Wafer prober

- Tokyo Electron Limited
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Description

FIG. 1 is a top/front/left side perspective view of a wafer prober showing our new design;

FIG. 2 is a top/front/left side perspective view thereof with a front cover open;

FIG. 3 is a front view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a back view thereof;

FIG. 7 is a left side view thereof; and,

FIG. 8 is a bottom view thereof.

Referenced Cited
U.S. Patent Documents
D264873 June 8, 1982 Olson et al.
D350490 September 13, 1994 Takao
5107206 April 21, 1992 Yanagi et al.
5506512 April 9, 1996 Tozawa et al.
Patent History
Patent number: D383683
Type: Grant
Filed: Apr 25, 1996
Date of Patent: Sep 16, 1997
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventors: Osamu Kamata (Kofu), Masahiko Sugiyama (Nirasaki), Munetoshi Nagasaka (Yamanashi-ken), Haruhiko Yoshioka (Yamanashi-ken), Kazumi Yamagata (Yamanashi-ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/53,608
Classifications
Current U.S. Class: Electrical Property (D10/75)
International Classification: 1004;