Defect inspection device for semiconductors

- Kabushiki Kaisha Toshiba

FIG. 1 is a front, top and left side perspective view of a defect inspection device for semiconductors showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a rear elevational view thereof; and

FIG. 7 is a bottom plan view thereof.

Referenced Cited
U.S. Patent Documents
D292979 December 1, 1987 Chow
4745354 May 17, 1988 Fraser
4755746 July 5, 1988 Mallory et al.
Other references
  • Toshiba, "A Defect Inspection Device for Semiconductors", Dec. 5, 1961.
Patent History
Patent number: D307724
Type: Grant
Filed: Dec 18, 1987
Date of Patent: May 8, 1990
Assignee: Kabushiki Kaisha Toshiba (Kawasaki)
Inventor: Yoshiaki Nishida (Tokyo)
Primary Examiner: Nelson C. Holtje
Assistant Examiner: Antoine D. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/134,892