Controller for semi-conductor processing machine

- Hitachi, Ltd.
Description

FIG. 1 is a front, top and right side elevational perspective view of a controller for semi-conductor processing machine showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right elevational view thereof;

FIG. 4 is a left elevational view thereof;

FIG. 5 is a top plan elevational view thereof;

FIG. 6 is a bottom plan elevational view thereof; and,

FIG. 7 is a rear elevational view thereof.

Referenced Cited
U.S. Patent Documents
D313975 January 22, 1991 Hirie
D315335 March 12, 1991 Frischer
D334564 April 6, 1993 Basara et al.
4046472 September 6, 1977 Eichorn et al.
Patent History
Patent number: D349888
Type: Grant
Filed: Feb 8, 1993
Date of Patent: Aug 23, 1994
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Takashi Yamamoto (Kodaira), Tomoyuki Miyata (Kokubunji), Kazunori Hasimoto (Tachikawa), Mitsuru Ohnuma (Tokyo), Toshihiko Wada (Musashimurayama), Seishiro Sato (Hitachi)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antoine D. Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/4,588
Classifications
Current U.S. Class: Console Or Floor Type (D13/163)