PREPARATION OF CIGS ABSORBER LAYERS USING COATED SEMICONDUCTOR NANOPARTICLE AND NANOWIRE NETWORKS
We disclose a method of preparing CIGS absorber layers using coated semiconductor nanoparticle and nanowire networks. The nanoparticles and nanowires containing one or more elements from group IB and/or IIIA and/or VIA are prepared from metal salts such as metal chloride and acetate at room temperature without inert gas protection. A uniform and non-aggregation CIGS precursor layer is fabricated with the formation of nanoparticle and nanowire networks utilizing ultrasonic spraying technique. High quality CIGS film is obtained by cleaning the residue salts and carbon agents at an increased temperature and selenizing the pretreated precursor layer.
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1. Field of the Invention
The present invention relates to a method synthesizing CIGS nanoparticle/wires based on metal salts.
2. Description of the Prior Art
A CIGS thin film is prepared by the formation of semiconductor nanoparticle and nanowire networks and selenization for a light absorption layer of photovoltaic devices.
Chalcopyrite CuInGaSe2 (CIGS) is a direct band gap semiconductor and has an exceptionally high absorption coefficient of more than 105/cm for 1.5 eV and higher energy photons. According to the recent report from the ZSW, a solar cell based on CIGS has reached a power conversion efficiency of 20.3%, which is comparable with the energy conversion efficiency of crystalline Si solar cells. Decent conversion efficiency and high chemical stability of CIGS make itself a promising p-type material for thin film photovoltaic devices.
Vacuum and non-vacuum technologies are the two main methods of preparing CIGS thin films. Vacuum-based processes including co-evaporation and sputtering, which have been successfully applied in commercial production lines. However, the high cost and complexity of vacuum-based fabrication process become barriers to affordable commercial modules.
An efficient non-vacuum printing process has the potential to overcome this barrier. The low cost technique is inherently suitable for large-scale applications and may benefit from established industries of coatings, paints, inks, electronic ceramics and colloidal systems. In particular, deposition at atmospheric environment offers an opportunity for the deposition of absorber materials at large scale with high throughput. This provides a potential cost advantage over conventional fabrication process that involves expensive vacuum equipment.
Kapur et al (U.S. Pat. No. 6,268,014) describe a method for fabricating a CIGS solar cell based upon the solution-based deposition of a source material comprised of mechanically milled, oxide-containing, sub-micron sized particles, while Eberspacher and Pauls (U.S. Pat. No. 6,268,014); Published U.S. Patent Application No. 2002/0006470) describe the forming of mixed metal oxide, sub-micron sized particles by pyrolizing droplets of a solution, then ultrasonically spraying the resulting particles onto a substrate. However, the high-temperature hydrogen reduction step is potentially explosive and requires substantial time and energy. Meanwhile, highly toxic H2Se gas atmosphere is requested in the selenization process. Byoung Koun Min in Published U.S. Patent Application No. 2012/0080091 A1 also involves the reduction process.
Fuqiang Huang in Published U.S. Patent Application No. 2011/0008927 A1 gets a 14.6% high efficiency employing a non-vacuum liquid-phase chemical technique.
David B. Mitzi. in Published U.S. Patent Application No. 2009/01454 also gets above 10% efficiency CIGS thin film solar cells using hydrazine as the solvent source.
Nanosolar Inc. in Published U.S. Patent Application No. 2008/0149176 has used binary copper selenide and indium/gallium selenides nanoparticles as starting materials to fabricate 14% thin film CIGS solar cells. Single metallic nanoparticles are the simplest form one could design. The structure of nanoparticles used by Nanosolar has a core-shell structure. Copper nanoparticles serve as the cores which are coated with IIIA-VIA shells such as indium selenide, gallium selenide etc. These selenide nanoparticles are dispersed in organic solution which may contain various ingredients including solvents, surfactants, binders, emulsifiers, thickening agents, film conditioners, anti-oxidants, flow and leveling agents, plasticizers and preservatives. By using the similar core shell strategy, Yoon et al. synthesized CuSe/InSe nanoparticles which yield only ˜1% efficiency.
However, those methods mentioned here require toxic reagents, need inert gas protection, require complex processes and are not easy to scale up to mass production. Thus, there is a need in the art, for a non-oxide, nanoparticle based precursor material that overcomes the above disadvantages.
