Wafer probe plate holder

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of a wafer probe plate holder showing my new design, the rear, right and left side elevational views being identical;

FIG. 2 is a top plan view;

FIG. 3 is a bottom plan view; and

FIG. 4 is a cross sectional view thereof taken along line 4-4' of FIG. 2 thereof.

Referenced Cited
U.S. Patent Documents
4219771 August 26, 1980 Reid et al.
4649338 March 10, 1987 Dugan
4649339 March 10, 1987 Grangroth et al.
4755747 July 5, 1988 Sato
4853627 August 1, 1989 Gleason et al.
4862077 August 29, 1989 Horel et al.
4961052 October 2, 1990 Tada et al.
Patent History
Patent number: D320361
Type: Grant
Filed: Jun 2, 1989
Date of Patent: Oct 1, 1991
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Wataru Karasawa (Yokohama)
Primary Examiner: Nelson C. Holtje
Assistant Examiner: Antoine D. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/360,754
Classifications
Current U.S. Class: Element Or Attachment (4) (D10/103)