as wafer level chip scale packages (WLCSP).

Typically, a WLCSP will include a stack of a plurality of semiconductor chips that are interconnected by bump connections. For example, each semiconductor chip may include electrode pads formed on the active surface and through electrodes formed at or along the edges of the semiconductor chip. The through electrodes may, in turn, be connected to the electrode pads by redistribution lines. The corresponding through electrodes provided on adjacent semiconductor chips may then be electrically connected with bump connections. Although the semiconductor chips in the chip stack are physically and electrically connected, the formation of such a stack using only bump bonding tends to result in a space or void being formed between the opposing surfaces of two adjacent semiconductor chips. Such spaces may cause reduced mechanical strength and increase the likelihood of reliability faults in the chip stack package. Therefore, the space between adjacent semiconductor chips should be filled to produce a stronger, more durable chip stack package. In a conventional method for manufacturing a WLCSP, liquid adhesive and/or adhesive tape may be used to fill the space between adjacent semiconductor chips.

FIG. 1 is a cross-sectional view of an example of a conventional WLCSP 130. The WLCSP 130 illustrated in FIG. 1 may be manufactured by sequentially using wafer preparing, wafer stacking, wafer sawing and liquid adhesive injection processes.

A plurality of substantially identical wafers (not shown), each having a plurality of semiconductor chips 111, may be prepared using any conventional semiconductor manufacturing process. Each semiconductor chip 111 is provided with a plurality of through electrodes 113 arranged in a peripheral region of the semiconductor chip and bumps 117 formed on at least one end surface of the through electrodes. Alternatively, instead of forming the bumps 117, the through electrodes 113 may be constructed so as to protrude above a surrounding surface of the semiconductor chip 111 for providing connection between adjacent semiconductor devices.

A plurality of such wafers are then vertically stacked so that the corresponding through electrodes 113 and/or bumps 117 of adjacent semiconductor chips 111 are aligned and brought into contact so as to provide electrical connection between adjacent semiconductor chips. The stacked wafers are then divided into individual chip stack packages 130 and a liquid adhesive 123 may be injected into a space remaining between adjacent semiconductor chips 111 and cured to reduce or eliminate voids from the chip stack package.

The WLCSP in which the spaces between adjacent semiconductor chips has been filled with an adhesive may exhibit improved mechanical strength and reliability in comparison with a similarly constructed WLCSP in which the vacant spaces between the adjacent semiconductor chips have not been filled.

However, because the liquid adhesive 123 used to fill the spaces between the adjacent semiconductor chips 111 typically includes metallic and/or non-metallic particulate filler materials, its flow characteristics may make it difficult to fill the space(s) between adjacent semiconductor chips completely or consistently, particularly for chip stacks having relatively small chip-to-chip spacing. Thus, as illustrated in FIG. 1, a WLCSP 130 manufactured with such a liquid adhesive 123 may still include one or more vacant spaces or voids 135 between adjacent semiconductor chips 111. One proposal for addressing the problem of voids in a WLCSP is to use an adhesive tape rather than a liquid adhesive.

FIG. 2 is a cross-sectional view of another example of a conventional WLCSP 230. The WLCSP 230 illustrated in FIG. 2 may be manufactured by sequentially using wafer preparing, adhesive tape attaching, wafer stacking and wafer sawing processes.

A plurality of substantially identical wafers (not shown), each having a plurality of semiconductor chips 211, each having a plurality of semiconductor chips 111, may be prepared using any conventional semiconductor manufacturing process. Each semiconductor chip 211 will typically include a plurality of through electrodes 213 arranged in a peripheral region of the semiconductor chip. The through electrodes 213 may be constructed with protruding portions (not shown) that extend above the adjacent surface of the semiconductor chip or may be provided with bumps 217 formed on at least on surface of the through electrodes.

An adhesive tape 221 may then be attached to the semiconductor chip 211 while still at the wafer level, the adhesive tape 221 typically having openings provided therein to avoid interfering with the bumps 217 or protruding portions (not shown) by maintaining some minimum separation distance between the adhesive tape and the connecting structures.

A plurality of such wafers are then vertically stacked so that the corresponding through electrodes 213 and bumps 217 of adjacent semiconductor chips 211 are aligned and brought into contact so as to provide electrical connection between adjacent semiconductor chips. The stacked and connected wafers may then be divided into individual chip stack packages 230.