SUMMARY OF THE INVENTIONIn order to solve these problems, the subject invention presents a facile way to synthesize soluble CIGS nanoparticles/wires at room temperature under non-vacuum condition and the reaction can finish in 5 minutes. We employ ultrasonic spray to effectively reduce the aggregation and obtain uniform CIGS precursor films. After heat treatment and selenization, high quality CIGS thin films are prepared. Finally, the effective solar cells based on the non-vacuum method in accordance with the invention are also achieved.
The present invention allows the drawbacks of the known non-vacuum techniques to be eliminated. For this purpose, the invention provides a method for preparing CIGS absorber layers by using a metal salt, thickening and binding agents to form uniform nanoparticle and nanowire networks and to provide a finished high quality CIGS film after selenization, in which:
a) CIGS nanoparticles and nanowires are produced based on using a metal salt such as metal chloride and acetate at room temperature without inert gas protection;
b) A CIGS precursor layer is coated on a Mo glass substrate by ultrasonic spraying of the CIGS nanoparticle and nanowire solution;
c) Uniform nanoparticle and nanowire networks are generated by initial heat treatment;
d) A clean CIGS precursor layer is obtained by cleaning the residue salts and carbon agents at an increased temperature above 200° C.;
e) High quality CIGS film is fabricated after selenizing the pretreated precursor layer at a temperature above 400° C.
According to the following description and drawings of this invention, the objects and features of the present invention will become apparent, which respectively show:
CIGS nanoparticles/wires have been synthesized using the low-cost solution route under atmospheric conditions in accordance with the present invention. The approach is simpler and less costly than any other non-vacuum methods with the following advantages:
(1) Normal atmosphere fabrication. No need to have inert gas protection;
(2) Short reaction time. The whole synthesis process may only take up to 5 minutes;
(3) Formation of amorphous and soluble nanoparticles/wires. The nanoparticles can be deposited on various substrates and turn into uniform thin films at low temperature (<350° C.);
(4) Low cost and easy to scale-up. The amorphous CIGS nanoparticles fabricated in our invention melt under low temperature (even below 180° C.) and crystallize to various sizes of nanoparticles with increasing temperature (above 200° C.). We observe such dynamical changes by the color of CIGS nanoparticle solutions: with increasing temperature, the color changes from white to red, then to yellow, finally black. We deposit the nanoparticle-based precursor on the Moly-coated substrate to form a smooth precursor layer. After typical selenization and typical device fabricating process, we obtain a high quality CIGS film and effective solar cells.
In accordance with the present invention, there is provided a method for preparing effective CIGS-based solar cells, comprising the following steps:
(1) Synthesizing the soluble CuInGaS2 nanoparticles/wires precursor at room temperature under non-vacuum condition. The process of synthesizing CIGS nanoparticles/wires, as shown in
(a) Providing a solution comprising Cu, In and Ga ions at 26, 28, 30, respectively, in a solvent at 32, the ratios of Cu, In and Ga ions being in the following proportions: Cu 0.9˜1; In 0.6˜0.8 and Ga 0.4˜0.2 to form the CIG solution at 34;
(b) Providing a thickening solution at 36;
(c) Providing a sulfurated precipitant at 38;
(d) Providing a highly effective coupling agent at 40;
(e) Adding the solution comprising Cu, In and Ga ions into the thickening solution and stirring the mixture to form homogeneous solution;
(f) Sequentially adding appropriate amount of sulfurated precipitant and coupling agent into above homogeneous solution and stirring the mixture to form a CuInGaS2 nanoparticles/nanowires well dispersed solution at 42.
(2) Preparing the CIGS-based ink, adding CIGS powder into specific solvent and adding some additives to form monodispersed CIGS ink. The process of preparing CIGS-based ink includes the following steps:
(a) Separating the CIGS nanoparticles/wires by centrifuging method;
(b) Washing and drying the centrifuged CIGS nanoparticles/wires under vacuum pump and low temperature;
(c) Providing the high volatilizing solvent with a low boiling point;
(d) Providing a small amount of additives, such as dispersants and thickening agents;
(e) Weighing an appropriate amount of CIGS solid powder, adding into the special organic solvent and some additives, stirring for overnight to form uniform ink.
(3) Ultrasonic spraying CIGS ink on Mo glass substrate, using ultrasonic spray to reduce the aggregation effect of CIGS nanoparticles/wires and obtaining uniform CIGS precursor films. The process of ultrasonic spraying CIGS-based ink on Mo glass substrate includes the following steps illustrated in
(a) Providing a Mo-coated glass substrate at 44;
(b) Providing monodisperse CIGS ink at 46;
(c) Automatically ultrasonic spraying the CIGS ink onto the Mo-glass under 300° C. a plurality of times (e.g. 3 times) at 48. Using ultrasonic spray technology can effectively reduce the aggregation effect and easily provide uniform and non-aggregated CIGS precursor films.
