Wafer-boat positioning member of wafer container

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Description

FIG. 1 is a perspective view of "a wafer-boat positioning member of wafer container " showing our design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear plan view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top side view thereof; and,

FIG. 7 is a bottom side view thereof.

Referenced Cited
U.S. Patent Documents
5538390 July 23, 1996 Salzman
5586585 December 24, 1996 Bonora et al.
5630690 May 20, 1997 Salzman
Patent History
Patent number: D397346
Type: Grant
Filed: Jul 16, 1997
Date of Patent: Aug 25, 1998
Assignee: Industrial Technology Research Institute (Hsinchu)
Inventors: Horng-Kuang Fan (Hsinchu), Gwo-Jou Huang (Hsinchu)
Primary Examiner: Antoine Duval Davis
Attorney: W. Wayne Liauh
Application Number: 0/73,699
Classifications
Current U.S. Class: D15/1441
International Classification: 1509;