RESTRAINED, UNATTACHED, ULTRAPURE PUMP DIAPHRAGM

Abstract

In one example, a fluid system component includes a first element and a second element, where one or both of the first and second elements are configured to be exposed to a fluid. The fluid system also includes a flexible diaphragm positioned between the first and second elements. Finally, the fluid system component includes one or more retaining elements, each retaining element having a first portion received in the first element and a second portion received in the second element. The retaining elements also extend through the flexible diaphragm.

Description

RELATED APPLICATIONS

This application is related to U.S. Pat. No. 6,106,246, entitled FREE-DIAPHRAGM PUMP, and U.S. Pat. No. 6,402,486, entitled FREE-DIAPHRAGM PUMP, both of which are incorporated herein in their respective entireties by this reference.

BACKGROUND

1. Field of the Present Disclosure

The present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components that include a diaphragm, and retention mechanisms and devices for diaphragms.

2. Description of Related Art

Diaphragm pumps are well suited for a variety of applications. In some conditions however, the diaphragm may fail to maintain a seal between a fluid chamber and an air chamber, thereby rendering the pump ineffective or useless. At least one diaphragm failure mechanism involves a partial or complete displacement of the diaphragm in response to operating and/or other conditions. Similar problems may be encountered in other fluid system components that include a diaphragm. Increasing the sealing pressure associated with the diaphragm may not be effective in resolving these problems.

BRIEF SUMMARY OF ASPECTS OF EXAMPLE EMBODIMENTS

It should be noted that the embodiments disclosed herein do not constitute an exhaustive summary of all possible embodiments, nor does this brief summary constitute an exhaustive list of all aspects of any particular embodiment(s). Rather, this brief summary simply presents selected aspects of some example embodiments. It should further be noted that nothing herein should be construed as constituting an essential or indispensable element of any invention or embodiment. Rather, various aspects of the disclosed embodiments may be combined in a variety of ways so as to define yet further embodiments. Such further embodiments are considered as being within the scope of this disclosure. As well, none of the embodiments embraced within the scope of this disclosure should be construed as resolving, or being limited to the resolution of, any particular problem(s). Nor should such embodiments be construed to implement, or be limited to implementation of, any particular technical effect(s) or solution(s).

Disclosed embodiments are generally concerned with fluid systems and associated components. Embodiments within the scope of this disclosure may include any one or more of the following elements, and features of elements, in any combination: a diaphragm of a fluid system component; a restrained, unattached, diaphragm of a fluid system component; fluid system component elements configured to cooperatively facilitate retention of a diaphragm in a fluid system component; a fluid system component that includes a restrained, unattached, diaphragm; a restrained, unattached, pump diaphragm; a pump head and pump body configured to facilitate retention of a diaphragm therebetween; a pump head and pump body that include respective complementary features that cooperate to aid in retention of a diaphragm between the pump head and pump body; means for maintaining restrained, unattached, retention of a diaphragm between first and second pump elements; one or more retaining elements configured to interface with a diaphragm so as to implement the retention of the diaphragm in a desired location and orientation; one or more retaining elements configured to interface with a diaphragm so as to implement the restrained, unattached, retention of the diaphragm in a desired location and orientation; one or more pins configured to extend through a diaphragm to implement the retention of the diaphragm in a desired location and orientation; and, a diaphragm of any of the following types—flat, blousing, pillow, trampoline, convolute, shallow draw, dish, “pie pan”, drop center, offset convolute, deep draw, “top hat”, double taper deep draw, bellows, and double bellows.

BRIEF DESCRIPTION OF THE DRAWINGS

The appended drawings contain figures of some example embodiments to further clarify various aspects of the present disclosure. It will be appreciated that these drawings depict only some embodiments of the disclosure and are not intended to limit its scope in any way. The disclosure will be described and explained with additional specificity and detail through the use of the accompanying drawings in which:

FIG. 1 is a partial section perspective view of an example fluid pump that includes a diaphragm and retaining elements;

FIG. 2 is an exploded view of an example fluid pump that includes a diaphragm and retaining elements; and

FIG. 3 is a partial section view of an example fluid pump that includes a diaphragm and retaining elements.

