Wafer container with constraints
A wafer container includes a container body with an opening on one side, and the inside with slots for placing the wafers. The door joined with the opening of the container body to protect the wafer therein, the characteristic in that: two rows of the plurality of wafer restraint components with a spaced at interval is located on the inner surface of the door and adjacent to the central of the door, in which the each wafer restraint component includes a base portion, which one end is fixed on the inner surface of the door, and another end is joined with a bent arm. The bent arm includes a first contact head and a second contact head to restrict the wafer moving toward the opening of the door.
1. Field of the Invention
The present invention is related to a front opening unified pod (FOUP), more particularly to the wafer container with the wafer restraint modules. The wafer restraint having a plurality of contact heads to restrict the wafer from moving.
2. Description of the Prior Art
The semiconductor wafers are transferred to different stations to apply the various processes in the required equipments. A sealed container is provided for automatic transfer to prevent the pollution.
According to the drawbacks of the aforementioned, one objective of the present invention is thus to provide a wafer container with wafer restraint modules, which is disposed on the inner surface of the door and adjacent two sides of central of door, in which each wafer restraint includes a plurality of contact head to restrict the wafer from moving toward the opening of the wafer container and toward the two sides of the opening. As results, the tiny dust particles can be prevented formed from the friction between the wafer and the wafer restraint component to contaminate.
Another objective of the present invention is to provide a wafer container with wafer restraint module, where the wafer restraint module is disposed on the two sides of the inner surface of the door and adjacent to the two sides of the central of the door. Each wafer restraint component includes a plurality of contact heads to contact the wafer sequentially, thereby, the contact heads can sustain the wafer to restrict the tiny dust particles are formed from the friction between the wafer and the wafer restraint component to contaminate the wafers.
Still another objective of present invention is to provide a wafer container with a wafer restraint component. The wafer restraint component is located on the inner surface of the door and adjacent to the two sides of the central of the door, in which the wafer restraint component is integrated with the inner surface of the door. Thus, the structure of the wafer container is simple and has lower manufacturing cost.
According to above objectives, the present invention provides a wafer container with a wafer restraint module, which includes a container body, and a door. The inner surface of the container body includes a plurality of slots for sustain a plurality of wafers therein; a side-wall of the container body includes an opening for exporting or importing the plurality of wafers; a plurality of restraint components with a spaced at interval is located on the inner surface of the door and adjacent to the central of the door, in which each wafer restraint component includes a base portion, which one end of the base portion is fixed on the inner surface of the door, and anther end is joined with the bent arm. The bent arm includes a first contact head and a second contact head which are provided for the wafer restraint component to restrict the wafer from moving toward the opening and two sides of the opening of the door.
The foregoing aspects and many of the attendant advantages of this invention will become more readily appreciated as the same becomes better understood by reference to the following detailed description, when taken in conjunction with the accompanying drawings, wherein:
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The base portion 41 of the wafer restraint component 40 and the bent arm 42 of the abovementioned can be made of two different materials or different elastic structures (such as thermoplastic elastomer), for example, the plastic with different hardness. Thus, the deformation of the base portion 41 is formed easily, and the bent arm 42 is difficult being deformed. With such, the one-half portion of the wafer restraint component 40 can provide a fine deformation, and another half can provide a lever bent arm 42. Not only the material of the wafer restraint component 40 or base portion 41 of the wafer restraint component 40 is an elasticity structure (such as thermoplastic elastomer) which is provided for deforming, so that the first contact head 43 and the second contact head 44 are contacted the wafer sequentially, but also the elasticity structure is capability of shockproof to prevent the wafer from moving toward the opening of the container body 10. Also, the base portion 41 includes at least one curved portion, which the angle of the curved portion would be changed to drive the movement of the bent arm 42 to cause the second contact head 44 is contacted the wafer when the wafer is contacted the first contact head 43. The first contact head 43 and the second contact head 44 also include a recess which is provided for fall within the wafer to restrict the wafer from moving. The plurality of wafer restraint components 40 can form as pedestal which is fixed on the inner surface 20 of the door 20. Alternatively, the plurality of wafer restraint components 40 is integrated with the inner surface 22 of the door 20, thus, the manufacturing cost can be reduced.
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While the invention has been described by way of examples and in terms of the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. To the contrary, it is intended to cover various modifications and similar arrangements as would be apparent to those skilled in the art. Therefore, the scope of the appended claims should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements.