A WLCSP manufactured using an adhesive tape may exhibit improved filling performance and mechanical strength in comparison with a WLCSP manufactured with a liquid adhesive. However, the adhesive tape may result in uneven pressure being applied to one or more of the semiconductor chips during a chip stacking process that may result in warpage of one, or more of the semiconductor chips. Further, as illustrated in FIG. 2, during the assembly process, the temperature and/or pressures applied to the chip stack may be sufficient to cause the adhesive tape composition 224 to liquefy and flow out from between the adjacent semiconductor chips and onto the lateral or side surfaces(s) of the package.

SUMMARY OF THE INVENTION

An exemplary embodiment of the present invention is directed to a chip stack package having improved mechanical strength and reliability.

The chip stack package in accordance with an exemplary embodiment of the present invention may include a first semiconductor chip, a second semiconductor chip stacked on the first semiconductor chip, a connector for connecting the first semiconductor chip to the second semiconductor chip, and at least one adhesive formed in a space between the first semiconductor chip and the second semiconductor chip. The at least one adhesive may include a first adhesive and a second adhesive. The first adhesive may be formed in a portion of the space between the first semiconductor chip and the second semiconductor chip and be positioned in a peripheral region on which the connector is provided. The second adhesive may be formed in the space remaining between the first semiconductor chip and the second semiconductor chip except for a region in which the first adhesive is provided.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the present invention will be readily understood with reference to the detailed description provided below when read in conjunction with the accompanying drawings in which similar or identical reference numerals are used to designate similar or corresponding structural elements, and in which:

FIG. 1 is a cross-sectional view of an example of a conventional WLCSP;

FIG. 2 is a cross-sectional view of another example of a conventional WLCSP;

FIG. 3A-FIG. 3F are cross-sectional views of a method for manufacturing a WLCSP in accordance with an exemplary embodiment of the present invention; and

FIG. 4 is a cross-sectional view of a WLCSP manufactured by a method in accordance with another exemplary embodiment of the present invention.

These drawings are provided for illustrative purposes only and are not drawn to scale. The spatial relationships and relative sizing of the elements illustrated in the various embodiments may have been reduced, expanded or rearranged to improve the clarity of the figure with respect to the corresponding description. The figures, therefore, should not be interpreted as accurately reflecting the relative sizing or precise positioning of the corresponding structural elements that could be encompassed by an actual device manufactured according to the exemplary embodiments of the invention.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are illustrated. In light of this detailed description, those of ordinary skill in the art will appreciate that this invention may be embodied in many different forms and should not, therefore, be construed as limited to the particular exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In the description, well-known structures and conventional processes have not been described or illustrated in detail to avoid obscuring the present invention. It will be appreciated that for simplicity and clarity of illustration, some elements illustrated in the figures have not necessarily been drawn to scale. For example, the dimensions of some of the elements have been exaggerated or reduced relative to other elements for clarity.

FIGS. 3A-3F are cross-sectional views of a method for manufacturing a WLCSP in accordance with an exemplary embodiment of the present invention. As illustrated in FIGS. 3A-3F, the disclosed method for manufacturing a WLCSP includes the steps of providing a plurality of wafers, applying a solid adhesive to at least one of the wafers, stacking the wafers so that the solid adhesive is positioned between two adjacent wafers, sawing the stacked wafers to separate semiconductor chip stacks and applying a liquid adhesive to the semiconductor chip stacks.

As illustrated in FIG. 3A, a wafer 10 may be prepared using any appropriate semiconductor device manufacturing process. The prepared wafer 10 will include a plurality of semiconductor chips 11, with each semiconductor chip including a plurality of through electrodes 13 formed through a peripheral region of the semiconductor chip. Conductive bumps 17 may then be formed on and electrically connected to at least one end of the through electrodes 13. The through electrodes 13 may, in turn, be electrically connected to integrated circuits provided on an interior region of the semiconductor chips 11 by conductive redistribution patterns (not shown). Alternatively, the through electrodes 13 may constructed so as to include a protruding portion that extends above the surrounding surface of the semiconductor chip 11 and eliminate the need to form bumps. The conductive bumps 17 may include solder, nickel, gold, copper, metal alloys or other materials having suitable electrical conductivity and are capable of forming conductive bonds with the material(s) used to form the through electrodes, i.e., good bondability.