DETAILED DESCRIPTION OF SOME EXAMPLE EMBODIMENTS

The present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components that include a diaphragm or other displaceable element that is maintained in a desired position and orientation through the use of one or more retaining elements and/or structural features of a fluid system component in connection with which the diaphragm is employed. In one particular example, a pump is provided that includes one or more pins, or comparable devices, to maintain a diaphragm in a desired position and orientation within the pump.

A. General Aspects of Some Example Embodiments

In general, fluid system components disclosed herein may used in a variety of different applications, and may be particularly useful in fluid systems for semiconductor manufacturing processes. Such fluid systems may employ, for example, deionized (DI) water, corrosive agents and materials including but not limited to acids and bases, gases, other fluids, and combinations of any of the foregoing. Such fluids may be hot, highly pressurized, reactive, and/or pure fluids.

The temperatures of fluids employed in such systems, such as acids for example, may be anywhere in the range of about 1 degree C. to about 180 degrees C., or in any sub-range falling within that range including, for example, about 100 degrees C. to about 180 degrees C. These temperatures are provided by way of example, and in some instances may be even higher than about 180 degrees C. For example, some systems may employ process fluids that are maintained at a temperature of about 120 degrees C., or higher. As another example, some systems may employ process fluids that may reach temperatures as high as about 200 degrees C. to about 220 degrees C., or higher. Note that as used herein, “fluid” embraces gases, liquids, combinations of gases and liquids, and combinations of one or more gases and/or one or more liquids with solids.

The fluid system components disclosed herein may be constructed with a variety of components and materials including, but not limited to, non-reactive and substantially non-reactive materials, non-metallic and substantially non-metallic materials, rubber, plastics such as polymers, and composites. It should be noted that non-reactive and substantially non-reactive materials embrace a variety of materials, including both metals, such as stainless steel for example, as well as non-metallic materials, such as plastics for example. Examples of the aforementioned polymers may include perfluoroalkoxy (PFA) and polytetrafluoroethylene (PTFE). Such polymers may include, for example, perfluoroalkoxy (PFA) and polytetrafluoroethylene (PTFE). Fluoroelastomers (FKM), and perfluoroelastomers (FFKM) may also be employed. These materials may or may not be virgin materials.

In certain applications, metals such as steel including stainless steel, copper, titanium, brass, nickel, aluminum, and alloys and combinations of any of the foregoing metals, may be used. Examples of such alloys include copper-nickel alloys (CNA), and nickel-copper alloys (NCA).

B. Overview of An Example Embodiment and Environment

With particular reference now to FIGS. 1-3, a brief overview is provided concerning an example fluid system component that includes a diaphragm. More specifically, FIG. 1 discloses an example fluid pump 100 having a pump head 102 which may be connected, permanently or removably, to a pump body 104 that may include a fluid inlet 104a and a fluid outlet 104b. With brief reference particularly to FIG. 3, and as discussed in more detail below, some embodiments may include a union 106 having threads configured to releasably engage corresponding threads of the pump body 104. The union 106 may be employed to removably secure the pump head 102 to the pump body 104. It should be noted that while the Figures indicate only a single pump head 102, some embodiments of a fluid pump include two pump heads such as pump head 102, one attached to either side of a pump body such as pump body 104. The two pump heads may be similar, or substantially identical, to each other in terms of construction and/or operation.

A diaphragm 200 may be positioned between the pump head 102 and the pump body 104. Some embodiments of a pump, such as a pump that includes multiple pump heads, may include multiple diaphragms. A plurality of retaining elements 300 may be provided that aid in retention of the diaphragm 200 in a desired position and orientation. When properly positioned and secured between the pump head 102 and pump body 104, the diaphragm 200 not only enables the pumping of a process fluid, but also maintains isolation between a process fluid and an operating fluid, discussed in more detail below.

