Semiconductor wafer support
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Description
FIG. 1 is a front and upper right perspective view of a semiconductor wafer support showing our new design;
FIG. 2 is a front and lower left perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a left side elevational view thereof, the right side elevational view and the rear elevational view being the same;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a top plan view of a second embodiment of a semiconductor wafer support, all other views being the same as the first embodiment except for the four apertures seen on the top and bottom.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
D235553 | June 1975 | Kunkle |
D273192 | March 27, 1984 | Yoshida |
D329192 | September 8, 1992 | Susac |
4397078 | August 9, 1983 | Imahashi |
4547958 | October 22, 1985 | Hufford |
4605893 | August 12, 1986 | Braslau |
4776745 | October 11, 1988 | Foley |
5042421 | August 27, 1991 | Anbe |
5042423 | August 27, 1991 | Wilkinson |
5109980 | May 5, 1992 | Matsuoka et al. |
5115912 | May 26, 1992 | Murphy |
5156983 | October 20, 1992 | Schlesinger et al. |
2-312259 | December 1990 | JPX |
Patent History
Patent number: D350942
Type: Grant
Filed: Aug 25, 1992
Date of Patent: Sep 27, 1994
Assignee: Particle Solutions (Charlotte, NC)
Inventors: Carrie Pellet (Charlotte, NC), Craig Donaldson (Charlotte, NC)
Primary Examiner: Wallace R. Burke
Assistant Examiner: Joel Sincavage
Law Firm: Shefte, Pinckney & Sawyer
Application Number: 7/935,365
Type: Grant
Filed: Aug 25, 1992
Date of Patent: Sep 27, 1994
Assignee: Particle Solutions (Charlotte, NC)
Inventors: Carrie Pellet (Charlotte, NC), Craig Donaldson (Charlotte, NC)
Primary Examiner: Wallace R. Burke
Assistant Examiner: Joel Sincavage
Law Firm: Shefte, Pinckney & Sawyer
Application Number: 7/935,365
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)