Although this exemplary embodiment show the through electrodes 13 formed through the peripheral region of the semiconductor chip 11, the through electrodes 13 may be not limited in this regard. For example, the through electrodes 13 may be formed in a central region of the semiconductor chip 11.

As illustrated in FIG. 3B, a solid adhesive 21 as a second adhesive, for example an adhesive tape or sheet, is attached to or formed on a portion of a surface of the semiconductor chips 11 formed on the wafer 10. The solid adhesive 21 may be formed on an interior region of a surface of the semiconductor chip 11 and be located completely within the peripheral surface region through which the through electrodes 13 are formed and on which the bumps 17 may be attached. The solid adhesive 21 will typically be sized and configured so as to maintain a minimum spacing between the solid adhesive and any protruding portions of the through electrodes 13 or bumps 17 and so that the solid adhesive defines the perimeter of the space or void in which the through electrodes or bumps are positioned. The space or void will also have at least one open side adjacent a side or lateral surface of the semiconductor chips to allow for the subsequent introduction of a flowable adhesive composition.

The solid adhesive 21 used in this exemplary embodiment may be a multi-layer adhesive tape that includes an intermediate base film 21a with adhesive layers 21b provided on both sides of the base film to provide the desired strength and adhesive performance. It will be appreciated that other solid adhesive materials, such as a single layer tape or an alternate multi-layer adhesive tape having other or different layers to provide particular performance modifications, may be used. It will also be appreciated that the solid adhesive may be formed in place by printing or otherwise depositing an adhesive composition on designated portions of the surface of the semiconductor chips 11 and is not, therefore, limited to any particular construction of or method of forming the solid adhesive 21.

If the through electrodes 13 are formed in the peripheral region of the semiconductor chip 11, the solid adhesive 21 may be formed in a central region of the semiconductor chip 11 or be formed in a portion of the peripheral region on which the through electrodes 13 are provided, including the central region.

As illustrated in FIG. 3C, after the solid adhesive has been provided on the wafer surface, a plurality of wafers can then be aligned and vertically stacked to interconnect corresponding semiconductor chips 11 on adjacent wafers by connecting corresponding electrodes 13 and/or bumps 17 to provide both mechanical and electrical connections between the adjacent semiconductor chips. The adjacent semiconductor chips 11 will also be attached by the solid adhesive 21 arranged between the opposing surfaces of the semiconductor chips. The solid adhesive 21 may also provide some resilience that will allow for absorption or dampening of at least some of the physical or mechanical shocks to which the semiconductor chip 11 may be subjected during manufacture including, for example, forces applied during the wafer stacking process.

As illustrated in FIG. 3D, after the stacking operation, the stacked wafers 10 may be divided into individual chip stack packages including a plurality of vertically stacked semiconductor devices 11. The wafers 10 may, for example, be separated along scribe lines 15 using a high-speed rotary diamond blade 50, a laser beam scribing apparatus or any other suitable apparatus for removing or weakening those portions of the wafers that lie between adjacent semiconductor chips so that the chip stack packages may be separated.

As illustrated in FIG. 3E, a flowable adhesive composition 23 as a first adhesive may then be injected into the spaces remaining between the adjacent semiconductor chips 11. For example, the flowable adhesive composition 23 may be a liquid adhesive that is applied sequentially or simultaneously into the portions of the space between the semiconductor chips 11 that are exposed along the lateral or side surfaces of the semiconductor chips. When using a liquid adhesive, the flowable adhesive composition 23 may be injected into or otherwise inserted or deposited into the space. The flowable adhesive composition will typically flow into the space or void from the lateral edge of the semiconductor chip to the exterior portion of the solid adhesive 21 at least partially as the result of capillary action and, in so doing, will surround and encapsulate those portions of the through electrodes 13 and/or bumps 17 that are present within the space. In this manner, the spaces or voids between the adjacent semiconductor chips 11 may be completely filled with the first adhesive and the second adhesive. The flowable adhesive composition 23 may include liquid adhesive such as an epoxy resin adhesive, an adhesive suspension or a fine powder.

After application, the flowable adhesive composition 23 may be cured by any appropriate method including, for example, self-curing, heating or UV irradiation. The cured flowable adhesive composition 23 may become a first adhesive of the resulting package. The exemplary embodiment of the manufacturing method described above may produce a completed WLCSP 30 as illustrated in FIG. 3F.