With regard to some general aspects of the operation of the fluid pump 100, a pressurized operating fluid may be introduced into the fluid pump 100 so as to contact one side of the diaphragm 200, causing a corresponding displacement of the diaphragm 200. In some example embodiments, the diaphragm 200 may be in contact with a process fluid such that the process fluid is pumped by the motion of the diaphragm 200 that is induced by the pressurized operating fluid. In other example embodiments, the diaphragm 200 may be configured to cause, either directly or indirectly, the deflection of another diaphragm (not shown) by virtue of a reciprocating shaft and/or other mechanism positioned between the diaphragms. In either example however, the pumping of a process fluid is effected by displacement of one or more diaphragms that are acted upon, either directly or indirectly, by a pressurized operating fluid.

Among other things, the retaining elements 300 may help to ensure that the diaphragm 200 does not move out of position relative to the pump head 102 and the pump body 104 during operation of the fluid pump 100, since withdrawal of the diaphragm 200 from its sealing position between the pump head 102 and pump body 104 could result in leakage of the process fluid and/or operating fluid, as well as contamination of the process fluid.

Further details concerning the structure and operation of some example fluid pumps are disclosed and/or claimed in U.S. Pat. No. 6,106,246, entitled FREE-DIAPHRAGM PUMP, and U.S. Pat. No. 6,402,486, entitled FREE-DIAPHRAGM PUMP, which have been incorporated herein in their respective entireties. It will be appreciated that aspects of this disclosure, such as the retaining elements 300 for example, may be employed in connection with the pumps of the foregoing patents.

C. Details of Aspects of An Example Embodiment and Environment

Directing more particular attention now to FIGS. 1-3, details are provided concerning an example fluid pump and components. In one example embodiment, the fluid pump may comprise a Maxim 50 Ultra-High Purity Chemical Pump, available from Trebor Int'l. (http://www.treborintl.com/support_documents/ds_Maxim_—50.pdf). The aforementioned data sheet is incorporated herein in its entirety by this reference.

With reference now to the example fluid pump 100, the pump head 102 and/or the pump body 104 may be constructed from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Such materials may be machined, molded, or otherwise formed. More generally, the materials for the pump head 102 and pump body 104 may be selected for compatibility with the operating fluids and operating conditions with which the fluid pump 100 is expected to be employed. Other examples of materials that may be used in the construction of the pump head 102 and/or pump body 104 are disclosed elsewhere herein. In some embodiments, the pump head 102 is formed of a single piece of material.

In terms of its configuration, the pump head 102 may include a variety of accessory ports configured to receive components that provide input to a user concerning aspects of the performance of the fluid pump 100. For example, the pump head 102 may include an accessory port 102a configured to receive a cycle probe. Another accessory port 102b may be provided that is configured to receive a leak probe. Still other accessory ports 102c may be provided to receive other probes or components. The accessory ports may or may not be threaded, or otherwise configured to releasably receive a probe or other component.

As further indicated in the Figures, the pump head 102 may define a plurality of recesses 102d, each of which is configured to receive a portion of a retaining element 300, as discussed in more detail below. The recesses 102d may or may not all be substantially the same diameter and/or depth. Moreover, the recesses 102d need not have a circular cross-section. Rather, the cross-sectional shape of the recesses 102d may be polygonal or any other shape. For example, the cross-sectional shape of one or more recesses 102d may be substantially triangular, square, or any other polygonal shape. Likewise, it is not necessary that the recesses 102d all have the same cross-sectional shape. In at least some embodiments, the recesses 102d are spaced substantially evenly about the diameter of a portion of the pump head 102. Such spacing is not required however. Finally, while eight recesses 102d are disclosed in FIG. 2, for example, various embodiments may have more, or fewer, recesses.

Finally, the pump head 102 and pump body 104 may each include complementary structure(s) that cooperate with each other to aid in the retention of the diaphragm. More particularly, a portion of the diaphragm 200 may be interposed between the respective complementary structures, and the respective complementary structures may be configured so that when they are engaged with each other, they tend to resist, or prevent, withdrawal of the diaphragm from between the pump head 102 and the pump body 104 (see, e.g., FIG. 3).