Claims
1. A wafer container including a container body that having a plurality of slots therein for placing a plurality of wafers; an opening, is formed on a sidewall of said wafer container for exporting said plurality of wafers or importing said plurality of wafers; and a door including an outer surface and an inner surface, wherein said inner surface of said door is joined with said opening of said container body for protecting said plurality of wafers therein, the characteristic in that:
- two rows of restraint modules are disposed on said inner surface of said door and adjacent to said central of said door, each restraint module consist a plurality of restraint components with a spaced at interval, and one restraint component aligned said restraint component of said restraint module, wherein each said restraint component includes a base portion, one end of said base portion is fixed on said inner surface of said door, and another end of said base portion is joined with a bent arm, and said bent arm includes a first contact head and a second contact head.
2. The wafer container according to claim 1, wherein said restraint module is an integrated structure.
3. The wafer container according to claim 1, wherein said restraint module is integrated with said inner surface of said door.
4. The wafer container according to claim 1, wherein said restraint component is an integrated structure.
5. The wafer container according to claim 1, wherein said restraint component is integrated with said inner surface of said door.
6. The wafer container according to claim 1, wherein said restraint component is an elastic component.
7. The wafer container according to claim 1, wherein said restraint component is a thermoplastic elastomer.
8. The wafer container according to claim 1, wherein said base portion of said restraint component is an elastic component.
9. The wafer container according to claim 1, wherein said base portion of said restraint component is a thermoplastic elastomer.
10. The wafer container according to claim 1, where the material is different between said base portion of said restraint component and said bent arm.
11. The wafer container according to claim 1, wherein the plastic material is different between said base portion of said restraint and said bent arm.
12. The wafer container according to claim 1, wherein said first contact head and said second contact head of said bent arm include a recess to restrict said wafer from moving.
13. The wafer container according to claim 1, wherein a connecting line between said first contact head and said second contact head is parallelled said inner surface of said door before said door joined with said container body.
14. The wafer container according to claim 1, wherein an included angle is formed between a connecting line of said first contact head and said second contact head and said inner surface of said door when said door in joined with said container body.
15. The wafer container according to claim 1, wherein said base portion of said restraint component is curved so as to said first contact head and said second contact head contacted said wafer.
16. The wafer container according to claim 1, wherein said wafer contacted said first contact head to deform said base portion so that said second contact head is contacted said wafer.
17. The wafer container according to claim 1, wherein said wafer contacted said first contact head to doform said base portion and lever said bent arm so that said second contact head is contacted said wafer.
18. The wafer container according to claim 1, wherein said base portion of said restraint component includes at least a curve portion.
19. The wafer container according to claim 1, wherein said wafer contacted said first contact head to change said included angle of said curve portion of said base portion so that said second contact head is contacted said wafer.
20. The wafer container according to claim 1, wherein said wafer contacted said first contact head to change said included angle of said curved portion of said base portion and lever said curved arm so that said second contact arm is contacted said wafer.
21. The wafer container according to claim 1, wherein said outer door includes at least a latch component thereon.
22. A wafer container including a container body that having a plurality of slots therein for placing a plurality of wafers; an opening, is formed on a sidewall of said wafer container for exporting said plurality of wafers or importing said plurality of wafers; and a door including an outer surface and an inner surface, wherein said inner surface of said door is joined with said opening of said container body for protecting said plurality of wafers therein, the characteristic in that: two row restraint modules are disposed on said inner surface of said door and adjacent to said central of said door, each restraint module consist a plurality of restraint components with a spaced at interval, and one restraint component aligned said restraint component of said restraint module, wherein each said restraint component includes a base portion, one end of said base portion is joined with a first bent arm and said first bent arm includes two free-ends, a first contact head is formed on one of two free-ends which is related to said inner surface of said door and adjacent to said central portion, and another free-end is related to said first contact head that is joined with a second bent arm, and said second bent arm includes a second contact head and a third contact head.
23. The wafer container according to claim 22, wherein said first bent arm is located between said two free-ends and a pivot is formed and adjacent to a sidewall of said inner surface.
24. The wafer container according to claim 23, wherein said pivot is fixed on said inner surface.
25. The wafer container according to claim 22, wherein said restraint module is an integrated structure.
26. The wafer container according to claim 22, wherein said restraint module is integrated with said inner surface of said door.
27. The wafer container according to claim 22, wherein said restraint component is an integrated structure.
28. The wafer container according to claim 22, wherein said restraint component is integrated with said inner surface of said door.
