Quartz process tube

- Tokyo Electron Limited
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Description

FIG. 1 a perspective view of a quartz process tube.

FIG. 2 a front elevational view thereof.

FIG. 3 a top plan view thereof.

FIG. 4 a bottom plan view thereof.

FIG. 5 a cross sectional view thereof taken along line 5--5 in FIG. 2.

FIG. 6 a rear elevational view thereof.

FIG. 7 a left side view thereof.

FIG. 8 a right side view thereof.

FIG. 9 a cross sectional view thereof taken along line 9--9 in FIG. 3; and,

FIG. 10 a cross sectional view thereof taken along line 10--10 in FIG. 3.

Referenced Cited
U.S. Patent Documents
5303671 April 19, 1994 Fondo et al.
5458685 October 17, 1995 Hasebe et al.
5520742 May 28, 1996 Ohkase
5536918 July 16, 1996 Ohkase et al.
Patent History
Patent number: D423463
Type: Grant
Filed: Jul 24, 1997
Date of Patent: Apr 25, 2000
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventors: Testuya Hanagata (Tokyo), Shingo Watanabe (Kanagawa)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/74,280
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;