(4) Heating treatment of the CIGS precursor films at 50, the soluble CIGS nanopowder will melt again and change to clear solution, as the temperature improve, the uniform and black color CIGS precursor films are obtained after the solution drying.
(5) Selenizing the heat treated CIGS precursor films at 52 to a temperature above 500° C., using Se powder as the Se-source and, high quality CIGS films will be achieved after selenizing the precursor films in a furnace (e.g. double zone furnace) for approximately one hour. The process of selenization includes the following steps:
(a) Providing pre-treated CIGS precursor films at 54;
(b) Selenizing the hot-treated precursor films at a temperature above 500° C. for approximately 60 mins in the selenization furnace using Selenium powder as the Se-source, so we can get high-quality CIGS absorb layer.
(6) Preparing CIGS device uses typical chemical bath deposition and sputtering and evaporating route. The whole process of fabricating CIGS PV device includes the following detailed steps:
(a) Depositing buffer layer CdS employing chemical bath deposition (“CBD”) method;
(b) Sputtering window layer i-ZnO and conductive AZO layer;
(c) Evaporating Ni/Al top-electrode, at 56, the standard CIGS PV device with structure of glass/Mo/CIGS/CdS/i-ZnO/AZO/Ni—Al is obtained in our invention. The detailed schematic diagram of whole process of preparing CIGS solar cells based on non-vacuum method is shown in
The typical synthesis of CIGS nanoparticles wires-based solution is shown as following:
First, synthesis of CuInGa precursor solution A by: Adding CuCl2H2O b(e.g. 0.68 g), InCl3 (e.g. 0.74 g) and GaCl3 (e.g. 0.35 g) into 5 mL Methanol, stirring for up to 30 min and a green color solution is obtained.
Second, synthesis of a thickening solution B by: Adding EC (e.g. 0.3 g) into Terpinol (e.g 10 mL), stirring overnight and heating to a temperature up to 200° C. until it is completely dissolved.
Then mixing solution A and thickening agent solution B, stirring for up to 5 hours.
Finally, gradually adding Thiourea (e.g. 0.3 g) and 3-MPA (e.g. 2 mL) (“3-Mercaptopropionic Acid”) into the mixture of solution A and B and a white nanoparticles-based solution is obtained. The transmission electron microscope (“TEM”) and the picture of CIGS nanoparticles/wires are shown in
The procedures of preparing CIGS ink are described.
First, separating the CIGS nanoparticles/wires by methanol using centrifuging method up to five times;
Second, drying the centrifuged powder under vacuum pump under 100° C. (e.g. 60° C.) for less than 10 hours (e.g. 8 hours), dried powder with a white color is obtained;
Then, weighing the CIGS dried powder (e.g. 3.0 g), adding solvent methyl ethyl ketone (“MEK”) (e.g. 70 mL) as the solvent and PEG (e.g. 30 mL) as the thickening agent and SHMP (e.g. 10 drops) as the dispersant, then mixing together and stirring for overnight to prepare the CIGS ink.
The procedures of ultrasonic spraying CIGS ink are described.
First, providing a clean Mo-coated glass substrate, using acetone, ethanol and DI water to wash the Mo-glass successively, finally using N2 to blow to dry.
Second, providing monodispersed CIGS ink (e.g. 100 mL) and storing in a bottle, extracting 30 mL ink into a syringe inside which is then ready to spray.
Then, set up the spraying parameters:
Run power of ultrasonic generator: P=less than 15 W (e.g. 5 W);
Temperature of the Mo-glass substrate: Ts=under 300° C. (e.g. 100° C.);
Spraying rate: V=greater than 1 ml/min. (e.g. 3 ml/min.);
Pressure of gas flow: P=greater than 5 Psi (e.g. 15 Psi);
Distance between the nozzle and the Mo-glass substrate: D=less than 150 mm (e.g. 90 mm);
Times of spray: n=less than 5 times (e.g. 3).
Automatically ultrasonic spraying the CIGS ink onto the Mo-glass under 300° C. (e.g. 100° C.) for less than 5 times (e.g. three times). Using ultrasonic spray technology can effectively reduce the aggregation effect and easy to obtain uniform and non-aggregated CIGS precursor films.