The WLCSP manufactured by a method in accordance with the exemplary embodiment described above will tend to increase the extent to which the space formed between adjacent semiconductor chips may be filled by using a combination of a first adhesive (a flowable adhesive composition) and a second adhesive (a solid adhesive). By locating the solid adhesive on a more central portion of the surface of the semiconductor chip, both the space that the later-applied flowable adhesive composition will be filling and the strength requirements for the cured flowable adhesive composition may be reduced. Similarly, because the flowable adhesive composition will no longer need to flow to the center of the semiconductor chip, the flow channel length will be reduced accordingly. If; for example, the distance between adjacent semiconductor chips is 30 μm or less, a range of conventional liquid adhesive compositions may be used for filling the space. It is expected that in most instances the distance between adjacent semiconductor chips is will be between about 10 μm and 50 μm.

Although this exemplary embodiment shows at least one adhesive including a solid adhesive and a flowable adhesive composition, the at least one adhesive may not be limited in this regard. For example, the at least one adhesive may be selected according to various standards, for example, TG (glass transition temperature), Young's Modulus or CTE (Coefficient of Thermal Expansion).

FIG. 4 is a cross-sectional view of a WLCSP 70 in accordance with another exemplary embodiment of the present invention. As illustrated in FIG. 4, the WLCSP 70 may further include a substrate on which the lowermost semiconductor chip 11′ of a WLCSP such as that illustrated in FIG. 3F may be mounted or, alternatively, to which a WLCSP may be attached. As illustrated in FIG. 4, in the lowest semiconductor chip 1′ the through electrodes 13 may be bump-bonded to corresponding substrate pads 43.

The lowest semiconductor chip 11′ may be attached to the substrate 41 using a solid adhesive 21′, which may be the same solid adhesive 21 that is used to attach adjacent semiconductor chips 11, 11′ within the chip stack. An epoxy resin adhesive may be injected into a space or void remaining between the substrate 41 and the lowest semiconductor chip 11′ except for a region in which the solid adhesive 21′ is provided. The epoxy resin adhesive may be cured to completely fill the spaces or voids between the substrate 41 and the lowest semiconductor chip 11′. Connecting bumps 45 may be provided on a surface of the substrate 41 separated from the chip stack, typically on a surface of the substrate 41 opposite the surface to which the chip stack is attached, for allowing connection of the stacked semiconductor chips 11, 11′αto external devices or circuits and thereby complete formation of the WLCSP 70.

Although in this exemplary embodiment, a solid adhesive 21′ used in attaching the lowest semiconductor chip 11′ to the substrate 41 is the same solid adhesive 21 that is used to attach adjacent semiconductor chips 11, 11′ within the chip stack, the solid adhesive 21′ may not be necessarily the same solid adhesive that is used to attach adjacent semiconductor chips 11, 11′ within the chip stack.

Accordingly, a method for manufacturing a WLCSP in accordance with an exemplary embodiment of the present invention may improve physical or mechanical stability and reliability during a chip stacking process at wafer level or chip level. The sufficiency of the bump connections may be inspected or otherwise tested after the chip stacking process to confirm that the connection process was at least nominally successful. Sample devices may be subjected to additional destructive and/or accelerated life testing for evaluating the yield and stability of the produced WLCSP devices.

Although certain exemplary embodiments of the present invention have been described in detail above, it should be understood that many variations and/or modifications of the basic inventive concepts herein taught, which may appear to those skilled in the art, will still fall within the spirit and scope of the exemplary embodiments of the present invention as defined in the appended claims. For example, the present invention may be employed in a chip stack package having a stack structure that utilizes a flip chip bonding process at the chip level. Further, the present invention may be incorporated in the manufacture of semiconductor devices having a space between wafers, between semiconductor chips, and/or between a single semiconductor chip or a chip stack and a substrate.

Claims

1. A chip stack package including:

a first semiconductor chip;

a second semiconductor chip stacked on the first semiconductor chip;

connector for electrically connecting the first semiconductor chip to the second semiconductor chip; and

at least one adhesive formed in a space between the first semiconductor chip and the second semiconductor chip, the at least one adhesive including a first adhesive and a second adhesive, the first adhesive being formed in a peripheral region on which the connector is provided, the second adhesive being formed in the space remaining between the first semiconductor chip and the second semiconductor chip except for a region in which the first adhesive is provided.