29. The wafer container according to claim 22, wherein said restraint component is an elastic component.
30. The wafer container according to claim 22, wherein said restraint component is a thermoplastic elastomer.
31. The wafer container according to claim 22, wherein said base portion of said restraint component is an elastic component.
32. The wafer container according to claim 22, wherein said base portion of said restraint component is a thermoplastic elastomer.
33. The wafer container according to claim 22, wherein the material is different between said base portion of said restraint component and said first bent arm.
34. The wafer container according to claim 22, wherein the material is different between said base portion of said restraint component and said second bent arm.
35. The wafer container according to claim 22, wherein the plastic material is different between said base portion of said restraint component and said first bent arm.
36. The wafer container according to claim 22, wherein the plastic material is different between said base portion of said restraint material and said second bent arm.
37. The wafer container according to claim 22, wherein said first contact head, said second contact head, and said third contact head of said restraint component include a recess to restrict said wafer from moving.
38. The wafer container according to claim 22, wherein a connecting line between said first contact head, said second contact head, and said third contact head is parallelled said inner surface of said door before said door joined with said container body.
39. The wafer container according to claim 22, wherein an included angle is formed between a connecting line of said first contact head, said second contact head, and said third contact head and said inner surface of said door when said door joined with said container body.
40. The wafer container according to claim 22, wherein said base portion of said restraint component is curved so as to said first contact head, said second contact head, and said third contact head contacted said wafer.
41. The wafer container according to claim 22, wherein said wafer contacted said first contact head to deform said base portion, so that said second contact head and said third contact head is contacted said wafer.
42. The wafer container according to claim 22, wherein said wafer contacted said first contact head to curve said base portion and lever said first bent arm and said second bent arm, so that said second contact head and said third contact head is contacted said wafer.
43. The wafer container according to claim 22, wherein said base portion of said restraint component includes at least a curved portion.
44. The wafer container according to claim 22, wherein said wafer is contacted said first contact head to change said included angle of said curved portion of said base portion, so that said second contact head and said third contact head contacted said wafer.
45. The wafer container according to claim 22, wherein said wafer contacted said first contact head to change said included angle of said curved portion of said base portion and lever said first bent arm and said second bent arm, so that said second contact head and said third contact head contacted said wafer.
46. The wafer container according to claim 22, wherein said outer surface includes at least a latch component.
47. A wafer container including a container body that having a plurality of slots therein for placing a plurality of wafers; an opening, is formed on a sidewall of said wafer container for exporting said plurality of wafers or importing said plurality of wafers; and a door including an outer surface and an inner surface, wherein said inner surface of said door is joined with said opening of said container body for protecting said plurality of wafers therein, the characteristic in that:
- a restraint module is located on said inner surface of said door and adjacent to a central portion of said door, and a plurality of restraint components with a spaced at interval is located on a central portion of said base portion, each curved portion are formed on a central portion of said base portion and toward two sides of said central portion, and a free-end of each said curved portion is formed a semicircle-like protruding portion to contact so as to a central portion of said semicircle-like protruding portion is contacted said wafers.
48. The wafer container according to claim 47, wherein said wafer restraint module is an integrated structure.
49. The wafer container according to claim 47, wherein said wafer restraint module is integrated with said inner surface of said door.
50. The wafer container according to claim 47, wherein a wear-resisting material is located on the contact surface between said guide notch of said protruding portion and said wafer.
51. The wafer container according to claim 50, wherein the material of said wear-resisting material is PEEK material.
52. The wafer container according to claim 47, wherein the width of said guide notch of said protruding portion is same as the thickness of said wafer to restrict said wafer from moving.
53. The wafer container according to claim 47, wherein an included angle is located between said base portion and said curve portion.
54. The wafer container according to claim 53, wherein said included angle is about 10 to 60 degree.
55. The wafer container according to claim 47, wherein said base portion of said restraint module includes a plurality of snap holes to snap said wafer restraint module on said inner surface of said door.
56. The wafer container according to claim 55, wherein said inner surface of said door corresponding to said plurality of snap holes includes a snap pillar to wedge said wafer restraint module on said inner surface of said door.
57. The wafer container according to claim 47, wherein said restraint component is ability of elasticity.
58. The wafer container according to claim 47, wherein said outer surface includes at least a latch component.
Type: Application
Filed: Aug 14, 2008
Publication Date: Feb 4, 2010
Inventors: Chin-Ming LIN (Shulin City), Kuan-Lun Pan (Shulin City)
Application Number: 12/191,414
International Classification: B65D 85/00 (20060101);