With reference now to the particular example disclosed in the Figures, the pump head 102 may include a complementary structure 102e configured to interface with complementary structure of the pump body 104. As noted herein, these respective complementary structures of the pump head 102 and the pump body 104 may aid in the retention of the diaphragm 200 (see, e.g., FIG. 3). In the example of FIG. 2, the complementary structure 102e extends around a substantial portion, or all of, a diameter of a portion of the pump head 102 and has a substantially V-shaped cross section. Other cross-sectional shapes may be alternatively employed however. As well, while the example pump head 102 includes a single complementary structure, other embodiments of a pump head may include multiple complementary structures, each configured to interface with a respective complementary structure of pump body.

The engagement of the respective complementary structures with each other, with the diaphragm between the complementary structures, may be referred to herein as the pump seal as it is those structures that cooperate with the diaphragm to substantially prevent leakage of process and/or operating fluid from the interface between the pump head 102 and the pump body 104.

With continued reference to the Figures, particularly FIG. 2, the diaphragm 200 is positioned between the pump head 102 and the pump body 104. Similar to the pump head 102 and pump body 104, the diaphragm may be substantially constructed as a single piece of material from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Depending upon considerations such as pump life, operating fluid type, pressure, and temperature, various other materials such as those disclosed herein may alternatively be employed in the construction of the diaphragm 200. The diaphragm 200 may or may not be substantially circular in shape. As well, the diaphragm 200 may be flexible, and the degree of flexibility of the diaphragm 200 may vary from one embodiment to another, depending upon considerations such as the operating conditions to which the diaphragm 200 is expected to be exposed.

As used herein, the term “diaphragm” embraces, among other things, any element, or combination of elements, configured to change its configuration in response to imposition of a pressure differential. As noted herein, one effect that may be achieved by such aspects of a diaphragm is the pumping of a fluid. It should be noted that the term “diaphragm” is intended to be construed broadly. Accordingly, a diaphragm as used here embraces, but is not limited to, diaphragms of the following types: flat; blousing; pillow; trampoline; convolute; shallow draw; dish; “pie pan;” drop center; offset convolute; deep draw; “top hat;” double taper deep draw; bellows; and, double bellows. Where a fluid pump includes more than one diaphragm, diaphragms of different types may be combined in a single fluid pump. In other embodiments of a fluid pump, multiple diaphragms of the same type are employed in the fluid pump.

Returning now to FIG. 2 in particular, a diaphragm 200 may include an outer portion 202 and an inner portion 204. In general, the outer portion 202 may facilitate the retention of the diaphragm 200 in a desired position and orientation, while the inner portion 204 of the diaphragm 200 may facilitate the pumping of a process fluid, as disclosed elsewhere herein. The outer portion 202 may include a grooved portion 202a configured to receive a structure of the pump head 102, such as the complementary structure 102e.

Additionally, the outer portion 202 may include a rim portion 202b. As indicated in the Figures, one embodiment of the diaphragm 200 includes a relatively flat rim portion 202b. The rim portion 202b may include a plurality of openings 202c, each of which may be configured to be substantially aligned with a corresponding recess 102d when the diaphragm is installed between the pump head 102 and the pump body 104. The openings 202c may be formed when the diaphragm 200 is manufactured, or the openings 202c may be formed by the retaining elements 300 when the pump head 102, pump body 104 and diaphragm 200 are assembled together. As best illustrated in FIG. 3, when the fluid pump 100 is assembled, each of the retaining elements 300 extends through a corresponding opening 202c in the diaphragm 200. In some embodiments, the openings 202c may be reinforced, such as with PFA or PTFE rings or sleeves, for example. The reinforcements may be made of other materials as well.

While the diaphragm 200 may have a substantially constant thickness throughout, other embodiments may be relatively thicker at the outer edge than at other locations of the diaphragm, so that the outer edge has a bulb-shaped cross section, for example. The outer edge may reside in a recess defined by the pump head and/or pump body and the recess may be configured similar to the bulb shape, such that the outer edge of the diaphragm cannot be withdrawn from the recess when the diaphragm is exposed to operating conditions. This diaphragm configuration may be used with or without the retaining elements 300.