2. The chip stack package according to claim 1, wherein the first semiconductor chip includes a plurality of first conductive connectors and the second semiconductor chip includes a plurality of second conductive connectors, and the first conductive connectors are electrically connected to corresponding second conductive connectors through the connector.

3. The chip stack package according to claim 2, wherein the first conductive connectors are formed in a peripheral region of the first semiconductor chip and the second conductive connectors are formed in a peripheral region of the second semiconductor chip.

4. The chip stack package according to claim 2, wherein the first conductive connectors are formed in a central region of the first semiconductor chip and the second conductive connectors are formed in a central region of the second semiconductor chip.

5. The chip stack package according to claim 2, wherein the first and second conductive connectors are through electrodes.

6. The chip stack package according to claim 5, wherein the connector is conductive protrusions formed on at least one end of the first and second conductive connectors.

7. The chip stack package according to claim 6, wherein the conductive protrusions are conductive bumps.

8. The chip stack package according to claim 1, wherein the first adhesive is formed by curing a flowable adhesive composition and the second adhesive is a solid adhesive.

9. The chip stack package according to claim 1, wherein the first adhesive has the material properties different from the second adhesive.

10. The chip stack package according to claim 3, wherein the second adhesive covers at least a central region of the first semiconductor chip.

11. The chip stack package according to claim 8, wherein the second adhesive is a multi-layer adhesive tape.

12. The chip stack package according to claim 11, wherein the multi-layer adhesive tape includes a core layer between an upper adhesive layer and a lower adhesive layer.

13. A chip stack package including:

a substrate having an upper surface and a lower surface;

a first semiconductor chip stacked on the upper surface of the substrate;

a second semiconductor chip stacked on the first semiconductor chip;

connector for electrically connecting the substrate to the first semiconductor chip and the first semiconductor chip to the second semiconductor chip; and

at least one adhesive formed in spaces between the substrate and the first semiconductor chip and between the first semiconductor chip and the second semiconductor chip, the at least one adhesive including a first adhesive and a second adhesive, the first adhesive being formed in a peripheral region on which the connector is provided, the second adhesive being formed in the spaces except for a region in which the first adhesive is provided.

14. The chip stack package according to claim 13, wherein the substrate has a plurality of substrate pads, the first semiconductor chip includes a plurality of first conductive connectors and the second semiconductor chip includes a plurality of second conductive connectors, and the substrate pads are electrically connected to the first conductive connectors through the connector and the first conductive connectors are electrically connected to the second conductive connectors through the connector.

15. The chip stack package according to claim 14, wherein the first conductive connectors are formed in a peripheral region of the first semiconductor chip and the second conductive connectors are formed in a peripheral region of the second semiconductor chip.

16. The chip stack package according to claim 14, wherein the first conductive connectors are formed in a central region of the first semiconductor chip and the second conductive connectors are formed in a central region of the second semiconductor chip.

17. The chip stack package according to claim 14, wherein the first and second conductive connectors are through electrodes.

18. The chip stack package according to claim 17, wherein the connector is conductive protrusions formed on at least one end of the first and second conductive connectors.

19. The chip stack package according to claim 18, wherein the conductive protrusions are conductive bumps.

20. The chip stack package according to claim 13, wherein the first adhesive is formed by curing a flowable adhesive composition and the second adhesive is a solid adhesive.

21. The chip stack package according to claim 13, wherein the second adhesive includes a substrate attaching adhesive for attaching the substrate to the first semiconductor chip and a chip attaching adhesive for attaching the second semiconductor chip to the first semiconductor chip.

22. The chip stack package according to claim 13, wherein the first adhesive has the material properties different from the second adhesive.

23. The chip stack package according to claim 15, wherein the second adhesive covers at least central regions of the substrate and the first semiconductor chip.

24. The chip stack package according to claim 20, wherein the second adhesive is a multi-layer adhesive tape.

25. The chip stack package according to claim 24, wherein the multi-layer adhesive tape includes a core layer between an upper adhesive layer and a lower adhesive layer.

26. The chip stack package according to claim 13, further including external connection terminals formed on the lower surface of the substrate.