Instrument for transferring boats for thermal treatment of semiconductor wafers

- Tel Sagami Limited
Description

FIG. 1 is a front elevational view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is an elevational view, the remainder of the cylindrical member being the same throughout in appearance;

FIG. 3 is a top plan view;

FIG. 4 is a bottom plan view;

FIG. 5 is an elevational view thereof;

FIG. 6 is a top perspective view; and,

FIG. 7 is a bottom perspective view thereof.

Referenced Cited
U.S. Patent Documents
D150358 July 1948 Hobart et al.
3604694 September 1971 Muller
3737282 June 1973 Hearn et al.
3744650 July 1973 Henebry et al.
4761134 August 2, 1988 Foster
Foreign Patent Documents
17213 1888 GBX
Patent History
Patent number: D327078
Type: Grant
Filed: Jan 25, 1989
Date of Patent: Jun 16, 1992
Assignee: Tel Sagami Limited (Kanagawa)
Inventors: Ken Nakao (Sagamihara), Seishiro Sato (Machida), Wataru Ohkase (Sagamihara)
Primary Examiner: Donald P. Walsh
Assistant Examiner: Antoine O. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/301,994
Classifications