Defect inspection device for semiconductors
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Description
FIG. 1 is a front, top and left side perspective view of a defect inspection device for semiconductors showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a rear elevational view thereof; and
FIG. 7 is a bottom plan view thereof.
Referenced Cited
Patent History
Patent number: D307724
Type: Grant
Filed: Dec 18, 1987
Date of Patent: May 8, 1990
Assignee: Kabushiki Kaisha Toshiba (Kawasaki)
Inventor: Yoshiaki Nishida (Tokyo)
Primary Examiner: Nelson C. Holtje
Assistant Examiner: Antoine D. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/134,892
Type: Grant
Filed: Dec 18, 1987
Date of Patent: May 8, 1990
Assignee: Kabushiki Kaisha Toshiba (Kawasaki)
Inventor: Yoshiaki Nishida (Tokyo)
Primary Examiner: Nelson C. Holtje
Assistant Examiner: Antoine D. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/134,892
Classifications
Current U.S. Class:
Measuring, Regulating Or Indicating Instrument, Or Casing (D10/46)