With continued reference to the Figures, further details are now provided concerning the example pump body 104. Similar to the pump head 102, the pump body 104 may, in some embodiments, be formed of a single piece of material. As indicated in the Figures, the pump body 104 may include a pump head mount 104c that is generally circular in shape. The pump head mount 104c may include external threads 104d configured to releasably engage corresponding threads of the union 106 (see FIG. 3). The pump head mount 104c may include a plurality of recesses 104e, whose characteristics may be similar, if not identical, to those of the recesses 102d defined by the pump body 102. Correspondingly, the disclosure herein concerning the recesses 102d applies equally to the recesses 104e. As indicated in the Figures, each of the recesses 104e is configured to receive a portion of a retaining element 300. As best illustrated in FIG. 3, the recesses 102d and 104e are located outside the pump seal. In other embodiments however, the pump seal may be located outside the recesses 102d and 104e.

In correspondence with the complementary structure 102e of the pump head 102, the pump body 104 may also include a complementary structure 104f that, in the example disclosed in the Figures, takes the form of a circumferential substantially V-shaped groove configured to receive the grooved portion 202a of the diaphragm and the complementary structure 102e of the pump head. As noted herein, the complementary structures can take any suitable configurations and are not limited to the aforementioned V-shaped configuration.

Directing attention now to the retaining elements 300, suitable materials for the retaining elements 300 include polypropylene or any of the other material(s) disclosed herein. The retaining elements 300 may in some embodiments take the form of pins configured to be received in recesses 102d and 104e. In general, the size and shape of the retaining elements 300 may be generally complementary with the size and shape of the recesses 102d and 104e. For example, the retaining elements 300 may be generally in the form of cylindrical pins that may be flat at one or both ends, or that may be tapered or otherwise shaped at one or both ends.

D. Assembly of An Example Embodiment

In assembling the example fluid pump 100, the retaining elements 300 may be employed in a variety of different ways. With regard to their attachment to the fluid pump 100, the retaining elements 300 may be press-fit into the recesses 102d of the pump head 102 or into the recesses 104e of the pump body 104. Alternatively, the retaining elements 300 may be integrally formed with the pump head 102 or the pump body 104 as part of a molding, machining, or other, process. In still other circumstances, the retaining elements 300 may be welded, or similarly attached, to the pump head 102 or pump body 104. In some embodiments, a portion of one or more of the retaining elements 300 may include threads that are configured to engage corresponding threads of a recess 102d or 104e. As well, the retaining elements 300 may or may not be permanently retained in the pump head 102 and/or pump body 104. Adhesives or other materials may be used where it is desired to permanently attach the retaining elements 300.

As noted herein, the diaphragm 200 may, in some instances, be pierced or perforated to form openings 202c prior to assembly of the fluid pump 100. In other instances, the diaphragm may be un-perforated at the time of assembly of the fluid pump 100. In such instances, the retaining elements 300 may be installed in one or the other of the pump head 102 or pump body 104. The retaining elements 300 may each include a pointed end extending outwardly from the component in which the retaining elements 300 are installed. The pointed ends of the retaining elements 300 may then be used to pierce the diaphragm 200 in the desired locations. In yet another example, the retaining elements 300 may be positioned in the diaphragm 200 prior to assembly of the diaphragm 200 with the pump head 102 and the pump body 104.

In any case, once the diaphragm 200, retaining elements 300, pump head 102 and pump body 104 are fitted together, the union 106 may be threaded onto the pump body 104 to hold the fluid pump 100 components together. The union 106 may be constructed of any of the materials disclosed herein.

Although this disclosure has been described in terms of certain embodiments, other embodiments apparent to those of ordinary skill in the art are also within the scope of this disclosure. Accordingly, the scope of the disclosure is intended to be defined only by the claims which follow.