The procedures of heating treatment are described. The process of heat treatment includes the following steps:
First, heating the CIGS nanoparticles/nanowires coated substrate up to 350° C. (e.g. 150-200° C.). All the particles are fused and become a clear solution.
Second, heating the sample up to 450° C. (e.g. 250-300° C.). The solution gradually solidified and the color changes from clear to red, finally becoming a deep black. Meanwhile referring to
Next the temperature is increased up to 500° C. (e.g. 350° C.) and held for half an hour, which will remove all the organic solvents and additives, finally the color changes to a deep black.
The procedures of selenization process are described.
First, using Selenium powder (e.g. 2.0 g) as the solid-state Se-source and placing it in the graphite box, then placing it into the quartz tube of a selenization furnace at a low temperature zone. The temperature profile of Se-source is shown in
Second, a sample is placed in the high temperature zone of selenization furnace, then using mixture of Ar or N as the protection gas and Selenizing the hot-treated precursor films above 500° C. (e.g. 550° C.) for 30-70 mins (e.g. 60 mins) in the selenization furnace.
After selenization, we can get high-quality CIGS absorb layer, as shown in
The procedures of fabricating a CIGS are described.
First, preparing CdS buffer layer through chemical bath deposition (CBD) method:
Using CdSO4 (e.g. 0.065 g) and Thiourea (e.g. 1.14 g), adding 25 mL NH3H2O and DI water (e.g. 200 mL), stirring and dissolving completely.
Then place the sample into the solution and heat up to 100° C. (e.g. 75° C.) for up to 30 mins (e.g. 15 mins). Taking the sample out and using DI water flushing and removing the aggregated CdS particles. In the end, drying in the oven below 100° C. (e.g. 80° C.) for 60-180 mins (e.g. 120 mins).
Second, sputtering i-ZnO and AZO window layers:
The sputtering depositing parameters of ZnO is shown as following: Sputtering power: P=100-200 W (e.g. 150 W); Sputtering pressure: P=0.5-10 mTorr (e.g 4.5 mTorr); Ar/O2=5:1-2:1 (e.g. 3:1); Gas Flow=10-100 sccm (e.g. 25 sccm); Sputtering time: T=up to 20 mins (e.g. 5 mins);
The sputtering depositing parameters of AZO is as following steps: Sputtering power: P=100-200 W (e.g. 150 W); Sputtering pressure: P=3-15 mTorr (e.g 6.0 mTorr); Gas Flow=10-100 sccm (e.g. 25 sccm); Sputtering time: T=up to 30 mins (e.g. 20 mins).
Finally, evaporating Ni—Al electrode:
Loading Ni wire (e.g. 0.5 g) and Al wire (e.g. 4 g), Sticking the sample with mask covered on the heating stainless steel plate. Sequencely evaporating Ni and Al wires under high vacuum background.
The present invention allows the drawbacks of the known non-vacuum techniques to be eliminated. For this purpose, the invention provides a method for preparing CIGS absorber layers by using a metal salt, thickening and binding agents to form uniform nanoparticle and nanowire networks and to provide a finished high quality CIGS film after selenization, in which:
a) CIGS nanoparticles and nanowires are produced based on using a metal salt such as metal chloride and acetate at room temperature without inert gas protection;
b) A CIGS precursor layer is coated on a Mo glass substrate by ultrasonic spraying of the CIGS nanoparticle and nanowire solution;
c) Uniform nanoparticle and nanowire networks are generated by initial heat treatment;
d) A clean CIGS precursor layer is obtained by cleaning the residue salts and carbon agents at an increased temperature above 200° C.;
e) High quality CIGS film is fabricated after selenizing the pretreated precursor layer at a temperature above 400° C.
In the process of synthesizing CIGS nanoparticles and nanowires, the steps are performed under ambient condition and room temperature. No inert protection gas and equipments are required in our method and the reaction runs fast and all processes can be finished in a few minutes. No toxic chemicals are involved.
The foregoing is considered as illustrative only of the principles of the invention. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the invention to the exact construction and operation shown and described, and accordingly, all suitable modifications and equivalents may be resorted to, falling within the scope of the invention.
