Holding pad for carrying substrate
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The broken lines depict unclaimed portions of the holding pad for carrying substrate, and thus form no part of the claimed design. The dot-dash chain lines in the drawings depict the boundaries of the claimed subject matter, and thus form no part of the claimed design.
Claims
The ornamental design for a holding pad for carrying substrate, as shown and described.
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Type: Grant
Filed: Dec 27, 2021
Date of Patent: Jan 16, 2024
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Tatsuhiko Tsujihashi (Koshi), Suguru Enokida (Koshi), Kazuki Matsushita (Koshi)
Primary Examiner: Omeed Agilee
Application Number: 29/821,009