Chamber for semiconductor fabricating machine

- Canon
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Description

FIG. 1 is a front elevational view of a chamber for semiconductor fabricating machine showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof; and,

FIG. 7 is a perspective view thereof.

Referenced Cited
U.S. Patent Documents
D326861 June 9, 1992 D'Amato
3667589 June 1972 Constable
4015706 April 5, 1977 Goffredo et al.
4690391 September 1, 1987 Stoffel et al.
4890382 January 2, 1990 Anderson et al.
Patent History
Patent number: D333144
Type: Grant
Filed: Mar 27, 1991
Date of Patent: Feb 9, 1993
Assignee: Canon Kabushiki Kaisha (Tokyo)
Inventor: Hiroyuki Koizumi (Tokyo)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antonine D. Davis
Law Firm: Fitzpatrick, Cella, Harper & Scinto
Application Number: 7/676,068
Classifications
Current U.S. Class: Miscellaneous (D15/199)