Claims
1. A method of preparing a CIGS absorber layer by using a metal salt, a thickening agent, and a binding agent to form uniform nanoparticle and nanowire networks and to finish a high quality CIGS film after selenization comprising the steps of:
- a) producing CIGS nanoparticles and nanowires based on using a metal salt at room temperature without inert gas protection;
- b) coating a CIGS precursor layer on a Mo glass substrate;
- c) generating uniform nanoparticle and nanowire networks by initial heat treatment;
- d) obtaining a clean CIGS precursor layer by cleaning residue salts and carbon agents at an increased temperature above 200° C.; and
- e) fabricating high quality CIGS film after selenizing the pretreated precursor layer at a temperature above 400° C.
2. A method as defined in claim 1, wherein the metal salt used to produce said nanoparticles and nanowires is at least one of a metal chloride and a metal acetate.
3. A method as defined in claim 1, wherein said glass substrate is coated by ultrasonic spraying of said nanoparticles and nanowires solution.
4. A method of preparing a CIGS-based solar cell comprising the steps of:
- synthesizing the soluble CuInGaS2 nanoparticles/wires precursor at room temperature under non-vacuum condition;
- preparing a CIGS-based ink, adding CIGS powder into specific solvent and adding additives to form monodispersed CIGS ink;
- ultrasonic spraying CIGS ink on Mo glass substrate, using ultrasonic spray to reduce the aggregation effect of CIGS nanoparticles/wires and obtaining uniform CIGS precursor films;
- heat treating of the CIGS precursor films to melt soluble CIGS nanopowder and change it to a clear solution, and cooling the solution to dry to a uniform and black color CIGS precursor film;
- selenizing the heat treated CIGS precursor films, using Se powder as the Se-source and, creating high quality CIGS films after selenizing the precursor films in a double zone furnace for one approximately hour; and
- preparing a CIGS device by chemical bath deposition and sputtering and evaporating step.
5. A method as defined in claim 4, wherein said step of synthesizing CIGS nanoparticles/wires comprises the steps of:
- (a) providing a solution comprising Cu, In and Ga ions, the ratio of Cu, In and Ga being in the following proportions: Cu 0.9˜1; In 0.6˜0.8 and Ga 0.4˜0.2;
- (b) providing a thickening solution;
- (c) providing a sulfurated precipitant;
- (d) providing an effective coupling agent;
- (e) adding the solution comprising Cu, In and Ga ions into said thickening solution and stirring the mixture to form a homogeneous solution; and
- (f) sequentially adding appropriate amounts of sulfurated precipitant and coupling agent into above homogeneous solution and stirring the mixture to form CuInGaS2 nanoparticles/nanowires in a well dispersed solution.
6. A method as defined in claim 4, wherein said step of preparing the CIGS-based ink comprises the steps of:
- (a) separating the CIGS nanoparticles/wires by centrifuging method;
- (b) washing and drying the centrifuged CIGS nanoparticles/wires under vacuum pump and low temperature;
- (c) providing the high volatilizing solvent with low boiling point;
- (d) providing a small amount of additives, such as dispersants and thickening agents; and
- (e) weighing an appropriate amount of CIGS solid powder, adding into the organic solvent and some additives, stirring for overnight to form a uniform ink.
7. A method as defined in claim 4, wherein said step of ultrasonic spraying CIGS ink on Mo glass substrate comprises the steps of:
- (a) providing a Mo-coated glass substrate;
- (b) providing monodisperse CIGS ink; and
- (c) automatically ultrasonically spraying the CIGS ink onto the Mo-glass a plurality of times under 300° C.
8. A method as defined in claim 7, wherein said CIGS ink is sprayed less than five times onto the Mo-glass.
9. A method as defined in claim 4, wherein said selenizing step comprises the steps of:
- (a) providing pre-treated CIGS precursor films; and
- (b) selenizing the hot-treated precursor films at a temperature above 500° C. for approximately 60 minutes in a selenization furnace using Selenium powder as the Se-source to obtain high-quality CIGS absorb layer.
10. A method as defined in claim 4, wherein said step of preparing said CIGS device comprises the steps of:
- (a) depositing a buffer layer of CdS employing CBD method;
- (b) sputtering a window layer of i-ZnO and a conductive AZO layer; and
- (c) evaporating Ni/Al top-electrode to form a CIGS PV device with structure of glass/Mo/CIGS/CdS/i-ZnO/AZO/Ni—Al.