Claims

1. A fluid system component, comprising:

a first element;

a second element, wherein one or both of the first and second elements are configured to be exposed to a fluid;

a flexible diaphragm positioned between the first and second elements; and

a plurality of retaining elements, each retaining element having a first portion received in the first element and a second portion received in the second element, and the retaining elements each extending through the flexible diaphragm.

2. The fluid system component as recited in claim 1, wherein each of the retaining elements comprises a pin.

3. The fluid system component as recited in claim 1, wherein the first and second elements each comprise respective first and second complementary that are engaged with each other, and wherein a portion of the flexible diaphragm is held between the first and second complementary structures.

4. The fluid system component as recited in claim 1, wherein the fluid system component comprises a valve.

5. The fluid system component as recited in claim 1, wherein the fluid system component comprises a pump.

6. The fluid system component as recited in claim 5, wherein the first element comprises a pump head, and the second element comprises a pump body.

7. The fluid system component as recited in claim 1, wherein one or more of the first element, second element, retaining elements, and diaphragm is substantially constructed of plastic.

8. A fluid pump, comprising:

a pump body;

a pump head attached to the pump body;

a flexible diaphragm positioned between the pump head and pump body; and

a plurality of retaining elements, each retaining element having a first portion received in the first element and a second portion received in the second element, and the retaining elements each extending through the flexible diaphragm.

9. The fluid pump as recited in claim 8, wherein the pump body, pump head, and the flexible diaphragm are substantially constructed of plastic.

10. The fluid pump as recited in claim 8, wherein the pump head and pump body each comprise respective first and second complementary structures that are engaged with each other, and wherein a portion of the flexible diaphragm is held between the first and second complementary structures.

11. The fluid pump as recited in claim 8, wherein one or more of the retaining elements is located outside of a pump seal cooperatively formed by the first and second complementary structures and the flexible diaphragm.

12. The fluid pump as recited in claim 8, wherein one or more of the retaining elements is located within a pump seal cooperatively formed by the first and second complementary structures and the flexible diaphragm.

13. The fluid pump as recited in claim 8, wherein one or more of the retaining elements is implemented as a pin, each pin having a first portion received in a recess defined by the pump head, and the pin having a second portion received in a recess defined by the pump body.

14. A fluid pump, comprising:

a pump body that defines a first complementary structure;

a pump head attached to the pump body, the pump body defining a second complementary structure configured to engage the first complementary structure;

a flexible diaphragm positioned between the pump head and pump body, a portion of the flexible diaphragm being positioned between the first and second complementary structures; and

a plurality of retaining elements, each retaining element having a first portion received in the first element and a second portion received in the second element, and the retaining elements each extending through the flexible diaphragm.

15. The fluid pump as recited in claim 14, wherein the first complementary structure comprises a circumferential groove with a substantially V-shaped cross-section, and the second complementary structure comprises a circumferential ridge having a substantially V-shaped cross-section.

16. The fluid pump as recited in claim 14, wherein the pump body a threaded pump head mount, and the fluid pump further comprises a union configured to engage threads of the pump head mount and releasably retain the pump body, flexible diaphragm and pump head together.

17. The fluid pump as recited in claim 14, wherein the retaining element each comprise a pin that is located outside of a pump seal cooperatively formed by the first and second complementary structures and the flexible diaphragm, the pins being disposed about a circumference of the flexible diaphragm.

18. The fluid pump as recited in claim 14, wherein the pump head, pump body, flexible diaphragm and retaining elements are substantially constructed of plastic.

19. The fluid pump as recited in claim 14, wherein the pump body comprises an additional pump head mount, and the fluid pump comprises an additional pump head mounted to the additional pump head mount.

20. The fluid pump as recited in claim 14, wherein the fluid pump is operable to pump a process fluid in response to receipt of a flow of a pressurized operating fluid.

21. The fluid pump as recited in claim 14, wherein the flexible diaphragm comprises one of the following types of diaphragms: flat; blousing; pillow; trampoline; convolute; shallow draw; dish; “pie pan;” drop center; offset convolute; deep draw; “top hat;” double taper deep draw; bellows; and, double bellows.