Controller for semi-conductor processing machine
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Description
FIG. 1 is a front, top and right side elevational perspective view of a controller for semi-conductor processing machine showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a right elevational view thereof;
FIG. 4 is a left elevational view thereof;
FIG. 5 is a top plan elevational view thereof;
FIG. 6 is a bottom plan elevational view thereof; and,
FIG. 7 is a rear elevational view thereof.
Referenced Cited
Patent History
Patent number: D349888
Type: Grant
Filed: Feb 8, 1993
Date of Patent: Aug 23, 1994
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Takashi Yamamoto (Kodaira), Tomoyuki Miyata (Kokubunji), Kazunori Hasimoto (Tachikawa), Mitsuru Ohnuma (Tokyo), Toshihiko Wada (Musashimurayama), Seishiro Sato (Hitachi)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antoine D. Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/4,588
Type: Grant
Filed: Feb 8, 1993
Date of Patent: Aug 23, 1994
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Takashi Yamamoto (Kodaira), Tomoyuki Miyata (Kokubunji), Kazunori Hasimoto (Tachikawa), Mitsuru Ohnuma (Tokyo), Toshihiko Wada (Musashimurayama), Seishiro Sato (Hitachi)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antoine D. Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/4,588
Classifications
Current U.S. Class:
Console Or Floor Type (D13/163)