11. A method as defined in claim 4, wherein said step of synthesizing CIGS nanoparticles/wires based solution comprises the steps of:
- (a) synthesizing a CuInGa precursor solution A by: Adding CuCl2.2H2O, InCl3 and GaCl3 into Methanol, stirring for up to 30 min and a green color solution is obtained;
- (b) synthesizing a thickening solution B by: Adding EC into Terpinol, stirring overnight and heating up to a temperature of 200° C. until it is completely dissolved;
- (c) mixing solution A and thickening agent solution B, and stirring for up to 5 hours; and
- (d) gradually adding Thiourea and 3-MPA into the mixture of solution A and B to obtain a white nanoparticles-based solution.
12. A method as defined in claim 4, wherein said step of preparing the CIGS-based ink comprises the steps of:
- (a) separating the CIGS nanoparticles/wires by methanol using centrifuging method up to five times;
- (b) drying the centrifuged powder under vacuum pump under 100° C. for less than ten hours to obtain white color dried powder;
- (c) weighing the CIGS dried powder, adding MEK as the solvent and PEG as the thickening agent and SHMP as the dispersant, then mixing together and stirring overnight to form CIGS ink.
13. A method as defined in claim 4, wherein the procedure of ultrasonic spraying CIGS ink comprises the steps of:
- (a) providing a clean Mo-coated glass substrate, using acetone, ethanol and DI water to wash the Mo-glass successively, finally using N2 to blow to dry;
- (b) providing monodispersed CIGS ink and storing in a container, extracting ink for ultrasonic spraying under following conditions or parameters:
- running power of ultrasonic generator: P=less than 15 W;
- temperature of the Mo-glass substrate: Ts=under 300° C.;
- spraying rate: V=greater than 1 ml/min;
- pressure of gas flow: P=greater than 5 Psi;
- distance between the nozzle and the Mo-glass substrate: less than 150 mm;
- number of sprays: n=less than 5 times;
- whereby CIGS ink is ultrasonically sprayed onto the Mo-glass under 300° C. for less than five times, aggregation effect is reduced to obtain uniform and non-aggregated CIGS precursor films.
14. A method as defined in claim 4, wherein said heat treatments step comprises:
- (a) heating the CIGS nanoparticles/nanowires coated substrate up to 350° C. to fuse all the particles to become a clear solution;
- (b) heating the sample up to 450° C. gradually solidify the solution and the color changes from clear to red, and finally becomes deep black and the networks are formed through the decomposed nanowires; and
- (c) increasing the temperature up to 500° C. and holding the temperature for half an hour to remove all the organic solvents and additives to finally cause the color to change to deep black.
15. A method as defined in claim 4, wherein said step of selenization comprises the steps of:
- (a) using selenium powder as the solid-state Se-source and placing same in a graphite box, and then into a quartz tube of a selenization furnace at a low temperature zone; and
- (b) placing the sample in a high temperature zone of the selenization furnace, and then using a mixture of Ar or N as the protection gas and Selenizing the hot-treated precursor films above 500° C. for 30-70 mins in a selenization furnace to form a high-quality CIGS absorber layer.
16. A method as defined in claim 4, wherein said step of fabricating comprises the steps of:
- (a) preparing a CdS buffer layer through a chemical bath deposition (CBD) method;
- (b) using CdSO4 and Thiourea, adding NH3H2O and DI water, stirring and dissolving completely;
- (c) placing the sample into a solution and heating up to 100° C. for up to 30 mins and removing the sample and using DI water flushing for removing the aggregated CdS particles and drying in an oven below 100° C. for 60-180 minutes;
- (d) sputtering i-ZnO and AZO window layers,
- (e) the sputtering depositing parameters of ZnO being as follows: sputtering power: P=100-200 W; sputtering pressure: P=0.5-10 mTorr; Ar/O2=5:1-2:1 gas flow=10-100 sccm; sputtering time: T=up to 20 minutes;
- (f) sputtering depositing parameters of AZO being as follows: sputtering power: P=100-200 W; sputte 00 sccm; sputtering time: T=up to 30 minutes;
- (g) evaporating Ni—Al electrode: and
- (h) loading Ni wire and Al wire, placing the sample with mask covered on a heating stainless steel plate and sequencially evaporating Ni and Al wires under high vacuum background to create a CIGS device.
Type: Application
Filed: Dec 16, 2013
Publication Date: Nov 20, 2014
Applicant: Sun Harmonics Ltd (Hangzhou)
Inventors: Yuhang Ren (Hangzhou), Paifeng Luo (Hangzhou), Bo Gao (Hangzhou)
Application Number: 14/048,285
International Classification: H01L 31/18 (20060101); H01L 31/032 (20060101);