Processing tube for use in a semiconductor wafer heat processing apparatus

Description

FIG. 1 a perspective view of a processing tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof;

FIG. 4 a bottom plan view thereof;

FIG. 5 a cross sectional view thereof taken along line V--V in FIG. 2;

FIG. 6 a rear elevational view thereof;

FIG. 7 a left side view thereof;

FIG. 8 a right side view thereof;

FIG. 9 a cross sectional view thereof taken along line IX--IX in FIG. 3; and,

FIG. 10 a cross sectional view thereof taken along line X--X in FIG. 3.